JPH0229170B2 - YORYOSHIKIDENJIRYURYOKEIYODOKANNOSEIZOHOHO - Google Patents
YORYOSHIKIDENJIRYURYOKEIYODOKANNOSEIZOHOHOInfo
- Publication number
- JPH0229170B2 JPH0229170B2 JP9740283A JP9740283A JPH0229170B2 JP H0229170 B2 JPH0229170 B2 JP H0229170B2 JP 9740283 A JP9740283 A JP 9740283A JP 9740283 A JP9740283 A JP 9740283A JP H0229170 B2 JPH0229170 B2 JP H0229170B2
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- peripheral surface
- conduit
- outer peripheral
- green sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
- G01F1/58—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by electromagnetic flowmeters
- G01F1/584—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by electromagnetic flowmeters constructions of electrodes, accessories therefor
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Description
【発明の詳細な説明】
本発明は容量式電磁流量計用導管(以下導管と
いう)の製造方法に関し、製作の容易化を図つた
ものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a conduit (hereinafter referred to as a conduit) for a capacitive electromagnetic flowmeter, and is intended to facilitate manufacturing.
第1図に一般の導管の縦断面を示す。第2図に
その横断面を示す。両図に示すように、セラミツ
クからなるパイプ状の導管1内には、面状をなす
測定電極2と、この測定電極2の外側に対面して
配置されたガード電極3とが埋設されている。こ
のうち測定電極2は、励磁コイル4による磁束に
直交して導管1内を流通する被測定流体(図示せ
ず)に発生する起電力を容量結合により取り出
す。またガード電極3は測定電極2をシールドし
ている。高透磁率材料からなるケース5は導管1
の外周を囲んで配置されており、前記励磁コイル
4による磁束の帰還磁路としての機能、即ちコア
としての機能もはたしている。なお導管1とケー
ス5との間にはポールピース6が備えられてい
る。 FIG. 1 shows a longitudinal section of a typical conduit. Figure 2 shows its cross section. As shown in both figures, a planar measuring electrode 2 and a guard electrode 3 disposed facing the outside of the measuring electrode 2 are embedded in a pipe-shaped conduit 1 made of ceramic. . Of these, the measurement electrode 2 extracts the electromotive force generated in the fluid to be measured (not shown) flowing in the conduit 1 perpendicularly to the magnetic flux generated by the excitation coil 4 through capacitive coupling. Further, the guard electrode 3 shields the measurement electrode 2. Case 5 made of high magnetic permeability material is conduit 1
It is arranged to surround the outer periphery of the excitation coil 4, and also functions as a return magnetic path for the magnetic flux generated by the excitation coil 4, that is, it also functions as a core. Note that a pole piece 6 is provided between the conduit 1 and the case 5.
ここで上述した導管1の従来技術に係る製造方
法を第3図に基づき説明する。第3図に示すよう
に、まずメタライズ加工により表面にシールド7
(図中斜線で示す部分)が施された未焼成のセラ
ミツク導管1に窓8を形成する。次に湾曲した矩
形の未焼成のセラミツク片9,9a,9bを順次
窓8に嵌め込んで積層していく。なお積層作業前
にメタライズ加工により、セラミツク片9,9
a,9bの外周面に夫々測定電極2、ガード電極
3及びシールド7を形成しておき、その後全体を
焼成していた。 A method of manufacturing the above-mentioned conduit 1 according to the prior art will now be explained with reference to FIG. As shown in Figure 3, first the shield 7 is applied to the surface by metallization processing.
A window 8 is formed in the unfired ceramic conduit 1 which has been subjected to the process (the shaded area in the figure). Next, curved rectangular unfired ceramic pieces 9, 9a, 9b are successively fitted into the window 8 and laminated. In addition, the ceramic pieces 9, 9 were made by metallization before the lamination work.
A measurement electrode 2, a guard electrode 3, and a shield 7 were formed on the outer peripheral surfaces of the electrodes a and 9b, respectively, and then the whole was fired.
しかしながらこのような従来技術においては次
のような欠点があつた。 However, such conventional technology has the following drawbacks.
(1) 窓8を形成するという窓抜き加工が非常に難
しい。(1) The window punching process to form the window 8 is extremely difficult.
(2) セラミツク片9,9a,9b自体の加工は成
形加工を用いずしては困難でありコスト高にな
る。(2) Processing the ceramic pieces 9, 9a, 9b themselves is difficult and costly without using molding.
