JPH0212688B2 - - Google Patents
Info
- Publication number
- JPH0212688B2 JPH0212688B2 JP10399483A JP10399483A JPH0212688B2 JP H0212688 B2 JPH0212688 B2 JP H0212688B2 JP 10399483 A JP10399483 A JP 10399483A JP 10399483 A JP10399483 A JP 10399483A JP H0212688 B2 JPH0212688 B2 JP H0212688B2
- Authority
- JP
- Japan
- Prior art keywords
- base
- air
- work pallet
- workpiece support
- negative pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007789 sealing Methods 0.000 claims description 8
- 230000003028 elevating effect Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005188 flotation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Feeding Of Workpieces (AREA)
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
【発明の詳細な説明】
本発明は工作機械のワークパレツトなどを、こ
れを支持するベース上に移送し、適位置に完全停
止させるのに用いられるエアースライドシステム
に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an air slide system used to transfer a workpiece pallet or the like of a machine tool onto a base that supports it and completely stop it at an appropriate position.
従来から、工作機械のワークパレツト、工作用
組立テーブル装置などのワーク支持台あるいは工
具類の移送に、これらを支持するベースとの間に
空気膜を形成してこれをエアーベアリングとな
し、無接触で軽快かつ振動なしに、上記移送が行
えるエアースライドシステムが提供されている。
また、このスライドシステムでは、上記ワークパ
レツトや組立テーブルのベースに対する移送停止
を行うために、これらの下部に真空圧(負圧)を
導入する吸盤を取り付けたものも既に提案されて
いる。 Traditionally, workpiece pallets of machine tools, workpiece assembly table devices, and other workpiece supports or tools have been transferred without contact by forming an air film between them and the base that supports them, and using this as an air bearing. An air slide system is provided that allows the above-mentioned transfer to be carried out easily and without vibration.
Furthermore, in this slide system, a type in which a suction cup is attached to the lower part of the work pallet or the assembly table to introduce vacuum pressure (negative pressure) in order to stop the transfer of the work pallet or the assembly table to the base has already been proposed.
しかしながら、かかる従来のエアースライドシ
ステムでは、吸盤の介在によつて、ワークパレツ
ト等とベースとのクリアランスを十分に大きくと
る必要があり、このクリアランスが不十分である
と、吸盤がベースに触れて移送が不安定になつた
り、不可能になつたりする場合がある。 However, in such conventional air slide systems, it is necessary to provide a sufficiently large clearance between the workpiece pallet, etc. and the base due to the interposition of suction cups. If this clearance is insufficient, the suction cups will touch the base and transport will be interrupted. It may become unstable or impossible.
また、吸盤による吸着面積は一般に小さく、こ
れによる吸引力も比較的小さいばかりか、この吸
盤がゴムなどの弾性体から形成されることによつ
て可撓性に富み、従つて吸盤による上記ワークパ
レツト等の停止位置が撓みの発生によりずれて、
これの正確が位置制御が不可能になるという問題
があつた。 In addition, the suction area of a suction cup is generally small, and the resulting suction force is not only relatively small, but also because the suction cup is made of an elastic material such as rubber, it is highly flexible. The stopping position shifts due to deflection,
There was a problem in that accurate position control became impossible.
本発明はかかる従来の問題点に鑑みて成された
もので、ワーク支持台とこのワーク支持台を支持
するベースとの間に空気膜を形成し、上記ワーク
支持台を移送部材によつて上記ベース上を移動さ
せるエアースライドシステムに於いて、上記ワー
ク支持台には圧縮空気圧および負圧を導入する導
入通路と、この導入通路に分岐連通し、かつ上記
ワーク支持台下面に開口する様に臨む複数の給排
気溝と、上記導入通路に連通する気圧室と、この
気圧室の圧力状態に応じて上下動する複数の昇降
部材と、これらの昇降部材の下面に上記給排気溝
の全部を外側から囲む様に取り付けられたシール
部材とからエアースライドシステムを構成し、こ
れによつてワーク支持台の移動および停止を確実
かつ安定的に実行することを目的とする。 The present invention has been made in view of such conventional problems, and includes forming an air film between a workpiece support stand and a base that supports the workpiece support stand, and moving the workpiece support stand as described above by a transfer member. In the air slide system that moves on the base, the workpiece support has an introduction passage for introducing compressed air pressure and negative pressure, and a branch that communicates with this introduction passage and opens to the bottom surface of the workpiece support. A plurality of supply/exhaust grooves, a pressure chamber communicating with the introduction passage, a plurality of elevating members that move up and down depending on the pressure state of the pressure chamber, and a plurality of elevating members with all of the above-mentioned supply/exhaust grooves located outside. The object of the present invention is to construct an air slide system from the air slide system and a sealing member attached so as to surround it, and thereby move and stop the workpiece support platform reliably and stably.
