JPH027500B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a field emission type liquid metal ion source with a reserve configuration that emits a long-life, high-intensity ion beam.

(Prior Art) A field emission type liquid metal ion source using a needle-like emitter is well known as a high-brightness ion source. The configuration of this ion source includes a simple direct heating type ion source configuration in which a current is passed through a needle-shaped emitter support that supports the needle-shaped emitter, and the support is directly resistance-heated to melt the metal to be emitted. There are reservoir configuration ion sources that heat a reservoir that stores molten metal.

The latter ion source can store a larger amount of molten metal and has less variation in melting temperature, so it can be used stably over a long period of time.

FIG. 1 shows an example of the main configuration of a conventional liquid metal ion source with a reserve configuration. This ion source is Au
Used as an ion source for high melting point metals such as

In FIG. 1, 1 is a needle-shaped emitter, 2 is a metallic liquid metal reservoir, 3 is molten metal in the reservoir 2, 4 is a support for supporting the needle-shaped emitter 1, and 5 is a liquid metal reservoir 2 This is a heating support. The storage section 2 is housed inside the support 5, and the support 5
Attach the support 4 to the top of the.

6 is a resistance wire for heating the reservoir arranged on the outer peripheral surface of the support 5, 7 is a heat shielding plate, 8 is an extraction electrode, 9 is an extraction power source that supplies power to the extraction electrode 8, and 10 is a power supply that supplies power to the heating resistance wire 6. This is a heating power source.

A hole is made at the tip of the liquid metal storage section 2,
From the hole, the needle emitter 1 projects outward from the liquid metal reservoir 2 with a small gap (approximately 0.1 mm).

With this configuration, the metal to be ionized is placed in the liquid metal storage section 2,
When a current is passed through the heating resistance wire 6 to heat it, the metal in the liquid metal reservoir 2 melts and becomes molten metal 3. The molten metal 3 flows along the needle-shaped emitter 1 protruding from the metal reservoir 2 and is supplied to the tip of the emitter. In this state, when the electric field at the tip of the needle emitter 1 covered with the liquid metal 3 is exceeded by the extraction power source 9, the electrostatic force applied to the surface of the liquid metal is caused by the surface tension of the liquid metal 3. When the contraction force is exceeded and a Taylor cone is generated, ion release begins at the tip of the cone.

By the way, the needle-like emitter 1 has a wire diameter of 0.2
A metal wire made of W, Ni, etc. is used, with a diameter of ~0.5 mm and a tip curvature of approximately 1 to 10 μm. In general, the liquid metal reservoir 2 is designed to provide reduced heating power, uniformity of temperature,
The inner diameter is determined in consideration of various points such as ease of insertion of the needle-shaped emitter (that is, the tip of the needle-shaped emitter 1 should not hit the inner wall of the liquid metal storage section 2), and an increase in the amount of molten metal stored. 1mm or less, length 20~
It has an elongated shape of about 30 mm, and the needle-like emitter 1 is supported by an upper needle-like emitter supporter 4.

Therefore, for metals that are solid at room temperature,
When replenishing metal, the metal is solidified on the needle-shaped emitter 1, and the introduction space is significantly reduced, and the needle-shaped emitter 1 becomes less flexible.
In addition to being difficult to replenish, since the needle emitter 1 is long, the position of the tip of the needle emitter 1 fluctuates due to thermal expansion and contraction, expansion of molten metal, and the like.

On the other hand, Al metal, B-Ni, B-Ni-Pt, Sb-
Molten metals such as alloys such as Pb-Au react with metals such as W and Ni, so carbon, Ti-coated carbon, boride, carbide, and carbon can be used as needle-shaped emitter materials for these molten metals. Attempts have been made to use high melting point conductive base materials, such as those coated with metal, as needle emitters.

However, a liquid metal ion source with a reserve configuration using such a needle-like emitter has not yet been realized. In general, needle-like emitters such as carbon and borides are brittle and have a different coefficient of expansion than molten metal when heated or cooled, so they do not melt or melt.
Distortion caused by solidification and thermal distortion caused by heating and cooling occurred, and it also broke easily.

