JPH023264B2 - - Google Patents
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- Publication number
- JPH023264B2 JPH023264B2 JP54075420A JP7542079A JPH023264B2 JP H023264 B2 JPH023264 B2 JP H023264B2 JP 54075420 A JP54075420 A JP 54075420A JP 7542079 A JP7542079 A JP 7542079A JP H023264 B2 JPH023264 B2 JP H023264B2
- Authority
- JP
- Japan
- Prior art keywords
- shaped magnetic
- sector
- fan
- magnetic field
- magnetic pole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/06—Electromagnets; Actuators including electromagnets
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Description
【発明の詳細な説明】
本発明は質量分析計等に用いられる扇形磁場装
置の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to improvements in fan-shaped magnetic field devices used in mass spectrometers and the like.
一般に荷電粒子を運動量によつて分離させるに
は扇形磁極が用いられる。例えば質量分析計では
分析管内を通るイオンをその質量差によつて分離
させるために大形の扇形磁場装置を用いることが
多いが、このタイプをセクタ形質量分析計と呼ん
でいる。 Generally, sector-shaped magnetic poles are used to separate charged particles based on their momentum. For example, mass spectrometers often use a large fan-shaped magnetic field device to separate ions passing through an analysis tube based on their mass differences, and this type is called a sector-type mass spectrometer.
第１図はセクタ形質量分析計のイオンビームと
扇形磁極との関係を説明する図である。イオン源
１で発生したイオンは入射スリツト２を通つて発
散し、このイオンビーム３は、上下に配置した一
対の扇形磁極４間を通過する。このとき扇形磁極
４間の磁力がイオンビーム３の起動を彎曲させる
と共に集束し、イオンの質量によつて集束位置を
異にする質量スペクトルを生ずる。このような位
置Ａにコレクタースリツト５を設置すれば特定の
質量のイオンを選択して取り出すことができ、こ
れをイオン検知器６で検出している。 FIG. 1 is a diagram illustrating the relationship between an ion beam and a fan-shaped magnetic pole of a sector-type mass spectrometer. Ions generated by an ion source 1 are diverged through an entrance slit 2, and this ion beam 3 passes between a pair of sector-shaped magnetic poles 4 arranged above and below. At this time, the magnetic force between the fan-shaped magnetic poles 4 curves and focuses the activation of the ion beam 3, producing a mass spectrum whose focusing position differs depending on the mass of the ions. If the collector slit 5 is installed at such a position A, ions of a specific mass can be selected and extracted, and the ions detected by the ion detector 6.
イオンビーム３の通路は入射スリツト２とコレ
クタースリツト５を両端に固定した弧状の分析管
内とし、この分析管内は高真空状態に排気されて
いる。もし、イオンビーム３の集束位置が破線で
示すようにA′位置となつたときは、扇形磁極４
をＢからB′の位置に移動させてコレクタースリ
ツト５に集束させるようにするのが従来の調整法
であつた。 The ion beam 3 passes through an arc-shaped analysis tube with an entrance slit 2 and a collector slit 5 fixed at both ends, and the inside of this analysis tube is evacuated to a high vacuum state. If the focusing position of the ion beam 3 is at the A' position as shown by the broken line, the fan-shaped magnetic pole 4
The conventional adjustment method was to move the light from position B to position B' so that the light was focused on the collector slit 5.
しかるに扇形磁極４は大重量のヨーク、コイル
等と一体となつており、その総重量は数百Kgにも
達する。したがつて、このような重量物を数μｍ
の精度で微動させて位置を調節するには、大形で
精密な微動機構を必要としていた。また、この微
動機構は調整時だけ使用されるもので分析精度に
は直接関係しない構成部分であるが、これに相当
の経費を費すことは質量分析計のコストを高める
原因ともなつていた。 However, the fan-shaped magnetic pole 4 is integrated with a heavy yoke, coil, etc., and its total weight reaches several hundred kilograms. Therefore, such a heavy object with a thickness of several μm
In order to adjust the position with such precision, a large and precise fine movement mechanism was required. Furthermore, although this fine movement mechanism is a component that is used only during adjustment and is not directly related to analysis accuracy, the considerable expense involved increases the cost of the mass spectrometer.
