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JPH0220934B2 - - Google Patents
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JPH0220934B2 - - Google Patents

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Publication number
JPH0220934B2
JPH0220934B2 JP8677083A JP8677083A JPH0220934B2 JP H0220934 B2 JPH0220934 B2 JP H0220934B2 JP 8677083 A JP8677083 A JP 8677083A JP 8677083 A JP8677083 A JP 8677083A JP H0220934 B2 JPH0220934 B2 JP H0220934B2
Authority
JP
Japan
Prior art keywords
methane gas
light
wavelength
methane
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8677083A
Other languages
Japanese (ja)
Other versions
JPS59212738A (en
Inventor
Akio Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP58086770A priority Critical patent/JPS59212738A/en
Priority to DE19833334264 priority patent/DE3334264A1/en
Priority to US06/536,051 priority patent/US4567366A/en
Publication of JPS59212738A publication Critical patent/JPS59212738A/en
Publication of JPH0220934B2 publication Critical patent/JPH0220934B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/08Optical fibres; light guides

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Description

【発明の詳細な説明】 この発明は、LNGタンカー,LNGタンク,さ
らには炭鉱坑道内などの測定地点が遠く離れてい
る箇所でのメタンガスの濃度の測定に好適なメタ
ンガス濃度測定法およびその測定装置に関する。
[Detailed Description of the Invention] The present invention provides a methane gas concentration measuring method and a measuring device suitable for measuring the concentration of methane gas in locations where measurement points are far apart, such as in LNG tankers, LNG tanks, and even in coal mine tunnels. Regarding.

メタンガスは燃料用ガスとして極めて重要なも
のであり、天然ガスなどに多量に含まれている。
特に近年都市ガスの高カロリー化に伴つて都市ガ
スに天然ガスを利用することが多くなつている。
したがつて、都市ガスの漏出によるガス爆発等を
未然に防止するために地下街,高層ビル等の特定
地域におけるメタンガスの漏出を確実に、迅速に
検知し、警報を発する安全システムの開発が急務
とされている。
Methane gas is extremely important as a fuel gas, and is contained in large amounts in natural gas and the like.
Particularly in recent years, as city gas has become more caloric, natural gas has been increasingly used as city gas.
Therefore, in order to prevent gas explosions caused by city gas leaks, there is an urgent need to develop a safety system that can reliably and quickly detect methane gas leaks in specific areas such as underground malls and high-rise buildings, and issue warnings. has been done.

また、メタンガスは炭鉱内に発生する炭鉱ガス
の主成分であり、炭鉱ガスによるガス爆発あるい
はこれが引き金となる炭塵爆発を未然に防止する
ためにも、同様のシステムが必要とされている。
Furthermore, methane gas is the main component of coal mine gas generated in coal mines, and a similar system is required to prevent gas explosions caused by coal mine gas or coal dust explosions triggered by these gases.

しかしながら、従来から用いられている接触燃
焼式,熱伝導式,半導体式などのメタンガスセン
サは、その動作原理からしてガス選択性,応答性
が不十分で周囲の共存ガスおよび温度,湿度によ
つて影響を受けやすく、信頼性に不満があつた。
そのため、測定条件の厳しい採掘現場等には不適
であり、また実時間測定も困難である。しかも、
遠隔監視,遠隔測定の場合電気信号が送受される
ことから電磁誘導による誤報やケーブル損傷によ
る事故誘発などの危険性も無視することができな
いなどの問題がある。
However, conventionally used methane gas sensors such as catalytic combustion type, thermal conduction type, and semiconductor type have insufficient gas selectivity and response due to their operating principles, and are sensitive to surrounding coexisting gases, temperature, and humidity. There were complaints about reliability.
Therefore, it is unsuitable for mining sites where measurement conditions are severe, and real-time measurement is also difficult. Moreover,
In the case of remote monitoring and telemetry, electrical signals are sent and received, so there are problems that cannot be ignored, such as false alarms caused by electromagnetic induction and the risk of accidents caused by cable damage.

このような問題を解決するために、本発明者は
先に、メタンガスが1.6μm帯、1.3μm帯に特性吸
収を有することおよび1.6μm帯、1.3μm帯の光
は、一般の通信用石英系光フアイバの最も伝送損
失の小さい帯域であることに基づいたメタンガス
濃度測定法およびその装置を特願昭57−166836号
として提案した。この測定法は、1.6μm帯または
1.3μm帯の光を該波長域において伝送損失が小さ
い光フアイバによつて雰囲気ガスが流出入する測
定セルに伝送し、測定セルでメタンガスの1.666μ
mまたは、1.331μmでの吸収がなされた後の光を
1.6μm帯または1.3μm帯の波長域において伝送損
失が小さい光フアイバによつて帯域透過フイルタ
に送り、上記メタンガスの吸収波長とそれ以外の
波長との光に分光し、これら二つの波長の光をそ
れぞれ光検出器に送り、これら光の強度比を求
め、これによつて上記測定セル中のメタンガス濃
度を測定するものである。
In order to solve such problems, the present inventor first discovered that methane gas has characteristic absorption in the 1.6 μm band and 1.3 μm band, and that light in the 1.6 μm band and 1.3 μm band is A method and device for measuring methane gas concentration based on the band having the lowest transmission loss of optical fiber was proposed in Japanese Patent Application No. 57-166836. This measurement method is applicable to 1.6 μm band or
Light in the 1.3 μm band is transmitted to a measurement cell where atmospheric gas flows in and out through an optical fiber with low transmission loss in this wavelength range, and the measurement cell absorbs 1.666 μm of methane gas.
m or light after absorption at 1.331μm
The light is sent to a bandpass filter using an optical fiber with low transmission loss in the wavelength range of 1.6 μm or 1.3 μm, and the light is separated into the absorption wavelength of the methane gas and other wavelengths, and the light of these two wavelengths is separated. The intensity ratio of these lights is determined by sending each light to a photodetector, thereby measuring the methane gas concentration in the measurement cell.

