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JPH0252961B2 - - Google Patents
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JPH0252961B2 - - Google Patents

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Publication number
JPH0252961B2
JPH0252961B2 JP58089566A JP8956683A JPH0252961B2 JP H0252961 B2 JPH0252961 B2 JP H0252961B2 JP 58089566 A JP58089566 A JP 58089566A JP 8956683 A JP8956683 A JP 8956683A JP H0252961 B2 JPH0252961 B2 JP H0252961B2
Authority
JP
Japan
Prior art keywords
detection
edge
output
metal plate
detection coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58089566A
Other languages
Japanese (ja)
Other versions
JPS59214702A (en
Inventor
Hiroshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maki Manufacturing Co Ltd
Original Assignee
Maki Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maki Manufacturing Co Ltd filed Critical Maki Manufacturing Co Ltd
Priority to JP58089566A priority Critical patent/JPS59214702A/en
Publication of JPS59214702A publication Critical patent/JPS59214702A/en
Publication of JPH0252961B2 publication Critical patent/JPH0252961B2/ja
Granted legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Geophysics And Detection Of Objects (AREA)

Description

【発明の詳細な説明】 本発明は、高周波過電流を利用し、導電性を有
する金属体のエツジの位置又はその接近を非接触
的に検出する装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device that uses high-frequency overcurrent to non-contactly detect the position of an edge of a conductive metal body or its approach.

機械工業の技術の進歩は目覚ましく、ロボツト
に代表される如く機械とエレクトロニクスを結合
した自動化システムが極めて重要な位置を占める
に至つている。このような自動化システムに於い
ては、種々の検出装置が重要な機能を果すのであ
るが、特に金属体の位置検出装置は広範な用途に
必要とされるものであり、渦流式、静電容量式、
磁気式等のものが公知である。しかしながら、検
出装置の検出域を横断するように移動する金属体
のエツジの移動方向位置又はその接近を検出する
目的に使用する場合には、従来の検出装置は次の
ような問題点を有していた。
Advances in technology in the mechanical industry are remarkable, and automated systems that combine machines and electronics, such as robots, have come to occupy an extremely important position. In such automated systems, various detection devices play important functions, but metal object position detection devices are especially needed for a wide range of applications, including eddy current type, capacitive type, formula,
Magnetic type and other types are known. However, when used for the purpose of detecting the moving direction position of the edge of a metal body moving across the detection area of the detection device or its approach, the conventional detection device has the following problems. was.

まず、渦流式のものでは検出装置の検出部(プ
ローブ)と検出対象の金属体との離隔距離を正確
に保持しない場合には少なからぬ誤差を生じる。
また、静電容量式のものでは検出部又は検出対象
金属体の表面に付着する水分・油分に影響されて
誤差が生じる。更に、磁気式のものでは検出対象
に発磁体を付加する必要が有るという制約があ
る。
First, with the eddy current type, considerable errors occur if the separation distance between the detection section (probe) of the detection device and the metal object to be detected is not maintained accurately.
Furthermore, in the capacitive type, errors occur due to the influence of moisture and oil adhering to the detection section or the surface of the metal object to be detected. Furthermore, the magnetic type has a limitation in that it is necessary to add a magnetic body to the object to be detected.

本発明は、このような従来装置の問題点を解決
すべくなされたものであつて、検出部と検出対象
の離隔距離によつても検出精度が影響され難く、
またこれらへの水分・油分の付着に影響されない
ことは勿論、水・油の中でも検出可能であり、更
に検出対象に発磁体を付加する必要のない金属体
のエツジ検出装置を提供することを目的とする。
以下、本発明をその実施例を示す図面に基づき具
体的に説明する。
The present invention was made to solve the problems of the conventional device, and the detection accuracy is not easily affected by the distance between the detection unit and the detection target.
Another object of the present invention is to provide an edge detection device for metal bodies that is not affected by moisture or oil adhering to these objects, can be detected even in water or oil, and does not require the addition of a magnetic body to the detection target. shall be.
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be specifically described below based on drawings showing embodiments thereof.

