JPH0249794B2 - - Google Patents
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- Publication number
- JPH0249794B2 JPH0249794B2 JP58250712A JP25071283A JPH0249794B2 JP H0249794 B2 JPH0249794 B2 JP H0249794B2 JP 58250712 A JP58250712 A JP 58250712A JP 25071283 A JP25071283 A JP 25071283A JP H0249794 B2 JPH0249794 B2 JP H0249794B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaning solvent
- liquid
- cleaned
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Cleaning By Liquid Or Steam (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は洗浄装置に関するものであり、例えば
油等で汚染された精密機器類（IC、電子機器、
液晶パネル、ポンプ等）を洗浄する洗浄装置とし
て用いて有効である。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a cleaning device, for example, a cleaning device for cleaning precision equipment (IC, electronic equipment, etc.) contaminated with oil or the like.
It is effective when used as a cleaning device for cleaning liquid crystal panels, pumps, etc.
洗浄装置は、例えば油等で汚染された精密機器
類（例えばIC、電子機器、液晶パネル、ポンプ
等）をフロン、トルクロルエチレン等の洗浄用溶
剤中に浸漬するなどして油等を除去する装置であ
つて、従来その構造は第１図に示すように、洗浄
装置本体８と蒸留器９とにより成り、洗浄装置本
体１内はヒータ３ａを有する温浴槽３、超音波振
動子４ａを有する冷浴槽４、ヒータ５ａを奏する
ベーパー槽５より構成されている。その洗浄方法
は、まず被処理物（ワーク）を治具付チエンコン
ベア１９に乗せ、温浴槽３に浸漬する。この温浴
槽３内でワークに付着している油等は膨張し、一
部洗浄溶剤中に溶解する。次に、冷浴槽４内に浸
漬し、超音波により油等の異物をワークより剥離
させると同時に、ワークの温度を下げる。さらに
ベーパー槽５内に搬送しベーパー雰囲気中に設置
する。すると、ワーク表面で洗浄溶剤が凝縮しワ
ーク表面をすすぎ洗いする。この後、ワークを冷
却蛇管７の上部に移動させ、ワークを乾燥して取
り出す。この様な洗浄過程において、例えば１個
のワークに付着している油分量が70mg／個のもの
を洗浄して、油分量１〜２mg／個以下の洗浄品質
を得るには温浴槽３、冷浴槽４、ベーパー槽５に
各180秒間浸漬する必要があり、設備自体が大型
に、かつヒータ３ａ，５ａ容量も大きくなり、設
備費・エネルギ費が高くなるという問題点があつ
た。
Cleaning equipment removes oil by immersing precision equipment (e.g. ICs, electronic devices, liquid crystal panels, pumps, etc.) contaminated with oil in a cleaning solvent such as Freon or Torchlorethylene. As shown in FIG. 1, this device conventionally has a structure consisting of a cleaning device main body 8 and a distiller 9, and the inside of the cleaning device main body 1 includes a hot bath 3 having a heater 3a and an ultrasonic vibrator 4a. It is composed of a cold bath 4 and a vapor tank 5 that has a heater 5a. In the cleaning method, first, a workpiece is placed on a chain conveyor 19 with a jig and immersed in a hot bath 3. Oil and the like adhering to the work in the hot bath 3 expands and partially dissolves in the cleaning solvent. Next, the workpiece is immersed in a cold bath 4, and foreign substances such as oil are peeled off from the workpiece by ultrasonic waves, and at the same time, the temperature of the workpiece is lowered. Further, it is transported into a vapor tank 5 and placed in a vapor atmosphere. Then, the cleaning solvent condenses on the workpiece surface and rinses the workpiece surface. Thereafter, the workpiece is moved to the upper part of the cooling corrugated tube 7, dried, and taken out. In such a cleaning process, for example, to clean a workpiece with an oil content of 70 mg/piece and obtain a cleaning quality with an oil content of 1 to 2 mg/piece, hot bath 3 and cold bath 3 are used. It is necessary to immerse the body in the bathtub 4 and the vapor tank 5 for 180 seconds each, which increases the size of the equipment itself and the capacity of the heaters 3a and 5a, resulting in higher equipment and energy costs.