しかしながら、この測定法によれば、上記問題
点は解決されるものの得られた測定値が正しくメ
タンガス濃度を表示しているかどうか判断がつか
ない場合があつた。
However, although this measurement method solves the above-mentioned problems, there are cases in which it is difficult to determine whether the obtained measured value correctly indicates the methane gas concentration.

すなわち、被測定ガス中にメタン以外の炭化水
素系ガス、例えばプロパン等が微量に混在した場
合、これら炭化水素系ガスは1.6μm付近または
1.3μm付近に特性吸収を有しているため、得られ
る測定値からは被測定ガス中にメタン以外の炭化
水素系ガスが存在せずメタンガスのみの濃度を測
定しているのかあるいは上記炭化水素系ガスが混
入しメタン以外の炭化水素系ガスとの混合物の濃
度を測定しているのか判断がつかないことがあつ
た。
In other words, when a small amount of hydrocarbon gas other than methane, such as propane, is mixed in the gas to be measured, these hydrocarbon gases have a diameter of around 1.6 μm or
Since it has a characteristic absorption near 1.3 μm, the obtained measurement value indicates that there are no hydrocarbon gases other than methane in the gas being measured, and that the concentration of only methane gas is being measured, or that the concentration of the above hydrocarbon gas is being measured. There were times when gas was mixed in and it was difficult to determine whether the concentration of a mixture with a hydrocarbon gas other than methane was being measured.

この発明は上記事情に鑑みてなされたもので、
厳しい測定条件下でも信頼性が高く、実時間測定
ができ、かつ極めて遠隔の監視および測定が行
え、事故誘発等の危険性がなく、さらにメタン以
外の炭化水素系ガスの妨害の有無を判断すること
のできるメタンガス濃度測定法およびその装置を
提供することを目的とするものである。
This invention was made in view of the above circumstances,
It is highly reliable even under severe measurement conditions, can perform real-time measurements, can perform extremely remote monitoring and measurement, has no risk of causing accidents, and can determine the presence or absence of interference with hydrocarbon gases other than methane. The object of the present invention is to provide a method for measuring methane gas concentration and an apparatus therefor.

以下、図面を参照しながらこの発明を詳しく説
明する。
Hereinafter, the present invention will be explained in detail with reference to the drawings.

この発明は、近年光通信用に開発された、例え
ば石英系光フアイバのような光フアイバが、波長
1.0〜1.8μmで極めて伝送損失が低く、また、こ
の波長域内の1.3μm付近および1.6μm付近にメタ
ンガスの特性吸収があり、さらに1.3μmおよび
1.6μmのメタンガスの特性吸収帯の付近には水蒸
気(H2O)および二酸化炭素(CO2)による吸収
がほとんどないという知見に基づいてなされたも
のである。
This invention is based on the fact that optical fibers such as silica-based optical fibers, which have been developed in recent years for optical communications, have wavelengths
The transmission loss is extremely low at 1.0 to 1.8 μm, and there is characteristic absorption of methane gas around 1.3 μm and 1.6 μm within this wavelength range, and furthermore, at 1.3 μm and 1.6 μm, the transmission loss is extremely low.
This was based on the knowledge that there is almost no absorption of water vapor (H 2 O) and carbon dioxide (CO 2 ) near the 1.6 μm characteristic absorption band of methane gas.

第1図は石英系光フアイバの波長0.6μm〜1.8μ
mの波長域における伝送損失を示すグラフであ
る。このグラフから明らかなように波長1.1〜
1.7μmでは伝送損失は1dB/Km以下であり、特に
1.6μm付近では0.2dB/Kmと言う超低損失を示し
ている。このような超低損失の光フアイバを光伝
送路とすれば、遠隔地に存在するメタンガスの濃
度を吸光光度法によつて測定できる可能性が生じ
ることがわかる。
Figure 1 shows the wavelength of silica optical fiber from 0.6μm to 1.8μm.
3 is a graph showing transmission loss in a wavelength range of m. As is clear from this graph, the wavelength is 1.1~
At 1.7μm, the transmission loss is less than 1dB/Km, especially
It shows an ultra-low loss of 0.2dB/Km near 1.6μm. It can be seen that if such an ultra-low loss optical fiber is used as an optical transmission line, it is possible to measure the concentration of methane gas in a remote location by spectrophotometry.

第2図および第3図は、この発明の対象となる
メタンガスの特性吸収を示すもので、第2図のグ
ラフはメタンガスの1.33μm帯の特性吸収を示し、
1.331μmの強度の強い吸収バンドがあることがわ
かる。第3図のグラフはメタンガスの1.66μm帯
の特性吸収を示し、1.666μmに比較的強度の強い
ブロードな吸収バンドのあることがわかる。そし
て、これらの2つの吸収バンドの付近にはH2O,
CO2の特性吸収帯がほとんど存在しないことが別
の測定によつて確められた。
Figures 2 and 3 show the characteristic absorption of methane gas, which is the subject of this invention, and the graph in Figure 2 shows the characteristic absorption of methane gas in the 1.33 μm band.
It can be seen that there is a strong absorption band at 1.331 μm. The graph in Figure 3 shows the characteristic absorption of methane gas in the 1.66 μm band, and it can be seen that there is a relatively strong and broad absorption band at 1.666 μm. In the vicinity of these two absorption bands, H 2 O,
Further measurements confirmed that the characteristic absorption band of CO 2 was almost absent.

しかし、上述のように1.6μm帯あるいは1.3μm
帯にはメタン以外の炭化水素系ガスの特性吸収帯
が存在することがわかつている。
However, as mentioned above, the 1.6μm band or 1.3μm band
It is known that there is a characteristic absorption band for hydrocarbon gases other than methane.

