JPH0324016B2 - - Google Patents
Info
- Publication number
- JPH0324016B2 JPH0324016B2 JP61289156A JP28915686A JPH0324016B2 JP H0324016 B2 JPH0324016 B2 JP H0324016B2 JP 61289156 A JP61289156 A JP 61289156A JP 28915686 A JP28915686 A JP 28915686A JP H0324016 B2 JPH0324016 B2 JP H0324016B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- detection probe
- positioning
- electrode
- dimensional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Control Of Position Or Direction (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、微動装置に関し、詳しくは超微細
加工時の位置合せや、走査トンネル顕微鏡におけ
る試料あるいは、検出部である探針の移動に用い
るのに好適な微動装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a fine movement device, and more specifically, it is used for positioning during ultrafine processing and for moving a sample or a probe which is a detection part in a scanning tunneling microscope. This invention relates to a fine movement device suitable for.
この発明は、圧電素子体からなる一次元、二次
元、三次元微小位置決め機構において、動作軸に
対し、検出部探針が傾くことなく動作するよう
に、軸の変形部分（電極）の検出部である探針保
持台側端部を、検出探針保持台より離して、検出
部探針の一次元、二次元、三次元微小位置決めを
設定することで、精度高く行なうことを可能とし
たものであり、産業上有益な微小位置決め機構で
ある。
In a one-dimensional, two-dimensional, or three-dimensional micro-positioning mechanism made of a piezoelectric element body, the present invention provides a detection portion of a deformed portion (electrode) of the axis so that the probe of the detection portion operates without tilting with respect to the operating axis. By setting the end of the probe holding stand side away from the detection probe holding stand and setting one-dimensional, two-dimensional, and three-dimensional minute positioning of the detection probe, it is possible to perform highly accurate positioning. This is an industrially useful micro-positioning mechanism.
〔従来の技術〕
光学機器及び分析機器において、試料と検出部
の位置決めや、超微細加工時の位置決めは、近
年、高精度が要求されてきている。また、試料表
面と検出探針先端部間に流れるトンネル電流を検
出し、トンネル電流が常に一定になるように、試
料表面と検出探針先端部間を制御して、原子構造
を観察する走査トンネル顕微鏡においては、数Å
のレベルで位置決めを行なう微動機構が不可欠と
なる。そして、従来、ｘ，ｙ，ｚ三次元に微小位
置決めを行なう機構として、立方体からなる圧電
素子ブロツクより、ｘ，ｙ，ｚ軸用棒状圧電素子
を一体で切り出して作製した第２図に示すごとき
キユービツク状三次元微小位置決め機構等が知ら
れている。（昭和60年春季第32回応用物理学会予
稿．真空トンネル顕微鏡用微動素子の特性評価．
電子技術総合研究所．岡山重夫，阪東寛，徳本洋
志，梶村皓二）。この三次元微小位置決め機構は、
圧電素子体からなり、圧電素子体は、分極処理さ
れた方向に電圧をかけることにより、その方向に
変形（伸び，縮み）し、他面では、それとは逆の
変形（縮み、伸び）として生じるもので、電圧を
加えることにより、微小変位が形成される為、第
３図に示すごときシステムにより、ｘ，ｙ，ｚ各
軸に加える電圧を制御することで、ｘ，ｙ軸の交
点に取付けた検出探針先端部の三次元微小位置決
めが可能となる。[Prior Art] In recent years, in optical instruments and analytical instruments, high precision has been required for positioning of a sample and a detection unit, and for positioning during ultrafine processing. In addition, the scanning tunnel detects the tunnel current flowing between the sample surface and the tip of the detection probe, and controls the distance between the sample surface and the tip of the detection probe so that the tunnel current is always constant to observe the atomic structure. In a microscope, a few Å
A fine movement mechanism that performs positioning at this level is essential. Conventionally, as a mechanism for micro-positioning in three dimensions of x, y, and z, a mechanism as shown in Fig. 2 was fabricated by cutting out bar-shaped piezoelectric elements for the x, y, and z axes as a single piece from a piezoelectric element block made of a cube. Cubic three-dimensional minute positioning mechanisms and the like are known. (Proceedings of the 32nd Spring Meeting of the Japan Society of Applied Physics, 1985. Characteristic evaluation of fine movement elements for vacuum tunneling microscopes.
Electronics Technology Research Institute. Shigeo Okayama, Hiroshi Bando, Hiroshi Tokumoto, Koji Kajimura). This three-dimensional minute positioning mechanism is
It consists of a piezoelectric element body, and when a voltage is applied to the polarized direction, the piezoelectric element body deforms (extends, contracts) in that direction, and on the other side, deforms (shrinks, stretches) in the opposite direction. By applying a voltage, a minute displacement is created, so by controlling the voltage applied to each of the x, y, and z axes using the system shown in Figure 3, it is possible to install the device at the intersection of the x, y, and y axes. This enables three-dimensional minute positioning of the tip of the detection probe.