以下に、本発明の実施例を図面について具体的
に説明する。 Embodiments of the present invention will be specifically described below with reference to the drawings.
第1図はその一実施例要部の斜視図であり、1
はベース、2はこのベース1上を移動するワーク
支持台たるワークパレツトで、このワークパレツ
ト2は図示しない移送部材たるタイミングベルト
3によつて、所定の時間ごとに所定量あて水平方
向に移送される。そして上記ワークパレツト2と
ベース1との間に後述する空気膜が形成される様
になつている。 FIG. 1 is a perspective view of the main parts of one embodiment.
2 is a base, and 2 is a work pallet that is a work support stand that moves on the base 1. The work pallet 2 is horizontally transferred by a timing belt 3, which is a transfer member (not shown), by a predetermined amount at predetermined time intervals. An air film, which will be described later, is formed between the work pallet 2 and the base 1.
一方、上記ワークパレツト2は、鋼材などによ
りコ字状に形成され、これの肉厚内に圧縮空気圧
および負圧を導入する導入通路4と、この導入通
路4に連通しかつ下端がワークパレツト2本体下
面に開口している複数の吸排気穴5と、この吸排
気穴5端に設けたオリフイス6と、このオリフイ
ス6の出口側に連通し、かつワークパレツト2本
体下面に臨む複数の給排気溝7と、上記オリフイ
ス6に並列接続され、かつチエツク弁8を介装し
た負圧導入通路9と、吸排気穴5の四本のバイパ
ス通路10を介して連通し、かつ昇降部材として
のピストン11によつて画成された四個の気圧室
としてのシリンダ12と、これらのシリンダ12
内にあつてピストン11の上限位置を決めるスト
ツパ13と、上記ピストン11上部にL字状の連
杆14を介して連繋され、かつワークパレツト2
本体内の二個一組ずつの透孔15中を出入する八
本のロツド16と、そのロツド16端にあつてワ
ークパレツト2本体の下面に突出しうるととも
に、上記給排気溝7の全部を囲む無端状のシール
部材17とから構成されている。なお、このシー
ル部材17は各ロツド16端に取り付けられた無
端状の支持部材18下面に嵌着されている。ま
た、互いに連続する給排気溝7のうち最外周にあ
るものが無端状をなしている。 On the other hand, the work pallet 2 is formed of a steel material or the like in a U-shape, and has an introduction passage 4 for introducing compressed air pressure and negative pressure into its wall thickness, and is connected to the introduction passage 4, and its lower end is connected to the lower surface of the main body of the work pallet 2. A plurality of intake/exhaust holes 5 open to the workpiece pallet 2, an orifice 6 provided at the end of the intake/exhaust hole 5, and a plurality of intake/exhaust grooves 7 communicating with the outlet side of the orifice 6 and facing the lower surface of the main body of the work pallet 2. , which are connected in parallel to the orifice 6 and communicated via a negative pressure introduction passage 9 with a check valve 8 interposed therebetween, and four bypass passages 10 of the intake/exhaust hole 5, and are connected by a piston 11 as an elevating member. cylinders 12 as four pressure chambers defined by the cylinders 12;
A stopper 13 located inside the piston 11 determines the upper limit position of the piston 11, and a stopper 13 that is connected to the upper part of the piston 11 via an L-shaped connecting rod 14, and that is connected to the workpiece pallet 2.