したがつて、例えば石英系光フアイバを光伝送
路とし、波長1.666μmおよび1.331μmのメタンガ
ス特性吸収バンドを利用すれば、遠隔地にあるメ
タンガスを共存H2O,CO2の影響をほとんど受け
ることなく高精度で測定でき、かつ1.666μmでの
吸光比と1.331μmでの吸光比とを同時に求め、
1.666μmで測定されたメタン濃度と1.331μmで測
定されたメタン濃度とを比較することにより、他
の炭化水素系ガスによる妨害の有無を知ることが
できることになる。
Therefore, for example, if a quartz-based optical fiber is used as an optical transmission line and the characteristic absorption bands of methane gas at wavelengths of 1.666 μm and 1.331 μm are used, methane gas in a remote location can be almost unaffected by coexisting H 2 O and CO 2 . It can be measured with high accuracy without any problems, and the absorbance ratio at 1.666 μm and the absorbance ratio at 1.331 μm can be determined simultaneously.
By comparing the methane concentration measured at 1.666 μm and the methane concentration measured at 1.331 μm, it is possible to determine whether there is interference by other hydrocarbon gases.

次に、波長1.3μmおよび1.6μmの近赤外域の光
を発光する光源について説明する。この波長域の
光源としては、従来より周知のガスマントル,グ
ローバー燈,ネルンストランプ,タングステン電
球,キセノンランプ,加熱電線などの光源をも使
用することができるが、取扱いの簡便性,耐久
性,消費電力等の点から半導体レーザーダイオー
ド(LD),発光ダイオード(LED)等が用いら
れる。
Next, a light source that emits light in the near-infrared region with wavelengths of 1.3 μm and 1.6 μm will be described. As light sources in this wavelength range, conventionally well-known light sources such as gas mantles, Grover lamps, Nern lamps, tungsten bulbs, xenon lamps, and heating wires can be used, but they are easy to handle, durable, and low in consumption. Semiconductor laser diodes (LDs), light emitting diodes (LEDs), etc. are used in terms of power, etc.

LDは高出力が得られるが温度,電源電圧によ
つて発光波長が変動しやすく、かつ単色性が高い
ので、このような用途に利用するには高度な技術
を必要とする。これに対してLEDは出力は低い
ものの発光スペクトルがややブロードであるため
波長の安定性がよく、特性吸収波長をカバーする
ことが簡単で使用しやすく対象となる気体の検出
範囲によつては充分利用できる。しかし、LED
を光源とした場合には、発光スペクトルがブロー
ドであるため、波長選択が必要となる。波長選択
には種々のタイプがあるがここでは安価な帯域透
過フイルタを用いることにした。
Although LDs can provide high output, their emission wavelength easily fluctuates depending on temperature and power supply voltage, and they are highly monochromatic, so advanced technology is required to use them for such purposes. On the other hand, LEDs have a low output, but their emission spectrum is somewhat broad, so the wavelength stability is good, and it is easy to cover the characteristic absorption wavelength, making it easy to use and sufficient depending on the detection range of the target gas. Available. However, the LED
When used as a light source, the emission spectrum is broad, so wavelength selection is required. There are various types of wavelength selection, but here we decided to use an inexpensive band pass filter.

ここで、帯域透過フイルタの透過幅は一般に広
く1〜数nm程度であり、測定物のスペクトル線
がこの幅よりも狭い場合には効率的に不利とな
る。しかし、メタンガスの1.331μmや1.666μmの
ように相当に幅が広い場合には、このような帯域
透過フイルタを用いても測定系全体の検出効率の
改善に十分役立つことを以下に具体的に検討し見
出した。
Here, the transmission width of a band-pass filter is generally wide, on the order of 1 to several nm, and if the spectral line of the object to be measured is narrower than this width, it is disadvantageous in terms of efficiency. However, in cases where the width is quite wide, such as 1.331 μm or 1.666 μm for methane gas, we will specifically consider below that even using such a band pass filter will be sufficient to improve the detection efficiency of the entire measurement system. I found it.

第4図は、中心波長1.6661μm,半値幅2nmで
透過特性がガウス分布型の帯域透過フイルタを用
い、このフイルタを透過した後の光の強度分布を
示すもので、実線はメタンガスが光路長50cmの測
定セル内に20Torrの圧力で含まれている場合を
表し、点線はメタンガスが存在しない場合を表わ
している。この両曲線の面積の差を点線で囲まれ
た面積で割ればメタンガスによる吸光比を求め得
ることが理解できる。
Figure 4 shows the intensity distribution of light after passing through the filter using a bandpass filter with a center wavelength of 1.6661 μm and a half-value width of 2 nm and a Gaussian distribution type transmission characteristic.The solid line shows the intensity distribution of light after passing through this filter. The dotted line represents the case where methane gas is not present in the measurement cell at a pressure of 20 Torr. It can be understood that the extinction ratio due to methane gas can be determined by dividing the difference in area between these two curves by the area surrounded by the dotted line.

第5図は、中心波長が1.6661μmA、1.6666μm
Bおよび1.6656μmCで半値幅が2nmの3種の帯
域透過フイルタを用いてメタンガスの1.666μmの
吸収スペクトル線の吸光比をメタン濃度を変化さ
せて測定した時のグラフを示したものである。メ
タンガスと空気との混合気体の圧力は1気圧と
し、その内のメタンガスの分圧(Torr)を変化
させた。グラフより明らかなようにフイルタの中
心波長が異なればメタンガスが同一分圧であつて
も吸光比は変化し、中心波長1.6661μmのフイル
タAが最も高い吸光比を与えることがわかる。
In Figure 5, the center wavelength is 1.6661μmA, 1.6666μm
This is a graph showing the absorption ratio of the 1.666 μm absorption spectrum line of methane gas measured by changing the methane concentration using three types of band pass filters with a half width of 2 nm at 1.6656 μm and B and 1.6656 μmC. The pressure of the mixed gas of methane gas and air was set to 1 atm, and the partial pressure (Torr) of the methane gas therein was varied. As is clear from the graph, if the center wavelength of the filter is different, the absorption ratio will change even if the partial pressure of methane gas is the same, and it can be seen that filter A with a center wavelength of 1.6661 μm gives the highest absorption ratio.