Therefore, in the conventional ion source configuration shown in Figure 1,
There were problems with the number of times of repeated use due to repeated heating and cooling, the positional accuracy of the needle emitter, and the supply of metal to be emitted as ions. Furthermore,
In the conventional ion source shown in Figure 1, the liquid metal reservoir 2 is made of metal, so it reacts with molten metals such as Al and alloys, making it difficult to emit a stable ion beam. .

(Purpose) Therefore, an object of the present invention is to facilitate the replenishment of metal to be ionized and improve the positional accuracy of the tip of the needle emitter by appropriately supporting the needle emitter inside the liquid storage section. In addition, in particular,
The object of the present invention is to provide a liquid metal ion source with a long life and highly stable reserve configuration that can withstand repeated use of heating and cooling for molten metal that easily reacts with metal wires.

(Structure of the Invention) In order to achieve the above object, the present invention includes a reservoir section that stores liquid metal to which ions are to be emitted, a needle-like emitter disposed at a lower part of the reservoir section, and a needle-like emitter disposed from the reservoir section. a supply member for supplying liquid metal to the reservoir portion; and an extraction electrode disposed opposite to the needle-like emitter to draw out liquid metal ions from the needle-like emitter;
The needle emitter is configured to store liquid metal on the opposite side of the ion emission direction.

(Example) The present invention will be described in detail below with reference to the drawings.

The overall structure of an embodiment of the liquid metal ion source of the present invention is shown in FIG. 2, and the main body of the ion source is shown in FIGS. 3 to 5. FIG. 4 is a sectional view taken along the line AA in FIG. 3, and FIG. 5 is a top view of the ion source main body shown in FIG. 3, viewed from above. Here, the same parts as in FIG. 1 are given the same reference numerals.

In Fig. 2, 11 is a flange with a voltage introduction terminal for installation in the device, 12 is an insulating substrate, 13 is a support for the ion source body, and 14 is a high voltage supply terminal that supplies high voltage to the needle emitter. .

In FIGS. 3 to 5, 15 is a needle-like emitter made of a metal wire or a high-melting point base material, 16
17 is a needle-shaped emitter support consisting of members 16-1 and 16-2, and 17 is a member 17-1 and 17-2.
A liquid metal reservoir consisting of: The member 17-2 has a hollow cylindrical shape that accommodates the molten metal 3, and the outer member 17-1 is arranged around this member 17-2. The lower part of this outer member 17-1 accommodates needle-like emitter support members 16-1 and 16-2, and the tip of the needle-like emitter 15 attached to the recess 16-1A formed in the member 16-1 is inserted into the lower part of the outer member 17-1. A nozzle portion 17-1A with a tapered tip is formed to protrude. 17-1B is a nozzle hole through which the needle emitter 15 projects. Further, 18 is a support for heating the liquid metal reservoir made of an insulating heat conductive material, and 19 is a conductive liquid metal reservoir fixing body.
and 19 constitute a reservoir section.
Even with such a structure, an ion beam can be emitted in the same manner as the ion source of FIG. 1. Here, the needle-shaped emitter 15 is arranged at the lower part of the reservoir section, and in the reservoir section, the molten metal 3 is stored on the opposite side of the needle-shaped emitter 15 from the ion emission direction. Therefore, the length of the needle emitter 15 can be shortened, the volume of the reservoir can be increased, and the nozzle hole 17 can be connected from the reservoir.
The molten metal 3 can be efficiently taken out only toward the needle emitter 15 through -1B.

An embodiment of the present invention having the above configuration will be described in more detail by taking an Al ion source as an example.

Since molten Al is highly reactive, metal cannot be used as a constituent material of the ion source in the parts that come into contact with the molten Al. Therefore, the special application
As disclosed in No. 142529, borides (TiB ₂ , CrB ₂ ), composite borides (BN-TiB ₂ ), carbides (TiC), etc., which are resistant to reaction with molten Al, are used to form the needle-like shape shown in Figure 2. Emitter 15, needle-like emitter support part 16
and constitutes a liquid metal storage section 17. Such materials are brittle and easily damaged by impact or distortion (distortion and thermal distortion associated with melting and solidification of Al).