第1図は本発明装置のブロツク図である。1は
検知対象である金属板Aに臨ませるべきプローブ
であつて3個の検出コイル21,22,23及び
抵抗3,3,3を内蔵している。各検出コイル2
1,22,23は杆状のフエライトコア21a,
22a,23aそれぞれに巻線21b,22b,
23bを巻回してなるものであつて、一端を接地
電位とし、他端を抵抗3,3,3を介して高周波
発振器4の出力端子に接続してある。
FIG. 1 is a block diagram of the apparatus of the present invention. Reference numeral 1 denotes a probe which should face the metal plate A to be detected, and has three detection coils 21, 22, 23 and resistors 3, 3, 3 built therein. Each detection coil 2
1, 22, 23 are rod-shaped ferrite cores 21a,
Windings 21b, 22b, 22a, 23a, respectively
23b, one end of which is connected to the ground potential, and the other end connected to the output terminal of the high frequency oscillator 4 via resistors 3, 3, 3.

各検出コイル21,22,23は各フエライト
コア21a,22a,23aの一端面を非磁性体
からなるプローブ1の保護板(図示せず)に臨ま
せてあり、金属板Aの移動方向と3個の検出コイ
ル21,22,23の並設方向とが一致するよう
に配設される。
Each of the detection coils 21, 22, 23 has one end surface of each ferrite core 21a, 22a, 23a facing a protective plate (not shown) of the probe 1 made of a non-magnetic material. The detection coils 21, 22, and 23 are arranged so that the directions in which they are arranged in parallel coincide with each other.

発振器4は100KHz〜10MHz程度の周波数の出
力を発するものであり、前記検出コイル21,2
2,23の巻線21b,22b,23bに高周波
電流を通流せしめる。
The oscillator 4 emits an output with a frequency of about 100KHz to 10MHz, and the detection coils 21 and 2
A high frequency current is passed through the windings 21b, 22b, and 23b.

各検出コイル21,22,23の非接地側端子
は差動増幅器5a,5bに接続されている。即ち
検出コイル21の巻線21bの端子は差動増幅器
5aの+入力端子に、また検出コイル22の巻線
22bの端子は差動増幅器5aの−入力端子及び
差動増幅器5bの+入力端子に、更に検出コイル
23の巻線23bの端子は差動増幅器5bの−入
力端子にそれぞれ接続されている。従つて差動増
幅器5aの出力端子には検出コイル21,22の
端子電圧の差相当の信号が得られることになる。
一方差動増幅器5bの出力端子には検出コイル2
2,23それぞれの端子電圧の差相当の信号が得
られることとなる。
Non-grounded terminals of each detection coil 21, 22, 23 are connected to differential amplifiers 5a, 5b. That is, the terminal of the winding 21b of the detection coil 21 is connected to the +input terminal of the differential amplifier 5a, and the terminal of the winding 22b of the detection coil 22 is connected to the -input terminal of the differential amplifier 5a and the +input terminal of the differential amplifier 5b. Furthermore, the terminals of the winding 23b of the detection coil 23 are respectively connected to the - input terminal of the differential amplifier 5b. Therefore, a signal corresponding to the difference between the terminal voltages of the detection coils 21 and 22 is obtained at the output terminal of the differential amplifier 5a.
On the other hand, the output terminal of the differential amplifier 5b is connected to the detection coil 2.
A signal corresponding to the difference between the terminal voltages of 2 and 23 is obtained.

差動増幅器5a,5bの出力信号はそれぞれ位
相検波回路6a,6bに与えられる。これらの位
相検波回路6a,6bには同期信号として発振器
4の出力が与えられている。
The output signals of differential amplifiers 5a and 5b are provided to phase detection circuits 6a and 6b, respectively. The output of the oscillator 4 is given to these phase detection circuits 6a and 6b as a synchronizing signal.

位相検波回路6a,6bは発信器4からの入力
信号に従い同一位相における差動増幅器5a,5
b出力の成分を出力し、この出力は増幅器7a,
7bそれぞれに与えられてそれぞれ所要レベルに
まで増幅される。
The phase detection circuits 6a and 6b detect differential amplifiers 5a and 5 in the same phase according to the input signal from the oscillator 4.
The component of the b output is output, and this output is sent to the amplifier 7a,
7b and amplified to the required level.

