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JPH029311B2 - - Google Patents
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JPH029311B2 - - Google Patents

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Publication number
JPH029311B2
JPH029311B2 JP14588981A JP14588981A JPH029311B2 JP H029311 B2 JPH029311 B2 JP H029311B2 JP 14588981 A JP14588981 A JP 14588981A JP 14588981 A JP14588981 A JP 14588981A JP H029311 B2 JPH029311 B2 JP H029311B2
Authority
JP
Japan
Prior art keywords
electrode
probe
plane
potential
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14588981A
Other languages
Japanese (ja)
Other versions
JPS5847265A (en
Inventor
Senichi Masuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP14588981A priority Critical patent/JPS5847265A/en
Publication of JPS5847265A publication Critical patent/JPS5847265A/en
Publication of JPH029311B2 publication Critical patent/JPH029311B2/ja
Granted legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/08Measuring current density

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Current Or Voltage (AREA)

Description

【発明の詳細な説明】 本発明は正、負両極性のイオンの存在する電界
中で、その正、負イオン電流密度を簡単かつ正確
に測定することを可能ならしめる所の測定器に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a measuring device that makes it possible to easily and accurately measure the current density of positive and negative ions in an electric field where ions of both positive and negative polarities exist. be.

本発明者は別発明「両極性イオン電流プローブ
装置」(特願昭55−066229号)において両極性イ
オンの存在する電界中で、その正、負イオン電流
密度を測定するための測定器たる「両極性イオン
電流プローブ装置」をはじめて提案した。しかし
乍ら、その実用に当つては、プローブ電位を測定
点の空間電位(以下平衡電位と呼称する)に一致
させるか、又は平衡点検出用の中心電極の電流が
ゼロとなる準平衡電位を求める必要があり、いづ
れも実際上極めて複雑かつ困難な検出操作を経な
ければ測定値を得ることが出来なかつた。
In another invention, "Bipolar ion current probe device" (Japanese Patent Application No. 55-066229), the present inventor developed a "Bipolar ion current probe device" which is a measuring device for measuring the positive and negative ion current density in an electric field where bipolar ions exist. We first proposed a bipolar ion current probe device. However, in practical use, it is necessary to match the probe potential to the space potential at the measurement point (hereinafter referred to as equilibrium potential), or to set a quasi-equilibrium potential at which the current at the center electrode for detecting the equilibrium point becomes zero. In each case, it was impossible to obtain a measured value without going through an extremely complicated and difficult detection operation.

本発明は、この様な欠点を取り除き、極めて操
作が簡単な新らしい「両極性イオン電流プローブ
装置」を提供することを目的とする。
The object of the present invention is to eliminate such drawbacks and provide a new "bipolar ion current probe device" which is extremely easy to operate.

しかして本発明は、この目的を、上記発明のプ
ローブが、それを構成する三つの電極をプローブ
の対称面に対して対称な配置としたのに対して、
これを根本的に変革し、プローブの対称面に対し
て三電極を以下に述べる如き非対称の配置とする
ことにより達成する。
However, the present invention has achieved this purpose by arranging the three electrodes symmetrically with respect to the plane of symmetry of the probe of the above-mentioned invention.
This is achieved by fundamentally changing the configuration and arranging the three electrodes asymmetrically with respect to the plane of symmetry of the probe as described below.

本発明を詳述するに先立つて先づ上記先行発明
(以下対称プローブと呼称する)の概要を述べる。
第1図は該対称プローブの基本構成を示すもの
で、対称面C1―C2に対してその両側に対称な形
状を有する小形の仮想面F(本図では球面又は円
筒)をプローブ表面とし、F面とC1―C2面の交
叉線S上に小さな巾をもつた長形の中心電極C
(球盤プローブでは円環状、円筒型プローブでは
短冊状)を絶縁配設し、その両側のF面上に、S
線に対して互に対称に、かつ、両側のF面部分全
体を実質的におおう如くに、かつC電極より一定
の小間隙をへだてて測定電極A,B(球形プロー
ブではほぼ半球状、円筒型プローブではほぼ半円
筒状)を絶縁配設して、一つの対称三電極プロー
ブを構成する。いまこれを測定すべき両極性イオ
ンの存在する電界中の一点PにC1―C2面が電界
と直交する如く挿入の上、三電極A,B,Cの電
位をP点の原電位(平衡電位)に一致せしめる
と、電界はC1―C2面を対称面として電気力線1,
1′が示す如く、互に対称な分布を呈する様にな
る。この時にはA電極は正イオン電流のみ、B電
極は負イオン電流のみを吸収し、その電流I+,I-
は、P点における正イオンのみによる電流密度
J+、負イオンのみによる電流密度J-と理論上次の
関係を有する。
Before describing the present invention in detail, the above-mentioned prior invention (hereinafter referred to as symmetrical probe) will first be outlined.
Figure 1 shows the basic configuration of the symmetrical probe, in which a small virtual surface F (spherical or cylindrical in this figure) having a symmetrical shape on both sides of the plane of symmetry C 1 - C 2 is used as the probe surface. , a long center electrode C with a small width is placed on the intersection line S of the F plane and the C 1 - C 2 plane.
(ring-shaped for spherical probes, strip-shaped for cylindrical probes) is insulated, and on the F plane on both sides, S
Measurement electrodes A and B (approximately hemispherical for a spherical probe, cylindrical (in the case of a type probe, it has an approximately semi-cylindrical shape) and is insulated to form one symmetrical three-electrode probe. Now, insert the C 1 - C 2 plane perpendicularly to the electric field at a point P in the electric field where the bipolar ions to be measured exist, and change the potentials of the three electrodes A, B, and C to the original potential at point P ( (equilibrium potential), the electric field becomes electric field lines 1,
As shown by 1', a mutually symmetrical distribution is exhibited. At this time, the A electrode absorbs only positive ion current, and the B electrode absorbs only negative ion current, and the currents I + and I -
is the current density due to only positive ions at point P
Theoretically, J + has the following relationship with the current density J - due to negative ions only.

