JPH0224788B2 - - Google Patents
Info
- Publication number
- JPH0224788B2 JPH0224788B2 JP56192076A JP19207681A JPH0224788B2 JP H0224788 B2 JPH0224788 B2 JP H0224788B2 JP 56192076 A JP56192076 A JP 56192076A JP 19207681 A JP19207681 A JP 19207681A JP H0224788 B2 JPH0224788 B2 JP H0224788B2
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- sintering
- silicon nitride
- aluminate
- test piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005245 sintering Methods 0.000 claims description 20
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 14
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 14
- 239000011521 glass Substances 0.000 claims description 9
- 229910000416 bismuth oxide Inorganic materials 0.000 claims description 8
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 claims description 8
- 239000011230 binding agent Substances 0.000 claims description 7
- YQNQTEBHHUSESQ-UHFFFAOYSA-N lithium aluminate Chemical compound [Li+].[O-][Al]=O YQNQTEBHHUSESQ-UHFFFAOYSA-N 0.000 claims description 5
- 239000012298 atmosphere Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 239000000843 powder Substances 0.000 claims description 4
- ANBBXQWFNXMHLD-UHFFFAOYSA-N aluminum;sodium;oxygen(2-) Chemical compound [O-2].[O-2].[Na+].[Al+3] ANBBXQWFNXMHLD-UHFFFAOYSA-N 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 229910001388 sodium aluminate Inorganic materials 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims description 2
- WPUINVXKIPAAHK-UHFFFAOYSA-N aluminum;potassium;oxygen(2-) Chemical compound [O-2].[O-2].[Al+3].[K+] WPUINVXKIPAAHK-UHFFFAOYSA-N 0.000 claims 1
- 239000012071 phase Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 239000012299 nitrogen atmosphere Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000035939 shock Effects 0.000 description 4
- -1 alkali metal aluminate Chemical class 0.000 description 3
- 150000004645 aluminates Chemical class 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- KVOIJEARBNBHHP-UHFFFAOYSA-N potassium;oxido(oxo)alumane Chemical compound [K+].[O-][Al]=O KVOIJEARBNBHHP-UHFFFAOYSA-N 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910010100 LiAlSi Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052910 alkali metal silicate Inorganic materials 0.000 description 1
- HEHRHMRHPUNLIR-UHFFFAOYSA-N aluminum;hydroxy-[hydroxy(oxo)silyl]oxy-oxosilane;lithium Chemical compound [Li].[Al].O[Si](=O)O[Si](O)=O.O[Si](=O)O[Si](O)=O HEHRHMRHPUNLIR-UHFFFAOYSA-N 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000002667 nucleating agent Substances 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 229910052670 petalite Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Description
本発明は、良好な耐熱性を有する高密度かつ高
強度の窒化珪素(Si3N4)焼結体の製造方法に関
するものである。
従来、耐熱性にすぐれる高密度窒化珪焼結体
は、いずれも少量の焼結助剤、すなわちMgO,
Al2O3,Y2O3,AlN等を加えて、1700〜1800℃
の温度域でホツトプレスを行うか、あるいは加圧
窒素雰囲気内で焼結を行うことにより得られてい
る。これらの焼結助剤は液相焼結による高密度化
を促進するものの、焼結後も焼結体内にガラス相
として残留し、高温強度の劣化等を引起す為、焼
結体の高温強度特性が不十分であり、この点での
改良が望まれている。
一方、液相構成成分として酸化珪素、酸化アル
ミニウムに酸化カルシウム等を加えた三成分系酸
