JPH0249547B2 - PURINTOHAISENBANNOSEIZOHOHO - Google Patents
PURINTOHAISENBANNOSEIZOHOHOInfo
- Publication number
- JPH0249547B2 JPH0249547B2 JP7990285A JP7990285A JPH0249547B2 JP H0249547 B2 JPH0249547 B2 JP H0249547B2 JP 7990285 A JP7990285 A JP 7990285A JP 7990285 A JP7990285 A JP 7990285A JP H0249547 B2 JPH0249547 B2 JP H0249547B2
- Authority
- JP
- Japan
- Prior art keywords
- plating
- copper
- resist film
- solution
- etching resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007747 plating Methods 0.000 claims description 63
- 238000000034 method Methods 0.000 claims description 60
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 53
- 239000010949 copper Substances 0.000 claims description 51
- 229910052802 copper Inorganic materials 0.000 claims description 51
- 239000000243 solution Substances 0.000 claims description 42
- 238000005530 etching Methods 0.000 claims description 40
- 239000003054 catalyst Substances 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 239000003638 chemical reducing agent Substances 0.000 claims description 12
- 239000007864 aqueous solution Substances 0.000 claims description 6
- 150000003839 salts Chemical class 0.000 claims description 5
- -1 borohydrides Chemical class 0.000 claims description 4
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims 1
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 15
- 239000000654 additive Substances 0.000 description 14
- 230000000996 additive effect Effects 0.000 description 10
- 230000007547 defect Effects 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 229940124024 weight reducing agent Drugs 0.000 description 10
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 9
- 229910000679 solder Inorganic materials 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000007639 printing Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- 238000007654 immersion Methods 0.000 description 4
- 239000000976 ink Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 229910001431 copper ion Inorganic materials 0.000 description 3
- 230000009849 deactivation Effects 0.000 description 3
- 238000005553 drilling Methods 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 2
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 2
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 2
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- RJTANRZEWTUVMA-UHFFFAOYSA-N boron;n-methylmethanamine Chemical compound [B].CNC RJTANRZEWTUVMA-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000008139 complexing agent Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 239000012279 sodium borohydride Substances 0.000 description 2
- 229910000033 sodium borohydride Inorganic materials 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- TXUICONDJPYNPY-UHFFFAOYSA-N (1,10,13-trimethyl-3-oxo-4,5,6,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-17-yl) heptanoate Chemical compound C1CC2CC(=O)C=C(C)C2(C)C2C1C1CCC(OC(=O)CCCCCC)C1(C)CC2 TXUICONDJPYNPY-UHFFFAOYSA-N 0.000 description 1
- URDCARMUOSMFFI-UHFFFAOYSA-N 2-[2-[bis(carboxymethyl)amino]ethyl-(2-hydroxyethyl)amino]acetic acid Chemical compound OCCN(CC(O)=O)CCN(CC(O)=O)CC(O)=O URDCARMUOSMFFI-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 239000004471 Glycine Substances 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- QPCDCPDFJACHGM-UHFFFAOYSA-N N,N-bis{2-[bis(carboxymethyl)amino]ethyl}glycine Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(=O)O)CCN(CC(O)=O)CC(O)=O QPCDCPDFJACHGM-UHFFFAOYSA-N 0.000 description 1
- 101150003085 Pdcl gene Proteins 0.000 description 1
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical compound ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- NSOXQYCFHDMMGV-UHFFFAOYSA-N Tetrakis(2-hydroxypropyl)ethylenediamine Chemical compound CC(O)CN(CC(C)O)CCN(CC(C)O)CC(C)O NSOXQYCFHDMMGV-UHFFFAOYSA-N 0.000 description 1
- ZMZDMBWJUHKJPS-UHFFFAOYSA-M Thiocyanate anion Chemical compound [S-]C#N ZMZDMBWJUHKJPS-UHFFFAOYSA-M 0.000 description 1