I+=kJ+ ……(1) I-=kJ- ……(2) 但しkはプローブの形状、電極A,B,Cの寸
法で定まる幾何学的係数で、球型プローブの場合
は、k=3πa2(d/2a)2、円筒型プローブの場合
k=4al(d/2a)となる。但し、a=プローブ半
径、d=C電極の幅、l=円筒電極における電極
の軸方向長さ、である。したがつて理論的にはプ
ローブの三電極A,B,Cを共通の外部可変電圧
線に接続し、その電位を平衡電位に一致せしめれ
ば、A電極及びB電極からの電流I+、I-を測定す
ることにより直ちに求めるJ+、J-の値が得られる
筈である。しかしすでに述べた如く、対箱プロー
ブ問題はこの平衡電位決定の困難さにある。すな
わち、 (1) 電極Cの電流Icは平衡電位下でもJ+とJ-に差
がある限りゼロとはならないが、Ic=0の電位
を準平衡電位として平衡電位を近似する方法を
とるとA電極とB電極からの電流値I+′,I-′は
平衡電位の値I+、I-から可成りのずれを生じ、
I+′、I-′を上式(1)、(2)に代入して求めたJ+、J-
の値は大きな誤差を有する。これを防ごうとし
てC電極の巾を小さくすると、Icが極めて小さ
くなり、そのゼロ検出が著しく不正確となり、
これまたJ+、J-に大きな誤差を生ずる。
I + =kJ + ...(1) I - =kJ - ...(2) However, k is a geometric coefficient determined by the shape of the probe and the dimensions of electrodes A, B, and C. In the case of a spherical probe, k=3πa 2 (d/2a) 2 , and in the case of a cylindrical probe, k=4al(d/2a). However, a=probe radius, d=width of the C electrode, l=axial length of the electrode in the cylindrical electrode. Therefore, theoretically, if the three electrodes A, B, and C of the probe are connected to a common external variable voltage line and the potential is made to match the equilibrium potential, the currents I + and I from the A and B electrodes By measuring - , you should be able to immediately obtain the values of J + and J - . However, as already mentioned, the problem with the paired box probe lies in the difficulty in determining this equilibrium potential. In other words, (1) The current I c of electrode C will not be zero even under an equilibrium potential as long as there is a difference between J + and J - , but there is a method of approximating the equilibrium potential by setting the potential of I c = 0 as a quasi-equilibrium potential. Then, the current values I + ′, I ′ from the A electrode and B electrode will deviate considerably from the equilibrium potential values I + , I ,
J + , J - obtained by substituting I + , I - ′ into the above equations (1) and (2)
The value of has a large error. If the width of the C electrode is reduced in an attempt to prevent this, I c becomes extremely small, and its zero detection becomes extremely inaccurate.
This also causes large errors in J + and J - .

(2) 上記準平衡電位において求めたA,B電極の
電流値の比をとると、その関数として正しい
I+、I-を求めるための補正係数が理論的に算出
できるが、その計算は著るしく厄介である。
(2) If we take the ratio of the current values of the A and B electrodes determined at the above quasi-equilibrium potential, it is correct as a function.
Although correction coefficients for determining I + and I - can be calculated theoretically, the calculation is extremely complicated.

(3) プローブ電位を変化させつつA,B,C電の
電流を測定し、両者をグラフ上にプロツトして
平衡電位とその電位におけるI+、Icを図式的に
求めることができるが、その方法は極めて長い
時間を要し、かつ得られた結果は不正確であ
る。
(3) It is possible to graphically determine the equilibrium potential and I + and I c at that potential by measuring the A, B, and C currents while changing the probe potential and plotting them on a graph. The method is extremely time consuming and the results obtained are inaccurate.

結局いずれの方法をとるにしても実際には対称
プローブを用いる限り、平衡点を正確迅速に決定
する手段がなく、その使用に当つて、この点が最
大の欠点であつたのである。本発明はこの欠点を
以下に述べる様に電極A,B,Cの配置を非対称
とすることによつて解決する。
In the end, no matter which method is used, in reality, as long as a symmetrical probe is used, there is no means to accurately and quickly determine the equilibrium point, and this was the biggest drawback in its use. The present invention solves this drawback by making the arrangement of electrodes A, B, and C asymmetric, as described below.

第2図は本発明(以下非対称プローブと呼称す
る)の基本構成を示す図である。C1―C2は対称
面でその両側に対称な形状を有する小形の仮想面
F(本図では球面又は円筒面)をもつてプローブ
表面とすることは第1図の対称プローブの場合と
同様である。しかし本発明の非対称プローブでは
中心のC電極がなく、C1―C2面とF面の交叉線
Sを中心としてその下半の仮想面全体をおおう如
く電極Bが絶縁配設され、またSの上半の仮想面
をおおう如く絶縁配設された電極Aは、C1―C2
面に平行なD1―D2面によつて上下に分割され、
相互に絶縁された電極A1と電極A2の二つの部分
より成る。但し電極A1の面積と電極A2の面積は
ほぼ等しくしてある。すなわち本発明の非対称プ
ローブは、非対称三電極プローブとなつている。
FIG. 2 is a diagram showing the basic configuration of the present invention (hereinafter referred to as an asymmetric probe). C 1 - C 2 is a symmetry plane, and the probe surface has a small virtual surface F (spherical or cylindrical in this figure) with a symmetrical shape on both sides, as in the case of the symmetrical probe in Fig. 1. It is. However, in the asymmetrical probe of the present invention, there is no center C electrode, and the electrode B is insulated so as to cover the entire lower half of the virtual plane centering on the intersection line S of the C 1 - C 2 plane and the F plane, and the S Electrode A, which is insulated to cover the virtual surface of the upper half of C 1 - C 2
Divided into upper and lower planes by D 1 - D 2 planes parallel to the plane,
It consists of two parts, electrode A1 and electrode A2 , which are insulated from each other. However, the area of electrode A 1 and the area of electrode A 2 are approximately equal. That is, the asymmetric probe of the present invention is an asymmetric three-electrode probe.

