JPH0256784B2 - - Google Patents
Info
- Publication number
- JPH0256784B2 JPH0256784B2 JP60166070A JP16607085A JPH0256784B2 JP H0256784 B2 JPH0256784 B2 JP H0256784B2 JP 60166070 A JP60166070 A JP 60166070A JP 16607085 A JP16607085 A JP 16607085A JP H0256784 B2 JPH0256784 B2 JP H0256784B2
- Authority
- JP
- Japan
- Prior art keywords
- receptacle
- vacuum
- high voltage
- plug
- introduction terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Connector Housings Or Holding Contact Members (AREA)
- Electron Beam Exposure (AREA)
- Insulators (AREA)
- Installation Of Indoor Wiring (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明はベークアウト（焼出し）の可能な、超
高真空装置用高電圧導入端子に関し、殊に超高真
空を使用する荷電ビーム装置等に用いて効果の著
るしいものである。Detailed Description of the Invention (Industrial Application Field) The present invention relates to a high voltage introduction terminal for ultra-high vacuum equipment that can be baked out, and particularly for charged beam equipment that uses ultra-high vacuum. It is highly effective when used.
（従来技術とその問題点）
従来の真空装置用高電圧導入端子はすべて真空
容器に対し直接直脱される構造のものであり、第
２図に例示するように、絶縁石３０に固着された
電極３１の後端をケーブル３２の先端の裸出高圧
線に接続し、その接続部分を絶縁性の樹脂３４で
固めたものをプラグヘツド３３、ケーブルカバー
３３′とともにＯリング５２を介して一体とし
（このときケーブル３２のシールド線３９はケー
ブルカバ３３′と絶縁石３０の間に挾み込まれて
アースされる）、それを例えば３８を支点とする
ヒンジ３５を用いて開閉できる構造とし、使用時
はＯリング３６を介して、真空容器３７（図の場
合は、それに取付けられた固定台３７′）に圧接
し固定させる構造となつている。(Prior art and its problems) All conventional high-voltage inlet terminals for vacuum equipment have a structure that is directly connected to and disconnected from the vacuum vessel, and as illustrated in FIG. The rear end of the electrode 31 is connected to the bare high-voltage wire at the tip of the cable 32, and the connected part is hardened with an insulating resin 34, and is integrated with the plug head 33 and cable cover 33' via an O-ring 52 ( At this time, the shield wire 39 of the cable 32 is sandwiched between the cable cover 33' and the insulating stone 30 and grounded), and is structured so that it can be opened and closed using, for example, a hinge 35 with 38 as a fulcrum, and when in use has a structure in which it is pressed and fixed to a vacuum container 37 (in the case of the figure, a fixing base 37' attached to it) via an O-ring 36.
従つて、耐熱性の乏しいケーブル３２や絶縁樹
脂３４が真空容器３７と不可分に連結されている
ため、この従来の高電圧導入端子を取付けた真空
装置は百数十度Ｃ以上の温度をかけてベークアウ
トすることが不可能であつた。しかるところ、半
導体装置の高精細度化、高性能化に伴つて、これ
まで比較的低真空で使用されていた荷電ビーム装
置を超高真空（10-7Pa以上）で使用する技術が
不可欠のものとなり、その装置では250℃以上で
ベークアウトする必要があるため、従来の高電圧
導入端子では対応できないことになつた。 Therefore, since the cable 32 and the insulating resin 34, which have poor heat resistance, are inseparably connected to the vacuum container 37, the vacuum equipment equipped with this conventional high voltage introduction terminal is exposed to temperatures of more than 100 degrees Celsius. It was impossible to bake out. However, as the definition and performance of semiconductor devices become higher, technology to use charged beam devices, which have been used in relatively low vacuums, in ultra-high vacuums (10 -7 Pa or higher) is becoming essential. Because the device requires baking out at a temperature of 250°C or higher, conventional high-voltage lead-in terminals are no longer compatible.
