JPH0225448B2 - - Google Patents
Info
- Publication number
- JPH0225448B2 JPH0225448B2 JP57179739A JP17973982A JPH0225448B2 JP H0225448 B2 JPH0225448 B2 JP H0225448B2 JP 57179739 A JP57179739 A JP 57179739A JP 17973982 A JP17973982 A JP 17973982A JP H0225448 B2 JPH0225448 B2 JP H0225448B2
- Authority
- JP
- Japan
- Prior art keywords
- particle size
- light intensity
- intensity distribution
- scattered light
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 18
- 239000013307 optical fiber Substances 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 3
- 238000007493 shaping process Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
- G01N15/0211—Investigating a scatter or diffraction pattern
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4704—Angular selective
- G01N2021/4711—Multiangle measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4704—Angular selective
- G01N2021/4711—Multiangle measurement
- G01N2021/4716—Using a ring of sensors, or a combination of diaphragm and sensors; Annular sensor
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
【発明の詳細な説明】
〔発明の属する技術分野〕
この発明は、微小な粒子の径を測定する粒径測
定装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical field to which the invention pertains] The present invention relates to a particle size measuring device for measuring the diameter of minute particles.
従来より光の散乱を利用した粒径測定装置の１
つに第１図に示すような装置がある。これはレー
ザー光３を試料８に照射し、試料８により散乱さ
れた光のθ方向の散乱光強度分布Ｉ（θ）を測定
し(1)式の関係を利用して散乱光強度分布Ｉ（θ）
から粒径分布ｎ（Ｄ）へ変換するものである。
One of the conventional particle size measuring devices that utilizes light scattering
There is a device as shown in FIG. This is done by irradiating the sample 8 with the laser beam 3, measuring the scattered light intensity distribution I(θ) in the θ direction of the light scattered by the sample 8, and using the relationship of equation (1), the scattered light intensity distribution I( θ)
This is to convert from the particle size distribution n(D) to the particle size distribution n(D).
Ｉ（θ）＝∫i（Ｄ，θ）ｎ（Ｄ）dD−(1)
ここでｉ（Ｄ，θ）は回折理論に基づ
いて計算した１粒子による散乱光
この方法では第１図に示すように試料８からの
散乱光を受光レンズ４を用いてレンズの焦点面に
集光している。これは試料の位置によらず散乱角
がθである光はすべて焦点面のｒ（＝θf）の位置
に集光させるためである。このような光学系であ
るとレンズの口径に限度があるために散乱光強度
分布の測定範囲が０〜15゜程度に限定される。又
フオトデイテクタとして第２図に示すようなパタ
ーンフオトダイオードアレイを用いると中心部が
強い透過光により照射され、この部分で発生した
電流が周辺のリングへ流れ込むために、散乱光強
度分布の測定に大きい誤差が混入する。 I (θ) = ∫i (D, θ) n (D) dD - (1) where i (D, θ) is the light scattered by one particle calculated based on diffraction theory. Scattered light from the sample 8 is focused on the focal plane of the lens using the light receiving lens 4. This is because all the light whose scattering angle is θ is focused on the focal plane at the position r (=θf), regardless of the position of the sample. In such an optical system, the measurement range of the scattered light intensity distribution is limited to about 0 to 15 degrees because the lens diameter is limited. Furthermore, when a patterned photodiode array as shown in Figure 2 is used as a photodetector, the central part is illuminated by strong transmitted light, and the current generated in this part flows into the surrounding ring, making it difficult to measure the scattered light intensity distribution. Errors are introduced.
この発明の目的は上述した欠点を改良し、広い
散乱角範囲にわたり正確な散乱光強度分布を測定
出来る光学系を備え、微小粒子をも測定可能な粒
径測定装置を提供することにある。
An object of the present invention is to improve the above-mentioned drawbacks, provide a particle size measuring device equipped with an optical system capable of accurately measuring the scattered light intensity distribution over a wide scattering angle range, and capable of measuring even minute particles.
本発明は第３図に示すように測定したい散乱角
方向に光フアイバを配置し、それぞれの光フアイ
バからの出力をデイスクリートなフオトデイテク
タで電気信号に変換することにより希望するすべ
ての散乱角範囲の散乱光強度分布を測定出来るよ
うにしたものである。
As shown in Figure 3, the present invention arranges optical fibers in the direction of the desired scattering angle and converts the output from each optical fiber into an electrical signal using a discrete photodetector. It is designed to measure the scattered light intensity distribution.
広い散乱角範囲にわたり正確な散乱光強度分布
を測定出来れば第４図に示すように散乱光強度分
布の変化の小さい微小粒子（0.1〜2μｍ）の散乱
光強度分布を区別出来るので微小粒子をも測定出
来るようになる。
If the scattered light intensity distribution can be accurately measured over a wide scattering angle range, it will be possible to distinguish the scattered light intensity distribution of small particles (0.1 to 2 μm) with small changes in the scattered light intensity distribution, as shown in Figure 4. Be able to measure.
本発明の詳細を第３図に示す実施例に基づいて
説明する。
The details of the present invention will be explained based on the embodiment shown in FIG.
