JPH0316187B2 - - Google Patents
Info
- Publication number
- JPH0316187B2 JPH0316187B2 JP3142784A JP3142784A JPH0316187B2 JP H0316187 B2 JPH0316187 B2 JP H0316187B2 JP 3142784 A JP3142784 A JP 3142784A JP 3142784 A JP3142784 A JP 3142784A JP H0316187 B2 JPH0316187 B2 JP H0316187B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- ultrafine particles
- pattern
- ultrafine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011882 ultra-fine particle Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 8
- 239000012159 carrier gas Substances 0.000 claims description 6
- 239000007921 spray Substances 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims description 4
- 230000004913 activation Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
Description
【発明の詳細な説明】
本発明は、基材面に強固に結着した超微粒子ス
プレー膜の形成法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for forming an ultrafine particle spray film that is firmly attached to a substrate surface.
従来基材面に、超微粒子の膜を形成する場合、
超微粒子マスに少量のバインダーを混入しペース
ト状としたものを塗布、乾燥することにより膜を
形成する方法の欠点を改良するべく、発明者は先
に特願昭57−196085号によりキヤリヤーガスによ
り超微粒子を混入しこれを基材面に直接スプレー
して所定形状の膜を形成する発明を提案したが、
本発明は、更にこの発明に関し、経済的に強固な
膜を基材面に形成する方法を新たに提供するもの
で、基材面に超微粒子をキヤリヤーガスと共にス
プレーし、その基材面に所定個所にその膜を形成
する超微粒子スプレー膜の形成法において、上記
スプレーに際し予め該基材面の所定個所に光スポ
ツトを走らせて表面活性化することを特徴とす
る。 Conventionally, when forming a film of ultrafine particles on the surface of a substrate,
In order to improve the drawbacks of the method of forming a film by mixing a small amount of binder into an ultrafine particle mass and applying and drying the paste, the inventor previously proposed ultrafine particles using a carrier gas in Japanese Patent Application No. 196085/1985. They proposed an invention in which fine particles were mixed in and sprayed directly onto the surface of the substrate to form a film in a predetermined shape.
The present invention further provides a new method for forming an economically strong film on a substrate surface, by spraying ultrafine particles together with a carrier gas onto the substrate surface at predetermined locations. The method for forming an ultrafine particle spray film is characterized in that the surface of the substrate is activated by running a light spot at a predetermined location on the surface of the substrate before spraying.
而して、更に強固な膜を望む場合は、上記の方
法によつて得た膜の上面に更に光スポツトを走査
して該膜を加熱することが好ましい。かように、
本発明によれば、基材の所定個所のみを光スポツ
ト加熱するので、基板全体を加熱するような無駄
を省き、経済的且つ高能率な基材表面の活性を行
なうことができる。又上記追加の膜の光スポツト
加熱によつても同様の効果をもたらし、膜の更に
ち密強固な生成をもたらす。 If a stronger film is desired, it is preferable to further heat the film by scanning a light spot on the upper surface of the film obtained by the above method. Like this,
According to the present invention, since only a predetermined portion of the substrate is optically spot heated, the waste of heating the entire substrate can be eliminated, and the surface of the substrate can be activated economically and with high efficiency. A similar effect can also be achieved by optical spot heating of the additional film, resulting in a more dense and strong film.
本発明を実施するには、例えば図示のように、
真空室中に基材、例えばガラス基板１を用意しこ
の表面に、その所定の文字、図形、模様、などの
パターンを超微粒子の焼成膜で表示するに当り、
その所定の個所に、図示の想像線で表わした所定
パターンに従つて、この個所２だけ紫外線などの
集光したものレーザー光、赤外線光などのスポツ
ト光３を照射装置４により照射して該部の活性化
即ち、表面吸着或は励起により超微粒子、特に金
属超微粒子に対する付着性の向上をもたらし、こ
の状態において、例えば、ノズル５より平均粒径
0.1μｍ以下のNiなどの超微粒子を水素、ヘリウ
ムなどのキヤリヤーガスと共にその所定のパター
ン個所に吹き付けてその所定のパターン６を第２
図示の如く形成する。然るときは、超微粒子は基
材１の該活性化した表面個所に強固に結着され
る。尚このパターン６形成作業中、該スポツト光
３の照射を継続することが好ましく、これによ
り、基材に堆積の超微粒子相互の焼成結着が行な
われると共にこれら超微粒子堆積又は焼成膜中に
含まれるガスは容易に拡散除去でき、ガスを含ま
ないち密な焼成膜を得ることができる。更に好ま
しくは、かゝる膜パターンの形成後も、該スポツ
ト光３を該パターン６の上面に当て走査するとき
は、更に強固ち密な焼成膜を高能率に得ることが
できる。この場合、照射光のエネルギー密度Ｘ照
射時間を適宜その使用される超微粒子の種類、量
等に応じて設定する。レーザーの場合、超微粒子
の共鳴吸収波長と合致した波長のレーザーを用い
れば、効率は更に向上する。この照射装置の周囲
は、真空減圧下で、或は不活性ガスなどの雰囲気
下におくこともできる。キヤリヤーガスによる超
微粒子マスの混合搬送スプレー装置は、先の出願
に開示した装置を用いることができることは云う
までもない。 To carry out the invention, for example, as shown in the figures,
In preparing a base material, for example, a glass substrate 1 in a vacuum chamber, and displaying a pattern such as a predetermined character, figure, pattern, etc. on the surface of the substrate with a fired film of ultrafine particles,
The predetermined portion is irradiated with spot light 3 such as concentrated ultraviolet rays, laser light, infrared light, etc. only at this portion 2 by the irradiation device 4 according to a predetermined pattern represented by the imaginary lines shown in the figure. activation, that is, surface adsorption or excitation, improves the adhesion to ultrafine particles, especially ultrafine metal particles, and in this state, for example, the average particle diameter
Ultrafine particles such as Ni with a size of 0.1 μm or less are sprayed together with a carrier gas such as hydrogen or helium onto the predetermined pattern 6.
