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JPH0219398B2 - - Google Patents
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JPH0219398B2 - - Google Patents

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Publication number
JPH0219398B2
JPH0219398B2 JP60103795A JP10379585A JPH0219398B2 JP H0219398 B2 JPH0219398 B2 JP H0219398B2 JP 60103795 A JP60103795 A JP 60103795A JP 10379585 A JP10379585 A JP 10379585A JP H0219398 B2 JPH0219398 B2 JP H0219398B2
Authority
JP
Japan
Prior art keywords
oxygen
column
tower
rectification
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60103795A
Other languages
Japanese (ja)
Other versions
JPS61262584A (en
Inventor
Hiroshi Tsushima
Masahiro Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Techno Engineering Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Techno Engineering Co Ltd, Hitachi Ltd filed Critical Hitachi Techno Engineering Co Ltd
Priority to JP10379585A priority Critical patent/JPS61262584A/en
Publication of JPS61262584A publication Critical patent/JPS61262584A/en
Publication of JPH0219398B2 publication Critical patent/JPH0219398B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、精留塔の精留分離を利用して原料空
気中の酸素を採取する空気分離に係り、特に採取
された製品酸素中に高沸点不純物を含まないよう
に改良された空気分離方法及び装置に関するもの
である。
[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to air separation in which oxygen is collected from feed air using rectification separation in a rectification column, and in particular, the present invention relates to air separation in which oxygen is collected from feed air using rectification separation in a rectification column, and in particular, the present invention relates to The present invention relates to an improved air separation method and device that does not contain boiling point impurities.

〔発明の背景〕[Background of the invention]

一般に、精留塔を用いて原料空気から酸素を分
離して製品酸素を得る空気分離方法は、次のよう
なものである。すなわち、空気を昇圧し、昇圧後
の空気中の水分および二酸化炭素を吸着塔で除去
し、水分および二酸化炭素除去後の原料空気を熱
交換器で深冷温度に冷却し、この冷却後の原料空
気を複式精留塔の下塔に吹込み、下塔内での精留
分離により下塔底部に酸素リツチの液体空気を得
て、この液体空気を複式精留塔の上塔に吹込み、
上塔内での精留分離により上塔底部に酸素を得る
ものである。このような、酸素を採取する空気分
離方法は、特開昭56−97772号公報、特開昭56−
80581号公報、特開昭55−152374号公報等に開示
されている。
Generally, an air separation method for obtaining product oxygen by separating oxygen from feed air using a rectification column is as follows. That is, air is pressurized, moisture and carbon dioxide in the air after pressurization are removed by an adsorption tower, and the raw material air after moisture and carbon dioxide removal is cooled to a cryogenic temperature in a heat exchanger, and the raw material after this cooling is Air is blown into the lower column of the double rectification column, and oxygen-rich liquid air is obtained at the bottom of the lower column by rectification separation in the lower column, and this liquid air is blown into the upper column of the double rectification column.
Oxygen is obtained at the bottom of the upper column by rectification separation in the upper column. Such an air separation method for collecting oxygen is disclosed in Japanese Patent Application Laid-Open No. 56-97772 and Japanese Patent Application Laid-open No. 56-97772.
It is disclosed in JP-A No. 80581, Japanese Unexamined Patent Publication No. 152374-1974, and the like.

ところで、この種の空気分離方法で製造された
酸素ガス中には、酸素よりも高沸点の不純物(高
沸点不純物)が含まれている。すなわち、沸点差
を利用しての精留分離であるので、上塔内では窒
素,水素等の酸素よりも低沸点の不純物と酸素お
よび高沸点不純物との精留分離はできるけれど
も、酸素と高沸点不純物との分離はできず、それ
らは共に上塔底部に蓄積される。したがつて、上
塔底部から抜出される製品酸素中には、酸素の他
に高沸点不純物が混入することになる。この場合
の高沸点不純物としては、メタン,エタン等の炭
化水素が挙げられる。半導体プロセス等で使用さ
れる酸素は、酸素中に含まれる不純物濃度が厳し
く制限されており、高沸点不純物が混入するのは
好ましくない。
By the way, the oxygen gas produced by this type of air separation method contains impurities having a higher boiling point than oxygen (high boiling point impurities). In other words, since rectification separation takes advantage of the difference in boiling points, impurities with a lower boiling point than oxygen such as nitrogen and hydrogen can be separated by rectification from oxygen and high-boiling impurities in the upper column. Separation with boiling point impurities is not possible; they together accumulate in the bottom of the upper column. Therefore, the product oxygen extracted from the bottom of the upper column contains high-boiling point impurities in addition to oxygen. In this case, high boiling point impurities include hydrocarbons such as methane and ethane. The concentration of impurities contained in oxygen used in semiconductor processes and the like is strictly limited, and it is undesirable for high boiling point impurities to be mixed into the oxygen.