いまこのプローブを電界中にC1―C2面が電気
力線と直交する如く挿入の上、三電極A1,A2
Bの電位を平衡電位に一致させる時は、電界の分
布は電気力線1,1′が示す如くC1―C2面を対称
面として対称な分布となることは第1図の場合と
変る所がない。
Now, insert this probe into the electric field so that the C 1 - C 2 plane is perpendicular to the lines of electric force, and connect the three electrodes A 1 , A 2 ,
When the potential of B is made to match the equilibrium potential, the distribution of the electric field becomes symmetrical with respect to the C 1 - C 2 plane as shown by the lines of electric force 1 and 1', which is different from the case in Figure 1. There is no place.

この場合A1,A2電極は正イオン電流のみを吸
収し、B電極は負イオン電流のみを吸収する。い
まそれぞれの電流をI+1、I+2、I-とすると、これ
らは正イオン電流密度J+、負イオン電流密度J-
の間にそれぞれ次の様な関係がある。
In this case, the A 1 and A 2 electrodes absorb only positive ion current, and the B electrode absorbs only negative ion current. Now, assuming that the respective currents are I +1 , I +2 , and I - , these have the following relationships with the positive ion current density J + and the negative ion current density J - , respectively.

I+1=k1J+ ……(3) I+2=k2J+ ……(4) I+=I+1+I+2=(k1+k2)J+=kJ+ ……(5) I-=kJ- ……(6) 但し、k1,k2はプローブの幾何学的形状、電極
A1,A2,Bの寸法で定まる幾何学的係数で、理
論計算又は実験で求まり、 (i) 球型プローブの場合: k1=3πa2(b/a)2 ……(7) k2=3πa2〔1−(b/a)2〕 ……(8) k=k1+k2=3πa2 ……(9) (ii) 円筒プローブの場合: k1=4al(b/a) ……(10) k2=4al〔1−(b/a)〕 ……(11) k=4al ……(12) となる。但しa=プローブ半径、b=A2電極の
高さ(第2図参照)、l=円筒電極における軸方
向電極の長さ、である。
I +1 =k 1 J + ……(3) I +2 =k 2 J + ……(4) I + =I +1 +I +2 =(k 1 +k 2 )J + =kJ + ……( 5) I - = kJ - ...(6) However, k 1 and k 2 are the geometrical shape of the probe and the electrode
A geometric coefficient determined by the dimensions of A 1 , A 2 , and B, determined by theoretical calculation or experiment. (i) For a spherical probe: k 1 = 3πa 2 (b/a) 2 ...(7) k 2 = 3πa 2 [1-(b/a) 2 ] ……(8) k=k 1 +k 2 = 3πa 2 ……(9) (ii) For cylindrical probe: k 1 = 4al(b/a) ...(10) k 2 = 4al [1-(b/a)] ...(11) k = 4al ...(12). where a=probe radius, b=height of the A2 electrode (see FIG. 2), and l=length of the axial electrode in the cylindrical electrode.

したがつて平衡電位においては、I+1とI+2の比
をとると (i) 球型プローブの場合: I+1/I+2=(b/a)2/〔1−(b/a)2
……(13) (ii) 円筒プローブの場合: I+1/I+2=(b/a)/〔1―(b/a)〕
……(14) となり、いずれもその比はb/aの関数となる。
また形状が球形ないし円筒形でない一般のプロー
ブの場合にも、平衡電位になると、A1,A2電極
の電流比I+1/I+2は、その電極の幾何学的形状、
寸法に固有の一定の幾何学的係数γ(プローブ平
衡係数と呼称する) I+1/I+2=γ ……(15) をとる。このことから逆にプローブ電位を変化さ
せつつA1,A2電極電流I+1′、I+2′を測定し、その
比が丁度上記γとなる電位(平衡電位)を手動又
は自動で決定すると、その時のA1,A2電極の電
流値として直ちにI+1、I+2を求めることが出来、
これから式(5)により直ちにJ+が求まる。
Therefore, at equilibrium potential, taking the ratio of I +1 and I +2 , (i) For a spherical probe: I +1 /I +2 = (b/a) 2 /[1-(b/ a) 2 ]
...(13) (ii) For cylindrical probe: I +1 /I +2 = (b/a)/[1-(b/a)]
...(14) In both cases, the ratio is a function of b/a.
In addition, even in the case of a general probe that is not spherical or cylindrical in shape, when the equilibrium potential is reached, the current ratio I +1 /I +2 of the A 1 and A 2 electrodes is determined by the geometric shape of the electrode,
A constant geometric coefficient γ (referred to as probe balance coefficient) specific to the dimensions is taken as I +1 /I +2 = γ (15). From this, conversely, measure the A 1 and A 2 electrode currents I +1 ′ and I +2 ′ while changing the probe potential, and manually or automatically determine the potential (equilibrium potential) at which the ratio is exactly γ above. Then, I +1 and I +2 can be immediately obtained as the current values of the A 1 and A 2 electrodes at that time,
From this, J + can be found immediately using equation (5).

またその時のB電極の電流I-から式(6)によりJ-
が求まる。
Also, from the current I - of the B electrode at that time, J - is determined by equation (6).
is found.

この場合平衡電位の検出は平衡電位において
I+1I+2となる様にA1,A2電極の分割を選ぶこと
により著しく容易となり、その精度を大巾に向上
することができる。
In this case, the detection of the equilibrium potential is performed at the equilibrium potential.
By choosing the division of the A 1 and A 2 electrodes so that I +1 I +2 , it becomes extremely easy and the accuracy can be greatly improved.

例えば、球形プローブの場合、式(7)、(8)から b=a/√2 ……(16) 円筒プローブの場合(10)、(11)式から b=a/2 ……(17) に選定すると平衡電位において丁度I+1=I+2とな
り、その検出決定はもつとも確実かつ容易となる
のである。
For example, for a spherical probe, from equations (7) and (8), b=a/√2...(16) For a cylindrical probe, from equations (10) and (11), b=a/2...(17) If selected, exactly I +1 = I +2 at the equilibrium potential, and the detection decision becomes reliable and easy.

以上が本発明による所の新規の両極性イオン電
流プローブの基本的な構成と原理である。
The above is the basic structure and principle of the novel bipolar ion current probe according to the present invention.

