JPH0232202B2 - SERAMITSUKUOMOCHIITAOZONAIZAASOCHI - Google Patents

Description

[Detailed Description of the Invention] "Industrial Application Field" This invention relates to an ozonizer using ceramic, which is composed of several layers of ozonizers, and is used to produce O ₃ by oxidizing O ₂ and by oxidizing NOx and SOx. This relates to denitrification, desulfurization, etc. An ozonizer is one that generates high-frequency corona discharge by installing electrodes on an insulator and applying high-frequency and high voltage, and can be used as a powerful ion source.Ozonizer also generates creeping corona discharge and activates when extreme pulsed high voltage is applied. It has a chemical discharge effect due to the formation of plasma.

``Prior Art'' Conventional ozonizers are generally flat or cylindrical, so in order to create a device with a large capacity, a large flat plate or cylinder is generally required, and if made of ceramic, it would be brittle and easily break. . (Japanese Patent Application No. 57-155617) "Means for Solving the Problem" This invention eliminates this drawback by stacking many layers of plate-shaped ozonizers to provide an ozonizer with a small volume and a large capacity. A linear discharge electrode is provided on one side of a substrate A made of insulating ceramics, a planar induction electrode is provided inside or on the opposite side of the substrate A, and a space having a support is provided on the discharge electrode of the substrate. Then, another substrate B provided with a similar electrode is stacked with the discharge electrode sides facing each other, and an ozonizer that allows the reactive gas to pass only in one direction in the space is used as a basic block, and the basic block is connected to the reactive gas by a support. An ozonizer device using ceramic, characterized in that it is stacked on another basic block or substrate through spaces through which the cooling fluid can pass only in different directions, and the support is preferably corrugated or columnar.

Next, this will be explained with reference to the drawings.

FIG. 1 is an assembled perspective view showing the simplest example of the ozonizer of the present invention, where A is a dense substrate (hereinafter simply referred to as the substrate) made of fine ceramic made of alumina porcelain, silicon nitride porcelain, etc.; It has a linear electrode 1 on the upper surface. The electrode is formed of metallization such as molybdenum or tungsten and nickel plating provided thereon, and has a terminal 1 at the end.
a and a columnar body 1 at the side end that does not have a terminal.
1,11. It also has a flat induction electrode 2 on its lower surface or inside, and a terminal 2a at its end. Reference numeral 3 denotes a corrugated support member which is inserted into the space surrounded by the substrate 1 and the columnar body 11 and serves to support the substrate B installed above it, but this is not limited to the corrugated plate;
A columnar support having the same shape as 11 may be installed in a similar direction. Next, the substrate B installed on the support body
has the same structure as the substrate A, but the columnar bodies 4, 4 at the side ends are oriented in a different direction from the columnar bodies 11, 11 of the substrate A, so that the gas to be oxidized is transferred to the substrate A.
The upper part of the substrate B can pass through, but the upper part of the substrate B cannot pass through. Substrate B has electrodes having the same structure as substrate A, but is installed in the opposite direction to substrate A, with the discharge electrode facing downward and facing the discharge electrode of substrate A. When a high frequency and high voltage is applied between the electrodes 1, 1 and 2, 2, a high frequency discharge is generated, and for example, O ₂ is oxidized to O ₃ and acts as an ozonizer. On the top surface of the next substrate B is an electrode 2.
A support body 6 is provided, and the support body has a waveform as shown in the figure, but the wave direction is set in a direction different from that of the support body 3, preferably at right angles, and a substrate C having no electrode is provided on it. Alternatively, the same substrate as A may be laminated in the same direction as A and this process may be repeated.

In any of the above cases, by installing a support 6 whose axial direction is different from that of the support 3, preferably at right angles, on the substrate B, a cooling fluid such as air or water is provided in this space. By passing through the ozonizer, the heat generated by the ozonizer can be excluded. And the cooling fluid and O ₂ or O ₃ are never mixed.