また他の従来技術に係る製造方法として第4図
に示すものがある。第4図においてはまず未焼成
のセラミツクからなる第1のパイプ10、第2の
パイプ10a及び第3のパイプ10bを形成す
る。このときパイプ10aはパイプ10の外周に
緊密に嵌入し得るとともにパイプ10bはパイプ
10aの外周に緊密に嵌入し得る大きさとしてお
く。次にメタライズ加工によりパイプ10の外周
面に測定電極2を形成する。パイプ10の傾斜面
にはシールド7aを施しておく。その後メタライ
ズ加工により外周面にガード電極3が形成された
パイプ10aを同心状にパイプ10の外周に嵌入
する。更に外周面及び傾斜面にシールド7bが施
されたパイプ10bを、同心状にパイプ10aの
外側に嵌入する。しかる後全体を一体に焼成して
導管を製造していた。 Further, there is a method shown in FIG. 4 as another conventional manufacturing method. In FIG. 4, first, a first pipe 10, a second pipe 10a, and a third pipe 10b made of unfired ceramic are formed. At this time, the size of the pipe 10a is such that it can fit tightly into the outer periphery of the pipe 10, and the pipe 10b is sized so that it can fit tightly into the outer periphery of the pipe 10a. Next, the measurement electrode 2 is formed on the outer peripheral surface of the pipe 10 by metallization. A shield 7a is provided on the inclined surface of the pipe 10. Thereafter, the pipe 10a having the guard electrode 3 formed on its outer circumferential surface by metallization is fitted concentrically to the outer circumference of the pipe 10. Furthermore, a pipe 10b having a shield 7b applied to its outer peripheral surface and an inclined surface is fitted concentrically to the outside of the pipe 10a. After that, the whole was fired as one piece to produce a conduit.
しかしながらこのような従来技術においては次
のような欠点があつた。 However, such conventional technology has the following drawbacks.
(1) レベル10,10a,10bを緊密に仕上げ
ることが難しい。(コスト高になる)
(2) パイプ嵌入面(第4図における左端)では3
層の境界が露出してしまい、焼成時各層収縮率
の相違により、境界に空隙ができ、この空隙か
ら水分、ゴミ等が侵入し精度誤差発生の原因と
なる。(1) It is difficult to complete levels 10, 10a, and 10b closely. (It will increase the cost) (2) 3 on the pipe insertion surface (left end in Figure 4)
The boundaries between the layers are exposed, and voids are formed at the boundaries due to differences in shrinkage rates of each layer during firing, and moisture, dust, etc. enter through these voids, causing accuracy errors.
(3) 焼成時各層収縮率の相違により焼成時の残留
応力が残り早期破損の原因となる。(3) Due to the difference in shrinkage rate of each layer during firing, residual stress remains during firing and causes early failure.
本発明は、上述の如き欠点のない導管の製造方
法に関し、その目的は製造が容易で、端面が露出
せず、しかも焼成時の残留応力が残らない導管を
提供することにある。 The present invention relates to a method for manufacturing a conduit without the above-mentioned drawbacks, and its purpose is to provide a conduit that is easy to manufacture, has no exposed end face, and does not retain residual stress during firing.
このような目的を達成する本発明の構成は、未
焼成のセラミツクパイプと、このパイプに巻回し
た第1の未焼成セラミツクシート(以下グリーン
シートという)と、この第1のグリーンシートの
外周に第2のグリーンシートを巻回し、その後全
体を焼成することを特徴とする。 The structure of the present invention that achieves such an object includes an unfired ceramic pipe, a first unfired ceramic sheet (hereinafter referred to as a green sheet) wound around the pipe, and an outer periphery of the first green sheet. The method is characterized in that the second green sheet is wound and then the whole is fired.