以上に示した従来の機構において、第４図ａで
示した状態から、第４図ｂに示す様に、電極に電
圧を印加して、厚み方向に変形（矢印イ）させる
ことにより、その変形量に対し軸方向の変形（矢
印ロ）として生じるもので、電極が付いていて電
圧をかけると変形する部分（ニ部）と、電極が付
いていない部分（ホ部）とに段差が生じ、微小な
傾きが形成される。その為、従来品の様に検出探
針保持台が電極に接している場合、傾斜の影響を
受け、検出探針先端部の動き量は、棒状圧電素子
の動き量とは異なつたもの（矢印ハ）になり、精
密な微小位置決めができないという問題があつ
た。
In the conventional mechanism shown above, from the state shown in Fig. 4a, as shown in Fig. 4b, by applying a voltage to the electrode and causing it to deform in the thickness direction (arrow A), This occurs as a deformation in the axial direction (arrow B) relative to the amount, and there is a step between the part that has an electrode and deforms when voltage is applied (part II) and the part that does not have an electrode (part H). A slight inclination is formed. Therefore, when the detection probe holder is in contact with the electrode as in the conventional product, the amount of movement of the tip of the detection probe is different from the amount of movement of the bar-shaped piezoelectric element (arrow) due to the influence of the inclination. c), and there was a problem that precise minute positioning could not be performed.
上記の問題点を解決するために、この発明は、
第５図ａに示す様に、軸の変形部分（電極）の検
出探針保持台側端部を検出探針保持台より離し
て、形成することにより、圧電素子体を、軸方向
に伸縮させるために、厚み及び幅方向に変形させ
ることから電極境界部に生じる傾斜の影響を検出
探針取付け台が受けることなく、第５図ｂに示す
様に検出部探針先端部を試料面に対し精密に微小
位置決め可能にした。
In order to solve the above problems, this invention
As shown in Figure 5a, the piezoelectric element body is expanded and contracted in the axial direction by forming the deformed portion (electrode) of the shaft so that the end on the detection probe holder side is separated from the detection probe holder. Therefore, since the detection probe mounting base is not affected by the inclination that occurs at the electrode boundary due to deformation in the thickness and width directions, the tip of the detection probe can be positioned relative to the sample surface as shown in Figure 5b. Enables precise minute positioning.
上記のように構成された機構にすることによ
り、圧電素子体を、軸方向に伸縮させるために、
厚み及び幅方向に変形させることから生じる電極
境界部の傾斜の影響を検出探針取付け台が受ける
ことがないため検出探針を試料面に対し精密に微
小位置決めすることが可能となる。
By using the mechanism configured as described above, in order to expand and contract the piezoelectric element body in the axial direction,
Since the detection probe mounting base is not affected by the inclination of the electrode boundary caused by deformation in the thickness and width directions, it is possible to precisely position the detection probe with respect to the sample surface.
この実施例は、走査型トンネル顕微鏡において
試料面上で原子構造を観察するレベル（数Å）で
検出探針先端部を位置決めする機構として用いた
ものであり、圧電素子体の厚み及び幅方向の変形
による微小位置決めへの影響を軽減することを目
的に考えだされたもので以下、図面に基づいて説
明していくこととする。
This example was used as a mechanism for positioning the tip of the detection probe at the level (several angstroms) for observing the atomic structure on the sample surface in a scanning tunneling microscope. This was devised for the purpose of reducing the influence of deformation on minute positioning, and will be explained below based on the drawings.
第１図ａにおいて、圧電素子体からｘ軸，ｙ
軸，ｚ軸棒状圧電素子体１1，１2，１3を一体で
作製し、各々の軸の相対する二面に電極２1，２
２，２3を形成する。そして、ｘ軸，ｙ軸の交点で
あるｚ軸上に検出探針保持台３が固定され、検出
探針保持台３には検出探針４が取付けられてい
る。本実施例では、圧電素子体の厚み及び幅方向
の変形による影響を検出探針保持台３に及ばない
ように棒状圧電素子体、１1，１2変形部分（電
極）を探針保持台より棒状圧電素子体の厚み分離
して形成した。そして、走査トンネル顕微鏡の検
出部探針の微動機構とて装置に組込み、実験した
ところ、従来品にあつた問題もなく、高精度な微
小位置決めがなされることが確認できた。また、
同様に第１図ｂ，ｃに示す様な二次元、一次元の
ものにも適用したところ、先の三次元のものと同
じ効果が得られた。 In Figure 1a, the x-axis, y-axis from the piezoelectric element body
Axis and z-axis rod-shaped piezoelectric element bodies 1 1 , 1 2 , 1 3 are integrally manufactured, and electrodes 2 1 , 2 are provided on two opposing surfaces of each axis.