Therefore, it has been confirmed that the length of the needle-like emitter 15 should be as short as possible, but for a needle-like emitter with a diameter of 0.5 mm, the length should be about 15 to 10 mm or less. On the other hand, if the length is 15 to 20 mm or more, it is easy to break and it is difficult to withstand repeated heating and cooling. In practice, it is also possible to use a short needle-like emitter 15 of about 5 mm or less. In addition, shortening the length of the needle-like emitter 15 has the advantage that the amount of displacement of the tip of the needle-like emitter due to thermal deformation is reduced, and the positional fluctuation of the ion beam emission source is reduced.

The needle-like emitter support 16 supports the needle-like emitter 15
In order to prevent damage to the needle-shaped emitter 15 due to distortion caused by thermal deformation of various parts due to distortion caused by surrounding metal or melting or solidification, the needle-shaped emitter 15 is made movable.
For example, in the vertical and horizontal directions of the needle emitter support.
The structure should have a gap of 0.1 to 0.3 mm. Further, a member 16 constituting the needle-like emitter support 16
-1 and 16-2 are both A-A in Figure 4.
As shown in the line cross-sectional view, the disc has an elongated structure in which both sides are cut out into a half-moon shape, and the upper surface of the member 16-1 has a recess 16-1A for accommodating the large-diameter rear end 15A of the needle-like emitter 15. Form it. Further, the width of the upper member 16-2 is made narrower than the width of the lower member 16-1. Therefore, the molten metal 3 stored above the needle-like emitter support 16 is
The liquid metal is supplied to the tip of the needle-like emitter 15 through the nozzle hole 17-1B as a liquid metal supply member through both sides thereof, and is thereby supplied from the upper part of the needle-like emitter support 16 to the needle-like emitter 15. This makes it easier to replenish molten metal.

This needle-like emitter support 16 is fixed by the liquid metal storage part fixing body 19 via the liquid metal storage part member 17-2 arranged above it,
This prevents the needle-like emitter support 16 from changing its position. At this time, the liquid metal storage part fixing body 19 may come into contact with the molten metal 3, so carbon, which has high reaction resistance to the molten metal 3 and has excellent heat resistance and conductivity,
Alternatively, by constructing the fixed body 19 from the same material as the needle-like emitter 15, it is possible to prevent reaction with molten Al, and at the same time, it is possible to apply a high voltage to the tip of the needle-like emitter from this part. Can be done. As shown in FIG. 5, the shape of the liquid metal storage part fixing body 19 can also be changed by making it into a shape in which both sides of a solid cylinder are cut off, and providing an exhaust port in the same manner as the emitter support 16. ,
The residual gas inside the liquid metal storage section 17 can be evacuated to a high vacuum, so that molten Al does not react with O ₂ or N ₂ and a stable ion beam can be obtained.

The liquid metal storage heating support 18 needs to support the liquid metal storage 17 and efficiently conduct heat generated by the reservoir heating resistance wire 6 to the liquid metal storage 17. It shall be composed of a conductor. Furthermore, since the wettability of the liquid metal storage section 17 with the molten metal 3 is good, the molten metal 3 passes from the inner wall 17-1C of the nozzle section 17-1A, through the outer wall 17-1D of the nozzle hole 17-1B, and then enters the nozzle section. 17-1A to the vicinity of the joint 17-1E with the support 18, and
There is a possibility of contact with the support 18 at 1E. Therefore, it is also necessary that the support 18 be made of boride (BN), oxide (Al ₂ O ₃ ), or the like, which is highly reactive with the molten metal 3 . The liquid metal storage heating support 18 may be supported either above or below;
In order to reduce heat loss in the vicinity of the nozzle hole 17-1B at the tip of the tube 7-1, a structure in which it is supported above is better.