化物混合体を選び、さらに酸化チタンを核形成剤
として添加した複合焼結助剤を用い、焼結体内に
残留するガラス相を冷却過程で結晶化せしめ、高
温強度の維持を試みるなど若干の改良もなされて
いるが、析出結晶相と窒化珪素との熱膨張特性の
不整合により熱衝撃にもろいという欠点があつ
た。
本発明は、焼結助剤として酸化ビスマスとアル
カリ金属のアルミン酸塩とを併用し、焼結体に所
定の温度で熱処理を行なうことにより、焼結体中
の残留ガラス相中に異方性の強い層状もしくは繊
維状結晶を析出せしめ、これにより耐熱・高強度
の焼結体を得ることのできる方法を提供するもの
である。
すなわち、本発明製造方法は、窒化珪素粉末
と、焼結助剤として酸化ビスマス0.5〜15重量%
及びアルミン酸リチウム、アルミン酸ナトリウム
及びアルミン酸カリウムのうち少なくとも1種
0.1〜5重量%とを混合し、これにバインダーを
加えて成形後、焼結し、続いて焼結体に非酸化雰
囲気中600〜1200℃の温度で熱処理を行なうこと
により焼結体中の残留ガラス相を結晶化させるこ
とからなるものである。
本発明で使用する焼結助剤は、酸化ビスマス
と、アルカリ金属のアルミン酸塩、すなわちアル
ミン酸リチウム、アルミン酸ナトリウム及びアル
ミン酸カリウムのうち少なくとも1種(以下、単
にアルミン酸金属塩という)とからなる。酸化ビ
スマスとアルミン酸金属塩とを併用することによ
り、アルカリ金属のケイ酸塩及びビスマス酸塩が
析出し、これらは粒界で異方性の強い層状または
繊維状に結晶化するため、焼結体の耐熱・高強度
特性が向上する。
酸化ビスマスの配合量は0.5〜15重量%であり、
好ましくは5〜10重量%である。アルミン酸金属
塩は0.1〜5重量%であり、好ましくは0.5〜2重
量%である。アルミン酸金属塩は、1種単独でま
たは2種以上を組み合わせて用いることができ
る。
本発明で使用する窒化珪素粉末は、通常使用さ
れているものである。また、バインダーも通常使
用されるものであれば何でも良いが、特に好まし
くはポリビニルアルコールやステアリン酸等の有
機バインダーである。
窒化珪素粉末と焼結助剤とを所定割合で混合
し、バインダーを添加した後、常法に従い成形体
を得る。得られた成形体を必要に応じて熱処理し
た後、常法にしたがい焼結する。例えば、窒素雰
囲気下1600〜1900℃にて常圧焼結または加圧焼結
を行なう。加圧焼結の場合には2〜500気圧、好
ましくは200気圧以上の窒素雰囲気下で行なう。
また、成形体を適切な圧力媒体に包蔵し、いわゆ
る熱間静水圧焼結(Hot Isostatio Pressing)を
行なうとさらに焼結度の高いものが得られる。
焼結操作に引続き、600〜1200℃の温度で焼結
体を熱処理する。この熱処理により焼結体中のガ
ラス相が繊維状または層状に結晶化する。600℃
未満であるとガラス相の結晶化が行なわれず、ま
た、1200℃を越えると異方性の強い結晶が得られ
ず、いずれも好ましくない。非酸化性雰囲気と
は、好ましくは窒素ガス雰囲気である。
以下、本発明方法を実施例及び比較例に基いて
説明する。なお、下記実施例及び比較例中、%は
重量%を意味する。
実施例 1
高純度窒化珪素(α率78%)に酸化ビスマス8
%とアルミン酸リチウム0.6%とを添加し、エチ
ルアルコールを溶媒とし、ゴム内張りボールミル
にて36時間湿式にて粉砕混合を行つた。乾燥後の
混合粉にバインダーとしてポリビニルアルコール
を加え、800Kg/cm2の圧力下で金型成形を行ない、
35×35×10mmの試験片を得た。試験片のグリーン
密度は理論密度の54%であつた。
この試験片を400℃までゆつくり加熱し、この
状態で5時間保ち、有機物の揮散除去を行なう。
次に、200気圧の窒素雰囲気下1700℃の温度に80
分間保持し、焼結を行なつた。さらに、この焼結
体を900℃の温度に2時間保ち、残留ガラス相の
結晶化を行なつた。得られた焼結試験片Aの密度
は、理論密度の97%であつた。
また、上記焼結試験片Aを粉砕してX線回折に
よる生成相の同定を行なつたところ、窒化珪素の
他に、ペタライト(Petalite):LiAlSi4O10、ビ
スマス酸塩:Si2Bi24O40及びAl2Bi24O39が検出さ
れた。
また、試験片Aについて電子顕微鏡観察を行な
つたところ、粒界には層状又は繊維状に近い結晶
が析出していた。
比較例
高純度窒化珪素(α率78%)と、酸化マグネシ
ウム5%、酸化アルミニウム1%及び酸化チタン
2%とを添加したものを、実施例1と同様にして
混合・焼結する。得られた焼結体を試験片Bとす
る。
試験例
上記実施例1と比較例で得られた焼結試験片
A,Bについて、それぞれ抗折強度の測定及び冷
熱サイクル試験を行なつた。冷熱サイクル試験
は、60℃×10分と1200℃×10分との間を加熱5
分、冷却2分の間隔で繰返し加冷することにより
行なう。各焼結試験片A,Bの結果を第1表に示
す。
The present invention relates to a method for manufacturing a high-density and high-strength silicon nitride (Si 3 N 4 ) sintered body having good heat resistance. Conventionally, high-density silicon nitride sintered bodies with excellent heat resistance have been produced using small amounts of sintering aids, namely MgO,
Add Al 2 O 3 , Y 2 O 3 , AlN, etc. and heat to 1700-1800℃
It is obtained by hot-pressing at a temperature range of 100 mL or by sintering in a pressurized nitrogen atmosphere. Although these sintering aids promote high density through liquid-phase sintering, they remain in the sintered body as a glass phase even after sintering, causing deterioration of high-temperature strength. The characteristics are insufficient, and improvement in this respect is desired. On the other hand, a ternary oxide mixture in which silicon oxide, aluminum oxide, calcium