特に高純度の酸素が必要とされる場合には、空
気分離装置で精留した高沸点不純物を含む酸素を
原料酸素として酸素精製設備に供給し、酸素精製
設備によつて高沸点不純物を除去し、これによつ
て高純度酸素を得ている。酸素精製設備は、例え
ば第2図に示す如きものとなる。すなわち、原料
酸素ガスを加熱するとヒータ31と、ヒータによ
つて加熱された原料酸素ガス中の高沸点不純物を
酸素と反応させ水と二酸化炭素に変える触媒槽3
2と、冷却器33と、触媒槽で生成された水と二
酸化炭素を吸着除去して高純度の精製酸素ガスを
出力する吸着塔34とを有する。このような構成
によつて、原料酸素ガス中の高沸点不純物(特
に、炭化水素)を除去して、純度お高い製品酸素
を得ることができる。しかし、この種酸素精製設
備を用いた場合、設備構成が複雑となるのみなら
ず、ヒーターの使用による電力消費、冷却器での
冷却水の使用、吸着塔での再生ガスの使用によつ
て運転費が多くかかることとなり、好ましくな
い。
When particularly high-purity oxygen is required, oxygen containing high-boiling point impurities that has been rectified in an air separation device is supplied as raw oxygen to the oxygen purification equipment, and the high-boiling impurities are removed by the oxygen purification equipment. , thereby obtaining high purity oxygen. The oxygen purification equipment is, for example, as shown in FIG. That is, when the raw material oxygen gas is heated, the heater 31 and the catalyst tank 3 react with high boiling point impurities in the raw material oxygen gas heated by the heater to water and carbon dioxide.
2, a cooler 33, and an adsorption tower 34 that adsorbs and removes water and carbon dioxide generated in the catalyst tank and outputs highly purified oxygen gas. With such a configuration, high-boiling point impurities (especially hydrocarbons) in the raw material oxygen gas can be removed to obtain product oxygen with high purity. However, when using this type of oxygen purification equipment, not only does the equipment configuration become complicated, but the operation also requires power consumption due to the use of the heater, use of cooling water in the cooler, and use of regenerated gas in the adsorption tower. This is not desirable as it will cost a lot of money.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、高沸点不純物を含まない高純
度酸素を採取することのできる空気分離方法及び
装置を提供することである。
An object of the present invention is to provide an air separation method and apparatus capable of collecting high purity oxygen free of high boiling point impurities.

〔発明の概要〕[Summary of the invention]

本発明は、酸素を採取する空気分離において、
複式精留塔の上塔底部に貯えられた酸素ガスを抜
出して頂部に凝縮部を有する精製酸素塔に供給す
ると共に、下塔で精留された環流液を精製酸素塔
内の凝縮部を介して上塔に供給し、精製酸素塔内
で酸素と高沸点不純物との精留分離を行なわせ、
該精留分離後の液体酸素を該精製酸素塔下部から
上塔底部に戻すと共に、精製酸素塔上部より高沸
点不純物の除去された高純度酸素を採取すること
を特徴としている。
The present invention provides air separation for extracting oxygen.
The oxygen gas stored in the bottom of the upper column of the double rectification column is extracted and supplied to the purified oxygen column having a condensation section at the top, and the reflux liquid rectified in the lower column is passed through the condensation section in the purified oxygen column. The oxygen is then supplied to the upper tower, where oxygen and high-boiling point impurities are separated by rectification in the purified oxygen tower.
It is characterized in that the liquid oxygen after the rectification and separation is returned from the lower part of the purified oxygen column to the bottom of the upper column, and high-purity oxygen from which high-boiling point impurities have been removed is collected from the upper part of the purified oxygen column.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明を具体的な実施例により詳細に説
明する。
Hereinafter, the present invention will be explained in detail using specific examples.