また、第6図は、中心波長1.6661μmで、半値
幅が1.5nmE,2.0nmFおよび2.5nmGの3種の帯
域透過フイルタを第5図に示したものと同一条件
で用いてメタンガスの吸光比を求めたものであ
る。これにより、例えば空気中の3Torrのメタン
ガス(爆発下限界の約6%の濃度に相当する。な
お、第6図の横軸の目盛は、メタンガスのTorr
数の対数をとつた値を示しているので、3Torrの
場合、横軸の目盛でlog3=0.447の位置が3Torrを
示す。)を検出するためには半値幅2.5nmGのフイ
ルタを用いて約1.5%の吸光比,すなわち光強度
の減少を測定すればよいことがわかる。(ただし、
第6図からはEのフイルタが最も高感度となるこ
とがわかるが、半幅値の狭いものはやや高価であ
り、またGのフイルタでも充分使用できるため、
Gのフイルタを選択した。)さらに、同様の検討
をメタンガスが含まれる都市ガスについても行つ
た。第7図は、20%のメタンガスを含む都市ガス
と空気との混合気体を試料とし、混合気体中の都
市ガス量を変化させて吸光比を測定したときのグ
ラフである。帯域透過フイルタには中心波長
1.6661μm,半値幅2.0nmのものを用いている。
In addition, Figure 6 shows the extinction ratio of methane gas using three types of bandpass filters with a center wavelength of 1.6661 μm and a half-width of 1.5 nmE, 2.0 nmF, and 2.5 nmG under the same conditions as shown in Figure 5. It's what I asked for. As a result, for example, 3 Torr of methane gas in the air (corresponding to a concentration of about 6% of the lower explosive limit).
Since it shows the value obtained by taking the logarithm of the number, in the case of 3Torr, the position of log3=0.447 on the horizontal axis scale indicates 3Torr. ), it is sufficient to use a filter with a half-width of 2.5 nmG and measure the extinction ratio of approximately 1.5%, that is, the decrease in light intensity. (however,
From Figure 6, it can be seen that the E filter has the highest sensitivity, but the one with a narrow half-width value is somewhat expensive, and the G filter can also be used satisfactorily.
I selected the G filter. ) Furthermore, a similar study was conducted for city gas, which contains methane gas. FIG. 7 is a graph when a mixture of city gas and air containing 20% methane gas is used as a sample, and the absorption ratio is measured by varying the amount of city gas in the mixture. For bandpass filters, the center wavelength
A material with a width of 1.6661 μm and a half width of 2.0 nm is used.

以上の検討結果から、光源に小型のLEDを用
い、波長選択に帯域透過フイルタを用いてもメタ
ンガス濃度を定量しうることがわかつた。また、
1.666μmと1.331μmとで同時にメタンガス濃度を
測定することにより、メタンガス以外の炭化水素
系ガスの妨害を検知できる。すなわち、メタン以
外の炭化水素系ガスも1.6μm帯および1.3μm帯に
特性吸収帯を有するものがあるが、1.666μmにお
ける分子吸光係数と1.331μmにおける分子吸光係
数とが異なるため、被測定ガス中にメタン以外の
炭化水素系ガスが混在していると、1.666μmで求
められたメタン濃度と1.331μmで求められたメタ
ン濃度が一致しなくなり、この不一致によつてメ
タン以外の炭化水素系ガスによる妨害が確認でき
る。
From the above study results, we found that it is possible to quantify methane gas concentration by using a small LED as a light source and a band pass filter for wavelength selection. Also,
By measuring the methane gas concentration at 1.666 μm and 1.331 μm simultaneously, interference with hydrocarbon gases other than methane gas can be detected. In other words, some hydrocarbon gases other than methane have characteristic absorption bands in the 1.6 μm band and 1.3 μm band, but since the molecular extinction coefficient at 1.666 μm and the molecular extinction coefficient at 1.331 μm are different, If a hydrocarbon gas other than methane is mixed in, the methane concentration determined at 1.666 μm and the methane concentration determined at 1.331 μm will not match, and this discrepancy may indicate that the methane concentration determined at 1.331 μm is caused by a hydrocarbon gas other than methane. Obstruction can be confirmed.