本発明は上記の問題に鑑み、被洗浄物の表面の
付着物および微細な間隙中の付着物を短時間に洗
浄することを目的とする。
SUMMARY OF THE INVENTION In view of the above-mentioned problems, it is an object of the present invention to clean deposits on the surface of an object to be cleaned and deposits in minute gaps in a short time.
この目的を達成するため本発明では、洗浄溶剤
液を加圧縮及び大気圧沸点以上に加熱した状態の
洗浄溶剤液を、洗浄槽の洗浄溶剤液中で被洗浄物
に噴射して洗浄を行なう構成とした。
In order to achieve this object, the present invention has a configuration in which cleaning is performed by spraying the cleaning solvent liquid, which has been pressurized and heated above the atmospheric pressure boiling point, onto the object to be cleaned in the cleaning solvent liquid of the cleaning tank. And so.
次に本発明の実施例を図面に基づいて説明す
る。
Next, embodiments of the present invention will be described based on the drawings.
第２図は本実施例の洗浄装置８全体を示す断面
図である。洗浄装置８はその外形を保温材等の外
枠１によつて形成され、この外枠１内に内枠２が
区画されている。この内外枠１，２の上方側面に
は搬送開口部１ａが形成され、この搬送開口部１
ａより治具付チエンコンベア１０に取付けられた
被洗浄物１６が洗浄装置８内に搬入される。治具
付ウエンコンベア１０はターンホイール６によつ
てその進行方向を変えており、搬送開口部１ａよ
り洗浄装置８内に進行した直後に下方に向かつて
進行する。この治具付チエンコンベア１０が下方
に向う途中にコイル状の冷却蛇管１７が配され、
この冷却蛇管１７の内方を治具付チエンコンベア
１０が通過している。冷却蛇管１７の内部には冷
水が流れており、冷却蛇管１７の近傍を冷却して
いる。下方に進行する治具付チエンコンベア１０
は洗浄装置８の荒洗浄槽８ａ内の下方までくる
と、２つのターンホイール６によつて進行方向を
上方に逆転している。被洗浄物１６は洗浄溶剤液
を保有している荒洗浄槽８ａ内を進む。さらに、
荒洗浄槽８ａ内を進むと大気圧沸点以上に加圧加
熱された洗浄溶剤液を被洗浄物１６に噴射する噴
射手段として直進性の第１ノズル１３ａが配設さ
れている。このノズル１３ａゾーンを通過し、荒
洗浄槽８ａを出、２つのターンホイール６にて
180゜方向転換され、仕上洗浄槽８ｂ内に侵入す
る。被洗浄物１６は仕上洗浄槽８ｂ内で２つのタ
ーンホイール６で180゜方向転換され、仕上洗浄槽
８ｂ内に侵入する。被洗浄物１６は仕上洗浄槽８
ｂ内で２つのターンホイール６で18゜方向転換さ
れ、大気圧沸点以上に加圧加熱された洗浄溶剤液
を被洗浄物１６に噴射する噴射手段として直進性
の第２ノズル１３ｂが配設されている。このノズ
ル１３ｂゾーンを通過し、仕上洗浄槽８ｂを出て
進む途中に前記冷却蛇管１７配され、この冷却蛇
管１７を通過後は洗浄装置８の内側に沿つて進行
し、前記搬送開口部１ａに達する。また、荒洗浄
槽８ａに洗浄溶剤液を加圧吐出する加圧手段とし
ての第１スプレーポンプ１１ａが配設され、さら
に第１スプレーポンプ１１ａより加圧吐出された
洗浄溶剤液を、大気圧沸点以上に加熱するための
加熱手段として第１熱交換器１２ａが配されてい
る。なお、この熱交換器１２ａは温水等により間
接加熱するものである。同様に仕上洗浄槽８ｂに
第２スプレーポンプ１１ｂ及び熱交換器１２ｂが
配されている。そして、荒洗浄槽８ａ内の汚れた
洗浄溶剤液はヘツド差により蒸留器流入配管９ａ
を介して蒸留器９に流入し、蒸留器９内で汚れた
液を蒸留し、清浄な洗浄溶剤液を蒸留器流出配管
９ｂを介し、仕上洗浄槽８ｂ内に流入させる。従
つて、仕上洗浄槽８ｂは清浄な洗浄溶剤液で保持
され、設定量以上の洗浄溶剤液は仕上洗浄槽８ｂ
よりオーバーフローし荒洗浄槽８ａ内に流入し、
荒洗浄槽８ａ内も清浄にする構造になつている。
さらに、前記熱交換器１２ａ，１２ｂとノズル１
３ａ，１３ｂはそれぞれ配管１５ａ，１５ｂによ
り接続され、第２ノズル１３ｂより噴射される洗
浄溶剤液は、第１ノズル１３ａより噴射される洗
浄溶剤液より極めて清浄なものである。清浄溶剤
液は第１及び第２ノズル１３ａ，１３ｂより大気
圧沸点以上の高温液となつて洗浄溶剤液中に噴射
されるが、一部の噴射された洗浄溶剤液は気化し
洗浄溶剤蒸気となつて洗浄装置８内に浮遊するが
冷却蛇管１７によつて再び冷却液化される。冷却
蛇管１７にて冷却液化された洗浄溶剤液は、洗浄
装置８の外面に設置された水分分離器１８に流入
する。この水分分離器１８は溶剤液と水とを比重
差によつて分離する装置で、分離された洗浄溶剤
液は前記蒸留器９によつて蒸留された洗浄溶剤液
と合流し、仕上洗浄槽８ｂ内に流入する。また、
本実施例では洗浄溶剤としてフロン溶剤を用いて
いる。 FIG. 2 is a sectional view showing the entire cleaning device 8 of this embodiment. The cleaning device 8 has an outer shape formed by an outer frame 1 made of a heat insulating material or the like, and an inner frame 2 is defined within the outer frame 1. A conveyance opening 1a is formed on the upper side surfaces of the inner and outer frames 1 and 2.