第２図は従来の質量分析計の扇形磁場装置の垂
直断面図である。Ｎ極である扇形磁極４ａとＳ極
である扇形磁極４ｂはコイル８ａ，８ｂを巻回し
たヨーク７の先端に取り付けられ、これらは１体
となつて微動台９上に設置されている。この扇形
磁場装置を微動させるには微動台９を移動させる
微動機構によつて行われる。一方、分析管１０は
扇形磁極４ａ，４ｂ間の隙間に水平に設置される
が、第１図に示すイオンビーム３を収容するため
に彎曲した扁平管状に形成されている。 FIG. 2 is a vertical cross-sectional view of a conventional mass spectrometer fan-shaped magnetic field device. The fan-shaped magnetic pole 4a, which is the north pole, and the fan-shaped magnetic pole 4b, which is the south pole, are attached to the tip of a yoke 7 around which coils 8a and 8b are wound, and these are installed as one body on a fine movement table 9. Fine movement of this fan-shaped magnetic field device is performed by a fine movement mechanism that moves the fine movement table 9. On the other hand, the analysis tube 10 is installed horizontally in the gap between the fan-shaped magnetic poles 4a and 4b, and is formed into a curved flat tube shape to accommodate the ion beam 3 shown in FIG.
分析管１０は薄肉の金属管をイオンビーム３の
通路に沿つて彎曲させると共に扁平に潰すという
特殊な工作法を用いて製作され、その両端は入口
端板と出口端板とに溶接されている。したがつ
て、特殊な設備を要しコスト高となつている。ま
た、第２図に示すように扁平部を扇形磁極４ａ，
４ｂ間の狭い間隙に挿入設置しているので、その
内側寸法は小となりイオンビーム３の縦寸法は小
さくなつている。例えば10mmの扇形磁極間隔に１
mm厚さの分析管１０を挿入し上下0.5mmの空気層
を介在させたときは、分析管の内側寸法は７mmと
なり、この扇形磁極間隔10mm全体をイオンビーム
３の通路とする場合に比べてイオン透過率は70％
となつている。なお、イオン透過率は入射スリツ
ト２から入つたイオン量とコレクタースリツト５
に到達するイオン量との比を表わすものである。 The analysis tube 10 is manufactured using a special manufacturing method in which a thin metal tube is curved along the path of the ion beam 3 and flattened, and both ends of the tube are welded to an inlet end plate and an outlet end plate. . Therefore, special equipment is required and costs are high. In addition, as shown in FIG.
Since the ion beam 3 is inserted into the narrow gap between the ion beams 4b, its inner dimension becomes small, and the vertical dimension of the ion beam 3 becomes small. For example, 1 for a sector magnetic pole spacing of 10 mm.
When inserting the analysis tube 10 with a thickness of mm and interposing an air layer of 0.5 mm above and below, the inner dimension of the analysis tube becomes 7 mm, compared to the case where the entire 10 mm interval between fan-shaped magnetic poles is used as the path of the ion beam 3. Ion transmission rate is 70%
It is becoming. Note that the ion transmittance is determined by the amount of ions entering from the entrance slit 2 and the collector slit 5.
It represents the ratio of the amount of ions reached.
一般に測定可能な質量範囲Ｍは磁場強度Ｂの自
乗に比例しており、磁場強度Ｂは磁極間隔Ｇに逆
比例する。これを(1)式で示す。 Generally, the measurable mass range M is proportional to the square of the magnetic field strength B, and the magnetic field strength B is inversely proportional to the magnetic pole spacing G. This is shown in equation (1).