この対応策として採用されたのが高電圧導入端
子そのものに耐熱性を持たせることである。しか
し、端子には電源から高絶縁性の電線を延長して
導入する必要があり、これに耐熱性を持たせるた
めには、例えば電線を裸線にしてセラミツクの碍
管等を使つて引き廻すことになる。これは徒らに
装置周辺を煩雑なものとし、かつ高価についてい
る。そのためこの問題の解決が急務となつて来
た。 The solution to this problem was to make the high-voltage lead-in terminal itself heat resistant. However, it is necessary to extend a highly insulated wire from the power source to the terminal, and in order to make it heat resistant, for example, the wire can be made bare and routed using a ceramic insulator tube. become. This unnecessarily makes the surroundings of the device complicated and expensive. Therefore, solving this problem has become an urgent task.
（発明の目的）
本発明は、ベークアウトが可能な超高真空用高
電圧導入端子の提供を目的とする。(Object of the Invention) The object of the present invention is to provide a high voltage introduction terminal for ultra-high vacuum that can be baked out.
（発明の構成）
本発明は、高電圧導入端子を耐熱性レセプタク
ルとプラグとの着脱可能な二体構造で構成し、該
レセプタクルを真空装置の真空容器に気密に固定
するとともに、該レセプタクルとプラグの接続部
には真空シール材を使用して密閉された気密空間
を設けて、この気密空間を真空排気しかつSF6等
の絶縁ガスを充填しうる構造にすることによつ
て、前記目的を達成したものである。(Structure of the Invention) The present invention comprises a high voltage introduction terminal with a removable two-piece structure consisting of a heat-resistant receptacle and a plug, the receptacle is airtightly fixed to a vacuum container of a vacuum device, and the receptacle and the plug are The above purpose can be achieved by providing an airtight space sealed using a vacuum sealing material at the connection part of the This has been achieved.
（実施例）
以下、本発明を実施例により、図に基いて説明
する。第１図は本発明の実施例の断面図を示し、
耐熱性レセプタクル１０は、セラミツクス
（Al2O3）製の絶縁石よりなるレセプタクル本体
１２と、その外周１４に対し気密に銀ロー付けさ
れた超高真空用のステンレス製フランジ１６と、
レセプタクル本体１２の内部の貫通孔１８の内周
２０に対しコバール２２を介して気密に銀ロー付
けされた銅製の高圧導入電極２４とよりなつてい
る。高圧導入電極２４の他端（大気側）は接続ピ
ン２６となつている。フランジ１６は銅ガスケツ
ト１７を用いて真空容器３７に対しボルト１５で
気密に固定される。(Example) Hereinafter, the present invention will be explained with reference to the drawings and examples. FIG. 1 shows a cross-sectional view of an embodiment of the invention,
The heat-resistant receptacle 10 includes a receptacle body 12 made of an insulating stone made of ceramics (Al 2 O 3 ), a stainless steel flange 16 for ultra-high vacuum use that is airtightly soldered with silver to the outer periphery 14 of the receptacle body 12 .
It consists of a high voltage introduction electrode 24 made of copper which is airtightly soldered with silver to the inner periphery 20 of the through hole 18 inside the receptacle body 12 via a Kovar 22. The other end (atmospheric side) of the high voltage introducing electrode 24 is a connecting pin 26 . The flange 16 is hermetically fixed to the vacuum vessel 37 with bolts 15 using a copper gasket 17.
従つてこのレセプタクル１０は、銅、ステンレ
ス、銀ロー、セラミツクスよりなり、少くとも
450℃以上の耐熱性をもち、これを取付けたまゝ
で真空容器３７をベークアウトすることができ
る。 Therefore, this receptacle 10 is made of copper, stainless steel, silver solder, or ceramics, and at least
It has heat resistance of 450°C or higher, and the vacuum container 37 can be baked out with it attached.
他方、このレセプタクル１０に接続されるプラ
グ４０は、ケーブル４１、その先端の裸出高圧線
につながる高圧端４３、それに電気的に接続され
ているピン受け４４を絶縁石４２内に高絶縁性合
成樹脂４５で固め、それをＯリング５２を介して
金属製プラグヘツド４６、ケーブルカバー４６′
とともに一体に結合したもので構成されている。
そしてプラグヘツド４６にはＯリング５１がその
リング状間隙内に収容されている。 On the other hand, the plug 40 connected to this receptacle 10 includes a cable 41, a high-voltage end 43 connected to the bare high-voltage wire at the tip, and a pin receiver 44 electrically connected to the cable 41. Harden with resin 45, and connect it to metal plug head 46 and cable cover 46' via O-ring 52.