oxide, etc. were added as liquid phase constituents was selected, and a composite sintering aid containing titanium oxide as a nucleating agent was used to create a sintered body. Some improvements have been made, such as trying to maintain high-temperature strength by crystallizing the glass phase remaining in the silicon nitride during the cooling process, but the drawback is that it is susceptible to thermal shock due to the mismatch in thermal expansion properties between the precipitated crystal phase and silicon nitride. It was hot. In the present invention, bismuth oxide and alkali metal aluminate are used together as sintering aids, and the sintered body is heat-treated at a predetermined temperature, thereby creating anisotropic properties in the residual glass phase in the sintered body. The object of the present invention is to provide a method in which strong layered or fibrous crystals are precipitated, thereby making it possible to obtain a heat-resistant and high-strength sintered body. That is, the manufacturing method of the present invention uses silicon nitride powder and 0.5 to 15% by weight of bismuth oxide as a sintering aid.
and at least one of lithium aluminate, sodium aluminate, and potassium aluminate
0.1 to 5% by weight, a binder is added to this, molded and sintered, and then the sintered body is heat-treated at a temperature of 600 to 1200°C in a non-oxidizing atmosphere. It consists of crystallizing the residual glass phase. The sintering aid used in the present invention contains bismuth oxide and at least one of alkali metal aluminates, namely lithium aluminate, sodium aluminate, and potassium aluminate (hereinafter simply referred to as metal aluminate). Consisting of By using bismuth oxide and metal aluminate together, alkali metal silicates and bismuthates precipitate, and these crystallize in highly anisotropic layered or fibrous forms at grain boundaries, making it difficult to sinter. Improves the body's heat resistance and high strength properties. The blending amount of bismuth oxide is 0.5 to 15% by weight,
Preferably it is 5 to 10% by weight. The amount of metal aluminate is 0.1 to 5% by weight, preferably 0.5 to 2% by weight. Aluminate metal salts can be used alone or in combination of two or more. The silicon nitride powder used in the present invention is commonly used. Further, the binder may be any commonly used binder, but organic binders such as polyvinyl alcohol and stearic acid are particularly preferred. After mixing silicon nitride powder and a sintering aid in a predetermined ratio and adding a binder, a molded body is obtained according to a conventional method. The obtained molded body is heat treated as required, and then sintered according to a conventional method. For example, normal pressure sintering or pressure sintering is performed at 1600 to 1900°C in a nitrogen atmosphere. In the case of pressure sintering, it is carried out under a nitrogen atmosphere of 2 to 500 atmospheres, preferably 200 atmospheres or more.
