JPH0217518B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is used in a single crystal pulling apparatus to move the growing crystal upward to take out the growing crystal during high-temperature heating and to shut off the high-temperature heating atmosphere. The present invention relates to the structure of an isolation valve.

[Conventional technology]

Conventionally used isolation valves are usually used in vacuum or gas atmospheres at room temperature or slightly higher than room temperature, but Si
In cases such as single crystal growth, the seal plate must have a water-cooled jacket structure to block the high temperature atmosphere.

The conventional isolation valve in this case is
Cooling water is introduced into the seal plate with a water-cooled jacket structure, and the cooling water is circulated through the outlet pipe to cool the seal plate. Rubber O-rings are attached to the connecting parts of the cooling water introduction and outlet pipes, etc. A sealant is installed to prevent cooling water from leaking to the outside.

[Problem that the invention seeks to solve]

However, in the case of conventional isolation valves such as those mentioned above, if the cooling water leaks to the outside due to damage to the sealing material and wear, it goes without saying that the growing single crystal will become defective, and the leakage will also cause damage to the sealing material. There was a problem in that the cooling water could come into contact with a high-temperature atmosphere and cause a steam explosion, potentially harming workers.

[Means for solving problems]

The isolation valve of the present invention solves the above problems, and in order to ensure airtightness and improve reliability and safety, the sealing surface 2 of the container 1 matches the shape as shown in the figure, and the cooling valve opens and closes the sealing surface 2 of the container 1. A seal plate 3 having a jacket structure is supported on a rotating shaft 4, and a cooling water inlet/outlet passage 1 is provided which communicates with a cooling water inlet 5 and an outlet 6, respectively, provided at the end of the rotary shaft 4.
4 and 15 are opened on the side of the rotating shaft 4 and provided inside the rotating shaft, and these cooling water introduction and outlet passages 14,
15, the parts connecting one end of the cooling water introduction pipes 7 and 8 are made into a welded joint structure 9, and the other ends of the cooling water introduction pipes 7 and 8 are respectively provided with a seal plate 3 having a water cooling jacket structure. A welded joint structure 9 is used to connect the provided cooling water inlet and outlet pipes.

[Effect]

When cooling water is supplied from the cooling water inlet 5 at one end of the rotating shaft 4 while the seal plate 3 having a water cooling jacket structure is in close contact with the sealing surface 2 of the container 1, the cooling water flows through the cooling water introduction passage 14 and the cooling water introduction passage 14. The cooling water is introduced into the jacket of the seal plate 3 through the pipe 7, and is led out from the cooling water outlet 6 at one end of the rotary shaft 4 through the cooling water outlet pipe 8 and the cooling water outlet passage 15, and circulates therein. The seal plate 3 is cooled by this circulating cooling water.

In this case, the seal plate 3 matches the seal surface 2 of the container 1 and seals it, completely blocking the high-temperature heating atmosphere inside and maintaining airtightness. Since the connecting portion between the pipes 7 and 8 is completely sealed by the welded joint structure 9, there is no risk of cooling water leaking to the outside.

〔Example〕

FIG. 1 is a simplified cross-sectional view showing one embodiment of the isolation valve of the present invention, and FIG. 2 is the same as that shown in FIG.
The line sectional view, FIG. 3, is a rear view of FIG. 1.

First, its configuration will be explained.

In the drawings, reference numeral 1 denotes a container provided in the lower part of the valve body 10, and 3 a seal plate having a water-cooled jacket structure that conforms to the shape of the sealing surface 2 of the container 1 to open and close it, and is supported by a rotating shaft 4. Reference numeral 11 indicates a free shaft at the center of the seal plate 3, and reference numeral 12 indicates a handle of a handle shaft connected to the rotating shaft 4 via a gear mechanism 13.

7 and 8 each have stainless steel cooling water introduced,
It is a lead-out pipe and is arranged in a helical manner around the flexible shaft 11. One ends of the cooling water introduction and outlet pipes 7 and 8 are connected to the side of the rotating shaft 4, and the cooling water provided inside the rotating shaft 4 is connected to the cooling water inlet 5 and outlet 6 at one end of the rotating shaft 4, respectively. Inlet and outlet passages 14,
It communicates via 15. The other ends of the cooling water inlet and outlet pipes 7 and 8 are connected to a cooling water inlet and outlet passageway (not shown) in a seal plate 3 having a water-cooled jacket structure.