Form as shown. In that case, the ultrafine particles are firmly bound to the activated surface areas of the substrate 1. It is preferable to continue the irradiation with the spot light 3 during the pattern 6 formation process, so that the ultrafine particles deposited on the base material are baked and bonded together, and the ultrafine particles contained in the deposited or fired film are bonded together. The gas can be easily diffused and removed, and a dense fired film containing no gas can be obtained. More preferably, even after the formation of such a film pattern, when the spot light 3 is scanned by applying it to the upper surface of the pattern 6, an even stronger and denser fired film can be obtained with high efficiency. In this case, the energy density of the irradiation light x the irradiation time is appropriately set depending on the type, amount, etc. of the ultrafine particles used. In the case of a laser, efficiency can be further improved if a laser with a wavelength that matches the resonant absorption wavelength of ultrafine particles is used. The surroundings of this irradiation device can be placed under vacuum or reduced pressure, or under an atmosphere of an inert gas or the like. It goes without saying that the apparatus disclosed in the earlier application can be used as a mixing and conveying spray apparatus for ultrafine particle mass using a carrier gas.
このように本発明によるときは、超微粒子をキ
ヤリヤーガスと共に基材面にスプレーし、その所
定のパターン膜を形成するに当り、予め、基板面
にその所定の膜パターンを形成すべき個所にのみ
光スポツトを照射走査するようにしたので、基材
面に高能率且つ経済的に超微粒子の焼成パターン
を形成することができる効果をもたらす。 As described above, according to the present invention, when spraying ultrafine particles together with a carrier gas onto the substrate surface to form a predetermined pattern film, the light is applied only to the portions of the substrate surface where the predetermined film pattern is to be formed. Since the spot is irradiated and scanned, it is possible to form a fired pattern of ultrafine particles on the surface of the substrate with high efficiency and cost.
第１図及び第２図は本発明実施の１例を示す斜
面図である。
１……基材、２……所定個所、３……スポツト
光、４……照射装置、５……ノズル、６……パタ
ーン。
FIGS. 1 and 2 are perspective views showing one example of implementing the present invention. 1... Base material, 2... Predetermined location, 3... Spot light, 4... Irradiation device, 5... Nozzle, 6... Pattern.
Claims (1)
プレーし、その基材面に所定個所にその膜を形成
する超微粒子スプレー膜の形成法において、上記
スプレーに際し予め該基材面の所定個所に光スポ
ツトを走らせて表面活性化することを特徴とする
超微粒子スプレー膜の形成法。1. In a method for forming an ultrafine particle spray film in which ultrafine particles are sprayed together with a carrier gas onto a substrate surface and the film is formed at a predetermined location on the substrate surface, a light spot is placed in advance at a predetermined location on the substrate surface during the above spraying. A method for forming an ultrafine particle spray film, which is characterized by surface activation by running the film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3142784A JPS60175573A (en) | 1984-02-23 | 1984-02-23 | Formation of ultra-fine particle spray film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3142784A JPS60175573A (en) | 1984-02-23 | 1984-02-23 | Formation of ultra-fine particle spray film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60175573A JPS60175573A (en) | 1985-09-09 |
| JPH0316187B2 true JPH0316187B2 (en) | 1991-03-04 |
Family
ID=12330938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3142784A Granted JPS60175573A (en) | 1984-02-23 | 1984-02-23 | Formation of ultra-fine particle spray film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60175573A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3222614B2 (en) * | 1993-04-15 | 2001-10-29 | 松下電工株式会社 | Film formation method on three-dimensional surface |
| JP4383268B2 (en) * | 2004-06-29 | 2009-12-16 | アルプス電気株式会社 | Spray coating method and spray coating apparatus |
-
1984
- 1984-02-23 JP JP3142784A patent/JPS60175573A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60175573A (en) | 1985-09-09 |
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