すなわち本発明による所の新規の両極性イオン
電流プローブは、対称面に対して面対称の形状を
有する小形の仮想面Fと該対称面C1―C2が交叉
する交叉線Sの両側の該仮想面上に、該交叉線S
に沿つた小間隙をへだてて、かつ面C1―C2に対
して互に対称に、該両側仮想面全体を実質的に覆
う如くに測定電極A,Bを絶縁配置し、更に該対
称面に平行な面D1−D2によつて電極Aを二つの
相互に小間隙をへだてて絶縁された部分電極A1
A2に分割し、これによつて測定電極A1,A2,B
よりり成る所の非対称三電極プローブを構成し、
これを支持用中空金属柱により絶縁支持し、該電
極A1,A2,Bにそれぞれ絶縁導線を接続の上、
これら導線を該支持用中空金属柱の内部を通して
絶縁貫通し、これら導線の他端をそれぞれ微少電
流計DA1,DA2,DBの端子に接続し、該DA1,DA2
DBのいま一つの端子と該支持用中空金属柱とを
共通の導線に接続の上、これを可変電圧源に接続
して一つの測定系を構成し、該非対称三電極プロ
ーブを正イオン電流と負イオン電流の共存する電
界中の測定点に挿入の上、A1,A2電極をたとえ
ば正イオン源、B電極を例えば負イオン源に向け
て該対称面C1―C2が電界の方向と直交する様に
配設し、該可変電圧源の電圧Vを変化することに
より、該電極A1,A2,Bおよび該支持用中空金
属柱の電位を変化して、該電極A1,A2に接続せ
る該微少電流計DA1,DA2の電流I+1′、I+2′の比
I+1′/I+2′の値を計算し、これを平衡電位に対応
する上述のプローブ平衡係数γに一致せしめるこ
とによつて該非対称三電極プローブの電位を測定
点の原電位に一致せしめ、この時の該微少電流計
の読み、I+1、I+2、I-を求め、(I+1+I+2)及びI-
の値がそれぞれの電極が対向するイオン源の極性
のイオン電流密度J+1、J-に比例することを利用
して、正負イオンの電流密度を同時にかつ分離し
て測定することを特徴とする。
That is, the novel bipolar ion current probe according to the present invention has a small virtual plane F having a plane-symmetrical shape with respect to the plane of symmetry, and a small virtual plane F having a plane-symmetrical shape with respect to the plane of symmetry, and a cross section S on both sides of the intersection line S where the plane of symmetry C 1 - C 2 intersects. On the virtual plane, the intersection line S
Measurement electrodes A and B are insulated and arranged symmetrically with respect to the plane C 1 - C 2 so as to substantially cover the entire imaginary plane on both sides, apart from a small gap along the symmetrical plane. The electrode A is separated by a plane D 1 -D 2 parallel to the two partial electrodes A 1 , separated from each other by a small gap.
The measurement electrodes A 1 , A 2 , B
constitute an asymmetric three-electrode probe consisting of
This is insulated and supported by a hollow metal pillar for support, and insulated conductive wires are connected to the electrodes A 1 , A 2 , and B, respectively.
These conductive wires are passed through the insulation of the supporting hollow metal column, and the other ends of these conductive wires are connected to the terminals of minute ammeters D A1 , D A2 , D B , respectively, and the D A1 , D A2 ,
Another terminal of D Insert the A 1 and A 2 electrodes toward the positive ion source and the B electrode toward the negative ion source so that the plane of symmetry C 1 - C 2 is in the electric field. By changing the voltage V of the variable voltage source, the potentials of the electrodes A 1 , A 2 , B and the supporting hollow metal column are changed, so that the electrode A 1 , A 2 The ratio of the currents I +1 ′ and I +2 ′ of the minute ammeters D A1 and D A2 connected to
By calculating the value of I +1 ′/I +2 ′ and matching it with the above-mentioned probe balance coefficient γ corresponding to the equilibrium potential, the potential of the asymmetric three-electrode probe is matched to the original potential of the measurement point. Finally, find the readings of the microammeter at this time, I +1 , I +2 , and I - , and find (I +1 + I +2 ) and I -
The current density of positive and negative ions can be measured simultaneously and separately by utilizing the fact that the value of is proportional to the ion current density J +1 and J - of the polarity of the ion source where the respective electrodes face each other. .

いま本発明による新規のプローブ装置の特徴及
び使用態様の詳細を実施例と図面により説明す
る。
The features and usage of the novel probe device according to the present invention will now be described in detail with reference to embodiments and drawings.

第3図は本発明のプローブを球型プローブとし
て実現せる例で、図において2はこの球型プロー
ブ部分である。C1―C2面を対称面とする仮想球
面F上に第2図に示す如き半球状の電極(A1
A2)とBが小間隙をへだててC1―C2面に対して
相互に対称に絶縁配設され、また電極A1,A2
C1―C2面に平行な面D1−D2によつて分割され、
相互に絶縁され、かつ小間隙をへだてほぼ等しい
表面積(本図の例では、b=a/√2)となる様
にしてある。
FIG. 3 shows an example in which the probe of the present invention can be realized as a spherical probe, and in the figure, 2 is the spherical probe portion. A hemispherical electrode (A 1 +
A 2 ) and B are arranged symmetrically and insulated with respect to the C 1 - C 2 plane with a small gap, and the electrodes A 1 and A 2 are
Divided by plane D 1 - D 2 parallel to C 1 - C 2 plane,
They are mutually insulated and have approximately the same surface area (b=a/√2 in the example of this figure) separated by a small gap.

3はプローブ支持用中空金属柱で、その内面に
密着せる絶縁物円筒4を収納し、4の延長部分5
がプローブ部分2を固定支持して正負両イオンの
存在する電界中の所要の測定点にこれを挿入、
C1―C2面が電界と直交する如くに配設する。
3 is a hollow metal column for supporting the probe, which houses an insulating cylinder 4 to be brought into close contact with the inner surface, and an extension part 5 of 4.
fixedly supports the probe part 2 and inserts it at a required measurement point in an electric field where both positive and negative ions are present,
Arrange so that the C 1 - C 2 planes are perpendicular to the electric field.