増幅器7a,7bの出力は共に加算回路8及び
減算回路9に与えられる。加算回路8は増幅器7
a,7b出力を加算して和信号PSを出力する。
減算回路9は増幅器7a,7b出力の差を演算し
てその差信号MSを出力する。
The outputs of amplifiers 7a and 7b are both applied to an adder circuit 8 and a subtracter circuit 9. Adder circuit 8 is amplifier 7
A and 7b outputs are added and a sum signal PS is output.
The subtraction circuit 9 calculates the difference between the outputs of the amplifiers 7a and 7b and outputs the difference signal MS.

後述するように和信号PSは金属板Aのエツジ
がプローブ1に接近したことを検出するために利
用され、差信号MSは例えばプローブ1の中心、
即ち検出コイル22の中心を基準とする金属板A
のエツジの位置情報を有する信号として利用され
る。
As will be described later, the sum signal PS is used to detect when the edge of the metal plate A approaches the probe 1, and the difference signal MS is used to detect when the edge of the metal plate A approaches the probe 1, for example.
That is, the metal plate A with the center of the detection coil 22 as a reference
It is used as a signal containing edge position information.

次にこの回路の動作を説明する。まず金属板A
がプローブ1から離れた位置にある場合には、検
出コイル21,22,23の非接地側端子の電圧
は等しいので、差動増幅器5a,5bの出力信号
は零であり和信号PS及び差信号MSはいずれも零
である。次に金属板Aが図示の如く検出コイル2
3側から検出コイル21側へ移動して行く場合の
動作について説明する。今第2図に示す如く、金
属板Aのエツジが検出コイル23に対向している
状態にある場合についてみると、金属板Aに発生
する渦電流は検出コイル23を通流する高周波に
よるものが検出コイル22によるものよりも大き
いので、検出コイル23のインピーダンスが検出
コイル22のインピーダンスより低くなり、この
結果検出コイル23の巻線23bの端子電圧が検
出コイル22の巻線22bの端子電圧よりも低く
なり、その差に相当する電圧信号が差動増幅器5
b出力に得られる。
Next, the operation of this circuit will be explained. First, metal plate A
is located away from the probe 1, the voltages at the non-grounded terminals of the detection coils 21, 22, and 23 are equal, so the output signals of the differential amplifiers 5a and 5b are zero, and the sum signal PS and the difference signal MS is zero in both cases. Next, the metal plate A is connected to the detection coil 2 as shown in the figure.
The operation when moving from the 3 side to the detection coil 21 side will be explained. Now, as shown in FIG. 2, when the edge of the metal plate A is facing the detection coil 23, the eddy current generated in the metal plate A is due to the high frequency flowing through the detection coil 23. Since the impedance of the detection coil 23 is lower than that of the detection coil 22, the terminal voltage of the winding 23b of the detection coil 23 is lower than the terminal voltage of the winding 22b of the detection coil 22. The voltage signal corresponding to the difference is sent to the differential amplifier 5.
b output.

第3図は横軸に検出コイル22の中心から金属
板Aのエツジまでの距離x(検出コイル21側を
正)をとり、縦軸に増幅器7a,7bの出力電圧
をとつて、増幅器7a,7bの出力とxとの関係
を示したものである。図示の如く金属板Aが検出
コイル23の遠方から接近するに従い増幅器7b
出力は増加していき、金属板Aのエツジが検出コ
イル23,22の中心を通るタイミングで極大値
をとり、検出コイル22に接近するに従い増幅器
7b出力は低下して行く。金属板Aのエツジが検
出コイル21側に遠ざかるに従い増幅器7b出力
は零に近付いて行く。
In FIG. 3, the horizontal axis represents the distance x from the center of the detection coil 22 to the edge of the metal plate A (positive on the detection coil 21 side), and the vertical axis represents the output voltages of the amplifiers 7a, 7b. 7b shows the relationship between the output of 7b and x. As shown in the figure, as the metal plate A approaches the detection coil 23 from a distance, the amplifier 7b
The output increases and reaches a maximum value when the edge of the metal plate A passes through the center of the detection coils 23 and 22, and as it approaches the detection coil 22, the output of the amplifier 7b decreases. As the edge of the metal plate A moves away from the detection coil 21 side, the output of the amplifier 7b approaches zero.