It is made up of two parts that are combined together.
An O-ring 51 is accommodated in the ring-shaped gap in the plug head 46.
第１図は、前記レセプタクル１０とこのプラグ
４０とがボルト４８で締付けられて接続状態にあ
る図であり、前者の接続ピン２６は後者のピン受
け４４に弾力的に挿入され両者は電気的に一体化
されているが、このときその接続部分にはＯリン
グ５１，５２でシールされた気密空間５０が設け
られる。この気密空間５０はプラグヘツド４６に
固設されたパイプ５５を経由して図示しない二つ
のバルブに接続されており、バルブの一方は真空
ポンプに通じ、他方は絶縁ガスボンベに通じてい
る。 FIG. 1 shows the receptacle 10 and the plug 40 in a connected state, tightened with bolts 48, the former's connecting pin 26 being elastically inserted into the latter's pin receiver 44, and both electrically connected. Although they are integrated, an airtight space 50 sealed with O-rings 51 and 52 is provided at the connecting portion. This airtight space 50 is connected to two valves (not shown) via a pipe 55 fixed to the plug head 46, one of which communicates with a vacuum pump and the other with an insulating gas cylinder.
さて、上記した高電圧導入端子は次のように使
用される。先づ真空容器３７にレセプタクル１０
だけを固定した状態で所定温度、所定時間のベー
クアウトが行なわれ、その後自然放冷される。温
度が70℃以下に低下するとレセプタクル１０にプ
ラグ４０が挿入され接続して固定される。次い
で、気密空間５０内の空気がバルブの一つを通し
て図示しない真空ポンプで所定圧力にまで排気さ
れ、そのバルブは閉じられ、その後もう一つのバ
ルブを通してCO2、SF6などの絶縁ガスが導入さ
れ、このバルブもまた閉じられる。高電圧の通電
はこのあとはじめて行なわれ、所定の超高真空処
理作業が開始される。 Now, the above-mentioned high voltage introduction terminal is used as follows. First, the receptacle 10 is placed in the vacuum container 37.
Bake-out is performed at a predetermined temperature and for a predetermined time with only the parts fixed, and then allowed to cool naturally. When the temperature drops below 70°C, the plug 40 is inserted into the receptacle 10, connected and fixed. Next, the air in the airtight space 50 is evacuated to a predetermined pressure by a vacuum pump (not shown) through one of the valves, that valve is closed, and then an insulating gas such as CO 2 or SF 6 is introduced through the other valve. , this valve is also closed. High voltage is then applied for the first time, and a predetermined ultra-high vacuum processing operation begins.
絶縁ガスは装置の小型化に不可欠である。絶縁
ガスを使用しないときは、所定の絶縁電圧を得る
に必要な、絶縁石１２の縁面距離は極めて長大で
あるため、本発明の二体構造の高電圧導入端子は
余りに大型となる。 Insulating gas is essential for downsizing equipment. When no insulating gas is used, the edge distance of the insulating stone 12 required to obtain a predetermined insulating voltage is extremely long, so the two-piece structure high voltage introduction terminal of the present invention becomes too large.
従来の高電圧導入端子と同程度の大きさの、上
記実施例の高電圧導入端子で、絶縁ガスとして
SF6を用いる場合、絶縁ガスの充填圧力を３気圧
にすることによつて100KVの耐電圧を得ること
ができた。尤も、使用する電圧がさ程高くないと
きには、気密空間５０内は真空排気するだけ、も
しくは大気圧の乾燥空気の封入、などでも作業は
充分に行ないうる。封入するガスの種類圧力はそ
の時々の条件によつて自由に選定できるものであ
る。 The high voltage introduction terminal of the above embodiment is about the same size as the conventional high voltage introduction terminal, and can be used as an insulating gas.