Liquid metal according to the embodiments of the present invention described above
An experimental example using an Al ion source will be described. 1
Ion source operating time: approximately 8 hours, operating temperature: 660°C
Even if it is operated repeatedly at ~900℃ (average approx. 750℃) about 50 times (heating time: approx. 20-30 minutes, cooling time: approx. 40-
60 minutes), no damage to the needle-like emitter 15, no reaction of Al with each component, and no deterioration of Al were observed.
It has been experimentally confirmed that this is an extremely long-life and highly reliable ion source. Moreover, needle-like emitters 1
No fluctuations were observed at the tip of No. 5, and the positional accuracy of each part was extremely stable against thermal fluctuations. Furthermore, since there is no needle-shaped emitter 15 at the top of the molten metal storage section 17 that serves as a metal supply port, it is also possible to supply metal, especially when the needle-shaped emitter 15 is fixed by solidified metal. It was easy to do.

As described above, according to the present invention, it is possible to provide a long-life ion source that can withstand repeated use of heating and cooling, and it is also possible to easily replenish metal to this ion source.

As an example of continuously and stably emitting an ion beam over a long period of time, Fig.
This shows the time-dependent characteristics of the ion beam emission current of the Al ion source. This is a measurement of the stability of the ion beam emission current when the operating temperature is 750℃ and the extraction voltage is kept constant at 7.3KV.
Despite using a low current of 20 μA, the fluctuation rate of the ion beam current was extremely small at less than ±1%/3 hours, indicating extremely stable operation.
This proves that the molten Al is smoothly supplied to the tip of the needle-like emitter 15 without any changes, and that there is almost no fluctuation in the position of the tip of the needle-like emitter 15.

The present invention has been explained above using a liquid metal Al ion source as an example, but the embodiments of the present invention are
It goes without saying that the present invention is not limited to Al, but can be applied to metals that are solid at room temperature, molten alloys that are highly reactive to metals, and the like. Furthermore, it is obvious that the present invention is not limitedly applicable only to brittle needle-like emitters, but is also effective to needle-like emitters made of metal wire. be.

7 and 8 show a longitudinal cross-sectional view and a bottom view of another embodiment of the present invention, where 20 is a member 16-2 of the needle emitter support 16 in FIG.
21 is a liquid metal storage section consisting of members 21-1 and 21-2 similar to the storage section 17, and these two members 20
and 21 constitute a reservoir section. The inner member 21-2 of the liquid metal reservoir 21 has a needle-like emitter support 20 similar to the inner member 17-2 in FIG.
This is to prevent positional fluctuations. In this example, unlike the emitter support 16, the member 16-1 is not provided, and the outer member 21-1 of the liquid metal storage section 21 is
The member 16 of the needle-like emitter support 16 in FIG.
-1, a recess 21-1A for supporting the needle emitter 15 is formed in the nozzle part 21-1B,
Further, the needle emitter 15 is connected to the liquid metal storage section 21-1.
The nozzle hole 21-1C is made to protrude downward from the nozzle hole 21-1C.

According to the above configuration, the length of the needle-like emitter 15 is reduced compared to the embodiment shown in FIGS. 2 to 5, and the strength and positional accuracy of the needle-like emitter 15 are increased.
Moreover, the ease of assembly can be improved.

In this embodiment, the nozzle hole 21-1C is partially closed by the needle emitter 15. Therefore, in this example, a small hole 22 for molten metal propagation (for example, about 0.2 mm in diameter) is provided near the nozzle hole 21-1C.
By providing one or more of the above), a liquid metal supply member is configured, and the molten metal 3 is smoothly supplied to the tip of the needle emitter 15.

The needle-like emitter support 20 and the liquid metal reservoir 21 are similar to the needle-like emitter support 16 and the liquid metal reservoir 1 in the embodiment shown in FIGS. 2 to 5.
Constructed from the same material as 7. On the other hand, regarding the needle-shaped emitter support 20 and the liquid metal storage section 21-2, since power can be supplied directly from the liquid metal storage section 21-1 to the needle-shaped emitter 15, these members 20 and 21-2 are electrically conductive. Needless to say, it is not necessary to use a material having .