6,7,8は絶縁ひふくを有する導線で絶縁物
円筒4の内部を貫通の上それぞれが電極A1
A2Bに接続され、またそれぞれの導体の他端は絶
縁支持されている微少電流計DA1,DA2,DBの一
端に接続されている。更にこれら微少電流計の他
端は共通導線9に接続され、該金属柱3に接属せ
る導線10と共に、可変直流高圧電源11に接続
され、これによつてプローブ2の各電極A1,A2
Bは共通の電圧Vを供給されている。いま電圧V
を調節し、微少電流計DA1とDA2の指示値I+1′と
I+2′の比がプローブ平衡係数γ(本図の例ではγ
=1 すなわちI+1′=I+2′)となる様にすると、
この時の電圧Vの値は平衡電位に一致し、またこ
の時の微少電流計DA1,DA2,DBの指示値(平衡
電流値)(I+1、I+2、I-)を読むと式(5)、(6)、(9)か
ら I+=I+1+I+2=3πa2J+ ……(18) I-=3πa2J- ……(19) により直ちにJ+、J-を求めることができる。この
場合、I+1′とI+2′の大きさはほぼ平衡点附近まで
等しくなるので、平衡係数γは1に近く(本図の
例ではγ=1)したがつて平衡電位の検出決定は
極めて容易である。またこの場合微少電流計
DA1,DA2,DBにA−D変換部と電気−光信号変
換部を設け、I+1′、I+2′、IB′の値をデジタル信号
に変換の上、光信号に変換し、これを光フアイバ
ー12,13,14によりマイクロプロセツサー
ないしミニコンピユーター等より成る計算制御1
5に導き、ここでI+1′/I+2の計算を行つて、こ
れをγに一致する如く出力信号を導線16によつ
て直流高圧電源11の操作部に導き、I+1′/
I+2′=γの時の電流I+1、I+2、I-を決定の上、上式
(17)、(18)からJ+J-を算出してこれを表示のプ
リント部17に表示させ、かつプリントさせる様
にすることもできる。
Reference numerals 6, 7, and 8 are conductive wires having insulating shells that pass through the inside of the insulating cylinder 4, and each have an electrode A 1 ,
A 2 B, and the other end of each conductor is connected to one end of microammeters D A1 , D A2 , D B which are insulated and supported. Further, the other ends of these minute ammeters are connected to a common conducting wire 9, and together with a conducting wire 10 attached to the metal column 3, are connected to a variable DC high voltage power source 11, thereby connecting each electrode A 1 , A of the probe 2. 2 ,
B is supplied with a common voltage V. Current voltage V
Adjust the readings of microcurrent meters D A1 and D A2 to I +1 ′ and
The ratio of I +2 ′ is the probe balance coefficient γ (in this example, γ
= 1, that is, I +1 ′=I +2 ′), then
The value of voltage V at this time matches the equilibrium potential, and the indicated values (equilibrium current values) (I +1 , I +2 , I - ) of the minute ammeters D A1 , D A2 , D B at this time When read, from equations (5), (6), and (9), I + = I +1 + I +2 = 3πa 2 J + ……(18) I - = 3πa 2 J - ……(19) immediately yields J + , J - can be found. In this case, the magnitudes of I +1 ′ and I +2 ′ are almost the same up to the equilibrium point, so the equilibrium coefficient γ is close to 1 (γ = 1 in the example shown in the figure), so the detection and determination of the equilibrium potential is is extremely easy. In this case, a microcurrent meter
An A-D converter and an electrical-to-optical signal converter are provided at D A1 , D A2 , and D B to convert the values of I +1 ′, I +2 ′, and I B ′ into digital signals, and then convert them into optical signals. The calculation control 1 consisting of a microprocessor or minicomputer etc.
5, calculate I +1 ′/I +2 , and lead the output signal to the operation part of the DC high voltage power supply 11 through the conductor 16 so that it matches γ, and then I +1 ′ /
After determining the currents I +1 , I +2 , and I - when I +2 ′ = γ, J + J - is calculated from the above equations (17) and (18), and this is displayed on the print section 17. It can also be displayed and printed.

第4図は本発明のプローブを円筒型プローブと
して実現せる実施例で、同図aはその縦断面図、
同図bはそのプローブ部分の横断面図である。図
における18はこの円筒型プローブ部分である。
C1―C2面を対称面とする仮想円筒面F上に半円
筒状の電極(A1+A2)とBが小間隙をへだてて
C1―C2面い対して相互に対称に絶縁配置され、
また電極A1,A2はC1―C2面に平行な面D1―D2
よつて分割され、相互に絶縁され、かつ小間隙を
へだててほぼ等しい表面積(本図の例ではb=
a/2)となる様にしてある。
FIG. 4 shows an embodiment in which the probe of the present invention is realized as a cylindrical probe, and FIG.
Figure b is a cross-sectional view of the probe portion. 18 in the figure is this cylindrical probe portion.
A semi-cylindrical electrode (A 1 + A 2 ) and B are separated by a small gap on a virtual cylindrical plane F whose plane of symmetry is the C 1 - C 2 plane.
C 1 - C 2 are arranged symmetrically and insulated against each other,
Further, electrodes A 1 and A 2 are divided by planes D 1 - D 2 parallel to the C 1 - C 2 plane, are mutually insulated, and have approximately equal surface areas separated by a small gap (in the example of this figure, b =
a/2).

3は該円筒型プローブ支持用の中空金属柱で、
その内部に密着収納された絶縁物円筒4は3を越
えて伸延し該円筒型プローブ18の電極A1,A2
Bを担持し、更に伸延してガード金属キヤツプ1
9を担持している。かくして円筒型プローブ18
の両側には同一外径の二つの金属円柱13,19
があつて電極A1,A2,Bの端部への電界集中を
防いでいる。図における6より17までの番号の
要素の名称と機能は第3図の同一番号のそれと同
じである。
3 is a hollow metal column for supporting the cylindrical probe;
An insulating cylinder 4 tightly housed therein extends beyond the electrodes A 1 , A 2 , and 3 of the cylindrical probe 18 .
B is supported and further extended to guard metal cap 1.
It carries 9. Thus, the cylindrical probe 18
There are two metal cylinders 13, 19 with the same outer diameter on both sides of the
This prevents the electric field from concentrating on the ends of the electrodes A 1 , A 2 , and B. The names and functions of elements numbered 6 through 17 in the figure are the same as those of the same numbered elements in FIG.