以下本発明の実施例を第5図乃至第8図を参照
して説明する。第5図は導管の縦断面を示し、第
6図はその横断面を示す。図において20は未焼
成のセラミツクパイプ(以下パイプという)で両
端部にフランジ21,21′を有し中間部に段部
22を有している。このパイプ20の段部22に
は円周上対称となる位置に測定電極23,23′
がメタライズされている。24はパイプ20の段
部22に巻回した第1のグリーンシートで外側の
面にはガード電極25,25′がメタライズされ
ている。26は第1のグリーンシート24の外周
に巻回した第2のグリーンシートである。27は
シールドでフランジ21,21′の斜面および第
2のグリーンシート26の外周面にメタライズさ
れ、コイル4やその他の電気部品からの電気的ノ
イズをシールドしている。なおフランジ21,2
1′の両端面にはアース電極28,28′がメタラ
イズされている。第7図は第1のグリーンシート
24の展開図を示し、パイプ20の段部22に巻
回したときに対称となる位置にガード電極25,
25′がメタライズされている。29,29′は測
定電極23,23′のリード線引出し孔である。
第8図は第2のグリーンシート26の展開図を示
し、第1のグリーンシート24の外周に巻回した
ときに対称となる位置にガード電極25,25′
のリード線引出し孔30,30′が設けられ、一
方の面にはシールド27がメタライズされてい
る。 Embodiments of the present invention will be described below with reference to FIGS. 5 to 8. FIG. 5 shows a longitudinal section of the conduit, and FIG. 6 shows its cross section. In the figure, 20 is an unfired ceramic pipe (hereinafter referred to as pipe) having flanges 21, 21' at both ends and a stepped portion 22 in the middle. Measurement electrodes 23, 23' are placed at symmetrical positions on the circumference of the stepped portion 22 of the pipe 20.
is metalized. A first green sheet 24 is wound around the stepped portion 22 of the pipe 20, and guard electrodes 25, 25' are metallized on the outer surface. 26 is a second green sheet wound around the outer periphery of the first green sheet 24. A shield 27 is metallized on the slopes of the flanges 21, 21' and on the outer peripheral surface of the second green sheet 26 to shield electrical noise from the coil 4 and other electrical parts. In addition, flanges 21, 2
Ground electrodes 28, 28' are metallized on both end faces of 1'. FIG. 7 shows a developed view of the first green sheet 24, with guard electrodes 25 and
25' is metallized. Reference numerals 29 and 29' are lead wire extraction holes for the measurement electrodes 23 and 23'.
FIG. 8 shows a developed view of the second green sheet 26, in which guard electrodes 25, 25' are placed at symmetrical positions when wound around the outer periphery of the first green sheet 24.
Lead wire extraction holes 30, 30' are provided, and a shield 27 is metallized on one surface.
上述の如く成形した後全体を焼成して導管を製
造する。 After shaping as described above, the entire body is fired to produce a conduit.
なお上述の実施例では測定電極23,23′を
メタライズする位置はパイプ20の外周面とし、
ガード電極25,25′の位置は第1のグリーン
シート24の外周面としたが、第1のグリーンシ
ート24の内周面に測定電極23,23′を、そ
の外周面にガード電極25,25′をメタライズ
してもよい。第9図は測定電極23、ガード電極
25をスルーホール状にメタライズした状態を示
すもので、第10図は第9図におけるZ視図であ
る。このように各電極をスルーホール状にメタラ
イズすれば上方からみて露出している部分にリー
ド線を溶接することができるので都合がよい。 In the above embodiment, the measurement electrodes 23, 23' are metalized at the outer peripheral surface of the pipe 20,
The guard electrodes 25, 25' were located on the outer peripheral surface of the first green sheet 24, but the measurement electrodes 23, 23' were placed on the inner peripheral surface of the first green sheet 24, and the guard electrodes 25, 25 were placed on the outer peripheral surface of the first green sheet 24. ′ may be metalized. FIG. 9 shows a state in which the measurement electrode 23 and the guard electrode 25 are metalized in the form of through holes, and FIG. 10 is a Z view in FIG. 9. It is convenient to metalize each electrode in the form of a through-hole in this way, since the lead wire can be welded to the exposed portion when viewed from above.
以上実施例と共に具体的に説明したように本発
明によれば両端にフランジを有する未焼成セラミ
ツクパイプの外周面に第1のグリーンシートを巻
回し、この第1のグリーンシートの外周面に第2
のグリーンシートを巻回し、これらの間に測定電
極、ガード電極をメタライズしその後一体として
焼成したので、製造が容易で、端面が露出せず、
残留応力が残らない導管が製造でき、その工業上
の効果は大である。 As specifically explained above in conjunction with the embodiments, according to the present invention, a first green sheet is wound around the outer peripheral surface of an unfired ceramic pipe having flanges at both ends, and a second green sheet is wound around the outer peripheral surface of the first green sheet.
The green sheet is rolled up, the measurement electrode and the guard electrode are metalized between them, and then they are fired as a single piece, so manufacturing is easy and the end surface is not exposed.