Figures 9 and 10 show a further embodiment of the invention, in which 31 is a liquid metal reservoir forming a reservoir section. This liquid metal storage section 31
This is a configuration that is a further development of the two embodiments shown in FIGS. 2 to 5 or 7 and 8. In these embodiments described above, in consideration of the fact that the needle-shaped emitter 15 and the liquid metal storage section 17 or 21 as a reservoir section are made of the same material, in this embodiment, the lower part of the liquid metal storage section 31 is A conical part 32 with a tapered mouth is formed, and a needle-like emitter 33 is integrally provided at the lower end thereof to protrude.

In this way, by not providing the needle-like emitter supports 16 and 20, the strength of the needle-like emitter 33 can be improved.
Positional accuracy and structural simplicity can be dramatically improved. However, in this example, there is no nozzle hole as in the above-mentioned example, so
One or more small holes 34 (diameter, for example, about 0.2 mm or more) similar to the small holes 22 shown in the examples of FIGS. 7 and 8 are provided in the vicinity of the needle emitter 33 to configure the molten metal supply member. As a result, the molten metal 3 is supplied to the tip of the needle emitter 33.

In the above, the embodiment of the present invention will be described with reference to the needle-shaped emitter 1.
5. Next, we will explain the embodiments shown in FIGS. 2 to 5, focusing on the wettability of the liquid metal storage section 17 with the molten metal 3. I do.

Generally, the inner wall 17-1C of the nozzle portion 17-1A
If the wettability between the liquid metal storage portion 17 and the molten metal 3 is poor, immediately after the liquid metal storage portion 17 comes into contact with the molten metal 3,
Due to surface tension, the molten metal 3 flows into the nozzle hole 17-1.
It's harder to get out than B. However, in this embodiment, since the liquid metal storage section 17 is made of the same material as the needle emitter 15, the wettability is good, and the molten metal 3 flows to the tip of the needle emitter 15 from the beginning of the ion source operation. Stable supply.

However, since the molten metal reservoir 17 is made of the same material, the molten metal 3 is
7-1B to the outer wall 17-1 of the nozzle part 17-1A
Propagates to D. Considering this point, in this embodiment, the liquid metal storage heating support 18 is structured to protrude toward the nozzle outer wall 17-1D, and
Liquid metal storage using high melting point insulating materials such as boride (BN) and oxides (Al ₂ O ₃ ), which have high reaction resistance against highly reactive molten metals 3 such as Al, and have poor wettability with molten metals 3 By configuring the part heating support 18, the nozzle part outer wall 1 can be heated at the joint part 17-1E.
It is configured to block the molten metal 3 that has propagated through 7-1D.

According to this configuration, the molten metal 3 forms a film on the nozzle part outer wall 17-1D and completely covers this area.
Moreover, since the molten metal 3 is held stably, it becomes possible to smoothly supply the molten metal 3 to the tip of the needle emitter 15, and stable ion beam emission as shown in FIG. 6 can be realized.

Such liquid metal storage section 17 and molten metal 3
Based on the wettability with the molten metal 3, the outer wall 17-1D of the nozzle portion 17-1A is made of a high melting point material that has poor wettability with the molten metal 3 and has high reaction resistance, using, for example, a plasma jet method. A configuration is also possible in which the molten metal 3 is prevented from propagating to the nozzle portion outer wall 17-1D by covering it.

Furthermore, the material composition is completely opposite, that is, the liquid metal storage part 17 is made of a high melting point material that has poor wettability with the molten metal 3 and has high reaction resistance, and the inner wall of the liquid metal storage part 17, especially the nozzle part 17. It goes without saying that a similar effect can be expected by coating the inner wall 17-1C of molten metal 3 with a high melting point material that has good wettability with the molten metal 3 and high reaction resistance.

Still another example of the present invention based on the concept of wettability is shown in FIGS. 11 and 12.

Here, 41 is the member 17 of the liquid metal storage section 17.
The needle-shaped emitter support 42 also serves as the function of the nozzle part 17-1A of 1, and 42 is a liquid metal storage part that does not have a nozzle structure. By fitting it into the section, a reservoir section is constructed, and the molten metal 3 is stored. The needle-like emitter support 41 has a hole 43 into which the needle-like emitter 15 is removably fitted and protruded and supported, and a supply member for supplying the molten metal 3 to the needle-like emitter 15, for example, about 0.3 mm in diameter. The above small holes 44 are formed.

