JPH02618B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a clean work room, and particularly to a structure of a clean work room suitable for preventing contaminated air from flowing into the clean work room at the ceiling.

[Background of the Invention] Conventionally, when supplying conditioned air to a clean work room as shown in FIG. 2, an air conditioning supply duct 6 was connected to an air supply port 13 in the ceiling as shown in FIG. There was a problem in that as more clean work rooms were installed, the cost of installing air conditioning air supply ducts became high. For this purpose, recently, as shown in Figure 3a, the ceiling panel 1 of the clean work room is used as an air conditioning supply air chamber 18 between it and the building 15. has the advantage of being significantly cheaper.

However, because the ceiling board 1 is made of many boards joined together due to material dimensions, board cutting, etc., the ceiling board joint 1
4 occurs. This part is sealed with sealing material, but due to poor workmanship, aging, earthquakes, etc.
If a gap etc. occurs in the seal part, please refer to Figure 3b.
As shown in , there is a risk that contaminated air may leak into the passage section 4b of the clean working room. Particles in the 0.1 μm unit are a problem in the manufacture of VLSIs, and the drop in performance due to such deterioration greatly affects the quality of the product and becomes a serious problem.

[Purpose of the invention]

An object of the present invention is to provide a highly reliable clean work room that can prevent contaminated air from flowing into the clean work room even if the upper part of the ceiling board of the clean work room is directly used as an air conditioning air supply chamber. It is in.

[Summary of the invention]

The present invention includes an air blower, a pressure chamber provided in communication with a discharge port of the air blower, an air supply chamber communicating with the pressure chamber via a filter provided in the pressure chamber, and the air blower, the pressure chamber, and the air supply chamber. In a clean work room equipped with a case containing a filter,
The air supply chamber has a negative pressure chamber on the interface side with the untreated air, and the negative pressure chamber communicates with the suction port of the blower in the case.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to FIGS. 4, 5, and 6. FIG. 4 shows a vertical cross section of a clean work chamber in an embodiment of the present invention, and FIG. 5 is an enlarged view of the ceiling portion of the clean work chamber shown in FIG. 4.

The clean space 4 is composed of a working part 4a as a clean space and a passage part 4b as a passage space.
A pressure chamber 10a equipped with a filter 12 is a working section 4a.
The pressure chamber 10a is provided with a blower 9 at the top thereof. Further, a pressure chamber 10b is provided on the upper surface of the pressure chamber 10a on the side facing the passage part 4b, and the pressure chamber 10b is located on the passage part 4b side.
A HEPA filter 11 is provided, and a blower 9 is provided on the upper side of the working chamber 4a.
Blower 9, pressure chambers 10a, 10b, filter 1
1 and 12 are provided as described above to constitute the air purifying means 40. A diffuser plate 2 is installed at the upper part of the passage section 4b.
8 and the partition plate 23, and constitutes an air supply chamber 24 that communicates with the pressure chamber 10b via the HEPA filter 11. The ceiling plate 1 is provided to cover the air supply chamber 24 and the upper part of the blower 9, and is configured to form a negative pressure chamber 25 communicating with the suction port of the blower 9 between the partition plate 23 and the ceiling plate 1. has been done.

In this embodiment, the clean working room surrounded by the ceiling plate 1 and the side plate 2 draws air through the pre-filter 8 and the air supply port 13 by operating the blower 9, and the HEPA filter 11 for the passage section
The water is then cleaned by the working part HEPA filter 12 and supplied to the working part 4a and the passage part 4b in the room to clean the room. The clean air is exhausted to the outside through the exhaust port 5, a portion of which is returned to the air conditioning machine room, and most of which is circulated through the prefilter 8 again. In this case, the air conditioning supply air amount supplied from the air supply port 13 is
Since the amount is very small compared to the amount sucked from the prefilter 8, the portion connected to the suction port of the blower 9 has a negative pressure as shown in the figure.

The ceiling of the passage section 4b has a ceiling plate 1 and a partition plate 23.
A negative pressure chamber 25 is formed by
is communicated with the suction port of the blower 9, so the inside of the negative pressure chamber 25 at the ceiling of the passage becomes negative pressure. As a result, when the air conditioning supply air chamber 18 is pressurized, the leak airflow 22 that has entered through the gap in the ceiling panel 1 is sucked into the blower 9 as shown by the dotted line in the figure.
The air flows into the cleaning work chamber via the HEPA filters 11 and 12 together with the air sucked through the prefilter 8 and the air supply port 13.

In a different embodiment of the present invention, as shown in FIG. 6a, the width of the ceiling plate 1 is extended to the passageway surface, and a ventilation hole 27 is provided on the upper surface on the passageway side, and the ceiling plate 1 is formed into a box shape so as to cover the ventilation hole 27. Alternatively, another ceiling plate 1' may be placed to form the negative pressure chamber 25. According to this, the ceiling can be divided into a work chamber and a passage, making it easier to install at the installation site. Carrying in work becomes easier, and workability during installation and assembly is improved.