Ｍ∝B2∝１／G2 ……(1)
したがつて、扇形磁極間隔を７mmとして分析管
１０を設置せず全面をイオンビーム３の通路とし
て利用できるとすると、イオン透過率を低下させ
ずに磁場強度は1.43倍に増加させることができ、
質量範囲を２倍に向上させることになる。例え
ば、扇形磁極間隔が10mmであるとき1500の質量ま
で測定できたとすると、これを７mm間隔に縮少し
たときは3000までの質量のイオンが測定できるこ
とになる。 M∝B 2 ∝1/G 2 ...(1) Therefore, if the interval between the fan-shaped magnetic poles is 7 mm and the entire surface can be used as a passage for the ion beam 3 without installing the analysis tube 10, the ion transmittance will be reduced. The magnetic field strength can be increased by 1.43 times without
This will double the mass range. For example, if the sector magnetic pole spacing is 10 mm and it is possible to measure up to 1500 masses, when this is reduced to 7 mm spacing, ions with masses up to 3000 can be measured.
即ち、従来のセクタ形質量分析計は大形の微動
装置を必要としたので高価となつており、分析管
を磁極間に介在させていたのでコスト高となると
共に磁場を十分に利用できないという欠点をもつ
ていた。 In other words, conventional sector-type mass spectrometers require a large micro-motion device, which makes them expensive, and the analysis tube is interposed between magnetic poles, which increases costs and has the drawback of not being able to fully utilize the magnetic field. It had a
本発明は高性能で安価な扇形磁場装置を提供す
ることを目的とし、コイルを巻回したヨークの対
向する両端面間に一対の扇形磁極を設置し、該扇
形磁極の側端面に可動磁極片が取り付けてある扇
形磁場装置において、上記扇形磁極の対向面間に
挿入され荷電粒子が通過する空間部を形成し、該
空間部に連通する孔をその側端面に開口させた非
磁性材よりなる分析板と、上記孔に連通する窓を
設け上記側端面に気密に取り付けた非磁性材より
なる端板とを設置し、上記分析板と上記扇形磁極
との間に非磁性材よりなり上記空間部を包囲する
一対の環状パツキングを介在させ、上記可動磁極
片が、上記扇形磁極の側端にスライド可能に接合
した磁性材よりなる三角形板よりなつていること
を特徴とするものである。 An object of the present invention is to provide a high-performance and inexpensive sector-shaped magnetic field device, in which a pair of sector-shaped magnetic poles is installed between opposite end faces of a yoke around which a coil is wound, and a movable magnetic pole piece is attached to the side end face of the sector-shaped magnetic pole. In a fan-shaped magnetic field device in which a fan-shaped magnetic field device is attached, a non-magnetic material is inserted between the opposing surfaces of the fan-shaped magnetic poles to form a space through which charged particles pass, and a hole communicating with the space is opened on the side end face of the space. An analysis plate and an end plate made of a non-magnetic material with a window communicating with the hole and airtightly attached to the side end face are installed, and the space made of a non-magnetic material is provided between the analysis plate and the sector-shaped magnetic pole. The movable magnetic pole piece is comprised of a triangular plate made of magnetic material slidably joined to the side end of the sector-shaped magnetic pole, with a pair of annular packings surrounding the magnetic pole piece being interposed therebetween.
第３図は本発明の一実施例である質量分析計の
扇形磁場装置の垂直断面図であり、第２図と同じ
部分は同一符号を付してある。この場合はヨーク
７の両端面間に扇形磁極１１ａ，１１ｂを配置
し、その間にはパツキング１３ａ，１３ｂを介し
て分析板１４を設置してこれらをねじで組立て扇
形磁場装置を構成しており、イオンビーム３は分
析板１４の空間部を通過する。 FIG. 3 is a vertical sectional view of a fan-shaped magnetic field device of a mass spectrometer according to an embodiment of the present invention, and the same parts as in FIG. 2 are given the same reference numerals. In this case, sector-shaped magnetic poles 11a and 11b are arranged between both end faces of the yoke 7, and an analysis plate 14 is installed between them via packings 13a and 13b, and these are assembled with screws to constitute a sector-shaped magnetic field device. The ion beam 3 passes through the space of the analysis plate 14.