There are eight rods 16 that go in and out of two sets of through holes 15 in the main body, and an endless rod that can protrude from the bottom surface of the work pallet 2 main body at the ends of the rods 16 and that surrounds all of the air supply and exhaust grooves 7. It is composed of a seal member 17 having a shape. The seal member 17 is fitted onto the lower surface of an endless support member 18 attached to the end of each rod 16. Further, among the mutually continuous supply/exhaust grooves 7, the one located at the outermost periphery is endless.
次に、かかるエアースライドシステムの作用を
詳述する。 Next, the operation of this air slide system will be explained in detail.
いま、ワークパレツト2上のワークを加工すべ
く、このワークパレツト2をベース1に所定量移
動させるため、コンプレツサより上記導入通路4
に圧縮空気を送り込む。すると、圧縮空気は先ず
吸排気穴5に至り、さらにオリフイス6およびバ
イパス通路10を通つてシリンダ12内に至る。
この場合に於いて、オリフイス6はバイパス通路
10よりも断面積が小さい。したがつて、シリン
ダ12内に圧入された空気圧によりピストン11
は直ちに上昇し、これとともにロツド16を上昇
させる。このため、これまでベース1の上面に密
接していたシール17がそのベース1より離れる
とともに、これより僅か遅れてオリフイス6から
各給排気溝7に空気圧が導入される。こうして給
排気溝7の空気圧が飽和状態になると、ベース1
の上面との間に微小間隙を作つて、ここから圧縮
空気の一部を逃がすこととなる。このため微小間
隙に空気膜が形成され、ベース1上面に対しワー
クパレツト2本体下面が浮上する如く、非接触状
態が維持される。 Now, in order to move the workpiece pallet 2 by a predetermined amount to the base 1 in order to process the workpieces on the workpiece pallet 2, a compressor is used to move the workpiece pallet 2 to the base 1 by a predetermined amount.
Inject compressed air into. Then, the compressed air first reaches the intake/exhaust hole 5, then passes through the orifice 6 and the bypass passage 10, and then reaches the inside of the cylinder 12.
In this case, the orifice 6 has a smaller cross-sectional area than the bypass passage 10. Therefore, the air pressure injected into the cylinder 12 causes the piston 11 to
immediately rises, causing the rod 16 to rise as well. Therefore, the seal 17, which has been in close contact with the upper surface of the base 1, is separated from the base 1, and air pressure is introduced from the orifice 6 into each air supply/exhaust groove 7 with a slight delay. When the air pressure in the air supply and exhaust groove 7 becomes saturated in this way, the base 1
A small gap is created between the top surface of the cylinder and a portion of the compressed air to escape. Therefore, an air film is formed in the minute gap, and a non-contact state is maintained such that the lower surface of the main body of the work pallet 2 floats relative to the upper surface of the base 1.
従つて、かかるワークパレツト2本体の非接触
状態を維持したまま、上記タイミングベルト3を
所定量変位せしめることによつて、ワークパレツ
トは軽快かつ振動なく変位し、ワークを所定の加
工操作位置に移送することができる。また、この
様なワークパレツト2本体の浮上は、給排気溝7
を広域に亘つて設けることとなり、そのワークパ
レツト本体2下面の全域に亘り均一に行われる。
なお、オリフイス6を中心として順次遠くなる給
排気溝7の深さを、徐々に浅くすることにより、
給排気溝7各部での空気圧をより均一化でき、上
記の浮上状態がより安定化するという効果が得ら
れる。 Therefore, by displacing the timing belt 3 by a predetermined amount while maintaining the non-contact state of the main body of the work pallet 2, the work pallet can be displaced easily and without vibration, and the work can be transferred to a predetermined processing operation position. Can be done. In addition, such floating of the work pallet 2 main body is caused by air supply and exhaust groove 7.
This will be done over a wide area, and will be done uniformly over the entire lower surface of the work pallet body 2.
In addition, by gradually decreasing the depth of the supply/exhaust groove 7 that goes farther away from the orifice 6,
The air pressure in each part of the air supply/exhaust groove 7 can be made more uniform, and the above-mentioned floating state can be more stabilized.