第8図に示すものは、以上の知見に基づいて構
成されたメタンガス測定装置の一例である。図中
符号1は発光ダイオード(LED)よりなる光源
である。この光源1で発光された1.3μm帯および
1.6μm帯の光は光結合器2を経て光伝送路である
低伝送損失の光フアイバ,例えば石英系光フアイ
バ3に送られる。石英系光フアイバ3は第1図に
示すような伝送特性を有し、1.1〜1.7μmで極め
て低損失のものであり、したがつてその長さを数
Km〜10Km程度としてもさしつかえない。石英系光
フアイバ3からの光は光結合器4bを経て測定セ
ル4に送り込まれる。この測定セル4は円筒状の
筒体4aの両端部にそれぞれ光結合器4b,4
b′が設けられており、筒体4aは測定ガスの自然
流出入を可能とするように多孔性焼結金属や連続
気孔構造のプラスチツクフオームなどから形成さ
れている。また、この測定セル4の光路長(光結
合器4b,4b′間の距離)は、特に限定されるこ
とがないが一例として50〜100cmとされることが
多い。また、メタンガスが低濃度の場合には周知
の多重光路型吸収セルを用いることもできる。測
定セル4から出た光は、光結合器4b′を経て低伝
送損失の光フアイバ,例えば石英系光フアイバ5
に送られる。この石英光フアイバ5も同様に低損
失のものが使用される。光フアイバ5を通過した
光は光結合器6からハーフミラーで構成された第
1のビームスプリツタ7に送られ、ここでまず2
つの光束に分けられる。第1の光束8は第1の帯
域透過フイルタ9に送られ、第2の光束10は第
2のビームスプリツタ11に送られ、ここでさら
に2つの光束;第3の光束12および第4の光束
13に分けられる。第3の光束12は第2の帯域
透過フイルタ14に送られ、第4の光束13は、
第3の帯域透過フイルタ15にそれぞれ送られ
る。
What is shown in FIG. 8 is an example of a methane gas measuring device constructed based on the above findings. Reference numeral 1 in the figure is a light source made of a light emitting diode (LED). The 1.3 μm band emitted by this light source 1 and
The light in the 1.6 μm band is sent through an optical coupler 2 to an optical fiber with low transmission loss, such as a quartz optical fiber 3, which is an optical transmission line. The silica-based optical fiber 3 has transmission characteristics as shown in Fig. 1, and has an extremely low loss of 1.1 to 1.7 μm.
Km to 10 Km is acceptable. Light from the quartz optical fiber 3 is sent into the measurement cell 4 via an optical coupler 4b. This measurement cell 4 has optical couplers 4b and 4 at both ends of a cylindrical body 4a, respectively.
b' is provided, and the cylindrical body 4a is formed of porous sintered metal or plastic foam with an open pore structure so as to allow the natural flow in and out of the measurement gas. Further, the optical path length of the measurement cell 4 (the distance between the optical couplers 4b and 4b') is not particularly limited, but is often set to 50 to 100 cm, for example. Furthermore, when the concentration of methane gas is low, a well-known multi-optical path type absorption cell can also be used. The light emitted from the measurement cell 4 passes through an optical coupler 4b' and is connected to a low transmission loss optical fiber, for example, a quartz optical fiber 5.
sent to. Similarly, this quartz optical fiber 5 is also of low loss. The light that has passed through the optical fiber 5 is sent from an optical coupler 6 to a first beam splitter 7 composed of a half mirror, where it is first split into two beam splitters.
It is divided into two luminous fluxes. The first beam 8 is sent to a first bandpass filter 9 and the second beam 10 is sent to a second beam splitter 11, where two further beams; a third beam 12 and a fourth beam splitter 11 are sent. The light beam is divided into 13 beams. The third beam 12 is sent to the second bandpass filter 14, and the fourth beam 13 is
The signals are respectively sent to a third band pass filter 15.

これらフイルタ9,14,15はいずれも薄膜
による光の干渉作用を利用した干渉フイルタであ
り、多層膜干渉フイルタなどが好適に用いられ、
中心波長での透過率ができるだけ高く、半値幅が
1.0〜2.0nmと狭いものが望ましい。そして、第1
のフイルタ9の中心波長は1.6661μmとされ、第
2のフイルタ14の中心波長は1.3312μmとされ
るかあるいはこの逆の組み合せとされる。また、
第3のフイルタ15の中心波長は、メタンの吸収
波長以外の波長でさらに水分、炭酸ガスの特性吸
収を示さない、例えば1.62μmまたは1.30μmとさ
れる。以下、第1のフイルタ9の中心波長は
1.6661μm、第2のフイルタ14の中心波長は
1.3312μm、第3のフイルタ15の中心波長は
1.62μmとして説明することにする。これによつ
て、第1のフイルタ9および第2のフイルタ14
を透過した光は、メタンガスの吸収によつて強度
の低下した1.6661μmまたは1.3312μmを中心とす
る透過波長分布がガウス形の光となり、また第3
のフイルタ15を透過した光は、メタンガスの吸
収には無関係の1.62μmを中心波長とする波長分
布がガウス形の光となる。これらの光は、それぞ
れアバランシエフオトダイオード(APD)やフ
オトダイオード(PD)(例えばGe半導体)など
で構成された第1,第2,第3の光検出器16,
17,18に送られ、電気信号に変換され、増幅
器19,20,21にて増幅されたのち、マイク
ロコンピユータなどから構成された演算処理装置
22に送られる。演算処理装置22は、第1の光
検出器16で検出し信号変換した電気信号を、第
3の光検出器18で検出し信号変換した電気信号
で割算して波長1.6661μmでのメタンの吸光比A
を求めるものであり、またこれと同時に、第2の
光検出器17で検出し信号変換した電気信号を、
第3の光検出器18で検出し信号変換した電気信
号で割算して波長1.3312μmでのメタンの吸光比
A′を求めるものである。
These filters 9, 14, and 15 are all interference filters that utilize the light interference effect of thin films, and multilayer film interference filters are preferably used.
The transmittance at the center wavelength is as high as possible, and the half-value width is
A narrow one of 1.0 to 2.0 nm is desirable. And the first
The center wavelength of the filter 9 is set to 1.6661 μm, and the center wavelength of the second filter 14 is set to 1.3312 μm, or the reverse combination thereof is used. Also,
The center wavelength of the third filter 15 is set to, for example, 1.62 μm or 1.30 μm, which does not exhibit characteristic absorption of moisture or carbon dioxide at wavelengths other than the absorption wavelength of methane. Below, the center wavelength of the first filter 9 is
1.6661 μm, the center wavelength of the second filter 14 is
1.3312μm, the center wavelength of the third filter 15 is
This will be explained assuming that it is 1.62 μm. As a result, the first filter 9 and the second filter 14
The transmitted light becomes Gaussian-shaped light with a transmission wavelength distribution centered at 1.6661 μm or 1.3312 μm, whose intensity has decreased due to absorption of methane gas, and
The light transmitted through the filter 15 has a Gaussian wavelength distribution with a center wavelength of 1.62 μm, which is unrelated to absorption of methane gas. These lights are transmitted to first, second, and third photodetectors 16, each of which is composed of an avalanche photodiode (APD) or a photodiode (PD) (for example, a Ge semiconductor).
17, 18, converted into an electrical signal, amplified by amplifiers 19, 20, 21, and then sent to an arithmetic processing unit 22 composed of a microcomputer or the like. The arithmetic processing unit 22 divides the electrical signal detected and converted by the first photodetector 16 by the electrical signal detected and converted by the third photodetector 18, and calculates methane at a wavelength of 1.6661 μm. Absorption ratio A
At the same time, the electrical signal detected and converted by the second photodetector 17 is
Absorption ratio of methane at a wavelength of 1.3312 μm divided by the electrical signal detected and converted by the third photodetector 18
This is to find A′.