Form 2 , 2 3 . A detection probe holder 3 is fixed on the z-axis, which is the intersection of the x-axis and the y-axis, and a detection probe 4 is attached to the detection probe holder 3. In this example, in order to prevent the effects of deformation of the piezoelectric element body in the thickness and width directions from affecting the detection probe holder 3, the rod-shaped piezoelectric element body 1 1 , 1 2 deformed parts (electrodes) are moved from the probe holder 3. It was formed by separating the thickness of the rod-shaped piezoelectric element body. When the device was incorporated into a device with a fine movement mechanism for the detection probe of a scanning tunneling microscope and tested, it was confirmed that highly accurate minute positioning was possible without the problems encountered with conventional products. Also,
When similarly applied to two-dimensional and one-dimensional objects as shown in FIGS. 1b and 1c, the same effect as the three-dimensional object was obtained.
この発明によると以上説明した様に、軸の変形
部分（電極）の検出探針保持台側端部を検出探針
保持台より離して、形成することにより、圧電素
子体を軸方向に伸縮させるために、厚み及び幅方
向に変形させることから電極境界部に傾斜が生じ
ても影響を受けることがないため、検出探針先端
部を試料面に対し精密に微小位置決めを行なうこ
とが可能になつた。
According to the present invention, as explained above, the piezoelectric element body is expanded and contracted in the axial direction by forming the deformed portion (electrode) of the shaft so that the end on the detection probe holder side is separated from the detection probe holder. Therefore, since it is deformed in the thickness and width directions, it will not be affected even if the electrode boundary is tilted, making it possible to precisely position the tip of the detection probe with respect to the sample surface. Ta.
第１図は、本発明の立体図、第２図は、従来品
の立体図、第３図は、本微動機構駆動システム
図、第４図，第５図は、一軸変形における、従来
品、発明品の検出部探針取付け台の動きを示した
図である。
１1，１2，１3……棒状圧電素子体、２1，２2，
２3……電極、３……検出探針保持台、４……検
出探針。
Fig. 1 is a three-dimensional view of the present invention, Fig. 2 is a three-dimensional view of the conventional product, Fig. 3 is a diagram of the present fine movement mechanism drive system, and Figs. FIG. 3 is a diagram showing the movement of the detection unit probe mounting base of the invention. 1 1 , 1 2 , 1 3 ... rod-shaped piezoelectric element body, 2 1 , 2 2 ,
2 3 ... electrode, 3 ... detection probe holding stand, 4 ... detection probe.
Claims (1)
れた一対の電極２1，２2，２3間に電圧を加える
ことにより前記圧電素子体１1，１2，１3を伸縮
させ、前記圧電素子体１1，１2，１3の一方の電
極側に検出探針保持台３を介して設けられた検出
探針４を微小位置決めする圧電素子微動機構にお
いて、 前記一方の電極２1，２2，２3が、前記検出探
針保持台３より離れ、且つ他方の電極２1，２2，
２3端部は前記一方の電極２1，２2，２3端部とほ
ぼ同一位置に形成されていることを特徴とする圧
電素子体微動機構。[Claims] 1. By applying a voltage between a pair of electrodes 2 1 , 2 2 , 2 3 formed on the upper and lower surfaces of the piezoelectric element bodies 1 1 , 1 2 , 1 3 , the piezoelectric element bodies 1 1 , Piezoelectric element fine movement that expands and contracts the piezoelectric elements 1 2 and 1 3 to minutely position the detection probe 4 provided on one electrode side of the piezoelectric element bodies 1 1 , 1 2 , and 1 3 via the detection probe holder 3 In the mechanism, one of the electrodes 2 1 , 2 2 , 2 3 is separated from the detection probe holder 3, and the other electrode 2 1 , 2 2 ,
2. A piezoelectric element body fine movement mechanism, characterized in that an end portion of the piezoelectric element body is formed at substantially the same position as the end portions of the one electrodes 2 1 , 2 2 , and 2 3 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61289156A JPS63141380A (en) | 1986-12-04 | 1986-12-04 | Fine adjustment device for piezoelectric element assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61289156A JPS63141380A (en) | 1986-12-04 | 1986-12-04 | Fine adjustment device for piezoelectric element assembly |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63141380A JPS63141380A (en) | 1988-06-13 |
| JPH0324016B2 true JPH0324016B2 (en) | 1991-04-02 |
Family
ID=17739488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61289156A Granted JPS63141380A (en) | 1986-12-04 | 1986-12-04 | Fine adjustment device for piezoelectric element assembly |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63141380A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5345137A (en) * | 1991-04-08 | 1994-09-06 | Olympus Optical Co., Ltd. | Two-dimensionally driving ultrasonic motor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59105388A (en) * | 1982-12-09 | 1984-06-18 | Matsushita Electric Ind Co Ltd | Circuit for driving electric-mechanic conversion element |
-
1986
- 1986-12-04 JP JP61289156A patent/JPS63141380A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63141380A (en) | 1988-06-13 |
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