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- PCEDCPYBUFBHHW-UHFFFAOYSA-N acetic acid;n'-(2-aminoethyl)ethane-1,2-diamine Chemical compound CC(O)=O.CC(O)=O.CC(O)=O.NCCNCCN PCEDCPYBUFBHHW-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 1
- VDTVZBCTOQDZSH-UHFFFAOYSA-N borane N-ethylethanamine Chemical compound B.CCNCC VDTVZBCTOQDZSH-UHFFFAOYSA-N 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 150000002171 ethylene diamines Chemical class 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- ZMZDMBWJUHKJPS-UHFFFAOYSA-N hydrogen thiocyanate Natural products SC#N ZMZDMBWJUHKJPS-UHFFFAOYSA-N 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- MGFYIUFZLHCRTH-UHFFFAOYSA-N nitrilotriacetic acid Chemical compound OC(=O)CN(CC(O)=O)CC(O)=O MGFYIUFZLHCRTH-UHFFFAOYSA-N 0.000 description 1
- 150000002940 palladium Chemical class 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- 229960003330 pentetic acid Drugs 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 125000004076 pyridyl group Chemical group 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000010019 resist printing Methods 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- MNWBNISUBARLIT-UHFFFAOYSA-N sodium cyanide Chemical compound [Na+].N#[C-] MNWBNISUBARLIT-UHFFFAOYSA-N 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000001119 stannous chloride Substances 0.000 description 1
- 235000011150 stannous chloride Nutrition 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Landscapes
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Description
産業上の利用分野
本発明はパートリーアデイテイブ法によりプリ
ント配線板を製造する場合に好適に採用されるプ
リント配線板の製造方法に関する。
従来の技術
従来、プリント基板の製造方法としては、銅張
積層板を素材として不要部分の銅をエツチング除
去して所望導電パターンを形成する方式であるサ
ブトラクト法が主流を占めてきた。しかし、近年
電子機器の急速な進歩により、プリント基板の需
要も急増し、要求される特性も多様化しており、
特に経済性や信頼性の改善が望まれている。これ
らの問題を解決する方法として、従来のサブトラ
クト法とは異なり、素材として積層板を用い、め
つきによつて必要な導電パターンだけを選択的に
任意の厚さで形成できるアデイテイブ法が注目さ
れている。このアデイテイブ法は加工工程を大巾
に短縮できるほか、サブトラクト法の欠点である
エツチングによる回路巾の減少を防止できるた
め、高密度を目的とする場合には非常に有利とさ
れている。
現在、アデイテイブ法によるプリント配線板の
製造方法としては、フルアデイテイブ法、セミア
デイテイブ法、パートリーアデイテイブ法の三方
法が知られている。
このうち、フルアデイテイブ法はパターン及び
スルホールを全て無電解銅めつきにより形成する
もので、工程を最も簡素化でき、将来的に最も期
待されている方法であるが、実際に高密度基板製
造上においては、基板、接着剤、印刷インク、め
つき液等に種々の問題を残しているほか、高価な
特殊基材の使用や表面粗化液による公害問題、ま
た基材と回路部との密着性や使用する接着剤のコ
スト面などを考え合せると、銅張積層板をベース
にしたものに比べ、まだ不利な点が多い。
一方、セミアデイテイブ法はパターン電気めつ
きの電導体として基板の全面に無電解銅めつきを
施し、パターン電気めつき後に非パターン部の無
電解銅めつき膜を溶解除去するもので、この方法
は高密度化し易い、めつき液の管理が容易である
などの利点を有するが、工程の大巾な簡素化は望
めず、表面粗化液による公害問題、基材と回路部
との密着性の問題など、フルアデイテイブ法と同
様の問題を残している。
これに対し、パートリーアデイテイブ法はサブ
トラクト法とアデイテイブ法の両者の欠点をカバ
ーできる方法として最近特に注目されているプリ
ント配線板製造法である。この方法は銅張り積層
板をエツチングすることによつてパターンを形成
し、スルホールのみを無電解銅めつきするもの
で、具体的例ではまず銅張り積層板にドリル、パ
ンチング等でスルホールを形成した後、スルホー
ル壁に無電解銅めつき液から銅を析出させるため
の触媒層を形成し、次いで銅張り積層板表面に印
刷法、ドライフイルム積層法等の方法でエツチン
グレジスト膜を形成する。次に、銅張り積層板を
エツチングし、非レジスト部の銅を溶解してパタ
ーンを形成し、前記エツチングレジスト膜を剥離
した後、ランド及びスルホール並びに必要回路部
分以外をレジスト印刷等することによりめつき・
ソルダーレジスト膜を形成し、最後に無電解銅め
つきを行ない、前記スルホール壁に無電解銅めつ
き膜を形成するものである。
発明が解決しようとする問題点
しかしながら、本発明者らの検討によると、上
述したパートリーアデイテイブ法の工程通りにプ
リント配線板を製作した場合、ブローホール、ス
ルホール欠損、無めつき等のスルホールめつき不
良がしばしば生じるものであつた。この原因とし
ては、スルホール壁に対する触媒の付着が強固で
ないため、触媒層形成後の工程、即ちエツチング
レジスト膜の形成工程、エツチング(パターン形
成)工程、エツチングレジスト膜の剥離工程、め
つき・ソルダーレジスト膜の形成工程、更に基板
を無電解銅めつき液に浸漬した後、スルホール壁
全面に銅が析出し、銅で完全にカバーされるまで
の時間(テイクタイム)に触媒層が不活性化或い
は溶解してしまい、スルホール壁に銅が析出しな
い部分が生じるためであると推定された。
このような触媒層の不活性化もしくは溶解によ
るスルホールめつき不良を防止するため、触媒層
形成後に無電解ニツケルめつきを施し、或いはレ
ジストによる穴うめを行なうなどして触媒層を保
護したり、めつき・ソルダーレジスト膜形成後に
触媒層の再活性化を行なつたり、スルホール壁に
厚付け無電解銅めつきを施す前にストライク無電
解銅めつき(高活性・低物性)を施すことが提案
されているが、これらの方法は工程を増やし、複
雑化させる問題がある。
このため、パートリーアデイテイブ法を採用し
てプリント配線板を製造する場合に、いたずらに
工程を複雑化させることなく簡単にかつ確実にス
ルホールめつき不良を防止して無電解銅めつきを
施す方法が要望されていた。
本発明は上記事情に鑑みなされたもので、スル
ホールめつき不良を確実に防止して無電解銅めつ
きし得、しかも通常のパートリーアデイテイブ法
の工程をそのまま踏襲して無電解銅めつきを行な
うことができるプリント配線板の製造方法を提供
することを目的とする。
問題点を解決するための手段
本発明は上記目的を達成するため、銅張り積層
板にスルホールを形成し、スルホール壁に無電解
銅めつき用触媒層を形成した後、前記積層板表面
にエツチングレジスト膜を形成し、次いで非レジ
スト部の銅を溶解除去し、更に前記エツチングレ
ジスト膜を剥離して銅パターン部を形成し、次に
ランド部及びスルホール並びに必要回路部分を残
してめつきレジスト膜を形成した後にこの積層板
を無電解銅めつき液に浸漬して、前記スルホール
壁に無電解銅めつき膜を形成するプリント配線板
の製造方法において、前記エツチングレジスト膜
の剥離液中に還元剤を添加するようにしたもので
ある。
即ち、本発明者らは、エツチングレジスト膜の
剥離には炭酸ナトリウム、水酸化ナトリウム等の
アルカリ性水溶液が多く使用されているが、この
種の剥離液が触媒層を不活性化し、これがスルホ
ールめつき不良につながるのではないかと予想