次に、こうして所定位置にワークパレツト2が
移送されたとき、所定の自動化手段によつて真空
ポンプ(図示しない)が作動し、コンプレツサが
停止される(なお、このコンプレツサを逆転し
て、真空ポンプとして作動させることもできる。
この真空ポンプの作動により、導入通路4および
吸排気穴5が負圧側に引かれ、シリンダ12およ
び給排気溝7内も負圧側に引かれる。このため、
ピストン11はシリンダ12中を下降し、同時に
ロツド16も下降する。このため、シール部材1
7はその負圧の大きさに応じた力でベース1上面
に圧接される。また、給排気溝7には、オリフイ
ス6およびチエツク弁8を有する負圧導入通路9
をそれぞれ通じて負圧が導入される。なお、負圧
導入通路9は、オリフイス6の負圧導入抵抗が大
きいので、その負圧導入速度が遅くなるのを防止
するために設けられている。 Next, when the work pallet 2 is transferred to a predetermined position, a vacuum pump (not shown) is activated by a predetermined automated means, and the compressor is stopped (note that this compressor can be reversed and used as a vacuum pump). It can also be activated.
By the operation of the vacuum pump, the introduction passage 4 and the intake/exhaust hole 5 are drawn to the negative pressure side, and the inside of the cylinder 12 and the supply/exhaust groove 7 are also drawn to the negative pressure side. For this reason,
The piston 11 descends in the cylinder 12, and at the same time the rod 16 also descends. For this reason, the seal member 1
7 is pressed against the upper surface of the base 1 with a force corresponding to the magnitude of the negative pressure. Further, the supply/exhaust groove 7 includes a negative pressure introduction passage 9 having an orifice 6 and a check valve 8.
Negative pressure is introduced through each. Note that the negative pressure introduction passage 9 is provided to prevent the negative pressure introduction speed from becoming slow since the negative pressure introduction resistance of the orifice 6 is large.
こうして、各給排気溝7の周囲をシール部材1
7によつて囲み、給排気溝7を負圧側に引くこと
により、ワークパレツト2本体の下面がベース1
の上面に密接することとなる。すなわち、ワーク
パレツト2はベース1上の設定位置に安定かつ確
実に保持されることとなるのである。 In this way, the sealing member 1
7, and by pulling the supply/exhaust groove 7 toward the negative pressure side, the lower surface of the work pallet 2 main body is connected to the base 1.
It will be in close contact with the top surface of the In other words, the work pallet 2 is stably and reliably held at the set position on the base 1.
第5図は他の実施例の縦断面図である。これは
ワークパレツト2Aに設けた上記同様の吸排気穴
5Aを中心として複数のバイパス通路10Aを連
通させ、そのバイパス通路10A端を、ワークパ
レツト2A下部外周のフランジ部21上部に開口
させ、このフランジ部21との間に気圧室22を
形成する様に、このフランジ部21外周およびワ
ークパレツト2A外周にL字状断面のリング23
を摺動自在に嵌挿してある。なお、上記バイパス
通路21の開口端は気圧室22に臨んでいる。2
4はリング23の上限位置を決めるために、ワー
クパレツト2A本体外周に突設したストツパ、2
5はワークパレツト2A外周に対向する側のリン
グ23内周に嵌合したシールリングである。ま
た、26は一端部をワークパレツト2A下面のリ
ング状凹所に固定し、他端部をリング23の下面
に固定または対向させたシール部材で、リング2
3側に於いて下部にシールリツプ27が突設され
ている。 FIG. 5 is a longitudinal sectional view of another embodiment. This allows a plurality of bypass passages 10A to communicate with each other around the intake/exhaust hole 5A similar to the above provided in the work pallet 2A, and the end of the bypass passage 10A is opened at the upper part of the flange part 21 on the outer periphery of the lower part of the work pallet 2A. A ring 23 with an L-shaped cross section is attached to the outer periphery of this flange portion 21 and the outer periphery of the work pallet 2A so as to form a pressure chamber 22 between the
is slidably inserted. Note that the open end of the bypass passage 21 faces the atmospheric pressure chamber 22. 2
4 is a stopper protruding from the outer periphery of the main body of the work pallet 2A in order to determine the upper limit position of the ring 23;
A seal ring 5 is fitted to the inner circumference of the ring 23 on the side opposite to the outer circumference of the work pallet 2A. Further, 26 is a sealing member having one end fixed to a ring-shaped recess on the lower surface of the work pallet 2A and the other end fixed to or facing the lower surface of the ring 23.