第1図は、本発明の一実施例を示すフローシー
トである。第1図において、1は複式精留塔であ
り、下塔2と上塔3と主凝縮器4を有する。5は
精製酸素塔であり、頂部に凝縮部6を有する構成
となつている。7と8は圧力調節用の弁である。
11〜20は導管を示す。
FIG. 1 is a flow sheet showing one embodiment of the present invention. In FIG. 1, 1 is a double rectification column, which has a lower column 2, an upper column 3, and a main condenser 4. Reference numeral 5 denotes a purified oxygen tower, which has a condensing section 6 at the top. 7 and 8 are pressure regulating valves.
11 to 20 indicate conduits.

まず、原料空気は、圧縮され、冷却された後、
水分および二酸化炭素を除去する前処理装置(吸
着塔など)で水分および二酸化炭素が除去され、
熱交換器で製品ガスおよび排ガス等の寒冷戻りガ
スと熱交換され、深冷温度に冷却される。深冷温
度に冷却され、一部液化した原料空気は、導管1
1を通つて、下塔2の中間段に吹込まれる。下塔
2内では、精留が行なわれ、下塔2の上部には窒
素が分離され、下塔2の底部には酸素を多く含ん
だ液体酸素が貯まる。窒素は、導管14,弁8を
介して上塔3の上部に吹込まれる。また、酸素リ
ツチの液体酸素は、導管12により抜出され、弁
7を経て、精製酸素塔5の凝縮部6に供給され、
塔内を上昇するガスを凝縮させ、自身は気化して
導管13から上塔3の中間段に吹込まれる。上段
3内では、精留分離により、上塔3の頂部に窒素
を、そして上塔3の底部に酸素が分離される。窒
素は、導管15から図示しない熱交換器で温度回
復され、窒素需要先に送られる。排ガスは、導管
16から図示しない熱交換器で温度回復され、大
気中に放出される。上塔3の底部に得られた酸素
は、導管17によりガスまたは液体として取出さ
れ、需要先に送られる。この場合の酸素は、上述
したように高沸点不純物を含んでおり、その純度
は高くない。そこで、高純度の酸素を得るため
に、上塔3底部に貯えられた酸素ガスを導管18
によつて抜出し、これを精製酸素塔5の下部に供
給する。精製酸素塔5に供給された酸素ガスは、
塔内を上昇し、凝縮部6で凝縮され、高沸点不純
物を多く含む液体酸素となつて塔内を下降し、導
管19から上塔3の底部に戻される。この精留操
作によつて、精製酸素塔5の上部には、高沸点不
純物の取除かれた高純度の酸素ガスが得られ、こ
れは導管20によつて高純度酸素の需要先,また
は貯蔵容器に送られる。つまり、複式精留塔1の
上塔底部に分離された高沸点不純物を含む酸素
を、精製酸素塔5に供給し、ここで精留分離によ
つて酸素と高沸点不純物を分離し、高沸点不純物
を含まない高純度酸素ガスが分離されている精製
酸素塔5の上部から製品ガスを抜出すことによつ
て、高純度の製品酸素が得られる。
First, the raw air is compressed and cooled, and then
Moisture and carbon dioxide are removed by a pretreatment device (such as an adsorption tower) that removes moisture and carbon dioxide.
In the heat exchanger, heat is exchanged with cold return gas such as product gas and exhaust gas, and the product gas is cooled to a cryogenic temperature. The feed air, which has been cooled to deep cooling temperature and partially liquefied, is transferred to conduit 1.
1 and is blown into the intermediate stage of the lower column 2. In the lower column 2, rectification is performed, nitrogen is separated in the upper part of the lower column 2, and liquid oxygen containing a large amount of oxygen is stored in the bottom of the lower column 2. Nitrogen is blown into the upper part of the upper column 3 via conduit 14 and valve 8. In addition, the oxygen-rich liquid oxygen is extracted through the conduit 12, passes through the valve 7, and is supplied to the condensing section 6 of the purified oxygen tower 5.
The gas rising in the column is condensed, and the gas itself is vaporized and blown into the intermediate stage of the upper column 3 through the conduit 13. In the upper column 3, nitrogen is separated at the top of the upper column 3 and oxygen at the bottom of the upper column 3 by rectification separation. The temperature of the nitrogen is recovered through a heat exchanger (not shown) from the conduit 15, and the nitrogen is sent to the nitrogen demand destination. The temperature of the exhaust gas is recovered through a heat exchanger (not shown) through the conduit 16, and then the exhaust gas is discharged into the atmosphere. The oxygen obtained at the bottom of the upper column 3 is removed as a gas or liquid via a conduit 17 and sent to the consumer. The oxygen in this case contains high-boiling point impurities as described above, and its purity is not high. Therefore, in order to obtain high-purity oxygen, the oxygen gas stored at the bottom of the upper tower 3 is transferred to the conduit 18.
This is then supplied to the lower part of the purified oxygen tower 5. The oxygen gas supplied to the purified oxygen tower 5 is
It rises in the column, is condensed in the condensing section 6, becomes liquid oxygen containing many high-boiling point impurities, descends in the column, and is returned to the bottom of the upper column 3 through a conduit 19. Through this rectification operation, high-purity oxygen gas from which high-boiling point impurities have been removed is obtained in the upper part of the purified oxygen tower 5, and this is transported to the demand destination or storage via the conduit 20. sent to the container. In other words, oxygen containing high-boiling point impurities separated at the upper bottom of the double rectification column 1 is supplied to the purified oxygen tower 5, where oxygen and high-boiling point impurities are separated by rectification separation. High purity product oxygen is obtained by extracting the product gas from the upper part of the purified oxygen tower 5 from which high purity oxygen gas containing no impurities is separated.