Here, the liquid metal storage section 42 is connected to the needle-shaped emitter 1
Although it is made of the same material as 5, the needle-shaped emitter support 4
1 is formed using a high melting point conductive material such as carbon which is resistant to reaction with highly reactive molten metal 3 such as Al and has poor wettability. As a result, the molten metal 3 passes through the small hole 44 provided in the needle-like emitter support and passes through the outer wall 41 of the needle-like emitter support 41.
It is possible to be supplied to the needle emitter 15 without propagating to A.

Moreover, since the needle emitter 15 is removably fitted into the needle emitter support 41, it is possible to improve the positional accuracy of the needle emitter 15 and to simplify the ion source configuration.

In addition, in this example, the needle-like emitter support 4
1 and the molten metal 3, small holes 44
Although it may be difficult to continuously supply the molten metal 3 to the needle-shaped emitter 15 through the hole, it is possible to make the small hole 44 relatively large in diameter or to make the outer wall 41A of the needle-shaped emitter support 41 sloped. By forming a molten metal reservoir at the joint portion 41B with the needle emitter 15, it is possible to smoothly supply the molten metal 3 to the tip of the needle emitter 15.

In addition, Fig. 7 and Fig. 8, and Fig. 11 and Fig. 1
In the example shown in FIG. 2, a structure is shown in which a small hole 22 or 44 is provided in order to supply the molten metal 3 to the tip of the needle emitter 15.
Of course, it is not necessary to provide the molten metal 3 from the side surface of the needle emitter 15.

In the embodiments of the present invention described above, the present invention has been explained by taking the case of a particularly reactive high-melting point metal as an example, but the present invention can also be applied to liquid metal ion sources such as other metals and various alloys. Needless to say, it can be applied.

Furthermore, in contrast to the conventional liquid metal ion source configured by arranging metallic needle-like emitters, the needle-like emitters are supported with the structure of the present invention, and the vicinity of the nozzle hole of the liquid metal storage section is arranged as described above. By composing the emitter with materials with different wettability (for example, it is possible to use a cladding material or by applying a thermal spray coating method), it is possible to improve the strength and positional accuracy of the needle-shaped emitter, and to ensure a smooth supply of liquid metal. It is a matter of course that this becomes possible and that a stable ion beam can be obtained.

Further, the reservoir section only needs to be composed mainly of the liquid metal storage section, and the liquid metal storage section heating support and the liquid metal storage section fixing body may be of various types as long as they take advantage of the spirit of the present invention. Needless to say, configuration is possible. Additionally, although the present invention has been described above with reference to a configuration example in which the reservoir section is indirectly heated by a resistance wire, it goes without saying that the reservoir section may be heated with electricity to melt the metal. be.

(Effects) As explained above, in the present invention, a conductive base material (generally a brittle material) that is resistant to reaction with the molten metal to be ionized is processed into a needle-shaped emitter with a reserve structure. Since the liquid metal ion source is configured, it is possible to provide an ion source that operates highly stably, can be used repeatedly, and has a long life. Furthermore, according to the ion source of the present invention, even when a metal wire emitter is used, it is easy to replenish solid metal at room temperature, and the ion beam emission direction changes due to thermal fluctuations of the needle emitter. can be improved. Therefore, the present invention is useful as a liquid metal ion source in a reserve configuration. Liquid metal ion sources have high brightness and can generate various ion species, so they are effective as ion sources for patterning (exposure, etc.), ion implantation, microetching, adhesion, doping, and even ion beam microanalysis. It can be used for

[Brief explanation of drawings]