A seal lip 27 is provided protruding from the lower part on the third side.
この実施例では、吸排気穴5Aおよびバイパス
通路10Aを通じて、気圧室22に空気圧や負圧
が上記の様にして導入され、吸排気穴5Aに空気
圧を導入したときは、ノズル6Aを通じてワーク
パレツト2A本体下面に圧縮空気を噴出させて、
これのベース1に対する浮上が実行される。一
方、吸排気穴5Aに負圧を導入したときは、気圧
室22内が負圧側に引かれ、リング23が下降す
るため、シール部材26も同時に下降して、シー
ルリツプ27がベース1上面に密接する。したが
つて、この密接後は、給排気溝7Aが周囲からシ
ールリツプ27によつて囲まれ、ノズル6Aから
給排気溝7A内を負圧側に引くことにより、ベー
ス1上面に対しワークパレツト2A下面が確実に
密接保持されることとなる。こうして上記実施例
を同じくワークパレツト2Aの浮上による軽快な
移送ならびにワークパレツト2Aの設定位置での
正確な停止動作が行われる。 In this embodiment, air pressure or negative pressure is introduced into the pressure chamber 22 through the intake/exhaust hole 5A and the bypass passage 10A as described above, and when air pressure is introduced into the intake/exhaust hole 5A, the workpiece pallet 2A body is By blowing out compressed air on the bottom surface,
Its flotation with respect to base 1 is performed. On the other hand, when negative pressure is introduced into the intake/exhaust hole 5A, the inside of the air pressure chamber 22 is drawn to the negative pressure side and the ring 23 is lowered, so the seal member 26 is also lowered at the same time, and the seal lip 27 is brought into close contact with the upper surface of the base 1. do. Therefore, after this close contact, the supply/exhaust groove 7A is surrounded by the seal lip 27, and by drawing the interior of the supply/exhaust groove 7A to the negative pressure side from the nozzle 6A, the lower surface of the workpiece pallet 2A is securely placed against the upper surface of the base 1. will be maintained closely. In this way, in the same manner as in the above embodiment, the work pallet 2A is floated to allow for light transfer and the work pallet 2A to be accurately stopped at the set position.
以上詳細に説明した様に、本発明によれば、ベ
ースに対するワークパレツトの移送が安定かつ確
実に行えるとともに、ベースに対するワークパレ
ツトの保持が確実となり、ワークパレツトの停止
位置が正確になる等の効果が得られる。また、ワ
ークパレツトの停止はこれの下面に無端状に設け
たシール部材をベースに対し密着させ、同時にこ
のシール部材で囲まれた広い領域に於いて吸引力
を発生せしめるので、保持速度が迅速となり十分
大きな保持力を得ることができる。また、この保
持力は負圧による金属製のワークパレツトとベー
スとの接触によつて得られるものである。 As explained in detail above, according to the present invention, the work pallet can be stably and reliably transferred to the base, the work pallet can be held securely to the base, and the stopping position of the work pallet can be accurate. . In addition, when stopping the work pallet, a sealing member provided in an endless manner on the lower surface of the workpiece pallet is brought into close contact with the base, and at the same time, a suction force is generated in a wide area surrounded by this sealing member, so that the holding speed is quick and sufficient. Great holding power can be obtained. Further, this holding force is obtained by contact between the metal work pallet and the base under negative pressure.
なお、ワークパレツトの移動は上記タイミング
ベルトの他、ボールネジとスクリユー、ラツクと
ピニオン、リニアモーターの利用等各種の方法を
採用できるものである。 In addition to the above-mentioned timing belt, various methods can be used to move the work pallet, such as using a ball screw and screw, a rack and pinion, and a linear motor.
本発明の装置は回転運動させることもできる。
その場合にはベース1をテーブル状とし、その中
心に設けた回転駆動軸と下面を平面としたワーク
パレツトを連結してテーブル上を回転させればよ
い。 The device according to the invention can also be moved in rotation.