The object to be cleaned 16 attached to the jig-equipped chain conveyor 10 is carried into the cleaning device 8 from a. The moving direction of the jig-equipped wet conveyor 10 is changed by the turnwheel 6, and immediately after moving into the cleaning device 8 through the conveyance opening 1a, the jig-equipped wet conveyor 10 moves downward. A coiled cooling corrugated pipe 17 is arranged on the way down of this jig-equipped chain conveyor 10,
A jig-equipped chain conveyor 10 passes inside this cooling corrugated pipe 17. Cold water flows inside the cooling corrugated tube 17 to cool the vicinity of the cooling corrugated tube 17. Chain conveyor 10 with jig moving downward
When it reaches the lower part of the rough cleaning tank 8a of the cleaning device 8, its traveling direction is reversed upward by the two turn wheels 6. The object to be cleaned 16 moves through a rough cleaning tank 8a containing a cleaning solvent. moreover,
Proceeding through the rough cleaning tank 8a, a linear first nozzle 13a is provided as a spraying means for spraying a cleaning solvent liquid heated under pressure to a boiling point above the atmospheric pressure onto the object 16 to be cleaned. It passes through this nozzle 13a zone, exits the rough cleaning tank 8a, and is processed by two turn wheels 6.
It is turned 180 degrees and enters the finishing cleaning tank 8b. The object 16 to be cleaned is turned 180 degrees by two turn wheels 6 in the finishing cleaning tank 8b, and enters the finishing cleaning tank 8b. The object to be cleaned 16 is in the finishing cleaning tank 8
b, the direction is changed by 18 degrees by the two turn wheels 6, and a straight second nozzle 13b is disposed as an injection means for injecting the cleaning solvent liquid heated under pressure to above the atmospheric pressure boiling point onto the object 16 to be cleaned. ing. After passing through this nozzle 13b zone and exiting the finishing cleaning tank 8b, the cooling corrugated pipe 17 is disposed, and after passing through this cooling corrugated tube 17, it advances along the inside of the cleaning device 8 and enters the conveyance opening 1a. reach Further, a first spray pump 11a is provided as a pressurizing means for discharging a cleaning solvent solution under pressure into the rough cleaning tank 8a, and furthermore, the cleaning solvent solution discharged under pressure from the first spray pump 11a is heated to a boiling point at atmospheric pressure. A first heat exchanger 12a is disposed as a heating means for heating above. Note that this heat exchanger 12a is for indirect heating using hot water or the like. Similarly, a second spray pump 11b and a heat exchanger 12b are arranged in the finishing cleaning tank 8b. The dirty cleaning solvent solution in the rough cleaning tank 8a is removed from the distiller inlet pipe 9a due to the head difference.