FIG. 2 shows a front view of the ozonizer. 7 is a high frequency high voltage power supply, and 8 is a ground. Next, another embodiment combining this basic structure will be shown.
FIG. 3 shows a structure in which a corrugated support 6 and a substrate B are provided below the basic block shown in FIG.
Since the reactant gas can also pass between B and C, the capacity is large.

FIG. 4 shows another configuration in which the induction electrode in FIG. 3 is provided inside the substrate.

Naturally, it is within the scope of the present invention to appropriately combine the above structures to form several layers.

"Function" As mentioned above, several layers of ozonizers are stacked, and cooling fluid passages are provided between the ozonizers, and corrugated supports or columnar supports are inserted in the ozonizer and cooling fluid passages at right angles to each other. As a result, it is possible to create an ozonizer with a small size and high capacity, and the oxidizing gas and the cooling fluid can pass through without mixing with each other, and the support improves the strength and compensates for the brittleness of ceramics. It becomes easy to handle.

"Example" A well-known alumina porcelain base with an alumina content of 90% or more is added with a well-known organic binder, and rolled to form a square green sheet with a thickness of 0.5 mm and a side of 100 mm, and one side of this is coated with tungsten paste to form a square green sheet. A square planar electrode 2 with a side of 80 mm and a linear electrode 1 were screen printed on a 50 μm film, dried and baked, and baked at 1600°C in an _H2 atmosphere for 2 hours.
Ni plating was applied to substrates A and B. Next, a corrugated support 3 was made from a sheet of the same material, and a columnar support at the side end was made from the same material into a shape of 3 mm x 3 mm x 100 mm, and fired to form alumina porcelain. These were assembled using silicone resin or glass into the shapes shown in Figures 2 and 3, and when a high frequency high voltage of 10KHz and 3000V was applied as described above through O ₂ and water as a cooling fluid, the O _{2 3} The conversion rate is good, and the ozone concentration on the outlet side is easily 5×10 ⁴ ppm.
~10×10 ⁴ ppm (conversion rate 5% to 10%) was reached, and there was no temperature rise during operation and no abnormality occurred during operation.

Although the above explanation uses a waveform as a support for convenience, the present invention is not limited to this and can naturally also use rod-like bodies, columnar bodies, and a grid-like body 9 as shown in a perspective view in FIG. be. Since this lattice-like object 9 has plate-like portions 10 at both ends, the columnar supports 2 at the side ends are not required, so that manufacturing costs can be reduced. In addition, in this example, each substrate and support were assembled separately using an adhesive after firing.
The present invention is not limited to this, but molds from a raw sheet,
After bonding with a solvent or the like, drying and baking may be performed, which greatly increases heat resistance.

[Brief explanation of drawings]

Figures 1A to 4E are assembled views of partial sheets constituting the basic block of the present invention, Figure 2 is a front view of the basic block, Figures 3 and 4 are front views showing another embodiment, and Figure 5. 1 is a perspective view of a lattice-like object used in place of a corrugated support. A, B, C...Substrate, 1, 2...Electrode, 11...
... Column body, 3, 6... Wave support, 1a, 2a...
...terminal, 7...power supply, 8...earth, 9...grid support.

Claims (1)

[Scope of Claims] 1 A linear discharge electrode is provided on one side of a substrate A made of insulating ceramics, a planar induction electrode is provided inside or on the opposite side of the substrate A, and is supported on the discharge electrode of the substrate. The basic block is an ozonizer that allows the reactive gas to pass only in one direction of the space, by stacking another substrate B with the discharge electrode side facing each other through a space having a similar electrode. An ozonizer device using ceramic, characterized in that the ozonizer is stacked on another basic block or substrate via a support through which a cooling fluid can pass only in a direction different from that of a reactant gas. 2. An ozonizer device using ceramic according to claim 1, wherein the support is corrugated, columnar, lattice-shaped, or a combination thereof.