第４図は第３図の扇形磁場装置の平面図で、第
５図は第４図の正面図である。一対の扇形磁極１
１ａ，１１ｂは端板１６ａ，１６ｂを両端に溶接
した一枚の分析板１４を挾みねじ孔１７を貫通す
るねじで扇形磁極１１ａ，１１ｂと共に１体に締
め付けられている。また、扇形磁極１１ａ，１１
ｂの各々の両端には蟻溝によつて三角形の可動磁
極片１２ａ，１２ｂ，１２ｃ，１２ｂが取り付け
られている。この可動磁極片１２は第４図の左端
に破線で示すごとく蟻溝を摺動して移動可能とな
つており、その斜面はイオンビーム３に対して斜
めに設置されているので、立体集束作用を調節し
てイオン透過率を向上させることができる。な
お、扇形磁極１１ａの複数のねじ孔１７で囲まれ
た内側部に示した２重の破線は、環状のパツキン
グ１３と分析板１４の空間部１５を示すもので、
空間部１５の両端は小孔となつて端板１６ａ，１
６ｂの中心孔に連通している。 FIG. 4 is a plan view of the fan-shaped magnetic field device shown in FIG. 3, and FIG. 5 is a front view of the sector-shaped magnetic field device shown in FIG. A pair of sector magnetic poles 1
A single analysis plate 14 with end plates 16a and 16b welded to both ends is fastened together with sector-shaped magnetic poles 11a and 11b by screws passing through screw holes 17, respectively. Moreover, the fan-shaped magnetic poles 11a, 11
Triangular movable magnetic pole pieces 12a, 12b, 12c, and 12b are attached to both ends of each b by dovetail grooves. This movable magnetic pole piece 12 is movable by sliding on a dovetail groove as shown by the broken line at the left end of FIG. can be adjusted to improve ion permeability. Note that the double broken line shown inside the sector-shaped magnetic pole 11a surrounded by the plurality of screw holes 17 indicates the annular packing 13 and the space 15 of the analysis plate 14.
Both ends of the space 15 are small holes and end plates 16a, 1
It communicates with the center hole of 6b.
第６図は扇形磁場装置を構成する部材の斜視図
で、重ね合わせる順序に配列してある。即ち、第
６図Ａは上部の扇形磁極１１ａ、第６図Ｂは上側
パツキング１３ａ、第６図Ｃは分析板１４、第６
図Ｄは下側パツキング１３ｂであり、パツキング
１３ａとは同形である。第６図Ｅは下部の扇板磁
極１１ｂで、上部の扇形磁極１１ａとは同形とな
つている。 FIG. 6 is a perspective view of the members constituting the fan-shaped magnetic field device, which are arranged in an overlapping order. That is, FIG. 6A shows the upper fan-shaped magnetic pole 11a, FIG. 6B shows the upper packing 13a, and FIG. 6C shows the analysis plate 14, the sixth
Figure D shows the lower packing 13b, which has the same shape as the packing 13a. FIG. 6E shows the lower fan-shaped magnetic pole 11b, which has the same shape as the upper fan-shaped magnetic pole 11a.
第７図はパツキングの断面図で、アルミニウム
又は銅等の非磁性材よりなる環状のスペーサ１８
の外側にゴム１９を接着させたものである。 Figure 7 is a cross-sectional view of the packing, with an annular spacer 18 made of non-magnetic material such as aluminum or copper.
Rubber 19 is adhered to the outside of the holder.
