JPH0252537B2 - - Google Patents

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention is directed to the epitaxial growth of semiconductor crystals, the diffusion of impurities into semiconductors, the growth of amorphous thin films, insulating films, the production of silica-based optical fibers, etc. The present invention relates to a reactive liquid container for containing a liquid.

[Prior art]

Conventionally, in order to transport the above-mentioned reactive liquid into a reaction container and cause the desired reaction, a carrier gas is introduced into a container containing the reactive liquid, and the liquid is transported together with the vapor of the liquid to the reaction container. was being carried out. In such a case, there are two methods for introducing the carrier gas into the reactive liquid container: a method in which the inlet for the carrier gas is provided above the surface of the reactive liquid in the reactive liquid container, and a method in which the inlet port is provided below the liquid surface.

In the former case, where the gas inlet is provided above the liquid level, the distance between the gas inlet and the outlet for the vapor of the reactive liquid supported by the carrier gas and the liquid level will vary depending on the amount of remaining liquid, and the cross-section of the container will vary depending on the height. If they are different, the area of the gas-liquid interface will change depending on the amount of residual liquid. Therefore, even if the temperature and carrier gas flow rate are the same, the evaporation rate will differ depending on the amount of residual liquid, resulting in a different concentration of liquid vapor, and the method of taking in the vapor will also change, resulting in a similar concentration difference. There was a problem in that the reproducibility of the single crystal composition, impurity concentration, impurity concentration of the diffusion layer, etc. was not good.

In the latter case, in which the gas inlet is provided below the liquid surface and the carrier gas is bubbled into the liquid, in addition to the problem of poor reproducibility due to changes in the liquid level depending on the amount of remaining liquid, as well as the following problems: Problems like this arise. In other words, when the carrier gas bubbles emitted from the inlet collapse on the liquid surface, some of the droplets are transported as minute droplets to the reaction vessel, and some of them are transported to the gas piping section and adhere to the pipe wall. . Since the temperature of the tube walls etc. is usually not controlled, the amount of these vapors changes depending on the ambient temperature, causing the same problem of poor reproducibility as described above. In addition, the liquid adhering to the tube wall decomposes and precipitates powder or oxides, which has an adverse effect.

[Purpose of the invention]

The present invention has been made to solve these drawbacks, and its purpose is to provide a reactive liquid container that can improve the controllability and reproducibility of the concentration of liquid vapor contained in the carrier gas from the outlet. It is in. Another object of the present invention is to provide a reactive liquid container in which the remaining amount of liquid in the container can be easily determined.

[Structure of the invention]

To summarize the present invention that achieves the above object, the present invention provides a reactive liquid container provided with an inlet for a carrier gas and an outlet for the vapor of a reactive liquid carried by the carrier gas, wherein the interior of the container is a partition wall and a first zone is formed. and a second zone, the first zone and the second zone communicate with each other at the lower part of the partition wall, and the first zone is provided with the inlet and the outlet. ) and a reactive liquid container provided with a carrier gas inlet and an outlet for the vapor of the reactive liquid carried by the carrier gas, the interior of the container is divided by a partition into a first zone and a second zone, and the first zone and A reactive liquid container that communicates with the second zone at the lower part of the partition, the first zone being provided with the inlet and the outlet, and the second zone being provided with a pressure gauge for displaying the atmospheric pressure of the zone. (Second invention). With the above configuration, the present invention makes it possible to set the gas-liquid interface where the reactive liquid in the container evaporates in the first zone, and to keep the position of the gas-liquid interface constant.

Next, the configuration of the reactive liquid container of the present invention will be explained with reference to the drawings. FIG. 1 shows a cross-sectional view of one embodiment of the reactive liquid container of the present invention. A reactive liquid (hereinafter simply referred to as liquid) 2 is contained in a container 1 . 3 is a pipe for introducing carrier gas into the container, and 4 is a pipe for discharging the carrier gas together with liquid vapor. The inside of the container is divided by a partition wall 5 into a first zone 6 equipped with a gas introduction pipe 3 and a discharge pipe 4, and a second zone 7 cut off from the outside world.
Each zone 6 and 7 communicates at the lower part of the partition wall 5 as shown. For this communication, the partition wall 5 may be made shorter than the length of the container as shown in the figure, or a through hole may be provided in a part of the partition wall.

