JPH0227015B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a dust-free constant temperature bath used for temperature testing and heat treatment of semiconductor products, precision parts, etc. in a clean air environment.

[Conventional technology]

In a dust-free constant temperature chamber, when the door is opened, there is a space not only inside the chamber of the constant temperature chamber, but also in front of the opening of the chamber for the purpose of manipulating the specimen before putting it into the chamber or after pulling it out from the chamber. It is necessary to maintain a clean air environment in the work space, and for this reason, conventionally, a clean bench was attached to the front of the dust-free constant temperature chamber and integrated, and downflow clean air was blown out by this clean bench. It is something that

[Problem that the invention seeks to solve]

When using the above-mentioned conventional technology, since a clean bench is attached, the apparatus becomes large and requires installation space, and a separate clean bench is required, which increases the price.

The present invention aims to miniaturize the apparatus without using a clean bench, and to make it economically advantageous since it requires less installation space.

[Means for solving problems]

The present invention includes a thermostatic chamber main body, a door attached to the front of the main body and supported substantially horizontally above the opening of the main body when opened, and a door formed on the door that blows clean air downward when the door is opened. It consists of a large number of clean air outlets that blow out, and an air purifying device that communicates with these clean air outlets. A flow of clean air is formed in the direction toward the main body, which prevents unclean air from entering the main body from outside when loading and unloading the specimen.There is no need to attach a clean bench, making the device more compact and requiring less installation space. , which aims to reduce the price.

[Effect]

When the front door of the thermostatic chamber is opened while the clean air generator is operating, the door is held approximately horizontally above the opening, and clean air is blown downward from the numerous clean air blow-off holes, causing the door to blow out from the front of the opening. A downward flow of clean air is formed to block the inflow of unclean air from the outside into the thermostatic chamber body.

〔Example〕

An embodiment of the present invention will be described with reference to the accompanying drawings.

Reference numeral 1 denotes a thermostatic chamber main body, and a door 3 that seals the front opening 2 is attached at its upper end to the upper end of the main body 1 with a hinge 4, and is connected to the main body 1 with a stay 5 in the middle.
The stay 5 is rotatably pivoted in the middle, one end is pivoted to bearing pieces 6 on both outer surfaces of the door 3, and the other end is pivoted to bearing pieces 7 on both outer surfaces of the main body 1, so that when the door 3 is opened, This is supported above the opening 2 in a substantially horizontal state. Further, a security door 8 is attached to the back of the main body 1 with a hinge 9. Packing 10, 11 is installed on the inner surface of doors 3, 8.
is installed.

Reference numeral 12 denotes an inner tank as a chamber, which is housed in the main body 1 via a space 13 that communicates with the bottom and back side.A circulation fan 14 and a heater 15 are housed in the bottom space 13, and a heater 15 is housed in the back space 13. An exhaust pipe 17 that protrudes outward from the main body 1 and has a damper 16 in the middle is open. A filter 18 is provided on the back of the inner tank 12, and a ventilation plate 1 is provided inside the filter 18.
9, an inside door 21 having a large number of ventilation holes 20 on the front side is pivoted on one side, and a gap 22 is provided between the inside door 21 and the door 3 of the main body 1.
A duct 23 is installed in the space 13 so that the space 22 communicates with the suction side of the circulation fan 14.
is formed.

24 is an air purifier, box 2 is placed on main body 1.
5 is supported, and inside the box 25, a filter 26 is provided at the front, a blower fan 27 is provided at the rear upper part, and a pre-filter 29 is provided facing the intake port 28 opened at the rear. The sides are connected through a duct 30. Further, an air supply pipe 31 made of a flexible tube is connected to the front end of the box 25, and this air pipe 31 is formed in the upper part of the door 3 and communicates with an air supply path 32.

In addition, a large number of clean air blowing holes 33 are formed on the inner surface of the door 3 facing the opening 2 of the main body 1, and these clean air blowing holes 33 are connected to a clean air introducing portion 34 formed inside the door 3. The air supply path 32 is in communication.

Note that 35 and 36 are drive motors for the circulation fan 14 and the ventilation fan 27, respectively.

Next, the operation of the above embodiment will be explained.

When semiconductor products and the like are stored in the inner tank 12 and subjected to heat treatment with the door 3 closed, as shown in FIG. After passing through the filter 18 on the back of the inner tank 12, the hot air from the
The semiconductor products, etc. in the inner tank 12 are heated by passing through the
It passes through the inside door 21 and is sucked into the circulation fan 14 through the gap 22 and circulated. Note that the air purifier 24 does not operate at this time. In addition, the inner tank 12
When taking out heat-treated semiconductor products from the inside or storing semiconductor products in the inner tank 12, when the door 3 starts to open, the air purifier 24 opens.
The blower fan 27 of the prefilter 2 starts to operate.
9. The clean air that has passed through the filter 26 flows into the clean air introduction part 34 inside the door 3 and starts blowing out from the many clean air blowing holes 33 on the bottom surface, and the door 3 is opened to a horizontal position and fixed as shown in FIG. When this happens, clean air is blown out from the numerous blow-off holes 33 in a downward flow. Therefore, when the inside door 21 is opened to the side as shown by the chain line to open the inner tank 12, the front surface of the opening 2 is blocked by the flow of clean air, and there is no possibility that unclean air from outside will flow in. . At this time, the circulation fan 14 is stopped.

〔Effect of the invention〕

According to the present invention, there is provided a constant temperature chamber main body, a door attached to the front surface of the main body and supported substantially horizontally above the opening of the main body when opened, and a door formed on the door that cleans downward when the door is opened. It consists of a large number of clean air outlets that blow out air, and an air purifying device that communicates with these clean air outlets. When taking out the door, the opening causes a flow of clean air blown downward from the numerous clean air blowing holes of the door held substantially horizontally,
The front surface of the opening of the main body is blocked by this air flow, and air can be prevented from flowing into the main body from the outside. Therefore, there is no need to attach a clean bench to the front part of the main body, and the device can be made smaller, the installation area can be reduced, and the price can be reduced.

[Brief explanation of drawings]

FIG. 1 is a vertical sectional side view of a dust-free thermostatic chamber showing one embodiment of the present invention with the door closed, FIG. 2 is a vertical sectional side view with the door opened, and FIG. 3 is a front view of the same. 1... Constant temperature chamber body, 2... Opening, 3... Door, 24
...Air cleaning device, 33...Cleaned air outlet.

Claims (1)

[Claims] 1. A constant temperature chamber body, a door that is attached to the front of this body and is supported approximately horizontally above the opening of the body when opened, and a number of holes formed on this door that blow clean air downward when the door is opened. A dust-free constant temperature bath characterized by comprising a clean air outlet and an air cleaning device communicating with the clean air outlet.