JPH028289B2 - - Google Patents
Info
- Publication number
- JPH028289B2 JPH028289B2 JP18279485A JP18279485A JPH028289B2 JP H028289 B2 JPH028289 B2 JP H028289B2 JP 18279485 A JP18279485 A JP 18279485A JP 18279485 A JP18279485 A JP 18279485A JP H028289 B2 JPH028289 B2 JP H028289B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- spatial light
- light modulation
- substrate
- electro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 11
- 239000000853 adhesive Substances 0.000 claims description 9
- 230000001070 adhesive effect Effects 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 7
- 230000001427 coherent effect Effects 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、真空容器中に光電面または電子銃等
の電子源と電気光学結晶を設けて構成した空間光
変調管に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a spatial light modulation tube constructed by providing an electron source such as a photocathode or an electron gun and an electro-optic crystal in a vacuum container.
（従来の技術）
前述した空間光変調管において、前記電気光学
結晶は、真空容器内に機械的に支持されていた。
解像度を向上させるためには前記結晶を薄く加工
する必要があり、例えば0.3mm以下の厚さにする
と、機械的固定では結晶が反つてしまうという不
都合がある。(Prior Art) In the spatial light modulation tube described above, the electro-optic crystal was mechanically supported within a vacuum container.
In order to improve the resolution, it is necessary to process the crystal thinly. For example, if the crystal is made thinner than 0.3 mm, there is a problem that the crystal will warp when mechanically fixed.
そこで、本件発明等は結晶を基板に接着した
後、結晶を薄くし研磨し、それらを接着したまま
真空容器中に封入する構造（特願昭58−41180号
および特願昭59−171194号）を提案している。 Therefore, the present invention has a structure in which the crystals are bonded to a substrate, the crystals are thinned and polished, and the crystals are sealed in a vacuum container while being bonded (Japanese Patent Application No. 58-41180 and Japanese Patent Application No. 59-171194). is proposed.
（発明が解決しようとする問題点）
前記提案によれば、結晶を薄くしても歪なく配
置することができ、空間光変調管の解像度を向上
させることができる。(Problems to be Solved by the Invention) According to the above proposal, even if the crystal is thinned, it can be arranged without distortion, and the resolution of the spatial light modulation tube can be improved.
しかし、結晶の接着に用いられた接着剤が真空
容器中に入れることによりガスを放出し、このガ
スが光電面製作の障害になつたり、光電面作成
後、光電面感度を低下させる原因となつているこ
とがわかつた。 However, the adhesive used to bond the crystals releases gas when placed in a vacuum container, and this gas can interfere with the production of the photocathode or cause a decrease in the sensitivity of the photocathode after it has been fabricated. I found out that
電子源として光電面のかわりに電子銃を用いた
空間光変調管において、前記ガス放出により管の
寿命が短くさせられている。 In a spatial light modulation tube using an electron gun instead of a photocathode as an electron source, the lifetime of the tube is shortened due to the gas emission.
本発明の目的は前述した問題を解決することが
できる空間光変調管を提供することにある。 SUMMARY OF THE INVENTION An object of the present invention is to provide a spatial light modulation tube that can solve the above-mentioned problems.
（問題を解決するための手段）
前記目的を達成するために、本発明による空間
光変調管は、真空容器中に形成された電子源から
の電子が表面に与えられることにより光学的変化
を生ずる結晶を用いた空間光変調管において、前
記結晶を透明導電膜を介して基板に接着剤で固定
し、少なくとも前記基板と前記結晶との周辺境界
部を、蒸気圧の低い物質でコーテイングして構成
されている。(Means for Solving the Problem) In order to achieve the above object, the spatial light modulation tube according to the present invention produces an optical change by applying electrons from an electron source formed in a vacuum container to the surface. In a spatial light modulation tube using a crystal, the crystal is fixed to a substrate via a transparent conductive film with an adhesive, and at least a peripheral boundary between the substrate and the crystal is coated with a substance having a low vapor pressure. has been done.