The dirty liquid is distilled in the distiller 9, and the clean cleaning solvent liquid is made to flow into the final cleaning tank 8b via the distiller outlet pipe 9b. Therefore, the final cleaning tank 8b is held with clean cleaning solvent, and the cleaning solvent in excess of the set amount is kept in the final cleaning tank 8b.
It overflows and flows into the rough cleaning tank 8a,
The inside of the rough cleaning tank 8a is also cleaned.
Furthermore, the heat exchangers 12a, 12b and the nozzle 1
3a and 13b are connected by pipes 15a and 15b, respectively, and the cleaning solvent sprayed from the second nozzle 13b is much cleaner than the cleaning solvent sprayed from the first nozzle 13a. The cleaning solvent liquid is injected from the first and second nozzles 13a and 13b into the cleaning solvent liquid as a high-temperature liquid with a boiling point at atmospheric pressure or higher, but some of the injected cleaning solvent liquid vaporizes and becomes cleaning solvent vapor. The liquid then floats in the cleaning device 8, but is cooled and liquefied again by the cooling corrugated pipe 17. The cleaning solvent liquid cooled and liquefied in the cooling spiral pipe 17 flows into a moisture separator 18 installed on the outer surface of the cleaning device 8 . This water separator 18 is a device that separates the solvent liquid and water based on the difference in specific gravity, and the separated cleaning solvent liquid joins the cleaning solvent liquid distilled by the distiller 9, and the final cleaning tank 8b flow inside. Also,
In this embodiment, a fluorocarbon solvent is used as the cleaning solvent.
次に本実施例の作動について説明する。 Next, the operation of this embodiment will be explained.
まず、搬送開口部１ａより外方に出ている治具
付チエンコンベア１０に、油等で汚れた被洗浄物
１６を取付ける。治具付チエンコンベア１０は図
示してない駆動源により第２図中矢印Ｒで示す方
向に駆動されており、最初に被洗浄物１６は冷却
蛇管１７の内側を通過する。その後、治具付チエ
ンコンベア１０の進行に伴い荒洗浄槽８ａ内に入
り、洗浄溶剤液中に浸漬する。被洗浄槽１６に付
着している油等は、溶剤液により膨潤し、一部洗
浄溶剤液中に溶解し、第１ノズルゾーンに進行す
る。第１スプレーポンプ１１ａにて0.5〜２Kg／
cm2（ゲージ圧）にまで加圧された洗浄溶剤液は、
その後熱交換器１２ｂにより50〜80℃まで加熱さ
れる。そして、この加圧加熱された洗浄溶剤液は
第１ノズル１３ａより洗浄溶剤液中に噴射され
る。この噴射された洗浄溶剤は、液中を直線状に
進行し被洗浄物の表面または近傍を高速で流れ
る。この時、洗浄溶剤液とその液中に噴射された
洗浄溶剤との境界面には、洗浄溶剤液の蒸発によ
つて蒸気層が形成され、この内側には、大気圧沸
点以上に圧縮加熱された洗浄溶剤が外側の蒸気層
に保護されて直進することとなる。また、この蒸
気層が形成されて膨張する過程においては、内側
に圧力をおよぼすこととから、噴射された洗浄溶
剤の直進性をさらに良好にする。この加圧加熱し
て噴射された洗浄溶剤は、気化するに十分な熱量
をもつているため、液体と気体の混合状態で液中
を進行し、被洗浄物１６に均一に到達する。そし
て、被洗浄物１６の表面に付着している油等の除
去は容易にできる。さらにこの液体と気体の混合
状態で噴射された洗浄溶剤は、液体状態より粘性
が小さいため、従来では洗浄するに非常に困難で
あつた微細な間隙をも流入し洗浄効果をあげる。 First, the object to be cleaned 16 contaminated with oil or the like is attached to the jig-equipped chain conveyor 10 extending outward from the conveyance opening 1a. The jig-equipped chain conveyor 10 is driven by a drive source (not shown) in the direction indicated by an arrow R in FIG. Thereafter, as the jig-equipped chain conveyor 10 advances, it enters the rough cleaning tank 8a and is immersed in the cleaning solvent solution. Oil and the like adhering to the cleaning tank 16 swells with the solvent, partially dissolves in the cleaning solvent, and advances to the first nozzle zone. 0.5-2Kg/at the first spray pump 11a
The cleaning solvent solution pressurized to cm 2 (gauge pressure) is