この場合、プローブ電位が平衡電位になると、
式(5)、(6)、(12)から I+=I+1+I+2=4alJ+ ……(20) I-=4alJ- ……(21) したがつて直ちに(I+1+I+2)及びI-より求め
るJ+とJ-を得ることが出来る。円筒型プローブは
二次元電界に使用するのに適し、球型プローブは
三次元電界に適用するのに好適である。
In this case, when the probe potential becomes the equilibrium potential,
From equations (5), (6), and (12), I + =I +1 +I +2 =4alJ + ...(20) I - =4alJ - ...(21) Therefore, immediately (I +1 +I + 2 ) and I-, we can obtain the required J + and J - . Cylindrical probes are suitable for use with two-dimensional electric fields, and spherical probes are suitable for application with three-dimensional electric fields.

第5図は本発明による所の新規のプローブをパ
ルス荷電を行つている電気集塵装置の逆電離診断
とパルス荷電の自動制御用センサーとして使用せ
る実施例である。20は電気集塵装置の集塵室で
接地された集塵極21、その中間に絶縁配設され
た放電極22より成り、22は直流高圧電源23
により導電24を介して21に対して負のコロナ
開始寸前の値の直流高電圧Vdcが与えられてお
り、かつこれに重ねて導線25、結合コンデンサ
26を介して高圧パルス電源27より負の高圧パ
ルスVpを印加され、Vpが印加された時にのみパ
ルス状の負コロナ放電を行つている。集塵空間2
8に進入せるダスト粒子は負コロナ放電によつて
生じた負イオンの射突によつて負電荷を与えら
れ、クーロン力により集塵極21上に除去され、
ここに堆積してダスト属29を形成する。この層
29を通して負イオンが流れ層内に電界 Ed=Jρd ……(22) を生ずる。但しJは負イオン電流密度、ρdはダ
スト抵抗率である。したがつてダストの抵抗率
ρdが高くなりすぎて約2×1010Ω−cmをこえると
ダスト層内の電界が破壊値Edsをこえて Ed=J×ρ,d>Eds ……(23) となり、絶縁破壊を生じこの点からいわゆる逆コ
ロナを生じて正イオンを放出、したがつて集塵空
間28には放電極22に向う正イオン電流と放電
極22から集塵極に向う負イオン電流を生ずるこ
ととなる。その結果ダスト粒子の電荷が中和さ
れ、集塵性能が大巾に低下する。この場合電荷減
少に度合は集塵空間28の内部の正負両イオンの
電流密度J+、J-の値で定まる。したがつて本発明
によるるプローブでこれを測定することによつ
て、逆コロナの有害度を診断できる。この場合、
本図の例では球形プローブ2が用いられ、これが
支持用中空金属柱3により放電極22と集塵極2
1の中間に挿入されている。図におけるDは第3
図のDA1,DA2,DBのセツトであり、15,17
は同図の15,17と同一要素である。本例では
プローブに平衡電位を与えるための直流高圧電源
11の代りに、放電極22と集塵極21の間に抵
抗とコンデンサより成る可変分圧器30を挿入
し、印加電圧を分圧し、その分圧値を調整するこ
とによつてプローブ電圧を変化させこれによつて
平衡電位を与える。任意の直流電圧で一旦平衡条
件を与えておくと、直流電圧の変化、パルス電圧
の重畳を間わず如何なる場合にもその平衡状態が
保持される。この様にして光フアイバー31によ
りDに結合された計算制御部15にはI+1′、I+2′、
IB′がデジタル光信号として与えられ、I+1′/
I+2′=γとなる様にその出力信号が導線16を介
して可変分圧器30の可変操作部32に与えられ
ている操作、分圧比を変化させて平衡電位がプロ
ーブに与えられる様に自動制御を行う。またこの
時に得られるI+1、I+2、IBの値からJ+、J-が算出
され、J+の値をゼロとして逆コロナを解消する様
に、操作信号が15から導線33を介して高圧パ
ルス電源27に与えられて、そのパルス波高値電
圧Vp、パルス周波数p、パルス巾τpを変化させる
ことにより放電極22より供給される負パルスコ
ロナ電流を低下させ、これによつて式(23)の条
件を解消させて、逆コロナを消滅させる。また逆
コロナが著しく旺盛となり、この様な操作によつ
ても消滅しない時は、Vdcを下げるか、あるいは
短時間にこれをゼロにするという操作が必要とな
る。この様な場合には計算制御部15はこの状況
をJ+、J-の値から判断の上、別の信号を導線34
を介して直流高圧電源23に与え、その直流負電
圧Vdcを除々に低下させるか、又は周期的に瞬時
ゼロに下げては復帰するという操作を行わしめ、
逆コロナの完全な解消を行う。
FIG. 5 shows an embodiment in which the novel probe according to the present invention is used as a sensor for reverse ionization diagnosis of an electrostatic precipitator performing pulse charging and for automatic control of pulse charging. 20 consists of a dust collection electrode 21 grounded in the dust collection chamber of the electrostatic precipitator, and a discharge electrode 22 insulated between the two, and 22 is a DC high voltage power source 23.
A high DC voltage Vdc with a value on the verge of the onset of negative corona is applied to 21 via the conductor 24, and in addition to this, a negative high voltage is applied from the high voltage pulse power source 27 via the conductor 25 and the coupling capacitor 26. A pulse V p is applied, and a pulsed negative corona discharge is performed only when V p is applied. Dust collection space 2
Dust particles entering 8 are given a negative charge by the impact of negative ions generated by negative corona discharge, and are removed onto the dust collecting electrode 21 by Coulomb force.
It is deposited here to form a dust group 29. Negative ions flow through this layer 29 and generate an electric field Ed=Jρd (22) within the layer. However, J is the negative ion current density and ρd is the dust resistivity. Therefore, when the resistivity ρd of the dust becomes too high and exceeds approximately 2×10 10 Ω-cm, the electric field within the dust layer exceeds the breakdown value Eds, and Ed=J×ρ, d>Eds ……(23) Therefore, dielectric breakdown occurs and a so-called reverse corona is generated from this point, and positive ions are released.Therefore, in the dust collection space 28, a positive ion current flows toward the discharge electrode 22, and a negative ion current flows from the discharge electrode 22 toward the dust collection electrode. This will result in As a result, the electric charge of the dust particles is neutralized, and the dust collection performance is greatly reduced. In this case, the degree of charge reduction is determined by the current densities J + and J - of both positive and negative ions inside the dust collecting space 28. Therefore, by measuring this with the probe according to the present invention, the degree of harmfulness of the reverse corona can be diagnosed. in this case,
In the example shown in this figure, a spherical probe 2 is used, which is connected to a discharge electrode 22 and a dust collection electrode 2 by means of a supporting hollow metal column 3.
It is inserted in the middle of 1. D in the figure is the third
It is a set of D A1 , D A2 , D B in the figure, 15, 17
are the same elements as 15 and 17 in the same figure. In this example, instead of the DC high-voltage power supply 11 for giving a balanced potential to the probe, a variable voltage divider 30 consisting of a resistor and a capacitor is inserted between the discharge electrode 22 and the dust collection electrode 21 to divide the applied voltage and By adjusting the partial voltage value, the probe voltage is varied, thereby providing an equilibrium potential. Once an equilibrium condition is established with an arbitrary DC voltage, the equilibrium state is maintained regardless of changes in the DC voltage or superimposition of pulse voltages. In this way, the calculation control unit 15 connected to D by the optical fiber 31 receives signals I +1 ′, I +2 ′,
I B ′ is given as a digital optical signal, I +1 ′/
The output signal is applied to the variable operating section 32 of the variable voltage divider 30 via the conductor 16 so that I +2 ' = γ, and the voltage division ratio is changed so that an equilibrium potential is applied to the probe. Perform automatic control. Also, J + and J - are calculated from the values of I +1 , I +2 and I B obtained at this time, and an operation signal is sent from 15 to the conductor 33 so that the value of J + is set to zero and the reverse corona is eliminated. The negative pulse corona current supplied from the discharge electrode 22 is lowered by changing its pulse wave peak voltage V p , pulse frequency p , and pulse width τ p . This eliminates the condition of equation (23) and eliminates the inverted corona. Furthermore, if the reverse corona becomes extremely active and cannot be eliminated even with these operations, it is necessary to lower V dc or to bring it to zero in a short period of time. In such a case, the calculation control unit 15 judges this situation from the values of J + and J - and sends another signal to the conductor 34.
is applied to the DC high-voltage power supply 23 through the DC negative voltage V dc, and the DC negative voltage V dc is gradually lowered, or periodically lowered to instantaneous zero and then returned to it.
Completely eliminate reverse corona.