なお、予め本測定装置を用いて濃度の異なる数
点のメタンガスの標準ガスについて波長1.6661μ
m及び波長1.3312μmでの吸光比B及びB′を各々
求めておく。そして、標準ガスのメタンガスの濃
度と求めた波長1.6661μm及び波長1.3312μmでの
吸光比との関係を演算処理装置22に入力してお
けば、測定セル4内に存在する気体中のメタンガ
スの濃度は吸光比A及びA′から求めることがで
きる。そして、これら二つの測定濃度は、さらに
相互に比較され、両者が誤差範囲内で同一の場合
はその結果が測定セル4内の気体のメタンガス濃
度として表示器23に表示される。また、両者の
間に所定値以上の差がある場合には、測定セル4
内の気体にはメタン以外の炭化水素系ガスが含ま
れているか、あるいは測定装置の光結合器6以降
の部分;ビームスプリツタ7,11、帯域透過フ
イルタ9,14,15、光検出器16,17,1
8、増幅器19,20,21に異常が生じたこと
を意味するので、その旨の表示が表示器23に示
される。なお、光結合器6と第1のビームスプリ
ツタ7との間にテスト用発光源を設け、上記異常
時に光結合器6からの光を遮断し、上記テスト用
発光源を発光させて測定装置自体の異常を判断で
きるようにすれば、メタン以外の炭化水素系ガス
による妨害が確認できる。
In addition, using this measuring device in advance, we measured the wavelength of 1.6661μ for several standard methane gases with different concentrations.
The absorption ratios B and B' at m and wavelength of 1.3312 μm are determined respectively. Then, by inputting the relationship between the concentration of methane gas as the standard gas and the determined absorption ratios at wavelengths of 1.6661 μm and 1.3312 μm into the arithmetic processing unit 22, the concentration of methane gas in the gas existing in the measurement cell 4 can be determined. can be determined from the extinction ratios A and A'. These two measured concentrations are further compared with each other, and if they are the same within the error range, the result is displayed on the display 23 as the methane gas concentration of the gas within the measurement cell 4. In addition, if there is a difference greater than a predetermined value between the two, the measurement cell 4
The gas inside contains a hydrocarbon gas other than methane, or the part of the measuring device after the optical coupler 6; beam splitter 7, 11, band transmission filter 9, 14, 15, photodetector 16. ,17,1
8. This means that an abnormality has occurred in the amplifiers 19, 20, and 21, so a message to that effect is shown on the display 23. Note that a test light source is provided between the optical coupler 6 and the first beam splitter 7, and when the above abnormality occurs, the light from the optical coupler 6 is blocked, and the test light source is made to emit light to complete the measuring device. If it is possible to determine whether there is an abnormality in itself, it will be possible to confirm interference caused by hydrocarbon gases other than methane.

第9図は、この発明の測定装置の他の例を示す
もので、第8図に示したものと同一構成部分には
同一符号を付してその説明は省略する。この例で
は、測定セル4を出た光はたとえば石英系光フア
イバのような低損失の光フアイバ5を通り、光分
岐路4によつて3つの光束に分けられ、それぞれ
光結合器25,26,27からチヨツパ28を経
て、第1のフイルタ9,第2のフイルタ14,第
3のフイルタ15に送り込まれる点と、第1の光
検出器16と第3の光検出器18とからの電気信
号が増幅器29に送られ、第2の光検出器17と
第3の光検出器18とからの電気信号が増幅器3
0に送られる点が前例と異るところである。この
例ではチヨツパ28によつて光検出器16,1
7,18からの電気信号が交流となり、増幅等が
容易である利点がある。
FIG. 9 shows another example of the measuring device of the present invention, in which the same components as those shown in FIG. 8 are given the same reference numerals and their explanation will be omitted. In this example, the light exiting the measurement cell 4 passes through a low-loss optical fiber 5 such as a silica-based optical fiber, and is divided into three beams by an optical branching path 4, each of which is connected to an optical coupler 25, 26. , 27, through the chopper 28, to the first filter 9, second filter 14, and third filter 15, and from the first photodetector 16 and the third photodetector 18. The signal is sent to the amplifier 29, and the electrical signals from the second photodetector 17 and the third photodetector 18 are sent to the amplifier 3.
The difference from the previous example is that it is sent to 0. In this example, the photodetectors 16 and 1 are detected by the chopper 28.
The electrical signals from 7 and 18 become alternating current, which has the advantage of being easy to amplify.

なお、上記例に限られず、光源1からの光を光
分岐路で複数の光に分割し、これら光を別々の石
英系光フアイバ3で複数の測定セル4……に送り
込み、複数の地点でのメタンガスを同時に測定す
るように構成することもできる。
Note that the example is not limited to the above example, and the light from the light source 1 is split into a plurality of lights by an optical branch path, and these lights are sent to a plurality of measurement cells 4 through separate silica-based optical fibers 3, and the light is transmitted at a plurality of points. It can also be configured to measure methane gas at the same time.