検出コイル22と検出コイル21の組み合せに
ついても同じ現象が起り、増幅器7a出力は金属
板Aのエツジが検出コイル22に接近するに従い
増加していき、金属板Aのエツジが検出コイル2
2,21の中心を通過するタイミングで極大値を
とり、検出コイル21から遠ざかるに従つて増幅
器7a出力は減少していく。
The same phenomenon occurs with the combination of the detection coil 22 and the detection coil 21, and the output of the amplifier 7a increases as the edge of the metal plate A approaches the detection coil 22, and the edge of the metal plate A approaches the detection coil 2.
The output of the amplifier 7a reaches its maximum value at the timing when it passes through the center of the coil 21, and decreases as it moves away from the detection coil 21.

第4図は加算回路8の出力、即ち和信号PS及
び減算回路9の出力、即ち差信号MSと検出コイ
ル22中心から金属板Aのエツジまでの距離xと
の関係を示すグラフである。加算回路8は第3図
に示す増幅器7a,7b出力を加算するものであ
るから和信号PSは図示の如く金属板Aのエツジ
側の検出コイル23に接近した所から緩かに上昇
し、やがて検出コイル21を通過する所までほぼ
一様な出力を示し、金属板Aのエツジが検出コイ
ル21から遠ざかるに従つて緩かに低下する形態
を示す。
FIG. 4 is a graph showing the relationship between the output of the addition circuit 8, that is, the sum signal PS, the output of the subtraction circuit 9, that is, the difference signal MS, and the distance x from the center of the detection coil 22 to the edge of the metal plate A. Since the adder circuit 8 adds the outputs of the amplifiers 7a and 7b shown in FIG. 3, the sum signal PS gradually rises from the point approaching the detection coil 23 on the edge side of the metal plate A as shown in the figure, and eventually becomes The output is approximately uniform until it passes through the detection coil 21, and the output gradually decreases as the edge of the metal plate A moves away from the detection coil 21.

これに対し、差信号MSは増幅器7a,7b両
出力の差となるので、第4図に示す如くx=0の
所で極性を反転する信号となる。従つて和信号
PSはプローブ1又は3個の検出コイル21,2
2,23によつてカバーされる広い検出域内に金
属板Aのエツジが接近したことを検出するための
信号として有効である。
On the other hand, since the difference signal MS is the difference between the outputs of the amplifiers 7a and 7b, it becomes a signal whose polarity is inverted at x=0 as shown in FIG. Therefore, the sum signal
PS is probe 1 or 3 detection coils 21, 2
This signal is effective as a signal for detecting that the edge of the metal plate A approaches the wide detection area covered by the metal plate A.

これに対して差信号MSはその変化の状態が急
峻であるので、その信号レベルからxの値を検出
するのに有効であり、特に正負のピーク間の範囲
でのxの検出精度は、この範囲の距離xの変化分
に対する電圧変化分が大きいので高精度となる。
On the other hand, the difference signal MS has a steep change state, so it is effective for detecting the value of x from the signal level. In particular, the detection accuracy of x in the range between positive and negative peaks is Since the voltage change with respect to the change in range distance x is large, high accuracy is achieved.

而して第3図において、破線で示す信号は金属
板Aとプローブ1との距離dが実線で示す信号よ
りも大となつた場合の増幅器7a,7bの出力を
それぞれ示している。
In FIG. 3, the signals indicated by broken lines indicate the outputs of the amplifiers 7a and 7b, respectively, when the distance d between the metal plate A and the probe 1 becomes greater than the signal indicated by the solid line.