この他本発明による新規の両極性電流プローブ
装置は凡める種類の電気集塵装置(例えば放電極
と集塵極の他に第3電極を有する三電極型電気集
塵装置)の診断や自動制御、粉体集塵装置、静電
分離装置等の診断や自動制御にも広く活用するこ
とが出来る。
In addition, the novel bipolar current probe device according to the present invention can be used to diagnose and automate all types of electrostatic precipitators (for example, three-electrode electrostatic precipitators having a third electrode in addition to a discharge electrode and a collection electrode). It can also be widely used for diagnosis and automatic control of control devices, powder dust collectors, electrostatic separators, etc.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は先行発明による両極性イオンプローブ
の基本構造を示す断面図、第2図は本発明の基本
構造を示す断面図、第3図は本発明を球型プロー
ブとして実現したものの断面及び構成図、第4図
は本発明を円筒型プローブとして実現したものの
断面および構成図、第5図は本発明をパルス荷電
を行つている電気集塵装置の逆コロナ診断および
自動制御に利する例の構成図を示す。図におい
て、 1……電気力線、A,B,C,A1,A2……プ
ローブ電極、C1―C2……対称面、F……対称仮
想面、D1―D2……C1―C2面に平行な面、3……
支持用中空金属柱、D,DB,DA1,DA2……微少
電流計、11,23……直流高圧電源、12,1
3,14,31……光フアイバー、15……計算
制御部、17……指示の印字部、、27……高圧
パルス電源、30……可変分圧器。
Fig. 1 is a cross-sectional view showing the basic structure of a bipolar ion probe according to the prior invention, Fig. 2 is a cross-sectional view showing the basic structure of the present invention, and Fig. 3 is a cross-sectional view and configuration of the present invention realized as a spherical probe. Figure 4 shows a cross section and configuration diagram of the present invention realized as a cylindrical probe, and Figure 5 shows an example in which the present invention is useful for reverse corona diagnosis and automatic control of an electrostatic precipitator that performs pulse charging. A configuration diagram is shown. In the figure, 1... Lines of electric force, A, B, C, A 1 , A 2 ... Probe electrode, C 1 - C 2 ... Plane of symmetry, F... Virtual plane of symmetry, D 1 - D 2 ... C 1 - plane parallel to C 2 plane, 3...
Supporting hollow metal column, D, D B , D A1 , D A2 ...Micro ammeter, 11,23 ... DC high voltage power supply, 12,1
3, 14, 31... Optical fiber, 15... Calculation control section, 17... Instruction printing section, 27... High voltage pulse power supply, 30... Variable voltage divider.