以上説明したように、この発明のメタンガス濃
度測定法および測定装置によれば、メタンガスの
特性吸収体に、光フアイバの最も低損失な波長領
域であり、かつCO2,H2Oの吸収帯がほとんど存
在しない1.33μmおよび1.66μmを選び、光伝送路
に低損失の光フアイバを、波長選択に小型で安価
な帯域透過フイルタを用い、1.33μmと1.66μmと
で同時に吸光比を求めてメタンガスの定量を行う
ものであるので、測定セルを極めて遠隔の地点に
設置することができ、電磁誘導を受けたり、ケー
ブル断線時の短絡事故を生ずることがなく、した
がつて炭鉱の坑道ガス中のメタンガス濃度の測定
や地下街等の広い地域に複数の測定セルを設置
し、1箇所で集中監視する場合などに好適であ
る。また、測定ガス中に存在するH2O,CO2の影
響をほとんど受けないので、精度も高い。さら
に、二つの吸収波長において、別々にメタンガス
濃度を求めるようにしているので、これら二つの
測定値を比較することにより、被測定ガス中にメ
タン以外の炭化水素系ガスが混在しているか否か
を知ることができるとともに測定装置自体の異常
をも知ることができ、さらには測定値そのものの
信頼性も高められる。また、吸光光度法であるの
で、実時間測定が可能であり、メタン濃度変動に
対して迅速な対応が可能となる。さらに、波長選
択に帯域透過フイルタを用いているので装置を小
型化かつ安価とすることができる。さらに、小
形,低電力で冷却などを必要としない小出力の発
光ダイオードを用いてもメタンの爆発限界より下
のレベルの高感度の検出を達成できる。
As explained above, according to the methane gas concentration measuring method and measuring device of the present invention, the characteristic absorber of methane gas has the lowest loss wavelength region of the optical fiber and the absorption band of CO 2 and H 2 O. We selected 1.33 μm and 1.66 μm, which are almost non-existent, and used a low-loss optical fiber as the optical transmission line and a small and inexpensive band pass filter for wavelength selection. Because it performs quantitative determination, the measurement cell can be installed at an extremely remote location, and it is not subject to electromagnetic induction or short-circuit accidents due to cable breakage. It is suitable for concentration measurement and when multiple measurement cells are installed in a wide area such as an underground mall for centralized monitoring at one location. Furthermore, it is highly accurate because it is hardly affected by H 2 O and CO 2 present in the measurement gas. Furthermore, since the methane gas concentration is determined separately at two absorption wavelengths, by comparing these two measured values, it can be determined whether hydrocarbon gases other than methane are mixed in the measured gas. It is possible to know the abnormality of the measuring device itself, and furthermore, the reliability of the measured values themselves can be improved. In addition, since it is an absorption photometry method, real-time measurement is possible, making it possible to quickly respond to changes in methane concentration. Furthermore, since a bandpass filter is used for wavelength selection, the device can be made smaller and less expensive. Furthermore, high-sensitivity detection of methane below the explosion limit can be achieved even by using a small-sized, low-power, low-output light emitting diode that does not require cooling or the like.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明に用いられる石英系光フアイ
バの伝送損失を示すグラフ、第2図はメタンガス
の1.33μm帯の吸収スペクトル、第3図はメタン
ガスの1.66μm帯のスペクトル、第4図はガウス
分布型の帯域透過フイルタを透過した光の強度分
布を示すグラフ、第5図は中心波長の異なる3種
の帯域透過フイルタを用いた時のメタンガスの濃
度と吸光比との関係を示すグラフ、第6図は半値
幅の異なる3種の帯域透過フイルタを用いた時の
メタンガスの濃度と吸光比との関係を示すグラ
フ、第7図は帯域透過フイルタを用いて空気中の
都市ガス濃度と吸光比の関係を都市ガス中のメタ
ンガス濃度によつて求めたグラフ、第8図および
第9図はいずれもこの発明のメタンガス測定装置
の例を示す概略構成図である。 1……光源、3……石英系光フアイバ、4……
測定セル、5……石英系光フアイバ、6……光結
合器、7……第1のビームスプリツタ、9……第
1の帯域透過フイルタ、11……第2のビームス
プリツタ、14……第2の帯域透過フイルタ、1
5……第3の帯域透過フイルタ、16,17,1
8……光検出器、19,20,21……増幅器、
22……演算処理装置、23……表示器、24…
…光分岐路、28……チヨツパ。
Figure 1 is a graph showing the transmission loss of the silica optical fiber used in this invention, Figure 2 is the absorption spectrum of methane gas in the 1.33 μm band, Figure 3 is the spectrum of methane gas in the 1.66 μm band, and Figure 4 is the Gaussian spectrum. Figure 5 is a graph showing the intensity distribution of light transmitted through a distributed bandpass filter. Figure 6 is a graph showing the relationship between the concentration of methane gas and the absorption ratio when three types of band transmission filters with different half widths are used, and Figure 7 is a graph showing the relationship between the concentration of city gas in the air and the absorption ratio using a band transmission filter. 8 and 9 are graphs showing the relationship between methane gas concentration in city gas and FIG. 9, which are both schematic configuration diagrams showing examples of the methane gas measuring device of the present invention. 1... Light source, 3... Quartz-based optical fiber, 4...
Measurement cell, 5... quartz optical fiber, 6... optical coupler, 7... first beam splitter, 9... first band pass filter, 11... second beam splitter, 14... ...Second band pass filter, 1
5...Third band pass filter, 16, 17, 1
8...Photodetector, 19,20,21...Amplifier,
22...Arithmetic processing unit, 23...Display device, 24...
...Light branch, 28... Chiyotupa.