この実施例によれば、高沸点不純物を含む酸素
を精製酸素塔に供給して、高沸点不純物のない部
分から製品酸素を抜出すので、高純度の酸素を得
ることができる。また、高純度の酸素を得るため
に追加される機器は、精製酸素塔とわずかの導管
のみでよく、大がかりな精製設備を必要としな
い。また、高純度の酸素を得るための運転費もほ
とんどかからない。
According to this embodiment, oxygen containing high-boiling point impurities is supplied to the purified oxygen tower, and product oxygen is extracted from a portion free of high-boiling point impurities, so that highly pure oxygen can be obtained. In addition, the only additional equipment needed to obtain high-purity oxygen is a purified oxygen tower and a few conduits, eliminating the need for large-scale purification equipment. In addition, there is almost no operating cost to obtain high-purity oxygen.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、酸素を採取する空気分離にお
いて、複式精留塔の上塔底部に貯えられた酸素ガ
スを抜出して頂部に凝縮部を有する精製酸素塔下
部に供給すると共に、下塔で精留された環流液を
精製酸素塔内の凝縮部を介して上塔に供給し、精
製酸素塔内で酸素と高沸点不純物との精留分離を
行なわせることにより、高沸点不純物を含まない
高純度酸素を簡単に採取することができる。
According to the present invention, in air separation for collecting oxygen, oxygen gas stored at the bottom of the upper column of a double rectification column is extracted and supplied to the lower part of the purified oxygen column having a condensation section at the top, and is purified in the lower column. The distilled reflux liquid is supplied to the upper column through the condensation section in the purified oxygen column, and oxygen and high-boiling point impurities are separated by rectification in the purified oxygen column. Pure oxygen can be easily collected.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す図、第2図は
酸素精製設備の一例を示す図である。 1……複式精留塔、2……下塔、3……上塔、
4……主凝縮器、5……精製酸素塔、6……凝縮
部、7,8……弁、10〜20……導管。
FIG. 1 is a diagram showing an embodiment of the present invention, and FIG. 2 is a diagram showing an example of oxygen purification equipment. 1...Double rectification column, 2...Lower column, 3...Upper column,
4... Main condenser, 5... Purified oxygen tower, 6... Condensing section, 7, 8... Valve, 10-20... Conduit.

Claims (1)