Moreover, if the compact is encapsulated in an appropriate pressure medium and subjected to so-called hot isostatio pressing, a product with an even higher degree of sintering can be obtained. Following the sintering operation, the sintered body is heat treated at a temperature of 600-1200°C. This heat treatment crystallizes the glass phase in the sintered body into a fibrous or layered form. 600℃
If it is less than 1,200°C, the glass phase will not be crystallized, and if it exceeds 1200°C, a crystal with strong anisotropy will not be obtained, both of which are unfavorable. The non-oxidizing atmosphere is preferably a nitrogen gas atmosphere. The method of the present invention will be explained below based on Examples and Comparative Examples. In addition, in the following examples and comparative examples, % means weight %. Example 1 High purity silicon nitride (α rate 78%) with bismuth oxide 8
% and 0.6% of lithium aluminate were added, and pulverization and mixing were carried out in a wet process for 36 hours in a rubber-lined ball mill using ethyl alcohol as a solvent. Polyvinyl alcohol is added as a binder to the mixed powder after drying, and it is molded under a pressure of 800 kg/cm 2 .
A test piece of 35 x 35 x 10 mm was obtained. The green density of the specimen was 54% of the theoretical density. This test piece was slowly heated to 400°C and kept in this state for 5 hours to volatilize and remove organic matter.
Then, at a temperature of 1700 °C under a nitrogen atmosphere of 200 atm 80
The mixture was held for a minute to perform sintering. Further, this sintered body was kept at a temperature of 900° C. for 2 hours to crystallize the residual glass phase. The density of the obtained sintered test piece A was 97% of the theoretical density. In addition, when the above sintered test piece A was crushed and the generated phases were identified by X-ray diffraction, in addition to silicon nitride, petalite: LiAlSi 4 O 10 and bismuthate: Si 2 Bi 24 O 40 and Al 2 Bi 24 O 39 were detected. Further, when specimen A was observed under an electron microscope, it was found that layered or fibrous crystals were precipitated at the grain boundaries. Comparative Example High-purity silicon nitride (α rate 78%) and 5% magnesium oxide, 1% aluminum oxide, and 2% titanium oxide were mixed and sintered in the same manner as in Example 1. The obtained sintered body is designated as test piece B. Test Example The sintered test pieces A and B obtained in Example 1 and Comparative Example were measured for bending strength and subjected to a thermal cycle test, respectively. The heating and cooling cycle test was conducted by heating between 60℃ x 10 minutes and 1200℃ x 10 minutes.
This is done by heating and cooling repeatedly at intervals of 2 minutes. Table 1 shows the results for each sintered test piece A and B.
【表】【table】
【表】
第1表から明らかなように、試験片A(本発明
品)は試験片B(比較品)に比べて常温における
抗折強度はほとんど遜色なく、高温下における強
度低下が少ない。また、冷熱サイクルテストで
は、試験片Bが26回で割れたのに対し、試験片A
は400回でも割れず、冷熱サイクルにおける耐久
性に優れる。
実施例 2
高純度窒化珪素(α率81%)に酸化ビスマス8
%、アルミン酸リチウム0.3%及びアルミン酸カ
リウム0.3%とを加え、実施例1と同様の条件で
成形・焼結し、窒素雰囲気下1000℃で熱処理を行
なつた。得られた試験片は、同様に耐熱衝撃性に
優れていた。また、試験片を電子顕微鏡で観察す
ると、粒界に繊維状又は層状の結晶相が析出して
いた。
実施例 3
実施例1と同様の組成の原料を用いて、同様に
成形・焼結した。焼結は、窒素雰囲気中1800℃で
常圧により行なつた。焼結体に窒素雰囲気下900
℃で2時間熱処理を行なつた。得られた試験片は
耐熱衝撃性に優れていた。
実施例 4
実施例1及び実施例2の方法でガスタービンエ
ンジンのブレードを試作した。それぞれのブレー
ドにホツトスピンテスト(105000rpm、5分毎に
500℃と、1100℃を繰り返す)を200サイクル行な
つたところ、いずれのブレードにもヒビワレは生
じなかつた。
以上の記載から明らかなように、本発明方法で
得られた窒化珪素焼結体は、焼結体中の粒界に存
在するガラス相が繊維状又は層状のように異方性
の強い形状で結晶化しているため、主結晶粒界を
相互に強くつなぎ合わせており、したがつて優れ