FIG. 1 is a vertical cross-sectional view showing an enlarged configuration of a conventional field emission type liquid metal ion source, especially the emitter part, and FIG. 2 is a vertical cross-sectional view showing an example of the configuration of a reserve configuration type liquid metal ion source according to the present invention. 3 is a vertical cross-sectional view showing an enlarged configuration of the emitter portion, FIG. 4 is a cross-sectional view taken along the line A--A, and FIG.
A top view of the illustrated ion source, FIG. 6 is a characteristic curve diagram showing the ion current characteristics over time of the ion source of the present invention, FIG. 7 is a vertical cross-sectional view showing a second embodiment of the ion source of the present invention, and FIG. 9 is a vertical sectional view showing the third embodiment of the ion source of the present invention, FIG. 10 is a bottom view thereof, and FIG. 11 is a vertical sectional view showing the fourth embodiment of the ion source of the present invention. , FIG. 12 is a bottom view thereof. 1...acicular emitter, 2...liquid metal storage section, 3...
Molten metal, 4... needle-shaped emitter support, 5... support for heating the liquid metal reservoir, 6... resistance wire for heating the reservoir, 7... heat shielding plate, 8... extraction electrode, 9... extraction power supply, 10... for heating Power supply, 11... Flange with voltage introduction terminal, 12... Insulating substrate, 13... Ion source body support, 14... High voltage supply terminal, 15... Needle emitter, 15A... Large diameter rear end, 16... Needle emitter Support, 16-1...lower member, 16-2...upper member, 16-1A...recess, 17...liquid metal storage section, 17-1...outer member, 17-2...inner member,
17-1A...nozzle part, 17-1B...nozzle hole,
17-1C...Inner wall, 17-1D...Outer wall, 17-1
E...Joint part, 18...Liquid metal storage part heating support, 19...Liquid metal storage part fixing body, 20...Acicular emitter support part, 21...Liquid metal storage part, 21-1
...Outer member, 21-2...Inner member, 21-1A...
Recess, 21-1B... Nozzle part, 21-1C... Nozzle hole, 22... Small hole, 31... Liquid metal storage part, 32
...Conical part, 33...Acicular emitter, 34...Small hole, 41...Acicular emitter supporter, 41A...Outer wall,
41B...Joint portion, 42...Liquid metal storage section, 43
...Support hole, 44...Small hole.

Claims (1)

[Scope of Claims] 1. A reservoir section for storing a liquid metal from which ions are to be emitted; a needle-like emitter disposed at a lower part of the reservoir section; and supplying the liquid metal from the reservoir section to the needle-like emitter. a supply member; and an extraction electrode disposed opposite to the needle-like emitter to extract ions of the liquid metal from the needle-like emitter, and in the reservoir section,
A liquid metal ion source characterized in that the liquid metal is stored on a side opposite to the ion emitting direction with respect to the needle-shaped emitter. 2. In the liquid metal ion source according to claim 1, the reservoir section includes a support that loosely supports the needle-like emitter, and a liquid metal storage section that stores the liquid metal together with the support. A liquid metal ion source characterized by: 3. In the liquid metal ion source according to claim 1, the supply member is a hole formed at the bottom of the reservoir section, and the liquid metal stored in the reservoir section is passed through the hole into the acicular shape. A liquid metal ion source characterized in that the source is supplied to an emitter. 4. In the liquid metal ion source according to claim 1, the needle-like emitter is integrally provided at the bottom of the reservoir section, and a hole serving as the supply member is provided in the bottom near the needle-like emitter. A liquid metal ion source characterized by having opened. 5. The liquid metal ion source according to any one of claims 1 to 4, wherein the reservoir section has an exhaust opening. 6. In the liquid metal ion source according to any one of claims 1 to 5, the reservoir section, the needle emitter, and the supply member are made of a material that does not easily react with the liquid metal. A liquid metal ion source characterized by: 7. The liquid metal ion source according to any one of claims 1 to 6, characterized in that a portion of the reservoir portion related to the needle emitter is made of a conductive material. liquid metal ion source. 8. In the liquid metal ion source according to any one of claims 1 to 7, the liquid metal ion source is supplied from the supply member toward the tip of the needle-like emitter outside the reservoir section and toward the tip of the needle-like emitter. 1. A liquid metal ion source characterized by making it difficult for the liquid metal to flow in a portion that comes into contact with the liquid metal in a direction other than the direction in which the liquid metal flows.