し、剥離液について種々検討を行なつた結果、次
亜リン酸ナトリウム、水素化ホウ素ナトリウム、
ジメチルアミンボラン等の還元剤を剥離液に添加
した場合、触媒層不活性化によるスルホール欠損
等のスルホールめつき不良が確実に防止され、ス
ルホール内を確実に無電解銅めつきし得ることを
知見し、本発明をなすに至つたものである。
以下、本発明につき更に詳しく説明する。
本発明に係るプリント配線板の製造方法は、ま
ず紙強化エポキシ板、紙強化フエノール板等の基
材の片面又は両面に銅箔を積層した銅張り積層板
にドリル或いはパンチング等によりスルホールを
形成する。
次に、このスルホール壁に無電解銅めつき析出
用触媒層を形成する。この触媒層の形成法として
は通常の方法を採用でき、特に制限されるもので
はないが、例えばパラジウム塩と第1錫塩との混
合溶液に積層板を浸漬し、次いで酸又はアルカリ
溶液中に浸漬してスルホール壁に金属パラジウム
核を付着させる方法、酸性塩化第1錫溶液等のセ
ンシタイジング液に積層板を浸漬し、次いで塩化
パラジウム溶液等のアクチベイテイング液に浸漬
する方法などが好適に採用し得る。
このようにして触媒層を形成した後は、銅張り
積層板の表面にパターン形成のためのエツチング
レジスト膜を形成する。このエツチングレジスト
膜の形成法も通常の方法を採用し得、例えば印刷
インクを用いて印刷する方法、ドライフイルムを
用いる方法などを採用し得る。
次いで、エツチングレジスト膜を形成した積層
板をエツチングし、非レジスト部の銅を溶解除去
する。ここで、エツチング液としては、塩化第2
銅溶液、塩化第2鉄溶液、過硫酸アンモニウム溶
液、アンモニアアルカリ性醋化剤溶液、アンモニ
アアルカリ性銅溶液など、通常使用されているエ
ツチング液が用いられ、スプレー法、浸漬法等を
採用して銅エツチングを行なうことができる。
エツチング後は、前記エツチングレジスト膜を
剥離し、銅パターンを形成するものであるが、こ
の場合このエツチングレジスト膜の剥離液として
は、エツチングレジスト膜の種類に応じ、塩化メ
チレン等の溶剤型剥離液、ブチルセルソルブ、ト
リエタノールアミンなどの溶剤を含むアルカリ性
半溶剤型剥離液、炭酸ナトリウム、水酸化ナトリ
ウム等のアルカリをベースとしたアルカリ性水溶
液型剥離液が使用し得る。これらのうちではコス
ト面、作業環境面等の点からアルカリ性水溶液が
好適に使用される。なお、これら剥離液はその通
常の使用条件を採用してエツチングレジスト膜を
剥離することができ、例えばアルカリ性水溶液の
場合には室温又は適当な温度(35〜65℃)の温度
でスプレー法、浸漬法等によりエツチングレジス
ト膜を溶解除去し得る。
ここで、本発明においては、このエツチングレ
ジスト剥離液中に還元剤を添加するもので、この
ように還元剤が添加された剥離液を用いてエツチ
ングレジスト膜を剥離することにより、スルホー
ルめつき時にスルホール欠損等のスルホールめつ
き不良が確実に回避され、良好なスルホールめつ
きを可能としたものである。この場合、本発明の
かかる目的に対しては剥離液としてアルカリ性水
溶液を使用することが好ましい。この剥離液に添
加する還元剤としては、次亜リン酸ナトリウム等
の次亜リン酸及びその塩、水素化ホウ素ナトリウ
ム、水素化ホウ素カリウム等の水素化ホウ素化
物、ジメチルアミンボラン、ジエチルアミンボラ
ン等のアミンボラン化合物などが好適に使用され
る。なお、これら還元剤の添加濃度は0.01〜0.6
モル/、特に0.1モル/以下とすることがで
き、少量でも十分に効果がある。
上述したようにしてエツチングレジスト膜を剥
離した後は、ランド部及びスルホール並びに必要
回路部分を残してめつきレジスト膜を形成する。
この場合、めつきレジスト膜は、例えばエポキシ
系ソルダーレジストインクによる印刷、写真法フ
オトソルダーレジストの使用等の適宜な方法でめ
つきレジスト膜(通常ソルダーレジストを兼ね
る)を形成することができる。
最後に、積層板を無電解銅めつき液中に浸漬
し、スルホール壁に無電解銅めつき膜を形成す
る。この場合、無電解銅めつき液としては、高物
性厚付け用のものが好適に使用される。このよう
な無電解銅めつき液としては、特に限定されない
が、例えば硫酸銅等の2価の銅塩(銅イオン濃度
0.01〜1モル/)、ホルムアルデヒド等の還元
剤(還元剤濃度0.02〜1モル/)、エチレンジ
アミンテトラ酢酸、テトラヒドロキシプロピルエ
チレンジアミン、N−ヒドロキシエチルエチレン
ジアミントリ酢酸、及びこれらの塩等のエチレン
ジアミン類、更にジエチレントリアミントリ酢
酸、ジエチレントリアミンペンタ酢酸、ニトリロ
トリ酢酸、シクロヘキシレンジアミンテトラ酢
酸、くえん酸、酒石酸、及びこれらの塩などの2
価の銅イオンを錯化する錯化剤(錯化剤濃度は2
価の銅イオンと等モル又はそれ以上)を主成分と
し、これに更に必要によりピリジル類、シアン
類、チオシアン類等の安定剤、グリシン等のホル
ムアルデヒドと付加生成物を形成する化合物、水
酸化ナトリウム等のPH調節剤などを添加した浴が
使用できる。なお、そのめつき条件は、使用する
めつき液の組成等に応じ適宜選定されるが、スル
ホール壁に対する無電解銅めつき膜の厚さは25〜
30μmとすることが好ましい。
以上のようにしてスルホール壁に無電解銅めつ
き膜を形成した後は、必要により熱処理(120〜
200℃)、防錆処理、半田コーテイング等の処理を
施すことができる。
発明の効果
本発明のプリント配線板の製造方法によれば、
銅張り積層板にスルホールを形成し、スルホール
壁に無電解銅めつき析出用触媒層を形成した後、
前記積層板表面にエツチングレジスト膜を形成
し、次いで非レジスト部の銅を溶解除去し、更に
前記エツチングレジスト膜を剥離して銅パターン
部を形成し、次にランド部及びスルホール並びに
必要回路部分を残してめつきレジスト膜を形成し
た後にこの積層板を無電解銅めつき液に浸漬し
て、前記スルホール壁に無電解銅めつき膜を形成
するプリント配線板の製造方法において、前記エ
ツチングレジスト膜の剥離液として還元剤が添加
されたものを用いたことにより、触媒層の不活性
化によるスルホールめつき不良が良好に防止され
るものである。
以下、実施例を示し、本発明を具体的に説明す
る。
実施例
紙強化エポキシ板(厚さ1.6mm)の両面に銅箔
を積層した銅張り積層板(NEMA規格FR−3)
を13×17cmに裁断し、直径0.8mmのスルホールを
ドリリングにより100個形成した。
次に、下記の工程によりスルホール壁に触媒層
(パラジウム核)を形成した。
1 触媒化液浸漬
PdCl2 0.5g/
SnCl2 25g/
HCl 350ml/
室温、5分浸漬
2 水洗
3 活性化処理
HCl 50ml/
室温、5分浸漬
4 水洗
5 乾燥
80℃、15分
触媒層の形成後、アルカリ除去型エツチングレ
ジストを用いてパターン印刷を行ない、エツチン
グレジスト膜を形成し、次いでCuCl2モル/、
CuCl0.01モル/、HCl3モル/からなるエツ
チング液を使用し、スプレーエツチング装置によ
り55℃の温度で非レジスト部の銅をエツチング除
去した。
次に、下記組成のアルカリ性水溶液型剥離液を
使用し、下記条件でエツチングレジスト膜を剥離
除去した。
剥離液組成
NaOH 4.0重量%
第1表に示す還元剤 0.01モル/
剥離条件
温 度 40℃
時 間 5分
その後、ランド及びスルホール並びに必要回路
部分以外の部分にエポキシ系ソルダーレジストイ
ンクを用いることにより、めつきレジスト膜を形
成し、次いで下記組成の無電解銅めつき液に浸漬
し、下記条件でめつきを行なつた。
無電解銅めつき液組成及びめつき条件
CuSO4・5H2O 0.04モル/
ホルムアルデヒド(37%) 0.3 〃
EDTA・4Na 0.1 〃
NaCN 5ppm
PH(NaOHで調整) 12.2
めつき温度 30℃
めつき時間 15分
撹 拌 空気
めつき後、スルホール内のめつき欠損の有無を
実体顕微鏡により観察した。その結果を第1表に
示す。
INDUSTRIAL APPLICATION FIELD The present invention relates to a method for manufacturing a printed wiring board that is suitably employed when manufacturing a printed wiring board by a part-time additive method. BACKGROUND ART Conventionally, the mainstream method for manufacturing printed circuit boards has been the subtract method, which is a method in which a desired conductive pattern is formed by etching away unnecessary copper using a copper-clad laminate as a material. However, due to the rapid advancement of electronic devices in recent years, the demand for printed circuit boards has increased rapidly, and the required characteristics have diversified.