第６図に示す部材を重ね合わせ複数のねじ孔１
７に挿入したねじで締め付ければ分析板１４の空
間部１５内は気密が保持される。分析板１４に溶
接してある端板１６ａ，１６ｂはイオン源１およ
びイオン検知器６にＯリングを介して気密に接続
されているので、イオン源室およびイオン検知器
を収容した室を高真空状態にした時は空間部１５
内も高真空状態に減圧される。 Plural screw holes 1 by overlapping the members shown in Fig. 6
By tightening the screws inserted in 7, the interior of the space 15 of the analysis plate 14 is kept airtight. The end plates 16a and 16b welded to the analysis plate 14 are airtightly connected to the ion source 1 and the ion detector 6 via O-rings, so the chamber housing the ion source chamber and the ion detector is kept under high vacuum. When it is in the state, space part 15
The interior is also reduced to a high vacuum.
このように構成した本実施例の扇形磁場装置は
次に列記するような多くの効果をもつている。 The fan-shaped magnetic field device of this embodiment configured as described above has many effects as listed below.
(1) 扇形磁極１１ａ，１１ｂの間隙全体をイオン
ビームが通過するので、イオン透過率が向上す
る。(1) Since the ion beam passes through the entire gap between the fan-shaped magnetic poles 11a and 11b, the ion transmittance is improved.
(2) 扇形磁極１１ａ，１１ｂを接近させることが
できるので、磁場強度が増加して分析可能な質
量範囲を倍増する。(2) Since the fan-shaped magnetic poles 11a and 11b can be brought close to each other, the magnetic field strength increases and the mass range that can be analyzed is doubled.
(3) 扇形磁場全体が１体に固定されているので振
動の影響が少ない。(3) Since the entire fan-shaped magnetic field is fixed in one body, the influence of vibration is small.
(4) 扇形磁場の収束収差の調整は複数個の可動磁
極片１２の微動によつて達成されるので、大形
の微動機構が不要となり調整作業が精密かつ容
易となる。(4) Adjustment of the convergence aberration of the fan-shaped magnetic field is achieved by fine movement of the plurality of movable magnetic pole pieces 12, so a large fine movement mechanism is not required, and the adjustment work becomes precise and easy.
(5) イオンビーム３の通路部が汚れたときは、扇
形磁場装置を取り出し分解することができるの
で、従来の管内面の清浄よりも容易である。(5) When the passage of the ion beam 3 becomes dirty, the fan-shaped magnetic field device can be taken out and disassembled, which is easier than cleaning the inner surface of the tube in the conventional method.
(6) 従来の分析管のような複雑な加工が必要ない
ので、コスト減が計れる。(6) Costs can be reduced because there is no need for complicated processing like conventional analysis tubes.
上記実施例はセクタ形質量分析計の扇形磁場装
置について述べたが、一般の荷電粒子のエネルギ
ー分析用としても適用することができる。 Although the above embodiment describes a fan-shaped magnetic field device for a sector-type mass spectrometer, it can also be applied to general energy analysis of charged particles.
本発明の扇形磁場装置は安価で高性能であると
いう効果が得られる。 The fan-shaped magnetic field device of the present invention has the advantage of being inexpensive and having high performance.
第１図はセクタ形質量分析計のイオンビームと
磁極との関係を説明する図、第２図は従来の質量
分析計の扇形磁場装置の垂直断面図、第３図は本
発明の一実施例である質量分析計の扇形磁場装置
の垂直断面図、第４図は第３図の扇形磁場装置の
平面図、第５図は第４図の正面図、第６図は第３
図の扇形磁場装置を構成する部材の斜視図、第７
図はパツキングの断面図である。
１……イオン源、２……入射スリツト、３……
イオンビーム、４，１１……扇形磁極、５……コ
レクタースリツト、６……イオン検知器、７……
ヨーク、８……コイル、１２……可動磁極片、１
３……パツキング、１４……分析板、１５……空
間部、１６……端板、１７……ねじ孔、１８……
スペーサー、１９……ゴム。
Fig. 1 is a diagram explaining the relationship between the ion beam and the magnetic pole of a sector-type mass spectrometer, Fig. 2 is a vertical cross-sectional view of a fan-shaped magnetic field device of a conventional mass spectrometer, and Fig. 3 is an embodiment of the present invention. FIG. 4 is a plan view of the sector-shaped magnetic field device of FIG. 3, FIG. 5 is a front view of FIG. 4, and FIG.