Thereafter, it is heated to 50 to 80°C by the heat exchanger 12b. Then, this pressurized and heated cleaning solvent liquid is injected into the cleaning solvent liquid from the first nozzle 13a. The sprayed cleaning solvent travels linearly through the liquid and flows at high speed on or near the object to be cleaned. At this time, a vapor layer is formed at the interface between the cleaning solvent liquid and the cleaning solvent injected into the liquid due to evaporation of the cleaning solvent liquid, and inside this vapor layer is compressed and heated to a temperature higher than the atmospheric pressure boiling point. The cleaning solvent is protected by the outer vapor layer and travels straight. Moreover, in the process of forming and expanding this vapor layer, pressure is applied to the inside, which further improves the straightness of the injected cleaning solvent. This pressurized and heated cleaning solvent has enough heat to vaporize, so it travels through the liquid in a mixed state of liquid and gas, and uniformly reaches the object 16 to be cleaned. In addition, oil and the like adhering to the surface of the object to be cleaned 16 can be easily removed. Furthermore, since the cleaning solvent sprayed in a mixed state of liquid and gas has a lower viscosity than that of a liquid state, it can flow into fine gaps that are extremely difficult to clean in the past, and achieve a cleaning effect.
次に、被洗浄物１６は仕上洗浄槽８ｂに入り、
第２ノズル１３ｂよりさらに加圧加熱された洗浄
溶剤液が第１ノズル１３ａと同様に噴出し、被洗
浄物１６を高品質に洗浄することができる。 Next, the object to be cleaned 16 enters the finishing cleaning tank 8b,
The cleaning solvent liquid further heated under pressure is ejected from the second nozzle 13b in the same manner as the first nozzle 13a, and the object to be cleaned 16 can be cleaned with high quality.
ここで洗浄溶剤に加える圧力と洗浄溶剤（フロ
ン溶剤）の沸点との関係を第３図に示す。この第
３図よりわかる様に、洗浄溶剤は大気圧下で47.6
℃で蒸発するが、0.5Kg／cm2加圧時では61℃、２
Kg／cm2加圧時では84℃で蒸発する。２Kg／cm2加圧
の例で説明すると、ノズル１３ａ，１３ｂ内まで
は２／Kg／cm2、80℃の洗浄溶剤は高温液状態のま
まであり、この洗浄溶剤液を被洗浄物に向けて噴
射させる。常温と80℃のフロン溶剤の保有する熱
エネルギは約10倍異なる。この熱エネルギを利用
して80℃の洗浄溶剤液を被洗浄物に噴射させるこ
とにより、被洗浄物表面に付着している油等は従
来540秒かかつていたものが約30秒で約70mg／個
から１〜２mg／個の残留油分になる。さらに30〜
100μ程の微間隙中に油等が付着している被洗浄
物の洗浄も従来の浸漬洗浄法では15分程度必要だ
つたが、本発明装置では60秒という短時間で洗浄
できるようになつた。なお、0.5Kg／cm2、50℃の
洗浄溶剤液を被洗浄物に噴射させてもほぼ同様の
結果を得ることができた。 FIG. 3 shows the relationship between the pressure applied to the cleaning solvent and the boiling point of the cleaning solvent (fluorocarbon solvent). As can be seen from this figure 3, the cleaning solvent is 47.6% under atmospheric pressure.
℃, but when 0.5Kg/ cm2 pressure is applied, it evaporates at 61℃, 2
Kg/ cm2 Evaporates at 84℃ when pressurized. To explain using an example of applying a pressure of 2 Kg/cm 2 , the cleaning solvent at 2/Kg/cm 2 and 80°C remains in a high temperature liquid state up to the inside of the nozzles 13a and 13b, and this cleaning solvent is directed toward the object to be cleaned. and spray it. The thermal energy possessed by CFC solvents at room temperature and 80°C is approximately 10 times different. By using this thermal energy to spray a cleaning solvent solution at 80°C onto the object to be cleaned, oil etc. adhering to the surface of the object to be cleaned can be reduced to about 70 mg/kg in about 30 seconds, compared to the previous 540 seconds. 1 to 2 mg of residual oil per piece. Another 30~
With the conventional immersion cleaning method, it took about 15 minutes to clean objects with oil and other substances adhering to them in minute gaps of about 100 microns, but with the device of the present invention, cleaning can now be done in as little as 60 seconds. . In addition, almost the same results could be obtained even when a cleaning solvent solution of 0.5 kg/cm 2 and 50° C. was sprayed onto the object to be cleaned.