In particular, improvements in economic efficiency and reliability are desired. As a method to solve these problems, the additive method, which uses a laminate as a material and selectively forms only the necessary conductive patterns at any thickness by plating, is attracting attention, unlike the conventional subtract method. ing. This additive method is considered to be extremely advantageous when high density is desired, as it can greatly shorten the processing steps and prevent the reduction in circuit width due to etching, which is a disadvantage of the subtract method. Currently, there are three known methods for manufacturing printed wiring boards using additive methods: full additive method, semi-additive method, and partially additive method. Among these methods, the full additive method forms all patterns and through holes by electroless copper plating, and is the method that can simplify the process the most and has the most expectations in the future. In addition to various problems with substrates, adhesives, printing inks, plating liquids, etc., there are problems with the use of expensive special substrates, pollution caused by surface roughening liquids, and problems with the adhesion between the substrate and circuit parts. There are still many disadvantages compared to those based on copper-clad laminates, considering the cost of the adhesive used and the cost of the adhesive used. On the other hand, in the semi-additive method, electroless copper plating is applied to the entire surface of the substrate as a conductor for pattern electroplating, and after pattern electroplating, the electroless copper plating film on the non-pattern areas is dissolved and removed. Although it has advantages such as easy densification and easy control of plating solution, it cannot be expected to greatly simplify the process, and there are problems with pollution due to surface roughening solution and problems with adhesion between the base material and the circuit part. The same problems as the fully additive method remain. On the other hand, the part-additive method is a printed wiring board manufacturing method that has recently attracted particular attention as a method that can overcome the drawbacks of both the subtract method and the additive method. In this method, a pattern is formed by etching a copper-clad laminate, and only the through holes are plated with electroless copper.In a specific example, through holes are first formed in the copper-clad laminate by drilling, punching, etc. Thereafter, a catalyst layer for depositing copper from an electroless copper plating solution is formed on the through-hole walls, and then an etching resist film is formed on the surface of the copper-clad laminate by a method such as a printing method or a dry film lamination method. Next, the copper-clad laminate is etched to form a pattern by dissolving the copper in non-resist areas, and after peeling off the etching resist film, resist printing is performed on areas other than lands, through-holes, and necessary circuit areas. moon·
A solder resist film is formed, and finally electroless copper plating is performed to form an electroless copper plating film on the through-hole wall. Problems to be Solved by the Invention However, according to the studies of the present inventors, when a printed wiring board is manufactured according to the process of the above-mentioned part-time additive method, through-holes such as blowholes, through-hole defects, and non-plating occur. Poor plating often occurred. The reason for this is that the adhesion of the catalyst to the through-hole walls is not strong, so the processes after the formation of the catalyst layer, that is, the formation process of the etching resist film, the etching (pattern formation) process, the peeling process of the etching resist film, the plating/solder resist During the film formation process, and after the substrate is immersed