In still another embodiment of the present invention, as shown in FIG.
According to this, it is possible to prevent the dust accumulated in the illumination lamp 7 from flowing out into the passage portion 4b. Note that the lighting cover is not limited to a flat plate shape, and may be a lighting cover 26' that protrudes downward and has a slope at the falling part, as shown in FIG. Air can be efficiently blown downward. Further, as shown in FIG. 6d, a chevron-shaped illumination cover 26'' may be attached to the illumination light 7 provided in the air supply chamber 24, thereby efficiently directing clean air from the filter 11 downward. The lighting cover 26'' can prevent dust from adhering to the lighting lamp 7, and since the lighting lamp 7 and the lighting cover 26'' are provided in clean air, it is possible to prevent a decrease in illuminance due to accumulation of dust. .

According to another embodiment of the present invention, as shown in FIG. 15', the cleaning work room can be installed without any problem.Also, if the air supply port 13' is provided at the part where the height of the ceiling plate 1'' changes as shown in Fig. 6f, To efficiently take in air blown from an outlet 6'a of an air conditioning supply air duct 6' provided in a space between a building ceiling 15 and a ceiling plate 1' to blow out conditioned air into this space. Can be done. If the portion of the ceiling plate 1'' where the height changes is formed as a slope, a sufficient opening area for the air supply port 13' can be secured.Furthermore, according to another embodiment, as shown in FIG. 6g, It may also be implemented in a filter unit type.

〔Effect of the invention〕

According to the present invention, even if the upper part of the ceiling plate of the clean work room is directly used as an air conditioning air supply chamber, it is possible to prevent contaminated air from flowing into the clean work room, resulting in a highly reliable clean work room. be able to.

[Brief explanation of drawings]

Fig. 1 is a vertical sectional view of a clean work room in a conventional example, Fig. 2 is a perspective view of a part of the clean work room in a conventional example, and Fig. 3 a is a clean work room installed in combination with an air conditioning system. FIG. 4 is a vertical cross-sectional view showing the flow of air on the workbench; FIG. Longitudinal cross-sectional view, Figure 5 is the 4th
FIG. 6a is a partial vertical sectional view showing a different embodiment of the present invention, FIG. 6b, FIG. 6c, and FIG. 6d are further different embodiments of the present invention. Partial longitudinal cross-sectional views showing the embodiment, Fig. 6e and Fig. 6f
is a partial vertical sectional view showing another embodiment of the present invention, No. 6
Figure g is a longitudinal sectional view showing still another embodiment.
Note that the arrows shown in the above figures indicate airflow. 9...Blower, 10b...Pressure chamber, 11...Filter, 24...Air supply chamber, 25...Negative pressure chamber, 30...
Case.

Claims (1)

[Claims] 1. A production line consisting of work equipment 3 arranged in a predetermined direction is surrounded so as to be isolated from the building space to form a clean space 4 independent from the building, and the work equipment 3 is arranged in the clean space 4. A work space 4a provided and a passage space 4b formed in parallel to the work space 4a.
It consists of a blower 9, pressure chambers 10a, 10b, filters 11, 12 above the work space 4a.
An air supply chamber is provided with an air purifying means 40 consisting of the above, and communicates with the pressure chamber 10b via the filter 11 provided in the pressure chamber 10b above the passage space 4b, to which clean air is supplied. 24 is arranged to supply clean air toward the work space 4a and to supply clean air toward the passage space 4b via the air supply chamber 24, and the air supply chamber 24 and the In a cleaning work room configured to house an air purifying means 40 in a case 30 and supplying conditioned air to the air purifying means 40 from an air conditioned air supply chamber 18 provided above the air supply chamber 24, a conditioned air supply chamber 18 between the supply air chamber 24 and the conditioned air supply chamber 18;
A clean working room characterized by being provided with a negative pressure chamber 25 for guiding leak airflow from the air to the air purifying means 40. 2. The negative pressure chamber 25 is provided inside the case 30, and the ceiling surface 1 of the case 30 is formed flat.
Clean work room as described in section. 3 The negative pressure chamber 25 is located on the ceiling surface 1 of the case 30.
A communication hole 27 is provided at a position of the case 30 protruding from the case 30 and facing the negative pressure chamber 25 for communicating the negative pressure chamber 25 with the blower 9. Clean work room as described in Section 1. 4 The negative pressure chamber 25 is provided with lighting means 7 inside,
2. The clean working chamber according to claim 1, wherein a light transmitting means 26 is provided on the side of the air supply chamber 24 facing the negative pressure chamber 25. 5. The negative pressure chamber 25 is provided inside the case 30, and the ceiling surface 1'' of the case 30 is formed such that the upper part of the passage space 4b is higher than the upper part of the work space 4a. Range 1
Clean work room as described in section.