洗浄溶剤液噴射によつて洗浄された被洗浄物
は、治具付チエンコンベヤ１０に伴つて、冷却蛇
管１７の内側を通過して乾燥され、搬送開口部１
ａまで運ばれる。 The object to be cleaned, which has been cleaned by spraying the cleaning solvent, passes through the inside of the cooling corrugated pipe 17 along with the jig-equipped chain conveyor 10, is dried, and then passes through the conveying opening 1.
carried to a.
荒洗浄槽８ａ内で被洗浄物１６に付着している
油等の約90％が除去され、仕上洗浄槽８ｂ内で残
りの油等が除去されている。従つて荒洗浄槽８ａ
内の洗浄溶剤液は汚れるので、この液を蒸留器９
で再生し、蒸留した液を仕上洗浄槽８ｂに流入さ
せ、さらに仕上洗浄槽８ｂ内の液をオーバフロー
させ、荒洗浄槽８ａ内に流入する回路にしてあ
り、常に各槽８ａ，８ｂ内の液清浄度を保護して
いる。 Approximately 90% of the oil adhering to the object to be cleaned 16 is removed in the rough cleaning tank 8a, and the remaining oil etc. is removed in the finishing cleaning tank 8b. Therefore, the rough cleaning tank 8a
The cleaning solvent inside the tank will become dirty, so this liquid should be removed from the distiller 9.
The circuit is configured such that the distilled liquid is allowed to flow into the finishing washing tank 8b, and then the liquid in the finishing washing tank 8b is caused to overflow and flows into the rough washing tank 8a, so that the liquid in each tank 8a, 8b is constantly Protects cleanliness.
さらに、槽８ａ，８ｂ内の洗浄溶剤液中で洗浄
溶剤を噴射するため、大気中で噴射するのに比
べ、洗浄溶剤蒸気の発生が少なく、冷却蛇管１７
の冷却能力も少なくてすみ、かつ洗浄装置８の外
へ飛散する洗浄溶剤蒸気も低くおさえることがで
き、省資源にもなるという効果がある。 Furthermore, since the cleaning solvent is injected into the cleaning solvent liquid in the tanks 8a and 8b, less cleaning solvent vapor is generated compared to when the cleaning solvent is injected in the atmosphere.
The cooling capacity of the cleaning device 8 can also be reduced, and the amount of cleaning solvent vapor scattered outside the cleaning device 8 can be suppressed to a low level, resulting in resource savings.
なお、上記実施例では荒洗浄槽、仕上洗浄槽の
二層に分けたが、油等の付着量が少ない被洗浄物
を洗浄する場合には、一槽でも十分効果が得られ
ることはもちろんである。また、洗浄溶剤として
フロン溶剤を用いたが、トリクロルエチレン、ト
リクロールエタン等の洗浄溶剤でも同様の効果を
得ることができる。 In the above example, the cleaning tank is divided into two layers: a rough cleaning tank and a finishing cleaning tank, but it goes without saying that a single tank can be sufficiently effective when cleaning objects with a small amount of oil, etc. be. Further, although a fluorocarbon solvent was used as the cleaning solvent, similar effects can be obtained with cleaning solvents such as trichloroethylene and trichloroethane.
更に、熱交換換器１２ａ，１２ｂを用いて、洗
浄溶剤を温水で間接加熱したが、電気ヒータで直
接加熱してもよい。 Furthermore, although the cleaning solvent was indirectly heated with hot water using the heat exchangers 12a and 12b, it may be directly heated with an electric heater.