The vapor of the liquid supported by the carrier gas is discharged, and when the liquid evaporates, the liquid level 8 in the first zone falls, and when it falls below the communication part between the first zone and the second zone, the gas enters the second zone 7, and the liquid level 8 in the first zone falls. The liquid level in the band rises. That is, the position of the liquid level 8 is substantially fixed near the uppermost end of the communication portion (lower end of the partition wall 5). Therefore, problems associated with changes in the liquid level position and surface area due to changes in the remaining amount of liquid can be avoided, and the desired liquid vapor can be generated simply by controlling the liquid temperature and carrier gas flow rate. It can be discharged with good reproducibility.

Reference numeral 9 indicates a hole provided for cleaning the container, replenishing liquid, etc., and is sealed by a threaded portion 10. However, these configurations do not affect the operation of the present invention, and merely improve the effectiveness of the container. This is merely a specific example of the bottom structure.

This container can be filled with liquid by evacuating the inside of the container to an appropriate degree and then sucking in the liquid. After adding the desired amount of liquid, by introducing a gas of the same type as the carrier gas or an inert gas, it is possible to create a difference in the liquid level position as shown in the figure.

FIG. 2 shows another embodiment of the present invention, which is a sectional view of a container provided with a pressure gauge 11 for measuring and displaying the internal pressure of the upper gas-filled portion of the second zone 7 of the container described above. The internal pressure of the second zone 7 is the same as that of the first zone 6.
The pressure decreases by the difference in the height of the liquid level, so by knowing the pressure, you can know the remaining amount of liquid. To do this more accurately, the first and second bands
What is necessary is to display the differential pressure in the band. This differential pressure is given by ρgh. Here ρ is the density of the liquid,
g is the gravitational acceleration and h is the height of the liquid level.

In the figure, the tip of the carrier gas introduction pipe 3 is shown to be below the liquid level in the second zone 7, but it may be shorter than this, and in the extreme it does not need to protrude into the container like the exhaust pipe. . Alternatively, an exhaust pipe may be provided extending into the container.

The reactive liquid contained in the container varies depending on its field of use, but may be water used for oxidizing silicon, for example, and does not need to be extremely reactive under normal conditions.

〔Effect of the invention〕

As explained above, in the present invention, the following effects can be achieved by providing a partition inside the container to divide it into two zones, and concentrating the carrier gas inlet and liquid vapor outlet in one of the zones.

The first effect is that the liquid level can be maintained constant regardless of the amount of liquid remaining, and the carrier gas inlet
Also, the positional relationship between the discharge port and the liquid level can be kept constant.
As a result, the liquid vapor concentration in the carrier gas discharged from the container is determined only by the temperature of the liquid and the flow rate of the carrier gas, and can be controlled with good reproducibility.

The second effect is that by adding a pressure gauge to such a container, the remaining amount of liquid can be easily determined. The effect is most noticeable in containers made of metal or other materials whose interior cannot be viewed directly.

[Brief explanation of drawings]

1 and 2 show cross-sectional views of one embodiment of the invention. DESCRIPTION OF SYMBOLS 1... Container, 2... Reactive liquid, 3... Carrier gas introduction pipe, 4... Discharge pipe, 5... Partition wall, 6...
...First zone, 7...Second zone, 8...Liquid level, 11
...Pressure gauge.

Claims (1)

[Claims] 1. A reactive liquid container provided with an inlet for a carrier gas and an outlet for vapor of a reactive liquid carried by the carrier gas, in which the inside of the container is divided by a partition into a first zone and a second zone. A reactive liquid container, characterized in that the first zone and the second zone communicate with each other at the lower part of the partition wall, and the first zone is provided with the inlet and the outlet. 2. In a reactive liquid container provided with an inlet for a carrier gas and an outlet for vapor of a reactive liquid carried by the carrier gas, the inside of the container is divided by a partition into a first zone and a second zone, and the interior of the container is divided into a first zone and a second zone. A reactive liquid container, characterized in that the two zones communicate with each other at the lower part of the partition wall, the first zone is provided with the inlet and the outlet, and the second zone is provided with a pressure gauge that displays the atmospheric pressure of the zone.