A perspective view of the members constituting the fan-shaped magnetic field device shown in FIG.
The figure is a sectional view of the packing. 1...Ion source, 2...Incidence slit, 3...
Ion beam, 4, 11... Fan-shaped magnetic pole, 5... Collector slit, 6... Ion detector, 7...
Yoke, 8... Coil, 12... Movable magnetic pole piece, 1
3... Packing, 14... Analysis plate, 15... Space, 16... End plate, 17... Screw hole, 18...
Spacer, 19...Rubber.
Claims (1)
に一対の扇形磁極を設置し、該扇形磁極の側端面
に可動磁極片が取り付けてある扇形磁場装置にお
いて、上記扇形磁極の対向面間に挿入され荷電粒
子が通過する空間部を形成し、該空間部に連通す
る孔をその側端面に開口させた非磁性材よりなる
分析板と、上記孔に連通する窓を設け上記側端面
に気密に取り付けた非磁性材よりなる端板とを設
置し、上記分析板と上記扇形磁極との間に非磁性
材よりなり上記空間部を包囲する一対の環状パツ
キングを介在させ、上記可動磁極片が、上記扇形
磁極の側端にスライド可能に接合した磁性材より
なる三角形板よりなつていることを特徴とする扇
形磁場装置。 ２ 上記環状パツキングが、環状のゴム材を外側
とし非磁性材よりなる環状の軟質金属材を内側と
して接着させたパツキングである特許請求の範囲
第１項記載の扇形磁場装置。[Scope of Claims] 1. A sector-shaped magnetic field device in which a pair of sector-shaped magnetic poles is installed between opposing end faces of a yoke around which a coil is wound, and a movable magnetic pole piece is attached to a side end face of the sector-shaped magnetic poles. an analysis plate made of a non-magnetic material that is inserted between opposing surfaces of the non-magnetic material to form a space through which charged particles pass, and has a hole communicating with the space opened on its side end surface, and a window communicating with the hole. an end plate made of a non-magnetic material airtightly attached to the side end surface, and a pair of annular packing made of a non-magnetic material surrounding the space is interposed between the analysis plate and the sector-shaped magnetic pole; A sector-shaped magnetic field device characterized in that the movable magnetic pole piece is comprised of a triangular plate made of a magnetic material that is slidably joined to the side end of the sector-shaped magnetic pole. 2. The fan-shaped magnetic field device according to claim 1, wherein the annular packing is a packing in which an annular rubber material is attached to the outside and an annular soft metal material made of a non-magnetic material is bonded to the inside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7542079A JPS55166907A (en) | 1979-06-14 | 1979-06-14 | Fan shaped magnetic field device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7542079A JPS55166907A (en) | 1979-06-14 | 1979-06-14 | Fan shaped magnetic field device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55166907A JPS55166907A (en) | 1980-12-26 |
| JPH023264B2 true JPH023264B2 (en) | 1990-01-23 |
Family
ID=13575672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7542079A Granted JPS55166907A (en) | 1979-06-14 | 1979-06-14 | Fan shaped magnetic field device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55166907A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62272437A (en) * | 1986-05-21 | 1987-11-26 | Mitsubishi Electric Corp | Mass spectrometer for ion implanting apparatus |
| US8835866B2 (en) * | 2011-05-19 | 2014-09-16 | Fei Company | Method and structure for controlling magnetic field distributions in an ExB Wien filter |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4936034U (en) * | 1972-07-10 | 1974-03-30 | ||
| JPS5029980U (en) * | 1973-07-18 | 1975-04-04 |
-
1979
- 1979-06-14 JP JP7542079A patent/JPS55166907A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55166907A (en) | 1980-12-26 |
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