JPH0241163B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a heating device, and particularly relates to a heating device, and in particular a heating device for heating a coating film (photoresist film, protective film, intervening layer, etc.) applied on a substrate (glass, metal, semiconductor, etc.).
This invention relates to a heating device for uniformly drying and solidifying materials (insulating layers, etc.).

Conventionally, in the above-mentioned equipment that heats and transports objects to be heated as part of a continuous process, if long-term heating is required, the heating equipment becomes long, and the relationship with other processing equipment in the assembly line work becomes difficult. Since then, it has occupied a large space that cannot be ignored and has become a problem. In addition, if heating is performed only from above, the surface of the paint film will solidify first, and as the middle and lower layers of the paint film solidify, air bubbles will be left behind, causing protrusions on the film surface and Delayed shrinkage inside the film may cause minute irregularities on the coating surface.

The present invention improves the above-mentioned drawbacks of the conventional method, and focuses on heating the coated substrate from below, and in combination with heating from the top, uniformly dries the coating film. In addition, the length of the heating device is saved by a conveying mechanism that advances and stops intermittently, and the heating device is small in terms of space and can be heated for a considerable length of time. The present invention is capable of preventing the occurrence of minute surface protrusions, and the present invention will be specifically explained below using examples shown in the drawings.

FIG. 1 is a front sectional explanatory view of the heating device of the present invention. Further, FIG. 2 is an explanatory diagram showing the conveyance state of the heating section from above, and FIG. 3 is an explanatory diagram of the conveyance on the heating table.

The heating table 1 has a built-in heater (not shown), is of an elongated type with a smooth upper surface, is placed horizontally, and has a plurality of parallel grooves 2 (see FIG. 3) extending from the starting end to the ending end on the upper surface. A transport rail 3 is placed in each of the parallel grooves 2, and a link mechanism 4 is attached to each end of the transport rail 3, which moves forward and backward in an arc while moving up and down. The object A to be heated on the heating table 1 is conveyed to the destination by moving forward and standing still intermittently while keeping the object horizontal by sinking or moving in a substantially circular arc as shown by the dotted line in Fig. 1. . In other words, when the transport rail 3 is below the surface of the heating table 1 by this link mechanism 4, the object to be heated A is held still on the heating table 1, and when the transport rail 3 comes out from the top surface of the heating table 1 by the link mechanism, the object to be heated is stopped. A is moved onto the transport rail 3, which moves forward in a substantially arc shape while remaining horizontal, and is transported. Since this movement is repeated intermittently, the object to be heated A is transported forward on the heating table 1.

The object to be heated A is always heated from above by the infrared heater 5, and when it is placed on the heating table 1, it is efficiently heated directly from the upper surface of the heating table 1.

The movement of intermittently conveying the heated object A on the heating table is performed by the link mechanism 4. That is, the conveyance rail 3 has a rotary wheel 6 rotating in the direction of the arrow, and an inverted T.
A type of link mechanism consisting of a letter-shaped crank 7 and a support arm 8 is installed, and as shown by the dotted line in Figure 1, it moves forward (to the right) a certain distance by circular motion.
The object to be heated A is moved forward. heating table 1
A conveyor belt 9 is connected to the starting and ending ends of the heating table 1, and the object to be heated A is carried onto or taken out from the heating table 1.

In addition, to adjust the heating time, for example, the rotating wheel 6 of the link mechanism may be made continuous or intermittently.
Alternatively, there are methods such as adjusting the rotation speed.

Since the heating device of the present invention is as described above, it has excellent performance in heating and drying coating films of photographic plates, ultra-precision electronic parts, etc., and uniformly heating and drying the entire coating film to obtain a smooth surface. This shows that.

[Brief explanation of the drawing]

FIG. 1 is a front sectional explanatory view of the heating device of the present invention, and FIG. 2 is a top explanatory view of the heating table.
FIG. 3 is an explanatory diagram of the movement of the transport rail. 1... Heating table, 2... Parallel groove, 3... Conveyance rail, 4... Link mechanism, 5... Infrared heater,
6...Rotating wheel, 7...Inverted T-shaped crank, 8...
Support arm, 9... Conveyor belt, A... Heated object.

Claims (1)

[Claims] 1. An infrared heater that irradiates downward from above;
It consists of a long heating table with a smooth upper surface provided under the heating table, and the heating table is provided with a plurality of parallel grooves extending from a starting end to a terminal end, a conveyor rail is provided in each of the parallel grooves, and a conveyor rail is provided in each of the parallel grooves, and When each of the conveyance rails is below the top surface of the heating table, the object to be heated remains stationary on the heating table, and when each of the conveyance rails rises above the surface of the heating table, it moves approximately in an arc in the conveyance direction. A link mechanism is installed at the starting end of the transport rail and intermittently repeats the process of transporting the object a certain distance, then descending from the heating table surface and returning to leave the object still on the heating table. A heating device characterized in that it is attached to the terminal end.