第4図の破線は第3図に破線で示した増幅器7
a,7b出力に対応する和信号PS及び差信号MS
をそれぞれ示している。この図から理解されるよ
うに差信号MSはプローブ1と金属板Aとの距離
dの如何に拘らずx=0の時にその電圧値が零と
なるので、金属板Aのエツジがプローブ1又は検
出コイル22の中心位置に達した時点の検出を距
離dの如何に拘らず正確に行なうことが出来る。
また和信号PSは緩かに変化する信号であるので、
この和信号PSを与えるべき後段の比較回路(図
示せず)の閾値を適宜に選択する場合は、やはり
距離dに影響されることなくその接近を正確に検
出することが出来る。
The broken line in FIG. 4 represents the amplifier 7 shown in broken line in FIG.
Sum signal PS and difference signal MS corresponding to a and 7b outputs
are shown respectively. As can be understood from this figure, the voltage value of the difference signal MS becomes zero when x=0 regardless of the distance d between probe 1 and metal plate A, so the edge of metal plate A It is possible to accurately detect the point in time when the center position of the detection coil 22 is reached, regardless of the distance d.
Also, since the sum signal PS is a signal that changes slowly,
If the threshold value of the subsequent comparing circuit (not shown) to which this sum signal PS is to be applied is appropriately selected, the approach can be accurately detected without being affected by the distance d.

そして検出コイル21,22,23のインピー
ダンスはプローブ1の保護板又は金属板Aの表面
に付着した水・油等には影響されないので周囲雰
囲気に影響されることなく金属板Aのエツジの検
出が可能であることは勿論、水中又は油中におい
ても全く同様にして金属板Aのエツジの検出を行
うことが可能である。
The impedance of the detection coils 21, 22, and 23 is not affected by water, oil, etc. attached to the protective plate of the probe 1 or the surface of the metal plate A, so the edge of the metal plate A can be detected without being affected by the surrounding atmosphere. Of course, it is possible to detect the edges of the metal plate A in exactly the same way underwater or in oil.

そして、検出対象の金属板Aは各検出コイル2
1,22,23への高周波通流によりその表面に
渦電流を生ぜしめるもの、即ち導電体であればよ
いので、特に発磁体を設ける等の必要もなく、用
途上の制約が少ない。
The metal plate A to be detected is connected to each detection coil 2.
1, 22, and 23 that generate eddy currents on their surfaces by high-frequency current flowing therethrough, ie, a conductor, there is no need to provide a magnetic body, and there are few restrictions on the use.

尚、上述の実施例では検出コイルを3個用いる
場合につき説明したが、4個以上の検出コイルを
並設することとして、差動増幅器、位相検波回
路、増幅器、加算回路、減算回路を相隣する2個
の検出コイルごとに設けるように構成してもよ
い。また各検出コイルは直線上に配列する構成に
限らず検出対象のエツジの移動域に対応させて、
たとえば円弧状に配設することとしてもよい。更
に和信号PS又は差信号MSの一方のみを必要とす
る場合は減算回路9又は加算回路8の一方を省略
できる。
In the above embodiment, the case where three detection coils are used has been explained, but if four or more detection coils are installed in parallel, a differential amplifier, a phase detection circuit, an amplifier, an addition circuit, and a subtraction circuit can be installed next to each other. It may be configured such that one is provided for every two detection coils. In addition, each detection coil is not limited to a configuration in which it is arranged in a straight line;
For example, they may be arranged in an arc shape. Furthermore, if only one of the sum signal PS or difference signal MS is required, one of the subtraction circuit 9 and the addition circuit 8 can be omitted.