A conduit with no residual stress can be manufactured, which has great industrial effects.
なお測定電極、ガード電極はメタライズに限ら
ず、ペースト状の導電性材料を塗布してもよい。 Note that the measurement electrode and the guard electrode are not limited to metallization, and may be coated with a paste-like conductive material.
第1図及び第2図は容量式電磁流量計の説明図
で、第1図は縦断面図、第2図は横断面図、第3
図は従来の製造方法を説明するための斜視図、第
4図は他の従来の製造方法を説明するための断面
図、第5図乃至第10図は本発明の実施例に係る
製造方法を説明するための図で、第5図は縦断面
図、第6図は横断面図、第7図は第1の未焼成セ
ラミツクシートの展開図、第8図は第2の未焼成
セラミツクシートの展開図、第9図、第10図は
測定電極、ガード電極をスルーホール状にメタラ
イズした場合の説明図である。
20……未焼成セラミツクパイプ、21,2
1′……フランジ、23,23′……測定電極、2
4……第1の未焼成セラミツクシート、25,2
5′……ガード電極、26……第2の未焼成セラ
ミツクシート。
Figures 1 and 2 are explanatory diagrams of a capacitive electromagnetic flowmeter, where Figure 1 is a longitudinal cross-sectional view, Figure 2 is a cross-sectional view, and Figure 3 is a cross-sectional view.
The figure is a perspective view for explaining a conventional manufacturing method, FIG. 4 is a sectional view for explaining another conventional manufacturing method, and FIGS. 5 to 10 are for explaining a manufacturing method according to an embodiment of the present invention. These diagrams are for explanation purposes. FIG. 5 is a longitudinal cross-sectional view, FIG. 6 is a cross-sectional view, FIG. 7 is a developed view of the first unfired ceramic sheet, and FIG. 8 is a developed view of the second unfired ceramic sheet. The developed views, FIGS. 9 and 10, are explanatory diagrams in which the measurement electrode and the guard electrode are metalized in the form of through holes. 20...Unfired ceramic pipe, 21,2
1'...flange, 23, 23'...measuring electrode, 2
4...first unfired ceramic sheet, 25,2
5'... Guard electrode, 26... Second unfired ceramic sheet.
Claims (1)
パイプの外周面に未焼成の第1のセラミツクシー
トを巻回し、次に前記第1の未焼成セラミツクシ
ートの外周面に第2の未焼成セラミツクシートを
巻回し、前記セラミツクパイプの外周面又は前記
第1のセラミツクシートの内周面に測定電極を、
前記第1のセラミツクシートの外周面又は前記第
2のセラミツクシートの内周面にガード電極を設
け、次に全体を一体として焼成したことを特徴と
する容量式電磁流量計用導管の製造方法。1. Wrapping a first unfired ceramic sheet around the outer peripheral surface of an unfired ceramic pipe having flanges at both ends, and then wrapping a second unfired ceramic sheet around the outer peripheral surface of the first unfired ceramic sheet. and place a measurement electrode on the outer peripheral surface of the ceramic pipe or the inner peripheral surface of the first ceramic sheet.
A method of manufacturing a conduit for a capacitive electromagnetic flowmeter, characterized in that a guard electrode is provided on the outer peripheral surface of the first ceramic sheet or the inner peripheral surface of the second ceramic sheet, and then the whole is fired as one piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9740283A JPH0229170B2 (en) | 1983-06-01 | 1983-06-01 | YORYOSHIKIDENJIRYURYOKEIYODOKANNOSEIZOHOHO |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9740283A JPH0229170B2 (en) | 1983-06-01 | 1983-06-01 | YORYOSHIKIDENJIRYURYOKEIYODOKANNOSEIZOHOHO |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59222719A JPS59222719A (en) | 1984-12-14 |
| JPH0229170B2 true JPH0229170B2 (en) | 1990-06-28 |
Family
ID=14191513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9740283A Expired - Lifetime JPH0229170B2 (en) | 1983-06-01 | 1983-06-01 | YORYOSHIKIDENJIRYURYOKEIYODOKANNOSEIZOHOHO |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229170B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5289725A (en) * | 1991-07-31 | 1994-03-01 | The Foxboro Company | Monolithic flow tube with improved dielectric properties for use with a magnetic flowmeter |
-
1983
- 1983-06-01 JP JP9740283A patent/JPH0229170B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59222719A (en) | 1984-12-14 |
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