A joint structure 9 is formed by welding between the rotary shaft 4, the cooling water inlet, the outlet pipes 7 and 8, and the connection part between the cooling water inlet, outlet pipes 7 and 8, and the seal plate 3 having a water cooling jacket structure.

Next, its effect will be explained.

When cooling water is supplied from the cooling water inlet 5 at one end of the rotating shaft 4 while the seal plate 3 having a water-cooled jacket structure is in close contact with the sealing surface 2 of the container 1,
The cooling water is introduced into the jacket of the seal plate 3 through the passage 14 in the rotating shaft 4 through the cooling water inlet pipe 7, and from there through the cooling water outlet pipe 8 to the rotating shaft 4.
The cooling water is led out from the cooling water outlet 6 at one end of the rotary shaft 4 through a passage 15 inside the rotary shaft 4 and flows therethrough. The seal plate 3 is cooled by this circulating cooling water.

In this case, the seal plate 3 matches the seal surface 2 of the container 1 and seals it, completely blocking the high-temperature heating atmosphere inside and maintaining airtightness. Since the connecting portion between the pipes 7 and 8 is completely sealed by the welded joint structure 9, there is no risk of cooling water leaking to the outside.

When the handle 12 is rotated clockwise in FIG. 1 and the rotating shaft 4 is rotated clockwise in FIG. 2, the seal plate 3 supported by the rotating shaft 4 is also rotated in the same clockwise direction. It can be opened and the sealing plate 3 can be closed by rotating the handle 12 in the opposite direction.

In the case of this embodiment, since the cooling water inlet and outlet pipes 7 and 8 are made of stainless steel, there is no fear of rusting and reliability and safety can be further improved.

〔Effect of the invention〕

As described above, according to the present invention, the seal plate 3 can be aligned with the seal surface 2 of the container 1 to seal it, so that the high-temperature heating atmosphere inside can be completely shut off and airtightness can be maintained. Also, cooling water introduction, one end of the outlet pipes 7, 8 and the cooling water introduction inside the rotary shaft 4, a part connecting the outlet passages 14, 15, and a part connecting the cooling water introduction, the other end of the outlet pipes 7, 8, and the water cooling jacket. Since the part connecting the cooling water introduction and outlet channels of the seal plate 3 of the structure is a welded joint structure 9,
The connection part can be completely sealed and the cooling water will not leak outside, so there is no risk of the growing single crystal becoming defective or causing a steam explosion that could harm the worker. This not only improves reliability and safety, but also facilitates maintenance and management since no consumables such as sealants are used.

[Brief explanation of drawings]

FIG. 1 is a simplified cross-sectional view showing one embodiment of the isolation valve of the present invention, and FIG. 2 is the same as that shown in FIG.
The line sectional view, FIG. 3, is a rear view of FIG. 1. DESCRIPTION OF SYMBOLS 1... Container, 2... Seal surface, 3... Seal plate with water-cooled jacket structure, 4... Rotating shaft, 5, 6... Cooling water inlet and outlet, 7, 8... Cooling water introduction and outlet pipe, 9... Welded joint structure, 14, 15...Aisle.

Claims (1)

[Claims] 1 A seal plate with a water-cooled jacket structure that matches the shape of the sealing surface of the container and opens and closes it is supported on a rotating shaft, and cooling water is introduced to communicate with the cooling water inlet and outlet provided at the end of the rotating shaft, respectively. ,
Outlet passages are provided inside the rotating shaft with openings on the sides of the rotating shaft, cooling water is introduced into these passages, cooling water is introduced into the outlet passages, and the part where one end of the outlet pipe is connected is made into a welded joint structure and cooled. An isolation valve characterized by having a welded joint structure at the part connecting the cooling water inlet and outlet passages, which are provided on seal plates each having a water cooling jacket structure at the other ends of the water inlet and outlet tubes.