また、ノズル１３ａ，１３ｂとして直進性のな
るものを利用したが、被洗浄物１６の大きさ等に
よりＶ型、フルコーン型等のノズルを用いても良
い。 Moreover, although the nozzles 13a and 13b are straight-advance ones, V-shaped, full-cone, etc. nozzles may be used depending on the size of the object 16 to be cleaned.
（発明の効果）
以上説明した様に、本発明の洗浄装置を用いれ
ば従来より極めて短時間に高品質の洗浄を行なう
ことができる。また、従来の洗浄装置で非常に長
時間を要した被洗浄物の微細な間隙に対しても、
容易に洗浄することが可能となる。さらに、洗浄
溶剤液中に位置する被洗浄物に噴射して洗浄する
から、空気中に飛散する洗浄溶剤が少なくなり、
洗浄溶剤液を効率良く利用することができる。(Effects of the Invention) As explained above, by using the cleaning device of the present invention, high-quality cleaning can be performed in a much shorter time than in the past. In addition, it can be used to clean the minute gaps in the object to be cleaned, which took a very long time with conventional cleaning equipment.
It becomes possible to wash easily. Furthermore, since the object to be cleaned is sprayed onto the object located in the cleaning solvent solution, less cleaning solvent is scattered into the air.
The cleaning solvent solution can be used efficiently.
第１図は従来の洗浄装置を示す断面図、第２図
は本発明の実施例を示す断面図、第３図はフロン
溶剤の圧力と沸点との関係を示す図である。
１１ａ，１１ｂ…スプレーポンプ（圧縮手段）、
１２ａ，１２ｂ…熱交換器（加熱手段）、１３ａ，
１３ｂ…ノズル（噴射手段）。
FIG. 1 is a sectional view showing a conventional cleaning device, FIG. 2 is a sectional view showing an embodiment of the present invention, and FIG. 3 is a diagram showing the relationship between the pressure and boiling point of a fluorocarbon solvent. 11a, 11b...spray pump (compression means),
12a, 12b...heat exchanger (heating means), 13a,
13b... Nozzle (injection means).
Claims (1)
を加圧する加圧手段と、この加圧手段で加圧され
た洗浄溶剤液が供給され、該洗浄溶剤液を大気圧
における沸点以上で加圧状態における沸点以下の
温度に加熱する加熱手段と、前記加圧手段及び加
熱手段によつて加圧加熱された洗浄溶剤液が供給
され、該洗浄溶剤液を前記洗浄槽の大気圧の洗浄
溶剤液中で被洗浄物に噴射する噴射手段とを備え
る洗浄装置。1. A cleaning tank containing a cleaning solvent solution, a pressurizing means for pressurizing the cleaning solvent solution, and a pressurized cleaning solvent solution supplied by the pressurizing means, and the cleaning solvent solution is pressurized at a temperature higher than the boiling point at atmospheric pressure. A heating means for heating to a temperature below the boiling point in a pressure state, and a cleaning solvent liquid heated under pressure by the pressurizing means and the heating means are supplied, and the cleaning solvent liquid is supplied to the cleaning tank at atmospheric pressure. A cleaning device comprising a spraying means for spraying liquid onto an object to be cleaned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25071283A JPS60137481A (en) | 1983-12-25 | 1983-12-25 | Washing method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25071283A JPS60137481A (en) | 1983-12-25 | 1983-12-25 | Washing method and device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60137481A JPS60137481A (en) | 1985-07-22 |
| JPH0249794B2 true JPH0249794B2 (en) | 1990-10-31 |
Family
ID=17211926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25071283A Granted JPS60137481A (en) | 1983-12-25 | 1983-12-25 | Washing method and device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60137481A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5381927B2 (en) * | 2010-07-30 | 2014-01-08 | 株式会社デンソー | Washing and drying method and washing and drying apparatus |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5218594U (en) * | 1975-07-28 | 1977-02-09 | ||
| SE413477B (en) * | 1978-09-06 | 1980-06-02 | Ekstrom & Co H A B | EXPANDABLE DORN FOR USE IN BUILDING OF Pipes |
| JPS5826616Y2 (en) * | 1981-07-07 | 1983-06-08 | 千年 内田 | A removable cold-weather collar that can also be used as a storage bag for two small items, and a cover for a warmer. |
-
1983
- 1983-12-25 JP JP25071283A patent/JPS60137481A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60137481A (en) | 1985-07-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |