JPH0231032B2 - - Google Patents
Info
- Publication number
- JPH0231032B2 JPH0231032B2 JP60256753A JP25675385A JPH0231032B2 JP H0231032 B2 JPH0231032 B2 JP H0231032B2 JP 60256753 A JP60256753 A JP 60256753A JP 25675385 A JP25675385 A JP 25675385A JP H0231032 B2 JPH0231032 B2 JP H0231032B2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- molded body
- cylindrical
- material molded
- graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002994 raw material Substances 0.000 claims description 36
- 239000000919 ceramic Substances 0.000 claims description 32
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 28
- 229910002804 graphite Inorganic materials 0.000 claims description 28
- 239000010439 graphite Substances 0.000 claims description 28
- 238000005245 sintering Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 10
- 230000004323 axial length Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 3
- 230000008602 contraction Effects 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 7
- 229910010271 silicon carbide Inorganic materials 0.000 description 6
- 239000008187 granular material Substances 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000012752 auxiliary agent Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Furnace Charging Or Discharging (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、円筒状セラミツクス原料成形体の焼
結方法に関し、とくに真円度の良好な高密度円筒
状セラミツクス焼結体を安定に、容易に得るため
の焼結方法に関する。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a method for sintering a cylindrical ceramic raw material molded body, and in particular, a method for stably and easily producing a high-density cylindrical ceramic sintered body with good roundness. This invention relates to a sintering method for obtaining.
近年セラミツクスのすぐれた特性に着目され、
各種の分野にセラミツクス部品が使用されてい
る。 In recent years, attention has been paid to the excellent properties of ceramics,
Ceramic parts are used in various fields.
たとえば炭化ケイ素焼結体を利用した軸受やボ
ールミル等の実用化がさかんに行なわれており、
これらについては寸法精度、とくに真円度が良好
であることが要求されている。 For example, bearings and ball mills using silicon carbide sintered bodies are being put into practical use.
These materials are required to have good dimensional accuracy, especially good roundness.
（従来の技術）
従来は、原料の焼結により直ちに真円度の良好
なセラミツクスをうることは困難であつたため、
通常、焼結后研削加工等の機械的な手段を用いて
真円度の良好なセラミツクス製品、たとえばセラ
ミツクス製の軸受や、ボールミルのライナー等を
製造していた。(Prior art) In the past, it was difficult to immediately obtain ceramics with good roundness by sintering raw materials.
Usually, mechanical means such as grinding after sintering are used to manufacture ceramic products with good roundness, such as ceramic bearings and liners for ball mills.
これらの方法は研削加工しろを大きくとる必要
があるため加工費が高く、量産性にかけ、又とく
に炭化ケイ素焼結体の場合は硬度が大で、ダイヤ
モンド砥石を用いても容易に研削することはでき
ず、製造に長時間を要した。 These methods require a large amount of grinding allowance, resulting in high processing costs and poor mass production.In addition, the hardness of silicon carbide sintered bodies is particularly high and it is difficult to grind them easily even with a diamond grindstone. This was not possible and production took a long time.
（発明が解決しようとする問題点）
本発明者らはセラミツクス原料成形体を焼成し
た際に、焼結品の寸法精度、とくに真円度が不良
となる原因について検討した結果、焼結に際して
の加熱が不均一であることに一つの原因があるも
のと判断し、種々検討の結果、本発明を完成し
た。(Problems to be Solved by the Invention) The present inventors have investigated the causes of poor dimensional accuracy, particularly roundness, of sintered products when ceramic raw material molded bodies are fired. It was determined that one of the causes was the non-uniform heating, and as a result of various studies, the present invention was completed.
（問題を解決するための手段）
即ち本発明は円筒状セラミツクス原料成形体を
焼結するにあたり、前記円筒状セラミツクス原料
成形体を黒鉛板上におき、該成形体の中空部に、
原料成形体の焼結収縮時の内径よりも径が小で、
かつ軸方向長さが原料成形体の軸方向長さに等し
いか、それより長い黒鉛よりなる円柱体もしくは
円筒体を、その上端が、原料成形体の上端に等し
いかそれより上にあるように配置し、該円柱体も
しくは円筒体の上端面に径が前記原料成形体の外
径より大である黒鉛板を積載して焼結することを
特徴とする円筒状セラミツクスの原料成形体の焼
結方法に関する。(Means for solving the problem) That is, in the present invention, when sintering a cylindrical ceramic raw material molded body, the cylindrical ceramic raw material molded body is placed on a graphite plate, and in the hollow part of the molded body,
The diameter is smaller than the inner diameter of the raw material compact during sintering shrinkage,
and a cylinder or a cylindrical body made of graphite whose axial length is equal to or longer than the axial length of the raw material molded body, such that its upper end is equal to or above the upper end of the raw material molded body. sintering of a cylindrical ceramic raw material molded body, characterized in that a graphite plate having a diameter larger than the outer diameter of the raw material molded body is placed on the cylindrical body or the upper end surface of the cylindrical body and sintered. Regarding the method.
まず本発明を完成した経緯を説明する。即ち本
発明者らは前述の如くセラミツクス製品の真円度
が不良となる一つの原因として加熱が不均一であ
ることにあると判断し円筒状セラミツクス原料成
形体の上部及び下部開放端に、黒鉛板を配設して
焼結を試みた。然しこの場合は、上部黒鉛板のた
め、原料成形体の変形が生起し易く、充分には目
的を達することはできなかつた。本発明者は前記
方法の欠点を排除すべく研究の結果本発明に到達
したのである。 First, we will explain how the present invention was completed. That is, the present inventors determined that one of the causes of poor roundness of ceramic products is due to non-uniform heating, as described above, and so we added graphite to the upper and lower open ends of the cylindrical ceramic raw material molded body. Sintering was attempted by arranging plates. However, in this case, because of the upper graphite plate, deformation of the raw material molded body was likely to occur, and the purpose could not be fully achieved. The present inventor has arrived at the present invention as a result of research to eliminate the drawbacks of the above method.
次に本発明について炭化ケイ素を例として更に
詳述する。 Next, the present invention will be explained in more detail using silicon carbide as an example.
まずセラミツクス原料である炭化ケイ素に、結
合剤、分散剤、消泡剤および助剤を所定量加え、
更に水を所定量加えたる後ボールミル等によりそ
れらを充分に混合してスラリーをつくる。次にス
ラリーをスプレードライヤー等により処理して顆
粒化したる後、顆粒をラバープレス型等にて加圧
して円筒状の成形体を製作する。最后に成形体を
機械加工して真円度の高い円筒状のセラミツクス
原料成形体をうる。 First, a predetermined amount of binder, dispersant, antifoaming agent, and auxiliary agents are added to silicon carbide, which is the raw material for ceramics.
Further, after adding a predetermined amount of water, they are thoroughly mixed using a ball mill or the like to form a slurry. Next, the slurry is treated with a spray dryer or the like to form granules, and then the granules are pressed with a rubber press mold or the like to produce a cylindrical molded body. Finally, the molded body is machined to obtain a cylindrical ceramic raw material molded body with high roundness.
このようにして得られた円筒形セラミツクス原
料成形体に本発明を適用する。 The present invention is applied to the cylindrical ceramic raw material molded body thus obtained.
本発明を図面にもとづいて説明する。１は前述
の最終的に得られた真円度の高い円筒状の原料成
形体であり、内部に中空部２を有する。次に中空
部２に、成形体１の焼結収縮時の内径よりも径が
小で、かつ軸方向長さが原料成形体１の軸方向長
さに等しいかそれより長い黒鉛よりなる円柱体３
を、円柱体の上縁が原料成形体の上縁に等しい
か、それより上にあるように配置する。なお図に
おいて円筒状原料成形体１と、円柱体３とは黒鉛
円板４上に配設してある。そして円柱体３の上端
面には径が成形体３の外径より大である黒鉛製円
板が積載されている。このように配設された円筒
状セラミツクス原料成形体を焼結することによ
り、真円度の良好な高密度円筒状セラミツクスを
うることができる。 The present invention will be explained based on the drawings. Reference numeral 1 denotes the above-mentioned finally obtained cylindrical raw material molded body having a high roundness, and has a hollow portion 2 inside. Next, a cylindrical body made of graphite having a diameter smaller than the inner diameter of the molded body 1 at the time of sintering contraction and an axial length equal to or longer than the axial length of the raw material molded body 1 is placed in the hollow part 2. 3
are arranged so that the upper edge of the cylindrical body is equal to or higher than the upper edge of the raw material molded body. In the figure, the cylindrical raw material molded body 1 and the cylindrical body 3 are arranged on a graphite disk 4. A graphite disk whose diameter is larger than the outer diameter of the molded body 3 is loaded on the upper end surface of the cylindrical body 3. By sintering the cylindrical ceramic raw material molded body arranged in this manner, a high-density cylindrical ceramic with good roundness can be obtained.
本発明の適用できるセラミツクス原料としては
炭化ケイ素、アルミナ、窒化ケイ素、窒化アルミ
等、通常用いられている範囲のものがすべて適用
できる。 As ceramic raw materials to which the present invention can be applied, all commonly used materials such as silicon carbide, alumina, silicon nitride, and aluminum nitride can be used.
さらに円筒状セラミツクス原料成形体の中空部
に配設される黒鉛筒体の径は、焼結后において、
円筒状セラミツクスの内壁と接触しない範囲で、
かつ原料成形体の焼結后の内径の少なくとも25％
が必要である。 Furthermore, after sintering, the diameter of the graphite cylinder disposed in the hollow part of the cylindrical ceramic raw material molded body is
As long as it does not come into contact with the inner wall of the cylindrical ceramic,
and at least 25% of the inner diameter after sintering of the raw material compact
is necessary.
又、黒鉛筒体は少なくともその軸方向長さの50
％が円筒状セラミツクス原料成形体で覆われるこ
とが必要である。 In addition, the graphite cylinder has at least 50 mm of its axial length.
% is required to be covered with the cylindrical ceramic raw material molded body.
（発明の効果）
円筒状セラミツクス原料成形体の本発明の方法
による焼結によつて得られた円筒状セラミツクス
は真円度が極めて高く、面粗度等の指示のない場
合、通常何らの機械加工を必要としない。しかも
手段が簡単であるため簡便に迅速にしかも大量
に、円筒状セラミツクスを製造することができ
る。(Effects of the invention) The cylindrical ceramics obtained by sintering the cylindrical ceramic raw material molded body by the method of the present invention have extremely high roundness, and if there is no indication of surface roughness etc., it is usually difficult to use any machine. No processing required. Moreover, since the means are simple, cylindrical ceramics can be manufactured easily, quickly, and in large quantities.
そして上述のような効果を奏するのにすでにの
べたように、黒鉛製円柱体もしくは円筒体が配置
されているためであり、このものは黒体であるの
で副射熱が大であり、熱の分布が均一化され、更
に又、円筒状セラミツクス原料成形体の変形は、
前記黒鉛製円柱体もしくは円筒体の接触によつて
防止されるためである。 As mentioned above, the above effect is achieved because the graphite cylinder or cylindrical body is arranged, and since this is a black body, there is a large amount of side radiation heat, and the heat is absorbed. The distribution is made uniform, and the deformation of the cylindrical ceramic raw material molded body is
This is because it is prevented by the graphite cylinder or the contact between the cylinders.
（実施例）
平均粒度0.5μｍ、純度97％の炭化ケイ素粉末
100重量部に、結合剤としてポリビニルアルコー
ル0.5〜３重量部、助剤としてボロン、フエノー
ルを合計で２〜10重量部加え、最后に水を添加し
て30重量％濃度に調整し、ボールミルを用いて15
〜24時間混合してスラリーを作つた。このスラリ
ーをスプレードライヤーで処理して平均粒径70μ
ｍの顆粒を得、この顆粒を湿式ラバープレスによ
り1000Kg／cm2の圧力で円筒状の炭化ケイ素原料成
形体を作り、最後に旋盤で加工して、外径240mm、
内径215mm、長さ240mmの円筒体とした。(Example) Silicon carbide powder with average particle size of 0.5 μm and purity of 97%
To 100 parts by weight, add 0.5 to 3 parts by weight of polyvinyl alcohol as a binder, and 2 to 10 parts by weight as auxiliary agents, boron and phenol, and finally add water to adjust the concentration to 30% by weight, using a ball mill. te15
A slurry was made by mixing for ~24 hours. This slurry was treated with a spray dryer and the average particle size was 70μ.
m granules were obtained, and these granules were pressed into a cylindrical silicon carbide raw material molded body using a wet rubber press at a pressure of 1000 kg/cm 2 , and finally processed using a lathe to form an outer diameter of 240 mm.
It was a cylindrical body with an inner diameter of 215 mm and a length of 240 mm.
この円筒体及び黒鉛柱体、黒鉛板を図面に示す
ように焼結炉内に配設した。 This cylindrical body, graphite column, and graphite plate were placed in a sintering furnace as shown in the drawing.
即ち外径250mm、厚さ10mmの黒鉛円板４の上に、
前記円筒体１と外径245mm、軸方向長さ245mmの黒
鉛円柱３とを、黒鉛円柱３が円筒体１の中空部２
の中心にあるようにしてのせ、さらに円柱３の上
に外径250mm、厚さ10mmの黒鉛円板５をのせた。 That is, on a graphite disk 4 with an outer diameter of 250 mm and a thickness of 10 mm,
The cylindrical body 1 and the graphite cylinder 3 having an outer diameter of 245 mm and an axial length of 245 mm are connected to each other, and the graphite cylinder 3 is connected to the hollow part 2 of the cylindrical body 1.
Further, a graphite disk 5 having an outer diameter of 250 mm and a thickness of 10 mm was placed on top of the cylinder 3.
