JPH023095B2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] This invention is applicable to rooms that require high cleanliness at a constant temperature and humidity, such as clean rooms for manufacturing semiconductor devices.
The present invention relates to an air conditioner that supplies required clean air.

[Prior art]

BACKGROUND ART Conventionally, as this type of air conditioner, there has been one shown in a block diagram in FIG. 1 is a metal mesh that removes relatively large foreign objects; 2 is a first coarse grain filter;
3 is a first eliminator; 4 is a blower that sucks outside air A from the metal mesh 1 side and sends it to the rear stage of the device; 5 and 6 are made of the same material and have the same performance as the second coarse filter 2 and the first eliminator 3; , remove the foreign object again. 7 is a heater for heating the air taken in; 8 is a first medium-performance filter, followed by a second medium-performance filter 9, which sequentially removes small foreign matter. 10
1 is a humidifier that humidifies or dehumidifies the ventilated air and adjusts it to an appropriate humidity; 11 is an air conditioner that cools or heats the air and adjusts it to an appropriate temperature; 12 is an air supply duct; and 13 is from this air supply duct 12. This is a high performance (HEPA) filter that removes minute foreign matter from the conditioned air and sends it into the room 16 as highly clean air. 14 is a drain provided at the bottom of the metal mesh 1 for draining water such as water droplets, and C indicates the drain. 15 is an exhaust pipe for exhausting excess air from the middle of the air supply duct 12.

The operation of the conventional device described above is as follows. The outside air sucked in by the blower 4 is first removed by the metal mesh 1 mainly of large water droplets and insects.
This mesh 1 is made of metal netting of No. 60 to No. 100. Subsequently, relatively large dust that could not be removed by the mesh 1 is removed by the first coarse filter 2, thereby preventing clogging of the subsequent filter. The first eliminator 3 is a device for removing large mist particles.
Removes 60-70% of mist, water droplets, and fine particles with a diameter of m or larger.

Next, the air pushed out by the blower 4 is
The second coarse particle filter 5 and the second eliminator 6 remove the relatively large-diameter particles that have not been removed so far.

Next, the heater 7 converts deliquescent particles such as sea salt particles into mist and water droplet-like particles again, and medium-performance filters 8 and 9 pass through the mist and recycle the collected dust. To prevent scattering, the circulating air is heated to an appropriate temperature to remove relative humidity, and the humidity is controlled to below the deliquescent humidity of the target ionic substance. This configuration is effective in removing mist and water droplets that enter when the external environment changes, especially when it rains during strong winds. Since most of the mist and water droplets are removed in the preceding stage, the negative effects of the middle-stage first medium-performance filter 8 and second medium-performance filter 9 are greatly reduced, and furthermore, the performance of the filters is effectively exhibited.

This first medium performance filter 8 removes 50 to 80% or more of the dust with a particle size of 0.3 μm or more, and the second medium performance filter 9 removes about 70 to 90% of the dust with a particle size of 0.3 μm or more.
Remove the above. Next, the humidity is adjusted to a constant level using a humidifier 10, the temperature is controlled to a constant level using an air conditioner 11, and this air is sent to each of the high-performance filters 13 at the subsequent stage via a ventilation duct 12. This filter 13 removes 99.97% or more of dust with a particle size of 0.1 μm or more, and sends highly clean air into the chamber 16.

In the above-mentioned conventional device, when the amount of dust mixed into the outside air increases, the removal efficiency of the middle-stage second medium-performance filter 9 is 70 to 90% or more, which is insufficient.
It had poor water repellency and was prone to redispersing collected dust.

[Summary of the invention]

This invention was made in order to eliminate the drawbacks of the above-mentioned conventional devices, and a high-performance filter with good water repellency and low pressure drop is provided as the next stage of the middle-stage filter to improve the dust collection efficiency. increase,
The purpose is to provide an air conditioner that eliminates re-entrainment.

[Embodiments of the invention]

FIG. 2 is a block diagram of an air conditioner according to an embodiment of the present invention, and numerals 1 to 8 and 10 to 16 are the same as the conventional devices described above. Reference numeral 20 denotes a high water repellent, low pressure drop, high performance (HEPA) filter, which is provided as a middle filter group at the next stage of the medium performance filter 8.

The operation of the apparatus of the above embodiment is as follows. The outside air sucked in by the blower 4 passes through the mesh 1, the first coarse filter 2, and the first eliminator 3 of the front filter group, and 60 to 70% of mist, water droplets, and fine particles are removed, as in the conventional device. Ru. Subsequently, the air pushed out by the blower 4 is passed through the second coarse filter 5 and the second coarse filter 5 of the previous stage filter.
With the eliminator 6, similar to the above conventional device,
Large diameter particles that have not been removed so far are removed again. Next, the air is heated to an appropriate temperature by the heater 7 to remove the relative humidity, as in the conventional case. From the air treated in this way, 50 to 80% or more of dust with a particle size of 0.3 μm or more is removed by the middle-performance filter 8 of the middle stage filter, as in the conventional filter.

The next-stage low pressure drop high-performance filter 20 has stronger water repellency than conventional high-performance filters, and has a 0.3μ
Removes 99.97% or more of garbage that is larger than m. The air from which fine dust has been removed in this way is adjusted to a constant humidity by a humidifier 10, as in the conventional device, controlled to a constant temperature by an air conditioner 11, and then passed through a blower duct 12.
and passes through a high-performance filter 13 at the subsequent stage. Here, more than 99.97% of the dust with a particle size of 0.1 or more is removed and sent into the chamber 16.

In the above embodiment, the pre-stage filter group is configured in the order of the mesh 1, the first coarse filter 2, the first eliminator 3, the blower 4, the second coarse filter 5, and the second eliminator 6, but the heater 7 The configuration may be changed and the types of filters may be changed or increased or decreased in accordance with the outside air environment, taking into consideration the heating capacity of the filter and the burden on the middle-stage medium-performance filter 8 and low-pressure-loss high-performance filter 20.

Further, in the above embodiment, the drain 14 is provided only in the metal mesh 1, but it may also be provided in each subsequent filter section.

〔Effect of the invention〕

As described above, according to the present invention, a high-performance filter with good water repellency and low pressure loss is provided as the next stage of the medium-performance filter in the middle-stage filter, so that the dust collection efficiency in the middle stage is increased. It eliminates re-scattering and can stably supply properly balanced, highly clean air even if the outside air conditions are unfavorable.

[Brief explanation of drawings]

FIG. 1 is a block diagram showing a conventional air conditioner, and FIG. 2 is a block diagram showing an air conditioner according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Metal mesh, 2...First coarse filter, 3...First eliminator, 4...Blower, 5
... Second coarse filter, 6 ... Second eliminator, 7 ... Heater, 8 ... Medium performance filter, 10
... Humidity conditioner, 11 ... Air conditioner, 12 ... Air duct, 13 ... High performance filter, 20 ... Low pressure loss high performance filter. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

[Claims] 1. Outside air is sucked in by a blower and passed sequentially through the filter group in the front stage to remove foreign matter from large to small in the outside air. This air is heated to an appropriate temperature by a heater to remove relative humidity, and then passed through the filter group in the middle stage. Fine particles of foreign matter are removed, and the humidity of this air is controlled using a humidifier.
In a device that sends clean air into the room after bringing it to an appropriate temperature using an air conditioner or heater and passing it through a high-performance filter in the latter stage to remove ultrafine foreign matter, the middle filter group described above is a medium-performance filter and the next stage to this filter. An air conditioner characterized by comprising a water-repellent, low-pressure-loss, high-performance filter.