in an electroless copper plating solution, copper is deposited on the entire surface of the through-hole wall, and during the time (take time) until it is completely covered with copper, the catalyst layer is inactivated or It is presumed that this is because the copper is dissolved and there are areas on the through-hole walls where copper does not precipitate. In order to prevent poor through-hole plating due to deactivation or dissolution of the catalyst layer, the catalyst layer is protected by electroless nickel plating after formation of the catalyst layer, or by filling holes with a resist. It is possible to reactivate the catalyst layer after plating/solder resist film formation, or to perform strike electroless copper plating (high activity, low physical properties) before applying thick electroless copper plating to the through-hole wall. Although these methods have been proposed, they have the problem of increasing the number of steps and complicating them. Therefore, when manufacturing printed wiring boards using the part-additive method, it is possible to easily and reliably prevent through-hole plating defects and perform electroless copper plating without unnecessarily complicating the process. A method was requested. The present invention was developed in view of the above circumstances, and it is possible to perform electroless copper plating while reliably preventing through-hole plating defects, and furthermore, it can perform electroless copper plating by following the process of the normal part-triadive method as it is. An object of the present invention is to provide a method for manufacturing a printed wiring board that can perform the following steps. Means for Solving the Problems In order to achieve the above object, the present invention forms through holes in a copper-clad laminate, forms a catalyst layer for electroless copper plating on the walls of the through holes, and then etches the surface of the laminate. A resist film is formed, then copper in non-resist areas is dissolved and removed, the etching resist film is peeled off to form a copper pattern area, and then a plating resist film is formed, leaving land areas, through holes, and necessary circuit areas. In the method for manufacturing a printed wiring board, the laminated board is immersed in an electroless copper plating solution to form an electroless copper plating film on the through-hole wall after forming the etching resist film. It is designed to add an agent. That is, the present inventors found that although alkaline aqueous solutions such as sodium carbonate and sodium hydroxide are often used to strip etching resist films, this kind of stripping solution inactivates the catalyst layer, which causes throughhole plating. Anticipating that this might lead to defects, we conducted various studies on stripping solutions and found that sodium hypophosphite, sodium borohydride,
It has been discovered that when a reducing agent such as dimethylamine borane is added to the stripping solution, throughhole plating defects such as throughhole defects due to deactivation of the catalyst layer are reliably prevented, and electroless copper plating can be performed reliably inside the throughholes. However, the present invention has been completed. The present invention will be explained in more detail below. In the method for manufacturing a printed wiring board according to the present invention, first, through holes are formed by drilling or punching in a copper-clad laminate in which copper foil is laminated on one or both sides of a base material such as a paper-reinforced epoxy board or a paper-reinforced phenol board. . Next, a catalyst layer for electroless copper plating is formed on the through-hole wall. The method for forming this catalyst layer can be any conventional method and is not particularly limited. For example, the laminate is immersed in a mixed solution of palladium salt and stannous salt, and then immersed in an acid or alkaline solution. Suitable methods include a method in