以上のように本発明に係る金属体のエツジ検出
装置は、導電性を有する金属体のエツジを検出す
る装置において、前記金属体に臨ませるべく並設
された3個以上の検出コイルと各検出コイルに高
周波電流を通流せしめる発振器と、2個の検出コ
イル夫々の端子電圧の差を検出する複数の差電圧
検出回路と、差電圧検出回路出力を位相検波する
複数の位相検波回路と、2個の位相検波回路の出
力の加算回路及び/又は減算回路とを具備し、前
記加算回路及び/又は減算回路出力により金属体
のエツジを検出すべくなしたものであるから、検
出対象との距離、検出部及び検出対象の表面状
態、気中、水中、油中の別等に拘らず常に安定し
た高精度のエツジ検出が可能であり、また発磁体
を検出対象に設ける等の煩しさもない等本発明は
優れた効果を奏する。
As described above, the edge detection device for a metal body according to the present invention is a device for detecting the edge of a conductive metal body, and includes three or more detection coils arranged in parallel to face the metal body, and each detection coil arranged in parallel to face the metal body. an oscillator that causes a high-frequency current to flow through the coil; a plurality of differential voltage detection circuits that detect the difference between the terminal voltages of the two detection coils; and a plurality of phase detection circuits that phase-detect the output of the differential voltage detection circuit; The device is equipped with an addition circuit and/or a subtraction circuit for the outputs of the phase detection circuits, and is designed to detect edges of a metal body by the outputs of the addition circuit and/or subtraction circuit. , stable and highly accurate edge detection is always possible regardless of the surface condition of the detection unit and the detection target, whether in air, water, oil, etc., and there is no need to install a magnetic body on the detection target. etc. The present invention has excellent effects.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明装置の実施例を示すブロツク
図、第2図はその動作説明のための模式図、第3
図は増幅器出力と距離xとの関係を示すグラフ、
第4図は和信号及び差信号と距離xとの関係を示
すグラフである。 1……プローブ、4……発信器、5a,5b…
…差動増幅器、6a,6b……位相検波回路、7
a,7b……増幅器、8……加算回路、9……減
算回路、21,22,23……検出コイル。
FIG. 1 is a block diagram showing an embodiment of the device of the present invention, FIG. 2 is a schematic diagram for explaining its operation, and FIG.
The figure is a graph showing the relationship between amplifier output and distance x,
FIG. 4 is a graph showing the relationship between the sum signal, the difference signal, and the distance x. 1... Probe, 4... Transmitter, 5a, 5b...
... Differential amplifier, 6a, 6b ... Phase detection circuit, 7
a, 7b...Amplifier, 8...Addition circuit, 9...Subtraction circuit, 21, 22, 23...Detection coil.

Claims (1)

【特許請求の範囲】[Claims] 1 導電性を有する金属体のエツジを検出する装
置において、前記金属体に臨ませるべく並設され
た3個以上の検出コイルと、各検出コイルに高周
波電流を通流せしめる発振器と、2個の検出コイ
ル夫々の端子電圧の差を検出する複数の差電圧検
出回路と、差電圧検出回路出力を位相検波する複
数の位相検波回路と、2個の位相検波回路の出力
の加算回路及び/又は減算回路とを具備し、前記
加算回路及び/又は減算回路出力により金属体の
エツジを検出すべくなしたことを特徴とする金属
体のエツジ検出装置。
1. A device for detecting the edge of a conductive metal body, comprising three or more detection coils arranged in parallel so as to face the metal body, an oscillator that causes a high-frequency current to flow through each detection coil, and two detection coils. A plurality of differential voltage detection circuits that detect differences in terminal voltages of respective detection coils, a plurality of phase detection circuits that phase detect the output of the differential voltage detection circuits, and an addition circuit and/or subtraction circuit for the outputs of the two phase detection circuits. 1. A device for detecting an edge of a metal body, comprising: a circuit for detecting an edge of a metal body using the output of the addition circuit and/or the subtraction circuit.
JP58089566A 1983-05-20 1983-05-20 Edge detecting device for metal body Granted JPS59214702A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58089566A JPS59214702A (en) 1983-05-20 1983-05-20 Edge detecting device for metal body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58089566A JPS59214702A (en) 1983-05-20 1983-05-20 Edge detecting device for metal body

Publications (2)

Publication Number Publication Date
JPS59214702A JPS59214702A (en) 1984-12-04
JPH0252961B2 true JPH0252961B2 (en) 1990-11-15

Family

ID=13974357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58089566A Granted JPS59214702A (en) 1983-05-20 1983-05-20 Edge detecting device for metal body

Country Status (1)

Country Link
JP (1) JPS59214702A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001267400A (en) * 2000-03-16 2001-09-28 Kyocera Corp Wafer support member
DE10335133A1 (en) * 2003-07-31 2005-03-03 Pepperl + Fuchs Gmbh Device and method for detecting the path of a target object
US7116091B2 (en) * 2004-03-04 2006-10-03 Zircon Corporation Ratiometric stud sensing
JP5836193B2 (en) * 2012-05-17 2015-12-24 オリンパス株式会社 Inertial drive actuator
JP6042694B2 (en) * 2012-10-23 2016-12-14 オリンパス株式会社 Inertial drive actuator

Also Published As

Publication number Publication date
JPS59214702A (en) 1984-12-04

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