Claims (1)

【特許請求の範囲】 1 対称面C1−C2に対して面対称の形状を有す
る小型の仮想面Fと、該対称面C1−C2が交叉す
る交叉線Sの両側の該仮想面上に、該交叉線Sに
沿つた小間隙をへだてて、かつ面C1―C2に対し
て互いに対称に該両側仮想面全体を実質的に覆う
如くに測定電極A,Bを絶縁配置し、更に該対称
面に平行な面D1―D2によつて電極Aを二つの相
互に小間隙をへだてて絶縁された部分電極A1
A2に分割し、これによつて測定電極A1,A2,B
より成る所の非対称三電極プローブを構成し、こ
れを支持用中空金属柱により絶縁支持し、該電極
A1,A2,Bにそれぞれ絶縁導線を接続の上、こ
れら導線を該支持用中空金属柱の内部を通して絶
縁貫通し、これら導線の他端をそれぞれ微少電流
計DA1,DA2,DBの端子に接続し、該DA1
DA2,DBのいま一つの端子を該支持用中空金属
柱とを共通の導線で接続の上、これを可変電圧源
に接続して一つの測定系を構成し、該非対称三電
極プローブを正イオン電流と負イオン電流の共存
する電界中の測定点に挿入の上、A1,A2を例え
ば正イオン源、B電極を例えば負イオン源に向け
て、該対称面C1―C2が電界の方向と直交する様
に配設し、該可変電圧源の電圧Vを変化すること
により該電極A1,A2,Bおよび該支持用中空金
属柱の電位を変化して、該電極A1,A2に接続せ
る該微少電流計DA1,DA2、の電流I+1′,I+2′の比
I+1′/I+2′の値を平衡電位に対応する本文に詳述
のプローブ平衡係数γに一致せしめることによつ
て、該非対称三電極プローブの電位を測定点の原
電位に一致せしめ、この時の該微少電流計の読み
I+1,I+2,I-を求め、(I+1+I+2)及びI-の値が電
極A、電極Bが対向するイオン源からの極性たと
えば正および負のイオン電流密度に比例すること
を利用して、正負イオンの電流密度を同時にかつ
分離して測定することを特徴とする所の両極性イ
オン電流プローブ装置。 2 可変電圧源として被測定系に電圧を供給する
電源に並列に可変分圧器を挿入の上、その出力電
圧の分圧電圧を利用することを特徴とする所の特
許請求の範囲第1項に記載の両極性イオン電流プ
ローブ装置。 3 微少電流計DA1,DA2,DA3として測定電流
値をA−D変換し更に光デジタル信号に変換、こ
れを大地電位にある計算制御部に光フアイバーで
供給、該計算制御部においてI+1′/I+2′の値の計
算を行わしめ、その値がγに一致するごとく計算
制御部より操作信号を該可変電圧源ないし、該可
変分圧器の調整操作部に供給制御し、これによつ
て自動的にVを平衡電位に一致せしめると共に
I+1,I+2,IBの値からJ+1、J-の計算表示せしめ
ることを特徴とする特許請求の範囲第1項及び第
2項に記載の両極性イオン電流プローブ装置。
[Claims] 1. A small virtual surface F having a plane-symmetrical shape with respect to the plane of symmetry C 1 -C 2 , and the virtual surfaces on both sides of the intersection line S where the plane of symmetry C 1 -C 2 intersects. Above, measurement electrodes A and B are insulated and arranged symmetrically with respect to the planes C 1 - C 2 so as to substantially cover the entire virtual planes on both sides, apart from a small gap along the intersection line S. , further separating the electrode A into two partial electrodes A 1 separated by a small gap from each other by a plane D 1 -D 2 parallel to the plane of symmetry,
The measurement electrodes A 1 , A 2 , B
An asymmetrical three-electrode probe consisting of
Connect insulated conductive wires to A 1 , A 2 , and B respectively, pass the insulation through the interior of the supporting hollow metal column, and connect the other ends of these conductive wires to the minute ammeters DA 1 , DA 2 , and DB, respectively. Connect to the terminal, the DA 1 ,
Connect the other terminal of DA 2 and DB to the supporting hollow metal column using a common conductor, connect this to a variable voltage source to configure one measurement system, and connect the asymmetric three-electrode probe to the After inserting it into a measurement point in an electric field where ion current and negative ion current coexist, point A 1 and A 2 toward, for example, a positive ion source and the B electrode toward, for example, a negative ion source, so that the symmetry plane C 1 - C 2 is The electric potential of the electrodes A 1 , A 2 , B and the hollow metal column for support is changed by changing the voltage V of the variable voltage source. The ratio of the currents I +1 and I +2 ′ of the minute ammeters DA 1 , DA 2 connected to A 1 and A 2
By matching the value of I +1 ′/I +2 ′ with the probe balance coefficient γ detailed in the text corresponding to the equilibrium potential, the potential of the asymmetric three-electrode probe is made to match the original potential of the measurement point. , the reading of the microcurrent meter at this time
I +1 , I +2 , I - are determined, and the values of (I +1 + I +2 ) and I - are proportional to the polarity, e.g., positive and negative ion current density, from the ion source where electrode A and electrode B face each other. A bipolar ion current probe device characterized in that it measures the current density of positive and negative ions simultaneously and separately by taking advantage of the fact that: 2. Claim 1, which is characterized in that a variable voltage divider is inserted in parallel with the power supply that supplies voltage to the system under test as a variable voltage source, and the divided voltage of the output voltage is used. A bipolar ion current probe device as described. 3 The measured current value is converted from analog to digital using the minute ammeters DA 1 , DA 2 , and DA 3 and further converted into an optical digital signal. This is supplied to the calculation control section at ground potential through an optical fiber, and the calculation control section receives the I +1 ′/I +2 ′ is calculated, and the calculation control unit supplies and controls an operation signal to the variable voltage source or the adjustment operation unit of the variable voltage divider so that the value matches γ; This automatically makes V match the equilibrium potential and
The bipolar ion current probe device according to claims 1 and 2 , characterized in that J +1 and J - are calculated and displayed from the values of I +1 , I +2 and IB.
JP14588981A 1981-09-16 1981-09-16 Probe for bipolar current Granted JPS5847265A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14588981A JPS5847265A (en) 1981-09-16 1981-09-16 Probe for bipolar current

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14588981A JPS5847265A (en) 1981-09-16 1981-09-16 Probe for bipolar current

Publications (2)

Publication Number Publication Date
JPS5847265A JPS5847265A (en) 1983-03-18
JPH029311B2 true JPH029311B2 (en) 1990-03-01

Family

ID=15395388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14588981A Granted JPS5847265A (en) 1981-09-16 1981-09-16 Probe for bipolar current

Country Status (1)

Country Link
JP (1) JPS5847265A (en)

Also Published As

Publication number Publication date
JPS5847265A (en) 1983-03-18

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