JPH03130545U

JPH03130545U -

Info

Publication number: JPH03130545U
Application number: JP4030190U
Authority: JP
Priority date: 1990-04-16
Filing date: 1990-04-16
Publication date: 1991-12-27

Description

[Brief explanation of drawings]

第１図はこの考案の一実施例を示す欠陥検出器
の構成図、第２図は第１のエアパージの構成図、
第３図、第４図、第５図は従来装置の説明図であ
る。図中、１……レーザ装置、２……光学系、３…
…スキヤナ、４……スキヤナドライバ、５……被
検査物、６……光ガイド、７……光電変換器、８
……信号処理器、９……第１のエアパージ、１０
……第２のエアパージである。なお、図中同一符
号は同一又は相当部分を示す。 Fig. 1 is a block diagram of a defect detector showing an embodiment of this invention, Fig. 2 is a block diagram of a first air purge,
FIG. 3, FIG. 4, and FIG. 5 are explanatory diagrams of conventional devices. In the figure, 1... laser device, 2... optical system, 3...
... Scanner, 4 ... Scanner driver, 5 ... Test object, 6 ... Light guide, 7 ... Photoelectric converter, 8
... Signal processor, 9 ... First air purge, 10
...This is the second air purge. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims

[Scope of utility model registration request]

An irradiation system consisting of a light source such as a laser, an optical system for adjusting the light emitted from the light source to an appropriate size, and a scanning system for scanning the object to be inspected, and reflection from the object to be inspected. - In a defect detector equipped with a light receiving system that receives scattered light and converts it into an electrical signal, and a signal processing system that processes this electrical signal and makes a pass/fail judgment, etc., the first part purges the inspected object immediately before inspection. What is claimed is: 1. A defect detector comprising: an air purge mechanism; and a second air purge mechanism for preventing purged dust and the like from entering an optical path.