このようにした後に炉内を加熱し、アルゴンふ
ん囲気中で100℃／Hrの昇温速度で2130℃まで温
度を高め、ついでその温度に３時間保持した後、
200℃／Hrの降温速度で室温まで冷却させて焼結
を完了した。 After this, the inside of the furnace was heated, and the temperature was increased to 2130°C at a heating rate of 100°C/Hr in an argon atmosphere, and then maintained at that temperature for 3 hours.
Sintering was completed by cooling to room temperature at a cooling rate of 200°C/Hr.
この焼結体即ち円筒状セラミツクスの最大外径
と最小外径との差は0.3mmであつた。 The difference between the maximum outer diameter and the minimum outer diameter of this sintered body, that is, the cylindrical ceramic, was 0.3 mm.
比較例
実施例において、黒鉛円板４に、円筒体１をの
せただけで実施例と同様に処理して円筒体セラミ
ツクスを得た。このものの最大外径と最小外径と
の差は2.5mmであつた。Comparative Example In the example, cylindrical ceramics were obtained by simply placing the cylindrical body 1 on the graphite disk 4 and treating it in the same manner as in the example. The difference between the maximum and minimum outer diameters of this product was 2.5 mm.
実施例と比較例とより、本発明の方法が真円度
の高い円筒状セラミツクスが得られることはあき
らかである。 From the Examples and Comparative Examples, it is clear that the method of the present invention yields cylindrical ceramics with high roundness.
図面は本発明を実施する方法を実施する際の原
料成形体、黒鉛柱体、黒鉛円板の配設状況を示す
図面を示す。
１……円筒状原料成形体、２……成形体１の中
空部、３……黒鉛製円柱体、４……円筒体成形体
１と黒鉛製円柱体３とをのせる黒鉛円板、５……
黒鉛製円柱体の上面にのせられた黒鉛円板。
The drawings show the arrangement of raw material molded bodies, graphite columns, and graphite disks when carrying out the method of carrying out the present invention. DESCRIPTION OF SYMBOLS 1... Cylindrical raw material molded body, 2... Hollow part of molded body 1, 3... Graphite cylindrical body, 4... Graphite disk on which cylindrical molded body 1 and graphite cylindrical body 3 are placed, 5 ……
A graphite disk placed on top of a graphite cylinder.
Claims (1)
あたり、前記円筒状セラミツクス原料成形体を黒
鉛板上におき、該成形体の中空部に、原料成形体
の焼結収縮時の内径よりも径が小で、かつ軸方向
長さが、原料成形体の軸方向長さに等しいか、そ
れより長い黒鉛よりなる円柱体もしくは円筒体
を、その上端が、原料成形体の上端に等しいか、
それより上にあるように配置し、該円柱体もしく
は円筒体の上端面に径が前記原料成形体の外径よ
り大きい黒鉛板を積載して焼結することを特徴と
する円筒状セラミツクス原料成形体の焼結方法。1. When sintering a cylindrical ceramic raw material molded body, the cylindrical ceramic raw material molded body is placed on a graphite plate, and a hollow portion of the molded body is filled with a material having a diameter smaller than the inner diameter of the raw material molded body at the time of sintering contraction. and the axial length is equal to or longer than the axial length of the raw material molded body, and the upper end is equal to the upper end of the raw material molded body,
A cylindrical ceramic raw material molding characterized in that a graphite plate having a diameter larger than the outer diameter of the raw material molded body is placed on the cylindrical body or the upper end surface of the cylindrical body and sintered. Body sintering method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60256753A JPS62119169A (en) | 1985-11-18 | 1985-11-18 | Method of sintering cylindrical ceramic raw material formed body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60256753A JPS62119169A (en) | 1985-11-18 | 1985-11-18 | Method of sintering cylindrical ceramic raw material formed body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62119169A JPS62119169A (en) | 1987-05-30 |
| JPH0231032B2 true JPH0231032B2 (en) | 1990-07-11 |
Family
ID=17296965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60256753A Granted JPS62119169A (en) | 1985-11-18 | 1985-11-18 | Method of sintering cylindrical ceramic raw material formed body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62119169A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03137063A (en) * | 1989-10-19 | 1991-06-11 | Showa Denko Kk | Method for sintering ceramics |
| JP6464666B2 (en) * | 2014-10-29 | 2019-02-06 | 住友金属鉱山株式会社 | Cylindrical target material and manufacturing method thereof, and cylindrical sputtering target and manufacturing method thereof |
-
1985
- 1985-11-18 JP JP60256753A patent/JPS62119169A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62119169A (en) | 1987-05-30 |
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