（実施例）
以下、図面等を参照して本発明をさらに詳しく
説明する。(Example) Hereinafter, the present invention will be described in more detail with reference to the drawings and the like.
第１図は本発明による空間光変調管の使用例を
示す略図である。まずこの図面により動作原理等
を簡単に説明する。 FIG. 1 is a schematic diagram illustrating an example of the use of a spatial light modulation tube according to the present invention. First, the operating principle etc. will be briefly explained with reference to this drawing.
インコヒーレント光像１は、レンズ２で空間光
変調管３の光電面４に投影される。 The incoherent optical image 1 is projected by a lens 2 onto a photocathode 4 of a spatial light modulation tube 3.
光電面４からは像１に対応した光電子が放出さ
れ、マイクロチヤンネルプレート５によつて増倍
された後、電気光学結晶７の表面に電荷像として
蓄積される。 Photoelectrons corresponding to the image 1 are emitted from the photocathode 4, multiplied by the microchannel plate 5, and then accumulated on the surface of the electro-optic crystal 7 as a charge image.
この電荷像により電気光学結晶７にその像に対
応する屈折率の変化が生じる。 This charge image causes a change in the refractive index of the electro-optic crystal 7 corresponding to the image.
そこで、レーザ光１０を出力ガラス窓８を通し
て結晶に照射すると、電気光学結晶７の中でレー
ザ光は変調され、出力にコヒーレント像１１が得
られる。 Therefore, when the laser beam 10 is irradiated onto the crystal through the output glass window 8, the laser beam is modulated within the electro-optic crystal 7, and a coherent image 11 is obtained at the output.
このようなコヒーレント像はコヒーレント並列
光演算に使用される。 Such coherent images are used for coherent parallel optical operations.
第２図は前記電気光学結晶７と出力ガラス窓８
を取り出して示した断面図である。 FIG. 2 shows the electro-optic crystal 7 and the output glass window 8.
It is a sectional view taken out and shown.
基板となる出力ガラス窓８に透明導電膜
（ITO）１０１を形成した後、電気光学結晶７の
素材を、接着剤（例えば紫外線硬化接着剤）１０
３で接着する。 After forming a transparent conductive film (ITO) 101 on the output glass window 8 serving as a substrate, the material of the electro-optic crystal 7 is coated with an adhesive (for example, an ultraviolet curing adhesive) 10.
Glue in step 3.
そして固定された電気光学結晶７の素材の表面
を研磨して、厚さ100μｍ以下にし、表面を光学
平面とする。 Then, the surface of the fixed electro-optic crystal 7 material is polished to a thickness of 100 μm or less, and the surface is optically flat.
その後、SiO2１０２を高周波スパツタで結晶
７と基板８の境界部の接着剤が外気と接触する部
分を封じる。 Thereafter, the SiO 2 102 is sealed by high-frequency sputtering at the boundary between the crystal 7 and the substrate 8 where the adhesive comes into contact with the outside air.
第３図は電気光学結晶と出力ガラス窓の他の結
合構造を示す断面図である。 FIG. 3 is a sectional view showing another coupling structure between an electro-optic crystal and an output glass window.
前述と同様に基板となる出力ガラス面板８に透
明導電膜１０１を形成した後、電気光学結晶７の
素材を、接着剤１０３で接着する。 After forming the transparent conductive film 101 on the output glass face plate 8 serving as the substrate in the same manner as described above, the material of the electro-optic crystal 7 is bonded with an adhesive 103.
そして同様に研磨した後に、結晶７の表面も含
めて誘電体ミラー（SiO2とZrO2の多層膜）１０
４をコーテイングする。 After polishing in the same manner, a dielectric mirror (multilayer film of SiO 2 and ZrO 2 ) 10 is formed, including the surface of the crystal 7.
Coat 4.
なお前述した各実施例は、結晶を出力ガラス面
板に接着した例を示した。 Note that each of the above-mentioned embodiments shows an example in which the crystal is bonded to the output glass face plate.
他の基板、例えば厚い結晶に結晶を接着した場
合も前記密封層による同様の効果を得ることがで
きる。 The same effect of the sealing layer can be obtained when the crystal is adhered to another substrate, for example, a thick crystal.