Claims (1)

【特許請求の範囲】 1 1.6μm帯と1.3μm帯の波長域を含む光を同時
にこれらの波長域において伝送損失が小さい光フ
アイバによつて雰囲気ガスが流出入する測定セル
に伝送し、この測定セルでメタンガスの1.666μm
および1.331μmでの吸収がなされた後の光を1.6μ
m帯と1.3μm帯の波長域において伝送損失が小さ
い光フアイバによつて帯域透過フイルタに送り、
前記二つのメタンガスの吸収波長の光とそれ以外
の波長の1つの光とに分光し、前記一方のメタン
ガスの吸収波長と前記それ以外の波長との強度比
および前記他方のメタンガスの吸収波長と前記そ
れ以外の波長との強度比を求め、これらの強度比
から前記測定セル中のメタンガス濃度を測定する
一方、前記二つの強度比からそれぞれ得られたメ
タンガス濃度を比較して、メタンガス以外の妨害
ガスの有無を検知することを特徴とするメタンガ
ス濃度測定法。 2 1.6μm帯と1.3μm帯の波長域を含む光を発光
する発光源と、この光を伝送するこれら波長域で
伝送損失の小さい光フアイバと、雰囲気ガスが流
出入する測定セルと、測定セルでメタンガスの
1.666μmと1.331μmでの吸収が行なわれた光をメ
タンガスの前記二つの吸収波長の光とそれ以外の
波長の一つの光とに分光する帯域透過フイルタ
と、前記1.666μmの吸収波長の光を検出し電気信
号に変換する第1の光検出器と、前記1.331μmの
吸収波長の光を検出し電気信号に変換する第2の
光検出器、および、前記それ以外の波長の光を検
出し電気信号に変換する第3の光検出器と、前記
第1の光検出器および前記第2の光検出器それぞ
れの電気信号と前記第3の光検出器の電気信号と
の比を演算してそれぞれのメタンガス濃度を算出
するとともに、この二つのメタンガス濃度を比較
してメタンガス以外の妨害ガスの有無を判定する
演算処理装置とを具備してなるメタンガス濃度測
定装置。
[Claims] 1. Light including the wavelength ranges of 1.6 μm band and 1.3 μm band is simultaneously transmitted through an optical fiber with small transmission loss in these wavelength ranges to a measurement cell into which atmospheric gas flows in and out, and this measurement 1.666 μm of methane gas in the cell
and 1.6 μm after absorption at 1.331 μm
It is sent to a band-pass filter by an optical fiber with low transmission loss in the m-band and 1.3μm wavelength range,
The light is separated into light having the absorption wavelength of the two methane gases and one light having the other wavelength, and the intensity ratio between the absorption wavelength of the one methane gas and the other wavelength, and the absorption wavelength of the other methane gas and the light are separated. The intensity ratios with other wavelengths are determined, and the methane gas concentration in the measurement cell is measured from these intensity ratios.The methane gas concentrations obtained from the two intensity ratios are compared, and interference gases other than methane gas are determined. A method for measuring methane gas concentration, which is characterized by detecting the presence or absence of methane gas. 2. A light emitting source that emits light in the 1.6 μm and 1.3 μm wavelength ranges, an optical fiber that transmits this light and has low transmission loss in these wavelength ranges, a measurement cell through which atmospheric gas flows in and out, and a measurement cell. of methane gas
a bandpass filter that separates the light absorbed at 1.666 μm and 1.331 μm into light at the two absorption wavelengths of methane gas and one light at another wavelength; a first photodetector that detects and converts it into an electrical signal; a second photodetector that detects the light with the absorption wavelength of 1.331 μm and converts it into an electrical signal; and a second photodetector that detects the light with the other wavelengths. a third photodetector for converting into an electrical signal, and calculating the ratio of the electrical signal of each of the first photodetector and the second photodetector to the electrical signal of the third photodetector; A methane gas concentration measuring device comprising an arithmetic processing device that calculates the respective methane gas concentrations and compares the two methane gas concentrations to determine the presence or absence of an interfering gas other than methane gas.
JP58086770A 1982-09-25 1983-05-18 Method and apparatus for measuring concentration of gaseous methane Granted JPS59212738A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP58086770A JPS59212738A (en) 1983-05-18 1983-05-18 Method and apparatus for measuring concentration of gaseous methane
DE19833334264 DE3334264A1 (en) 1982-09-25 1983-09-22 METHOD AND MEASURING DEVICE FOR MEASURING METHANE CONCENTRATION IN A GAS MIXTURE
US06/536,051 US4567366A (en) 1982-09-25 1983-09-26 Method and apparatus for measuring methane concentration in gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58086770A JPS59212738A (en) 1983-05-18 1983-05-18 Method and apparatus for measuring concentration of gaseous methane

Publications (2)

Publication Number Publication Date
JPS59212738A JPS59212738A (en) 1984-12-01
JPH0220934B2 true JPH0220934B2 (en) 1990-05-11

Family

ID=13895980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58086770A Granted JPS59212738A (en) 1982-09-25 1983-05-18 Method and apparatus for measuring concentration of gaseous methane

Country Status (1)

Country Link
JP (1) JPS59212738A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
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KR20240102383A (en) * 2022-12-26 2024-07-03 (주)파이버피아 Portable Gas Detection Sensor Using Laser

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0830680B2 (en) * 1990-10-15 1996-03-27 アンリツ株式会社 Gas detector
GB0002535D0 (en) 2000-02-04 2000-03-29 Bg Intellectual Pty Ltd A method for determining the safety of gas mixtures
WO2001094916A1 (en) 2000-06-02 2001-12-13 Lattice Intellectual Property Ltd. Non-dispersive ir measurement of gases using an optical filter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240102383A (en) * 2022-12-26 2024-07-03 (주)파이버피아 Portable Gas Detection Sensor Using Laser

Also Published As

Publication number Publication date
JPS59212738A (en) 1984-12-01

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