which metal palladium nuclei are attached to the through-hole wall by immersion, and a method in which the laminate is immersed in a sensitizing liquid such as an acidic stannous chloride solution, and then immersed in an activating liquid such as a palladium chloride solution. Can be adopted. After forming the catalyst layer in this manner, an etching resist film for pattern formation is formed on the surface of the copper-clad laminate. The method for forming this etching resist film may also be a conventional method, such as a printing method using printing ink or a method using a dry film. Next, the laminate on which the etching resist film has been formed is etched, and the copper in the non-resist areas is dissolved and removed. Here, as the etching solution, dichlorochloride
Commonly used etching solutions such as copper solution, ferric chloride solution, ammonium persulfate solution, ammonia alkaline thickener solution, and ammonia alkaline copper solution are used, and copper etching is performed by spraying, dipping, etc. can be done. After etching, the etching resist film is peeled off to form a copper pattern. In this case, the etching resist film stripping solution may be a solvent-based stripping solution such as methylene chloride depending on the type of the etching resist film. An alkaline semi-solvent type stripping solution containing a solvent such as , butylcellosolve, or triethanolamine, or an alkaline aqueous solution type stripping solution based on an alkali such as sodium carbonate or sodium hydroxide can be used. Among these, alkaline aqueous solutions are preferably used from the viewpoint of cost, working environment, etc. Note that these stripping solutions can be used to strip the etching resist film under the conditions under which they are normally used. For example, in the case of an alkaline aqueous solution, spraying or dipping can be performed at room temperature or at an appropriate temperature (35 to 65 degrees Celsius). The etching resist film can be dissolved and removed by a method or the like. Here, in the present invention, a reducing agent is added to the etching resist stripping solution, and by stripping the etching resist film using the stripping solution to which the reducing agent has been added, it is possible to remove the etching resist film during through-hole plating. Through-hole plating defects such as through-hole defects are reliably avoided, and good through-hole plating is made possible. In this case, it is preferable to use an alkaline aqueous solution as the stripping solution for the purpose of the present invention. Reducing agents to be added to this stripping solution include hypophosphorous acid and its salts such as sodium hypophosphite, borohydrides such as sodium borohydride and potassium borohydride, dimethylamine borane, diethylamine borane, etc. Amine borane compounds and the like are preferably used. The concentration of these reducing agents added is 0.01 to 0.6.
The amount can be set to 0.1 mol/mole or less, and even a small amount is sufficiently effective. After the etching resist film is peeled off as described above, a plating resist film is formed leaving the land portions, through holes, and necessary circuit portions.
In this case, the plating resist film (which usually also serves as a solder resist) can be formed by an appropriate method such as printing with epoxy solder resist ink or using a photographic photo solder resist. Finally, the laminate is immersed in an electroless copper plating solution to form an electroless copper plating film on the through-hole walls. In this case, as the electroless copper plating solution, one for thick coating with high physical properties is suitably used. Such electroless copper plating solution is not particularly limited, but for example, divalent copper salts such as copper sulfate (copper ion concentration
0.01 to 1 mol/), reducing agents such as formaldehyde (reducing agent concentration 0.02 to 1 mol/), ethylenediamines such as ethylenediaminetetraacetic acid, tetrahydroxypropylethylenediamine, N-hydroxyethylethylenediaminetriacetic acid, and salts thereof, and 2 such as diethylenetriaminetriacetic acid, diethylenetriaminepentaacetic acid, nitrilotriacetic acid, cyclohexylenediaminetetraacetic acid, citric acid, tartaric acid, and salts thereof.
A complexing agent that complexes valent copper ions (the concentration of the complexing agent is 2
The main component is copper ion (equimolar or more), and if necessary, stabilizers such as pyridyl, cyanide, thiocyanate, etc., compounds that form addition products with formaldehyde such as glycine, sodium hydroxide. A bath containing a PH regulator such as phthalate can be used. The plating conditions are appropriately selected depending on the composition of the plating solution used, etc., but the thickness of the electroless copper plating film on the through-hole wall is 25~25cm.
The thickness is preferably 30 μm. After forming an electroless copper plating film on the through-hole wall as described above, heat treatment (120~
200℃), rust prevention treatment, solder coating, etc. Effects of the Invention According to the method for manufacturing a printed wiring board of the present invention,
After forming through holes in the copper-clad laminate and forming a catalyst layer for electroless copper plating on the walls of the through holes,
An etching resist film is formed on the surface of the laminate, then copper in non-resist areas is dissolved and removed, the etching resist film is peeled off to form a copper pattern area, and then land areas, through holes, and necessary circuit areas are removed. In the method for manufacturing a printed wiring board, the laminate is immersed in an electroless copper plating solution to form an electroless copper plating film on the through-hole walls after forming a plating resist film on the through-hole walls. By using a stripping solution to which a reducing agent is added, poor through-hole plating due to deactivation of the catalyst layer can be effectively prevented. EXAMPLES Hereinafter, the present invention will be specifically explained with reference to Examples. Example: Copper-clad laminate with copper foil laminated on both sides of paper-reinforced epoxy board (thickness 1.6 mm) (NEMA standard FR-3)
was cut into 13 x 17 cm pieces, and 100 through holes with a diameter of 0.8 mm were formed by drilling. Next, a catalyst layer (palladium core) was formed on the through-hole wall by the following steps. 1 Immersion in catalytic solution PdCl 2 0.5 g / SnCl 2 25 g / HCl 350 ml / Room temperature, 5 minute immersion 2 Water washing 3 Activation treatment HCl 50 ml / Room temperature, 5 minute immersion 4 Water washing 5 Drying 80℃, 15 minutes After formation of catalyst layer , pattern printing was performed using an alkali-removable etching resist to form an etching resist film, and then CuCl 2 mol/,
Using an etching solution containing 0.01 mole of CuCl and 3 mole of HCl, the copper in the non-resist area was removed by etching at a temperature of 55° C. using a spray etching device. Next, the etching resist film was removed by using an alkaline aqueous stripping solution having the composition shown below and under the following conditions. Stripping solution composition NaOH 4.0% by weight Reducing agent shown in Table 1 0.01 mol / Stripping condition Temperature 40°C Time 5 minutes After that, by using epoxy solder resist ink on parts other than lands, through holes and necessary circuit parts, A plating resist film was formed, and then immersed in an electroless copper plating solution having the following composition, and plating was performed under the following conditions. Electroless copper plating solution composition and plating conditions CuSO 4・5H 2 O 0.04 mol / Formaldehyde (37%) 0.3 〃 EDTA・4Na 0.1 〃 NaCN 5ppm PH (adjusted with NaOH) 12.2 Plating temperature 30℃ Plating time 15 After plating, the presence or absence of plating defects in the through holes was observed using a stereomicroscope. The results are shown in Table 1.