（発明の効果）
以上詳しく説明したように、本発明によれば、
接着剤と真空との界面を低蒸気圧物質で覆つてし
まうので、接着剤からのガスの放出を防止でき
る。そのため、光電面作製の困難さ、光電面の感
度低下を除去することができると共に、電子銃タ
イプのものについても寿命の低下を防止できる。(Effects of the Invention) As explained in detail above, according to the present invention,
Since the interface between the adhesive and the vacuum is covered with a low vapor pressure substance, gas release from the adhesive can be prevented. Therefore, it is possible to eliminate the difficulty in producing a photocathode and the decrease in sensitivity of the photocathode, and also to prevent a decrease in the life of an electron gun type device.
第１図は本発明による空間光変調管の実施例の
使用例を示す略図である。第２図は電気光学結晶
部分と基板の固定構造の第１の実施例を示す断面
図である。第３図は電気光学結晶部分と基板の固
定構造の第２の実施例を示す断面図である。
１……インコヒーレント像、２……レンズ、３
……空間光変調管、４……光電面、５……マイク
ロチヤンネルプレート、６……メツシユ電極、７
……電気光学結晶、８……出力ガラス面板、９…
…ハーフミラー、１０……レーザ光、１０１……
透明導電膜（ITO）、１０２……SiO2膜、１０３
……接着剤層、１０４……誘導体ミラー、１１…
…コヒーレント像。
FIG. 1 is a schematic diagram illustrating the use of an embodiment of a spatial light modulation tube according to the invention. FIG. 2 is a sectional view showing a first embodiment of the fixing structure between the electro-optic crystal part and the substrate. FIG. 3 is a sectional view showing a second embodiment of the fixing structure between the electro-optic crystal part and the substrate. 1...Incoherent image, 2...Lens, 3
... Spatial light modulation tube, 4 ... Photocathode, 5 ... Microchannel plate, 6 ... Mesh electrode, 7
... Electro-optic crystal, 8 ... Output glass face plate, 9 ...
...Half mirror, 10...Laser light, 101...
Transparent conductive film (ITO), 102...SiO 2 film, 103
...adhesive layer, 104 ... dielectric mirror, 11 ...
...coherent image.
Claims (1)
表面に与えられることにより光学的変化を生ずる
結晶を用いた空間光変調管において、前記結晶を
透明導電膜を介して基板に接着剤で固定し、少な
くとも前記基板と前記結晶との周辺境界部を、蒸
気圧の低い物質で覆い密封層を形成して構成した
ことを特徴とする空間光変調管。1 In a spatial light modulation tube using a crystal that causes an optical change when electrons from an electron source formed in a vacuum container are applied to the surface, the crystal is fixed to a substrate with an adhesive through a transparent conductive film. A spatial light modulation tube characterized in that at least a peripheral boundary between the substrate and the crystal is covered with a substance having a low vapor pressure to form a sealing layer.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18279485A JPS6242117A (en) | 1985-08-20 | 1985-08-20 | Spatial optical modulation tube |
| US06/887,610 US4741602A (en) | 1985-08-20 | 1986-07-21 | Spatial light modulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18279485A JPS6242117A (en) | 1985-08-20 | 1985-08-20 | Spatial optical modulation tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6242117A JPS6242117A (en) | 1987-02-24 |
| JPH028289B2 true JPH028289B2 (en) | 1990-02-23 |
Family
ID=16124532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18279485A Granted JPS6242117A (en) | 1985-08-20 | 1985-08-20 | Spatial optical modulation tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6242117A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2587958B2 (en) * | 1987-10-16 | 1997-03-05 | 富士写真フイルム 株式会社 | Radiation image information reader |
| US5064257A (en) * | 1990-04-06 | 1991-11-12 | Hamamatsu Photonics K.K. | Optical heterodyne scanning type holography device |
-
1985
- 1985-08-20 JP JP18279485A patent/JPS6242117A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6242117A (en) | 1987-02-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |