JPH0323972B2 - - Google Patents
Info
- Publication number
- JPH0323972B2 JPH0323972B2 JP57071216A JP7121682A JPH0323972B2 JP H0323972 B2 JPH0323972 B2 JP H0323972B2 JP 57071216 A JP57071216 A JP 57071216A JP 7121682 A JP7121682 A JP 7121682A JP H0323972 B2 JPH0323972 B2 JP H0323972B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- recording medium
- substrate
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 229910018104 Ni-P Inorganic materials 0.000 claims description 10
- 229910018536 Ni—P Inorganic materials 0.000 claims description 10
- 229910020599 Co 3 O 4 Inorganic materials 0.000 claims description 5
- 230000005415 magnetization Effects 0.000 claims description 5
- 239000000696 magnetic material Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 26
- 238000010438 heat treatment Methods 0.000 description 8
- 238000007747 plating Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
- G11B5/73913—Composites or coated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Thin Magnetic Films (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】
本発明は垂直磁気記録用の記録媒体に係わる。
従来、垂直磁気記録媒体は、たとえばアイ イー
イー イー トランザクシヨン オン マグネ
テイクス（IEEE Trans.on Mag.）Vol MAG−
16 No.１（1980）に記載のあるように、ポリマー
基板もしくはアルミ基板の上に直接、基板面に垂
直な方向に磁化容易軸をもつ磁性材料、たとえば
Co−Cr膜などを被着し、もしくは、かかる磁性
薄膜と基板の間に軟磁性の薄膜を入れ、もしくは
この両方の磁性薄膜の間にさらにアモルフアスな
どの非磁性層を設ける、などの構造をしている。
しかし、これらの各層はあくまで記録再生特性を
向上させるためのものであり、ヘツドと記録媒体
が接触したときの強度をもたせるためのものでは
ない。本発明はかかる記録再生特性を損うことな
く、しかも、機械的な強度をもつ記録媒体を提供
する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a recording medium for perpendicular magnetic recording.
Conventionally, perpendicular magnetic recording media have been used, for example, in IEEE Trans.on Mag.
16 No. 1 (1980), a magnetic material with an axis of easy magnetization perpendicular to the substrate surface, such as
A structure in which a Co-Cr film or the like is deposited, a soft magnetic thin film is placed between the magnetic thin film and the substrate, or a non-magnetic layer such as amorphous is further provided between both magnetic thin films. are doing.
However, these layers are only intended to improve recording and reproducing characteristics, and are not intended to provide strength when the head and recording medium come into contact. The present invention provides a recording medium that does not impair such recording/reproducing characteristics and has mechanical strength.
以下に実施例をあげて詳しく説明する。 A detailed explanation will be given below with reference to examples.
第１図は本発明の実施例の１例を示す。アルミ
基板１の表面を周知の方法を用いて前処理洗浄
し、その上にNi−Ｐの無電解メツキを厚く、例
えば数十ミクロン付ける。このNi−Ｐメツキ層
２の表面を機械加工により、表面粗さの小さい平
面平坦化仕上する。しかる後、電気炉などにより
250〜300℃の雰囲気にて数十分から１時間程度の
熱処理を施した。 FIG. 1 shows an example of an embodiment of the present invention. The surface of the aluminum substrate 1 is pretreated and cleaned using a well-known method, and electroless Ni--P plating is applied thereon to a thickness of, for example, several tens of microns. The surface of this Ni--P plating layer 2 is machined to have a flat surface with small surface roughness. After that, using an electric furnace etc.
Heat treatment was performed in an atmosphere of 250 to 300°C for several tens of minutes to about one hour.
メツキしたままの、例えば7wt％程度のＰを含
有するNi−Ｐ膜は磁気的には保持力HCの高い硬
磁性を示すが、上記熱処理により軟磁性化する。
さらに、かかる熱処理により、Ni−Ｐが硬化す
る。メツキしたままの厚さ50μｍ程度の膜のビツ
カース硬さHVは300程度であつたが、熱処理後は
900程度になつた。 A Ni--P film containing, for example, about 7 wt% of P, as plated, exhibits hard magnetism with a high coercive force H C , but becomes soft magnetized by the heat treatment described above.
Furthermore, this heat treatment hardens Ni-P. The Vickers hardness H V of a film with a thickness of about 50 μm as plated was about 300, but after heat treatment
It was around 900.
かかる熱処理後に1μｍ程度の厚さのCo−Cr（例
えば20wt％程度のCr含有）などの垂直磁化膜３
を例えばRFスパツタ法により被着し、記録再生
特性および機械強度を調べた。その結果、記録再
生特性は、従来行われていたパーマロイを軟磁性
層とした記楼媒体とほぼ同一であつた。しかし、
機械強度を測定した結果では、本発明の記録媒体
が従来のものよりはるかに優れた強度を有するこ
とが判明した。これは下地Ni−Ｐ膜２の強度が
大きく寄与していることが分つた。 After such heat treatment, a perpendicularly magnetized film 3 of Co-Cr (for example, containing about 20 wt% Cr) or the like with a thickness of about 1 μm is formed.
was deposited by, for example, the RF sputtering method, and the recording/reproducing characteristics and mechanical strength were examined. As a result, the recording and reproducing characteristics were almost the same as those of the conventional recording medium using permalloy as a soft magnetic layer. but,
The results of measuring mechanical strength revealed that the recording medium of the present invention has far superior strength to conventional media. It was found that the strength of the base Ni--P film 2 greatly contributed to this.
第２図はもう１つの実施例を示す。本実施例に
おいてNi−Ｐ膜２を作製し、その表面を平面平
坦化仕上げをするところまでは前記実施例と同じ
である。本実施例では、その後、熱処理を施す前
に、まずCo−Crの垂直磁化膜３を作製した。し
かる後、200〜300℃雰囲気で熱処理を施した。 FIG. 2 shows another embodiment. This example is the same as the previous example until the Ni--P film 2 is produced and its surface is flattened. In this example, a perpendicular magnetization film 3 of Co--Cr was first formed before performing heat treatment. After that, heat treatment was performed in an atmosphere of 200 to 300°C.
本実施例の記録媒体を用いて、前記実施例と同
じように、記録再生特性および機械強度を調べ
た。その結果、記録再生特性は前記実施例より優
れ、かつ、パーマロイ軟磁性層とCo−Cr垂直膜
の間に非磁性アモルフアス層を設けた記録媒体と
同程度または若干優れた特性を示した。もちろ
ん、上記中間層のない２層媒体よりはるかに優れ
た特性を示した。さらに機械強度は前記実施例よ
り優れていることが分つた。 Using the recording medium of this example, the recording and reproducing characteristics and mechanical strength were examined in the same manner as in the previous example. As a result, the recording and reproducing characteristics were superior to those of the above examples, and were comparable to or slightly superior to those of a recording medium in which a nonmagnetic amorphous layer was provided between a permalloy soft magnetic layer and a Co--Cr vertical film. Of course, the properties were far superior to those of the two-layer media without the intermediate layer. Furthermore, it was found that the mechanical strength was superior to that of the previous example.
本実施例が記録再性特性および機械強度で優れ
ている原因を調べたところ、次の理由によること
が判明した。まず記録再生特性に関しては次の通
りである。すなわち、Ni−Ｐのメツキ膜はアモ
ルフアスであるが、熱処理を施すと結晶化するこ
とが分つた。一方、Co−Cr膜を結晶面に被着す
ると格子定数のミスマツチなどにより、結晶学的
および磁気的に好ましくない膜成長が起り、アモ
ルフアス上ではこのようなことはなく優れたCo
−Cr垂直磁化膜が成長することが分つた。この
２つの結果を考え合せると、本実施例が前記実施
例より記録再生特性で優れることは容易に理解で
きよう。 The reason why this example is excellent in recording reproducibility characteristics and mechanical strength was investigated and found to be due to the following reasons. First, the recording/reproducing characteristics are as follows. That is, it was found that although the Ni--P plating film is amorphous, it crystallizes when subjected to heat treatment. On the other hand, when a Co-Cr film is deposited on a crystal surface, crystallographically and magnetically unfavorable film growth occurs due to lattice constant mismatch, etc., but this does not occur on amorphous amorphous material, and the excellent Co
It was found that -Cr perpendicular magnetization film grows. Considering these two results together, it is easy to understand that this example is superior to the previous example in terms of recording and reproducing characteristics.
次に機械強度については以下の通りであつた。
すなわち、本実施例のCo−Cr膜表面をオージエ
分析などにより分析した結果、その表面に100Å
前後のCo3O4膜４が形成されていることが分つ
た。この膜が機械的強度を有することは前から知
られている。このために、前記実施例より機械強
度が優れていることが分つた。このCo3O4膜は極
めて薄いため、記録再生特性におよぼす影響が非
常に小さいことも分つた。 Next, the mechanical strength was as follows.
That is, as a result of analyzing the Co-Cr film surface of this example by Auger analysis, it was found that
It was found that the front and rear Co 3 O 4 films 4 were formed. It has long been known that this membrane has mechanical strength. For this reason, it was found that the mechanical strength was superior to that of the previous example. It was also found that because this Co 3 O 4 film is extremely thin, it has very little effect on recording and reproducing characteristics.
以上述べたごとく、本発明の記録媒体は記録再
生特性を損わないだけでなく、その特性をさらに
良くする効果があり、かつ機械強度が極めて優れ
たものであることが分ろう。 As described above, it can be seen that the recording medium of the present invention not only does not impair the recording and reproducing characteristics, but also has the effect of further improving the characteristics, and has extremely excellent mechanical strength.
なお、Ni−Ｐメツキ膜は他の作製方法によつ
ても可能であることはいうまでもない。基板はア
ルミ以外でも可能であり、基板両面に本発明を適
用することも出来る。 It goes without saying that the Ni--P plating film can also be produced by other methods. The substrate can be made of materials other than aluminum, and the present invention can also be applied to both sides of the substrate.
第１図はAl基板上にNi−Ｐ膜を被着し、その
上にCo−Cr磁性膜を被着した記録媒体の断面図、
第２図はAl基板上にNi−Ｐ膜、さらにその上に
Co−Cr磁性膜を被着し、その上部に保護膜を形
成した記録媒体の断面図である。
１……Al基板、２……Ni−Ｐ膜、３……Co−
Cr磁性膜、４……保護膜。
Figure 1 is a cross-sectional view of a recording medium in which a Ni-P film is deposited on an Al substrate and a Co-Cr magnetic film is deposited on top of it.
Figure 2 shows a Ni-P film on an Al substrate, and a Ni-P film on top of that.
FIG. 2 is a cross-sectional view of a recording medium on which a Co--Cr magnetic film is deposited and a protective film is formed on top of the Co--Cr magnetic film. 1...Al substrate, 2...Ni-P film, 3...Co-
Cr magnetic film, 4...protective film.
Claims (1)
上の磁性材料層を有する磁気記録媒体において、
上記軟磁性層は結晶質のNi−Ｐよりなることを
特徴とする磁気記録媒体。 ２ 前記軟磁性層のビツカース硬さは、約900以
上であることを特徴とする特許請求の範囲第１項
記載の磁気記録媒体。 ３ 前記磁性材料層はCo−Crの垂直磁化膜であ
ることを特徴とする特許請求の範囲第１項又は第
２項記載の磁気記録媒体。 ４ 前記Co−Crの垂直磁化膜表面にCo3O4膜が
形成されていることを特徴とする特許許請求の範
囲第３項記載の磁気記録媒体。 ５ 前記Co3O4膜の厚さは約100Åであることを
特徴とする特許請求の範囲第４項記載の磁気記録
媒体。 ６ 前記基体はアルミ基板であることを特徴とす
る特許請求の範囲第１項乃至第５項のうちいずれ
かに記載の磁気記録媒体。 ７ 基体上にNi−Ｐ膜を形成し、該Ni−Ｐ膜の
表面を平滑化し、上記Ni−Ｐ膜の表面上にCo−
Crを主成分とする磁性膜を形成し、熱処理を施
すことにより、上記Ni−Ｐ膜を軟磁性体化する
とともに上記磁性膜の表面にCo3O4膜を形成する
ことを特徴とする磁気記録媒体の製造方法。[Scope of Claims] 1. A magnetic recording medium having a substrate, a soft magnetic layer on the substrate, and a magnetic material layer on the soft magnetic layer,
A magnetic recording medium characterized in that the soft magnetic layer is made of crystalline Ni-P. 2. The magnetic recording medium according to claim 1, wherein the soft magnetic layer has a Vickers hardness of about 900 or more. 3. The magnetic recording medium according to claim 1 or 2, wherein the magnetic material layer is a perpendicular magnetization film of Co-Cr. 4. The magnetic recording medium according to claim 3, wherein a Co 3 O 4 film is formed on the surface of the Co-Cr perpendicular magnetization film. 5. The magnetic recording medium according to claim 4, wherein the Co 3 O 4 film has a thickness of about 100 Å. 6. The magnetic recording medium according to any one of claims 1 to 5, wherein the base is an aluminum substrate. 7 Form a Ni-P film on the substrate, smooth the surface of the Ni-P film, and coat the surface of the Ni-P film with Co-
A magnetic film characterized in that a magnetic film containing Cr as a main component is formed and heat treated to make the Ni-P film a soft magnetic material and a Co 3 O 4 film is formed on the surface of the magnetic film. A method for manufacturing a recording medium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57071216A JPS58189823A (en) | 1982-04-30 | 1982-04-30 | Magnetic recording medium and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57071216A JPS58189823A (en) | 1982-04-30 | 1982-04-30 | Magnetic recording medium and its manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58189823A JPS58189823A (en) | 1983-11-05 |
| JPH0323972B2 true JPH0323972B2 (en) | 1991-04-02 |
Family
ID=13454254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57071216A Granted JPS58189823A (en) | 1982-04-30 | 1982-04-30 | Magnetic recording medium and its manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58189823A (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60160027A (en) * | 1984-01-31 | 1985-08-21 | Sony Corp | Magnetic recording medium |
| JPH0658733B2 (en) * | 1984-09-07 | 1994-08-03 | 松下電器産業株式会社 | Metal thin film type magnetic tape |
| JPS6192418A (en) * | 1984-10-11 | 1986-05-10 | Teijin Ltd | Vertical magnetic recording medium |
| JPS6199924A (en) * | 1984-10-19 | 1986-05-19 | Matsushita Electric Ind Co Ltd | magnetic recording medium |
| US4729924A (en) * | 1984-12-21 | 1988-03-08 | Minnesota Mining And Manufacturing Company | Metallic thin film magnetic recording medium having a hard protective layer |
| JPS61220132A (en) * | 1985-03-26 | 1986-09-30 | Mitsubishi Electric Corp | Production of vertical magnetic recording medium |
| US4686151A (en) * | 1985-04-09 | 1987-08-11 | Dynamic Disk | Substrate material for magnetic recording media |
| JP4352398B2 (en) * | 2004-04-09 | 2009-10-28 | 富士電機デバイステクノロジー株式会社 | Magnetic recording medium substrate and method for manufacturing the same |
-
1982
- 1982-04-30 JP JP57071216A patent/JPS58189823A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58189823A (en) | 1983-11-05 |
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