た耐熱衝撃性及び耐熱高強度を有する。[Table] As is clear from Table 1, test piece A (product of the present invention) has almost the same bending strength at room temperature as test piece B (comparative product), and there is little decrease in strength at high temperatures. In addition, in the thermal cycle test, test piece B cracked after 26 cycles, while test piece A
It does not break even after 400 cycles and has excellent durability in cold and hot cycles. Example 2 High purity silicon nitride (α rate 81%) with bismuth oxide 8
%, 0.3% lithium aluminate, and 0.3% potassium aluminate, and molded and sintered under the same conditions as in Example 1, followed by heat treatment at 1000° C. in a nitrogen atmosphere. The obtained test piece also had excellent thermal shock resistance. Furthermore, when the test piece was observed under an electron microscope, a fibrous or layered crystal phase was precipitated at the grain boundaries. Example 3 Using raw materials having the same composition as in Example 1, molding and sintering were carried out in the same manner. Sintering was carried out at 1800° C. under normal pressure in a nitrogen atmosphere. Sintered body under nitrogen atmosphere 900℃
Heat treatment was carried out at ℃ for 2 hours. The obtained test piece had excellent thermal shock resistance. Example 4 A gas turbine engine blade was prototyped using the methods of Examples 1 and 2. Each blade was subjected to a hot spin test (105,000 rpm, every 5 minutes).
After 200 cycles of 500°C and 1100°C, no cracks appeared on any of the blades. As is clear from the above description, in the silicon nitride sintered body obtained by the method of the present invention, the glass phase existing at the grain boundaries in the sintered body has a highly anisotropic shape such as a fibrous or layered shape. Since it is crystallized, the main grain boundaries are strongly connected to each other, and therefore it has excellent thermal shock resistance and high heat-resistant strength.
Claims (1)
ス0.5〜15重量%及びアルミン酸リチウム、アル
ミン酸ナトリウム及びアルミン酸カリウムのうち
少なくとも1種0.1〜5重量%とを混合し、これ
にバインダーを加えて成形後、焼結し、続いて焼
結体に非酸化雰囲気下600〜1200℃の温度で熱処
理を行なうことにより焼結体中の残留ガラス相を
結晶化させることからなる窒化珪素焼結体の製造
方法。1. Mix silicon nitride powder with 0.5 to 15% by weight of bismuth oxide and 0.1 to 5% by weight of at least one of lithium aluminate, sodium aluminate, and potassium aluminate as a sintering aid, and add a binder to this. silicon nitride sintered body, which is formed by molding, sintering, and then heat-treating the sintered body at a temperature of 600 to 1200°C in a non-oxidizing atmosphere to crystallize the residual glass phase in the sintered body. manufacturing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56192076A JPS5895653A (en) | 1981-11-30 | 1981-11-30 | Manufacture of silicon nitride sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56192076A JPS5895653A (en) | 1981-11-30 | 1981-11-30 | Manufacture of silicon nitride sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5895653A JPS5895653A (en) | 1983-06-07 |
| JPH0224788B2 true JPH0224788B2 (en) | 1990-05-30 |
Family
ID=16285231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56192076A Granted JPS5895653A (en) | 1981-11-30 | 1981-11-30 | Manufacture of silicon nitride sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5895653A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5376602A (en) * | 1993-12-23 | 1994-12-27 | The Dow Chemical Company | Low temperature, pressureless sintering of silicon nitride |
-
1981
- 1981-11-30 JP JP56192076A patent/JPS5895653A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5895653A (en) | 1983-06-07 |
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