【特許請求の範囲】 1 複式精留塔の下塔に原料空気を吹込み、該下
塔内での精留分離により該下塔底部に酸素リツチ
の液体空気を得て、該液体空気を該複式精留塔の
上塔に吹込み、該上塔内での精留分離により該上
塔底部に低沸点不純物の除去された酸素を得るよ
うにした空気分離法において、 前記複式精留塔の上塔底部に貯えられた酸素ガ
スを抜出して頂部に凝縮部を有する精製酸素塔下
部に供給すると共に、下塔で精留された環流液を
精製酸素塔内の凝縮部を介して上塔に供給し、該
精製酸素塔内で酸素と高沸点不純物との精留分離
を行なわせ、該精留分離後の液体酸素を該精製酸
素塔下部から上塔底部に戻すと共に、該精製酸素
塔上部より高沸点不純物の除去された高純度酸素
を採取することを特徴とする空気分離方法。 2 複式精留塔の下塔に原料空気を吹込み、該下
塔内での精留分離により該下塔底部に酸素リツチ
の液体空気を得て、該液体空気を該複式精留塔の
上塔に吹込み、該上塔内での精留分離により該上
塔底部に低沸点不純物の除去された酸素を得るよ
うに構成した空気分離装置において、 前記複式精留塔の上塔底部と、頂部に凝縮部を
有する精製酸素塔の下部とを連絡させ上塔底部に
貯えられた酸素ガスを抜出す通路と、該精製酸素
塔で精留分離後の液体空気を上塔底部に戻す通路
とをそれぞれ設けると共に、複式精留塔の下塔で
精留された環流液を精製酸素塔内の凝縮部を介し
て上塔へ導く通路を設け、精製酸素塔上部より高
沸点不純物の除去された高純度酸素を採取するよ
うに構成したことを特徴とする空気分離装置。
[Claims] 1. Feed air is blown into the lower column of the double rectification column, and oxygen-rich liquid air is obtained at the bottom of the lower column by rectification separation in the lower column, and the liquid air is In an air separation method in which oxygen is blown into the upper column of a double rectification column and oxygen from which low-boiling impurities have been removed is obtained at the bottom of the upper column by rectification separation in the upper column, The oxygen gas stored at the bottom of the upper tower is extracted and supplied to the lower part of the purified oxygen tower, which has a condensation section at the top, and the reflux liquid rectified in the lower tower is passed through the condensation section in the purified oxygen tower to the upper tower. The purified oxygen tower is supplied with oxygen and high-boiling point impurities are separated by rectification in the purified oxygen tower, and the liquid oxygen after the rectification separation is returned from the lower part of the purified oxygen tower to the bottom of the upper tower. An air separation method characterized by collecting high purity oxygen from which higher boiling point impurities have been removed. 2. Feed air is blown into the lower column of the double rectification column, and oxygen-rich liquid air is obtained at the bottom of the lower column by rectification separation in the lower column, and the liquid air is transferred to the top of the double rectification column. In an air separation device configured to blow into a column and obtain oxygen from which low-boiling impurities have been removed at the bottom of the upper column by rectification separation in the upper column, the upper column bottom of the double rectification column; A passage that communicates with the lower part of the purified oxygen tower having a condensation section at the top and extracts oxygen gas stored at the bottom of the upper tower, and a passage that returns liquid air after rectification and separation in the purified oxygen tower to the bottom of the upper tower. In addition, a passageway was provided to guide the reflux liquid rectified in the lower column of the double rectification column to the upper column via the condensation section in the purified oxygen column, so that high-boiling point impurities were removed from the upper column of the purified oxygen column. An air separation device characterized in that it is configured to collect high-purity oxygen.
JP10379585A 1985-05-17 1985-05-17 Air separation method and device Granted JPS61262584A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10379585A JPS61262584A (en) 1985-05-17 1985-05-17 Air separation method and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10379585A JPS61262584A (en) 1985-05-17 1985-05-17 Air separation method and device

Publications (2)

Publication Number Publication Date
JPS61262584A JPS61262584A (en) 1986-11-20
JPH0219398B2 true JPH0219398B2 (en) 1990-05-01

Family

ID=14363330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10379585A Granted JPS61262584A (en) 1985-05-17 1985-05-17 Air separation method and device

Country Status (1)

Country Link
JP (1) JPS61262584A (en)

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US4755202A (en) * 1987-07-28 1988-07-05 Union Carbide Corporation Process and apparatus to produce ultra high purity oxygen from a gaseous feed
US4780118A (en) * 1987-07-28 1988-10-25 Union Carbide Corporation Process and apparatus to produce ultra high purity oxygen from a liquid feed

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JPS5324920A (en) * 1976-08-18 1978-03-08 Aisin Seiki Co Ltd Mechanical fuel injector
JPS6039951B2 (en) * 1976-10-16 1985-09-09 日本酸素株式会社 Argon separation method
JPS53115690A (en) * 1977-03-19 1978-10-09 Tokyo Ekika Sanso Kk Liquefied separation of air components by mixing impure nitrogen

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