When using SF 6 , a withstand voltage of 100 KV could be obtained by setting the filling pressure of the insulating gas to 3 atm. Of course, when the voltage used is not very high, the work can be carried out by simply evacuating the airtight space 50 or filling it with dry air at atmospheric pressure. The type and pressure of gas to be sealed can be freely selected depending on the conditions at the time.
二体構造にした利益は、プラグ４０側にも生ず
る。プラグ４０を真空内に入れる必要がなくなつ
たため、その構成材料の選択には温度や真空への
配慮が不要となり選択の自由度が大いに増したこ
とである。絶縁性の良い、かつシール材との密着
性の良い、そして成型性の良い樹脂材料を自由に
選ぶことができる。 The benefits of the two-piece structure also accrue to the plug 40 side. Since the plug 40 does not need to be placed in a vacuum, there is no need to consider temperature or vacuum when selecting its constituent materials, and the degree of freedom in selection is greatly increased. You can freely choose a resin material that has good insulation, good adhesion to the sealing material, and good moldability.
なお、実施例には電極が単一の場合をかゝげた
が、電極が複数ある高電圧導入端子にも本発明を
適用できることは明らかである。電気的な接続が
複数ケ所になるため、レセプタクルとプラグの挿
入接続には位置合せ用のガイドを設けることが必
要となる。 Although the embodiments have been described with reference to a single electrode, it is clear that the present invention can also be applied to a high voltage introduction terminal having a plurality of electrodes. Since electrical connections are made at multiple locations, it is necessary to provide a positioning guide for insertion and connection between the receptacle and the plug.
（発明の効果）
本発明は、ベークアウトの可能な超高真空用高
電圧導入端子を提供する効果がある。(Effects of the Invention) The present invention has the effect of providing a high voltage introduction terminal for ultra-high vacuum that can be baked out.
第１図は、本発明の高電圧導入端子の実施例断
面図。第２図は、従来の同様の図。
１０……耐熱性レセプタクル。４０……プラ
グ。３７……真空容器。５１……真空シール材。
５０……気密空間。
FIG. 1 is a sectional view of an embodiment of the high voltage introduction terminal of the present invention. FIG. 2 is a similar conventional diagram. 10...Heat-resistant receptacle. 40...Plug. 37...Vacuum container. 51...Vacuum sealing material.
50...Airtight space.
Claims (1)
電圧導入端子において、該高電圧導入端子を耐熱
性レセプタクルとプラグとの着脱可能な二体構造
で構成し、該レセプタクルを該真空装置の真空容
器に気密に固定するとともに、該レセプタクルと
プラグの接続部には真空シール材を使用する気密
空間を設けて、この気密空間を真空排気しかつ
SF6等の絶縁ガスを充填しうる構造としたことを
特徴とする高電圧導入端子。1. In a high voltage introduction terminal used in a vacuum device that requires bakeout, the high voltage introduction terminal is composed of a removable two-piece structure consisting of a heat-resistant receptacle and a plug, and the receptacle is attached to the vacuum container of the vacuum device. In addition to fixing the receptacle airtightly, an airtight space using a vacuum sealing material is provided at the connection between the receptacle and the plug, and this airtight space is evacuated.
A high voltage introduction terminal characterized by a structure that allows it to be filled with an insulating gas such as SF 6 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60166070A JPS6226779A (en) | 1985-07-27 | 1985-07-27 | High voltage introduction terminal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60166070A JPS6226779A (en) | 1985-07-27 | 1985-07-27 | High voltage introduction terminal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6226779A JPS6226779A (en) | 1987-02-04 |
| JPH0256784B2 true JPH0256784B2 (en) | 1990-12-03 |
Family
ID=15824419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60166070A Granted JPS6226779A (en) | 1985-07-27 | 1985-07-27 | High voltage introduction terminal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6226779A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04212678A (en) * | 1990-12-06 | 1992-08-04 | Nissan Shatai Co Ltd | Reinforced structure for floor panel |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6413679U (en) * | 1987-07-17 | 1989-01-24 |
-
1985
- 1985-07-27 JP JP60166070A patent/JPS6226779A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04212678A (en) * | 1990-12-06 | 1992-08-04 | Nissan Shatai Co Ltd | Reinforced structure for floor panel |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6226779A (en) | 1987-02-04 |
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