In that case, the base 1 may be made into a table shape, and a rotary drive shaft provided at the center thereof may be connected to a work pallet whose bottom surface is flat, and the table may be rotated.
第1図は本発明にかかるエアースライドシステ
ムの一実施例を示す要部の斜視図、第2図は同じ
くワークパレツトの平面図、第3図は第2図のA
−A線断面図、第4図は同じく底面図、第5図は
他のワークパレツトの縦断面図である。
1…ベース、2…ワーク支持台、3…移送部
材、4,5,5A…導入通路、7,7A…給排気
溝、12,22…気圧室、16,23…昇降部
材、17,26…シール部材。
FIG. 1 is a perspective view of the main parts of an embodiment of the air slide system according to the present invention, FIG. 2 is a plan view of the work pallet, and FIG.
4 is a bottom view, and FIG. 5 is a longitudinal sectional view of another work pallet. DESCRIPTION OF SYMBOLS 1... Base, 2... Work support stand, 3... Transfer member, 4, 5, 5A... Introduction passage, 7, 7A... Supply/exhaust groove, 12, 22... Air pressure chamber, 16, 23... Lifting member, 17, 26... Seal member.
Claims (1)
ベースとの間に空気膜を形成することによつて、
上記ワーク支持台を移送部材によつて上記ベース
上に移動させるエアースライドシステムに於い
て、上記ワーク支持台には、圧縮空気圧および負
圧を導入する導入通路と、この導入通路に分岐連
通し、かつ上記ワーク支持台下面に開口する様に
臨む複数の給排気溝と、上記導入通路に連通する
気圧室と、この気圧室の圧力状態に応じて上下動
する昇降部材と、この昇降部材の下面に、上記給
排気溝の全部を囲む様に取り付けられたシール部
材とを備えてなり、圧縮空気圧導入時には上記シ
ール部材をベースから離隔させ、負圧導入時には
上記シール部材をベースに密接させる様に構成し
たことを特徴とするエアースライドシステム。1. By forming an air film between the workpiece support and the base that supports the workpiece support,
In the air slide system in which the workpiece support is moved onto the base by a transfer member, the workpiece support has an introduction passage for introducing compressed air pressure and negative pressure, and branch communication with the introduction passage; and a plurality of supply/exhaust grooves opening to the lower surface of the workpiece support, a pressure chamber communicating with the introduction passage, an elevating member that moves up and down according to the pressure state of the air pressure chamber, and a lower surface of the elevating member. and a sealing member attached to surround the entirety of the supply/exhaust groove, the sealing member being separated from the base when compressed air pressure is introduced, and the sealing member being brought into close contact with the base when introducing negative pressure. Air slide system characterized by the following configuration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10399483A JPS59232740A (en) | 1983-06-10 | 1983-06-10 | Air-slide system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10399483A JPS59232740A (en) | 1983-06-10 | 1983-06-10 | Air-slide system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59232740A JPS59232740A (en) | 1984-12-27 |
| JPH0212688B2 true JPH0212688B2 (en) | 1990-03-26 |
Family
ID=14368848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10399483A Granted JPS59232740A (en) | 1983-06-10 | 1983-06-10 | Air-slide system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59232740A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07109217B2 (en) * | 1986-01-31 | 1995-11-22 | 京セラ株式会社 | Static pressure linear guide system |
| JPH0768973B2 (en) * | 1986-04-09 | 1995-07-26 | セイコーエプソン株式会社 | Static air-spindle |
| JP2007283428A (en) * | 2006-04-14 | 2007-11-01 | Yokogawa Electric Corp | Workpiece processing apparatus and work transfer system |
| DE102007030883A1 (en) * | 2007-07-03 | 2009-01-08 | Schaeffler Kg | Seal for a hydrostatic linear guide |
| CN102673574B (en) * | 2011-12-25 | 2015-06-17 | 河南科技大学 | Air floating block |
-
1983
- 1983-06-10 JP JP10399483A patent/JPS59232740A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59232740A (en) | 1984-12-27 |
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