JPH0316576B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a temperature and humidity control device for a clean room, and more particularly to a structure for heating and humidifying gas supplied into the room via a filter to maintain the cleanliness of the clean room.

Conventionally, in constructing an upper air heating and humidifying structure, as shown in FIG. , and a reheating coil 17 in that order, or, as shown in FIG. However, in either structure, since steam or hot water is directly sprayed onto the process gas, when attempting to perform large-capacity humidification, the steam spray type humidifier 18 is sprayed into the gas discharged from the conditioner 8'. Since the steam mist and the hot water mist from the hot water circulation type gas washer 19 remain, there is a problem that the remaining mist is captured by the filter 5, and the mist becomes drain and scatters to the indoor side.

Therefore, it may be possible to provide an extended air path in the conditioner 8' to naturally vaporize or drain the remaining mist, but in order to achieve sufficient natural vaporization or draining, the air path must be of considerable distance. Therefore, a problem arises in that the harmonizer 8' becomes considerably large in size.

An object of the present invention is to make it possible to sufficiently humidify the process gas without generating residual mist through reasonable improvements.

The characteristic configuration of the temperature and humidity control device for a clean room according to the present invention is that one end side is a processing gas intake port, and
A mixing chamber is provided, the other end of which is connected to the temperature and humidity control target room via a blower and a filter, and a nozzle is provided in the mixing chamber to supply high-humidity hot air for heating and humidifying the process gas from the intake port. The system is equipped with a high-humidity hot air generator that supplies hot air, and its functions and effects are as follows.

In other words, since the hot air is humidified in the high-humidity hot air generator, even if the amount of humidified moisture is large, the humidification is extremely efficient compared to directly humidifying the process gas with steam spray or hot water spray. can be done.

Therefore, the high-humidity hot air supplied from the nozzle to the mixing chamber can contain almost no mist of humidifying water, and by mixing with the high-humidity hot air, the processing gas can be mixed with no remaining mist. It is possible to sufficiently humidify and heat without any heat.

As a result, troubles caused by residual mist being captured by the filter can be avoided, and an extended air passage provided in the conditioner for vaporizing and draining the residual mist can also be omitted, making the overall design compact and compact. We have created a temperature and humidity control device for clean rooms with extremely excellent humidification properties.

Next, embodiments will be described based on the drawings.

As shown in FIG. 1, one end is connected to an outside air intake port 3 via a prefilter 1 and a preheating coil 2.
In addition, a mixing chamber 8 is provided, the other end of which is connected to the blow-off device 7 of the air-conditioned room 6 via a blower 4 and a high-performance filter 5, and the air is forcibly discharged from the exhaust port 9 of the air-conditioned room 6 by an exhaust fan 10. A flow path 11 is provided to mix and supply a part of the exhausted air with preheated outside air, and a device is provided in the mixing chamber 8 to adjust the temperature and humidity of the passing air to a set temperature and humidity state. A temperature and humidity control device is configured.

To configure the temperature and humidity control structure in the mixing chamber 8,
A bypass flow path 13 is provided with a blower 12 that separates and takes out a part of the outside air after passing through the prefilter 1, and the outside air is supplied to the casing 14A from the bypass flow path 13 at a temperature of 70°C to 80°C. ℃
a heater 14B that heats up to a high temperature of about
The high-humidity hot air generator 1 is equipped with a humidifying nozzle 14C that sprays water on the high-temperature hot air after heating.
A nozzle 15 is provided in the mixing chamber 8 for ejecting high-humidity hot air from the generator 14.

In the mixing chamber 8, on the downstream side of the high-humidity hot air jetting nozzle 15, there is a cooling coil that controls the dew point by cooling the passing air that has been heated and humidified by mixing with the high-humidity hot air to a water vapor saturated state at a set temperature. 16, and a reheating coil 17 for heating the dew point-controlled passing air to a set blowing temperature.

In other words, by humidifying the passing air by mixing it with the high-humidity hot air from the generator 14, it is possible to perform good humidification without generating residual mist.
Furthermore, by controlling the dew point of the passing air after humidification, the humidity in the air-conditioned room 6 can be maintained at the set humidity with high accuracy.

The temperature and humidity control process described above will be explained using the T-x diagram in FIG. 2. The outside air heated by the preheating coil 2 changes from state to state by mixing with the exhaust air from the indoor room. Then, in the generator 14, the passing air is heated and humidified to a state by mixing the high-humidity hot air heated and humidified to a state and the passing air in an upper air state, and then,
As it passes through the cooling coil 16, it is cooled and dehumidified to the saturated state of the set temperature, and the reheating coil 1
At step 7, it is heated from one state to another, and in that state it is blown into the room.

Next, another embodiment will be described.

Heater 14B provided in the high humidity hot air generator 14
Various types of burners, high-temperature steam coils, etc. can be applied to the humidifier 14C in the generator 14.
Various types of humidifiers can also be applied, such as using a steam spray nozzle instead of a water spray nozzle.

The ratio of the amount of high-humidity hot air from the generator 14 to the air passing through the mixing chamber 8 can be changed as appropriate depending on the set temperature and humidity of both and the set temperature and humidity of the room supply air.

Instead of mixing part of the exhaust air from the room with outside air, only outside air may be introduced into the mixing chamber 8. In addition, dew point control by the cooling coil 16,
And, omitting the reheating treatment by the reheating coil 17,
The passing air may be humidified and heated to indoor supply temperature and humidity only by mixing with the high-humidity hot air from the generator 14, and the preheating coil 2 can also be omitted.

An air washer for cooling the passing air may be incorporated in the mixing chamber 8, or a cooling coil 16 for controlling the dew point may be used to enable cooling and air conditioning.

Furthermore, as the gas to be subjected to temperature and humidity control, in addition to air, various gases can be used depending on the purpose of the clean room, and these gases are collectively referred to as processing gas.

The temperature and humidity control device according to the present invention can be applied to clean rooms for various purposes.

[Brief explanation of the drawing]

1 and 2 show an embodiment of the present invention, FIG. 1 is an overall system diagram, FIG. 2 is a T-x diagram showing the temperature and humidity control process, FIGS. The figures are system diagrams showing conventional structures. 2... Preheater, 3... Processing gas intake, 4...
Blower, 5...Filter, 6...Target room, 8...
...Mixing chamber, 10... Return air device, 14... High humidity hot air generator, 15... Nozzle.

Claims (1)

[Scope of Claims] 1. A mixing chamber 8 is provided with one end connected to the process gas intake 3 and the other end connected to a temperature and humidity control target chamber 6 via a blower 4 and a filter 5, 3
A temperature and humidity control device for a clean room, which is equipped with a high-humidity hot air generator 14 that supplies high-humidity hot air to a nozzle 15 provided in the mixing chamber 8 for heating and humidifying processing gas from a clean room. 2. The temperature and humidity control device for a clean room according to claim 1, wherein a preheater 2 is provided between the processing gas intake port 3 and the nozzle 15. 3 A part of the exhaust gas from the temperature and humidity control target room 6 is transferred to the intake port 3 on the upstream side of the nozzle 15.
The temperature and humidity control device for a clean room according to claim 1 or 2, further comprising a return air device 10 for supplying processing gas from a clean room.