レーザー１及びコリメータレンズ系２により成
形された平行ビーム３を試料８に照射し試料によ
り散乱された光を測定したい散乱角方向に配置し
た光フアイバ１０によりフオトデイテクタ１２に
導く。光フアイバの前にマイクロレンズ９を配置
し、マイクロレンズ９の光軸に平行な、すなわち
配置した散乱角方向に平行な光のみを光フアイバ
内に導くようにしてある。又外部の迷光を除去す
るためにレーザーの波長の光のみを透過させるフ
イルタ１１をフオトデイテクタ１２の前面に配置
している。このような光フアイバを複数個配置し
散乱光強度分布を測定する。電気信号に変換され
た散乱光強度分布は、散乱光強度分布−粒径分布
変換装置７により粒径分布へ変換される。この変
換装置は通常計算機により構成されアナログ入力
装置から、電気信号に変換された散乱光強度分布
を読み、粒径分布へ変換する。 A parallel beam 3 formed by a laser 1 and a collimator lens system 2 is irradiated onto a sample 8, and the light scattered by the sample is guided to a photodetector 12 by an optical fiber 10 arranged in the direction of the scattering angle desired to be measured. A microlens 9 is arranged in front of the optical fiber so that only light parallel to the optical axis of the microlens 9, that is, parallel to the disposed scattering angle direction, is guided into the optical fiber. Further, in order to remove external stray light, a filter 11 that transmits only light of the laser wavelength is arranged in front of the photodetector 12. A plurality of such optical fibers are arranged to measure the scattered light intensity distribution. The scattered light intensity distribution converted into an electric signal is converted into a particle size distribution by a scattered light intensity distribution-particle size distribution conversion device 7. This conversion device is usually configured with a computer and reads the scattered light intensity distribution converted into an electrical signal from an analog input device, and converts it into a particle size distribution.
第１図は従来の粒径測定装置のブロツク図。第
２図はパターンフオトダイオードアレイの形を示
す一部正面図。第３図は本発明の実施例を示すブ
ロツク図。第４図は散乱光強度分布を示すグラフ
である。
１……レーザー、８……試料（被測定粒子）、
２……コリメータレンズ系、９……マイクロレン
ズ、３……平行ビーム、１０……光フアイバ、４
……受光レンズ、１１……フイルタ、５……フオ
トデイテクタ、１２……フオトデイテクタ、６…
…増巾器、７……散乱光強度分布−粒径分布変換
装置。
Figure 1 is a block diagram of a conventional particle size measuring device. FIG. 2 is a partial front view showing the shape of a patterned photodiode array. FIG. 3 is a block diagram showing an embodiment of the present invention. FIG. 4 is a graph showing the scattered light intensity distribution. 1...Laser, 8...Sample (particle to be measured),
2... Collimator lens system, 9... Micro lens, 3... Parallel beam, 10... Optical fiber, 4
...Receiving lens, 11...Filter, 5...Photodetector, 12...Photodetector, 6...
...Amplifier, 7...Scattered light intensity distribution-particle size distribution conversion device.
Claims (1)
るレーザー光を平行ビームに成形するためのコリ
メータ・レンズ系と、このコリメータ・レンズ系
を通過するレーザー光を光フアイバとフオトデイ
テクタとにより、全散乱角範囲にわたり散乱光強
度分布が測定出来るよう構成した測定系及びこの
測定系で測定して得られた散乱光強度分布を粒径
分布に変換する粒径分布変換装置とを具備してな
る粒径測定装置。1. A laser device, a collimator/lens system for shaping the laser light output from the laser device into a parallel beam, and an optical fiber and a photodetector to convert the laser light passing through the collimator/lens system over the entire scattering angle range. A particle size measuring device comprising a measurement system configured to measure a scattered light intensity distribution and a particle size distribution conversion device that converts the scattered light intensity distribution obtained by measuring with this measurement system into a particle size distribution.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57179739A JPS5970944A (en) | 1982-10-15 | 1982-10-15 | Apparatus for measuring particle diameter |
| US06/541,023 US4595291A (en) | 1982-10-15 | 1983-10-12 | Particle diameter measuring device |
| EP83306227A EP0106684B1 (en) | 1982-10-15 | 1983-10-14 | Particle diameter measuring device |
| DE8383306227T DE3381178D1 (en) | 1982-10-15 | 1983-10-14 | PARTICLE DIAMETER MEASURING DEVICE. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57179739A JPS5970944A (en) | 1982-10-15 | 1982-10-15 | Apparatus for measuring particle diameter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5970944A JPS5970944A (en) | 1984-04-21 |
| JPH0225448B2 true JPH0225448B2 (en) | 1990-06-04 |
Family
ID=16071014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57179739A Granted JPS5970944A (en) | 1982-10-15 | 1982-10-15 | Apparatus for measuring particle diameter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5970944A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015007649A (en) * | 2009-07-10 | 2015-01-15 | 株式会社日立ハイテクノロジーズ | Automatic analyzer |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6117940A (en) * | 1984-07-05 | 1986-01-25 | Nippon Paint Co Ltd | Method and instrument for measuring dispersion condition of particles in high-density suspension or the like |
| JPS6171336A (en) * | 1984-09-14 | 1986-04-12 | Nippon Paint Co Ltd | Grain-size measuring apparatus |
| JPS61234339A (en) * | 1985-04-10 | 1986-10-18 | Fuji Electric Co Ltd | Fine particle detector for liquid |
| JPS6255545A (en) * | 1985-09-05 | 1987-03-11 | Toshiba Corp | Particle size measuring apparatus |
| JPH0264435A (en) * | 1988-08-31 | 1990-03-05 | Y D K:Kk | Measuring apparatus for particle size |
| JPH081482Y2 (en) * | 1990-11-17 | 1996-01-17 | 株式会社堀場製作所 | Particle size distribution measuring device |
| CN104596991B (en) * | 2014-12-25 | 2017-10-31 | 北京农业智能装备技术研究中心 | A kind of turbidity detection means |
-
1982
- 1982-10-15 JP JP57179739A patent/JPS5970944A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015007649A (en) * | 2009-07-10 | 2015-01-15 | 株式会社日立ハイテクノロジーズ | Automatic analyzer |
| US10113962B2 (en) | 2009-07-10 | 2018-10-30 | Hitachi High-Technologies Corporation | Automatic analyzer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5970944A (en) | 1984-04-21 |
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