【表】【table】
【表】
第1表の結果より、エツチングレジスト膜の剥
離液に還元剤を添加することによつてスルホール
めつき不良を確実に回避し得ることが認められ
た。[Table] From the results shown in Table 1, it was confirmed that through-hole plating defects could be reliably avoided by adding a reducing agent to the etching resist film stripping solution.
Claims (1)
ール壁に無電解銅めつき析出用触媒層を形成した
後、前記積層板表面にエツチングレジスト膜を形
成し、次いで非レジスト部の銅を溶解除去し、更
に前記エツチングレジスト膜を剥離して銅パター
ン部を形成し、次にランド部及びスルホール並び
に必要回路部分を残してめつきレジスト膜を形成
した後にこの積層板を無電解銅めつき液に浸漬し
て、前記スルホール壁に無電解銅めつき膜を形成
するプリント配線板の製造方法において、前記エ
ツチングレジスト膜の剥離液として還元剤が添加
されたものを用いてエツチングレジスト膜を剥離
することを特徴とするプリント配線板の製造方
法。 2 剥離液がアルカリ性水溶液であり、これに還
元剤を添加するようにした特許請求の範囲第1項
記載の方法。 3 還元剤として次亜リン酸及びその塩、水素化
ホウ素化物並びにアミンボラン化合物から選ばれ
る1種又は2種以上を用いた特許請求の範囲第1
項又は第2項記載の方法。[Scope of Claims] 1. After forming through holes in a copper-clad laminate and forming a catalyst layer for electroless copper plating deposition on the walls of the through holes, an etching resist film is formed on the surface of the laminate, and then a non-resist area is formed. After dissolving and removing the copper, the etching resist film is peeled off to form a copper pattern, and then a plating resist film is formed leaving land parts, through holes and necessary circuit parts, and then this laminate is electrolessly processed. In the method for producing a printed wiring board, which forms an electroless copper plating film on the through-hole wall by immersing the board in a copper plating solution, the etching resist is removed using a stripping solution for the etching resist film to which a reducing agent is added. A method for manufacturing a printed wiring board, characterized by peeling off a film. 2. The method according to claim 1, wherein the stripping solution is an alkaline aqueous solution, and a reducing agent is added thereto. 3. Claim 1 in which one or more types selected from hypophosphorous acid and its salts, borohydrides, and amine borane compounds are used as reducing agents.
or the method described in paragraph 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7990285A JPH0249547B2 (en) | 1985-04-15 | 1985-04-15 | PURINTOHAISENBANNOSEIZOHOHO |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7990285A JPH0249547B2 (en) | 1985-04-15 | 1985-04-15 | PURINTOHAISENBANNOSEIZOHOHO |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61237497A JPS61237497A (en) | 1986-10-22 |
| JPH0249547B2 true JPH0249547B2 (en) | 1990-10-30 |
Family
ID=13703211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7990285A Expired - Lifetime JPH0249547B2 (en) | 1985-04-15 | 1985-04-15 | PURINTOHAISENBANNOSEIZOHOHO |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249547B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0673396B2 (en) * | 1986-06-16 | 1994-09-14 | 株式会社日立製作所 | Method of manufacturing printed circuit board |
-
1985
- 1985-04-15 JP JP7990285A patent/JPH0249547B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61237497A (en) | 1986-10-22 |
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