JPH0328511B2 - - Google Patents
Info
- Publication number
- JPH0328511B2 JPH0328511B2 JP14448385A JP14448385A JPH0328511B2 JP H0328511 B2 JPH0328511 B2 JP H0328511B2 JP 14448385 A JP14448385 A JP 14448385A JP 14448385 A JP14448385 A JP 14448385A JP H0328511 B2 JPH0328511 B2 JP H0328511B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- molten metal
- jacket
- vacuum deposition
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 46
- 229910052751 metal Inorganic materials 0.000 claims description 46
- 238000007738 vacuum evaporation Methods 0.000 claims description 30
- 238000001771 vacuum deposition Methods 0.000 claims description 27
- 238000010438 heat treatment Methods 0.000 claims description 20
- 238000001704 evaporation Methods 0.000 claims description 18
- 230000008020 evaporation Effects 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 17
- 230000008021 deposition Effects 0.000 claims description 16
- 230000008018 melting Effects 0.000 claims description 12
- 238000002844 melting Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 5
- 238000005485 electric heating Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- 238000007664 blowing Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Description
本発明は主として連続的に鋼帯などの基材に亜
鉛などの真空蒸着用金属を真空蒸着させるために
大気圧下にある真空蒸着用金属の溶解炉によつて
溶解された真空蒸着用溶融金属を蒸着室の圧力と
大気圧との差によつて吸上管を通して蒸着室内の
蒸発槽へ供給するに際し、該吸上管がその周囲に
配置されている加熱体によつて加熱されることに
より生ずる真空蒸着用金属との電位腐食や熱疲労
その他の原因により損傷して大気がその損傷部分
より該吸上管内に侵入し真空蒸着用溶融金属を蒸
着室内に吹き出せることを防止する方法に関する
ものである。
The present invention mainly relates to a molten metal for vacuum evaporation which is melted in a melting furnace for the metal for vacuum evaporation under atmospheric pressure in order to continuously vacuum evaporate a metal for vacuum evaporation such as zinc onto a base material such as a steel strip. is supplied to the evaporation tank in the deposition chamber through the suction tube due to the difference between the pressure in the deposition chamber and the atmospheric pressure, and the suction tube is heated by the heating element disposed around it. This relates to a method for preventing the atmosphere from entering the suction pipe through the damaged part and blowing out the molten metal for vacuum evaporation into the evaporation chamber due to potential corrosion, thermal fatigue, or other causes of damage to the metal for vacuum evaporation. It is.
従来より真空蒸着は被蒸着用の基材の片面に簡
単且つ均一に所望の厚さに真空蒸着用金属を蒸着
できるため小さな物品には広く用いられていた。
しかしながら、鋼帯に亜鉛を真空蒸着させて大量
の亜鉛蒸着鋼帯を製造するというような大掛りな
連続真空蒸着装置は技術的に種々の問題があつて
殆んど開発されていない。
Conventionally, vacuum evaporation has been widely used for small articles because a metal for vacuum evaporation can be easily and uniformly deposited to a desired thickness on one side of a substrate to be evaporated.
However, large-scale continuous vacuum evaporation equipment capable of vacuum-depositing zinc onto steel strips to produce large quantities of zinc-coated steel strips has been hardly developed due to various technical problems.
このような現状において、本出願人等は工業的
に大量の真空蒸着亜鉛鋼帯を製造すべく大規模な
テストプラントを製作して連続真空蒸着を行つて
きた。
この連続真空蒸着装置の開発において蒸着室内
に如何にして真空蒸着可能な温度に加熱溶融され
た真空蒸着用金属を供給するかという問題が生じ
たが、本出願人等は大気圧下にある真空蒸着用金
属の溶解炉によつて溶解された真空蒸着用溶融金
属を蒸着室の圧力と大気圧との差によつて吸上管
を通して蒸着室内の蒸発槽へ供給すればよいこと
を究明し、この吸上管を通して真空蒸着用溶融金
属を蒸着室内の蒸発槽に供給するに際して真空蒸
着用溶融金属が吸上管内を通過する際に冷却され
ないように吸上管の周囲に加熱体を配置して真空
蒸着作業を実施したところ、吸上管が加熱体によ
り局部的に加熱されることにより生ずる真空蒸着
用金属との電位腐食や熱疲労その他の原因により
吸上管が損傷しその損傷部分から大量の大気が侵
入して蒸着室内の蒸発槽内にある真空蒸着用溶融
金属を蒸着室内に吹き出し大事故が発生する可能
性のあることを認識した。
Under these circumstances, the present applicant and others have constructed a large-scale test plant and performed continuous vacuum deposition in order to industrially manufacture large quantities of vacuum deposited zinc steel strips. In the development of this continuous vacuum evaporation system, a problem arose as to how to supply metal for vacuum evaporation that had been heated and melted to a temperature that allowed vacuum evaporation into the evaporation chamber. It was discovered that the molten metal for vacuum deposition melted in the melting furnace for the metal for deposition can be supplied to the evaporation tank in the deposition chamber through a suction pipe using the difference between the pressure in the deposition chamber and the atmospheric pressure. When the molten metal for vacuum deposition is supplied to the evaporation tank in the deposition chamber through this suction tube, a heating element is placed around the suction tube so that the molten metal for vacuum deposition is not cooled when passing through the suction tube. When performing vacuum evaporation work, the suction pipe was damaged due to potential corrosion with the vacuum deposition metal caused by local heating of the suction pipe by a heating element, thermal fatigue, and other causes, and a large amount of water was removed from the damaged area. It was recognized that there was a possibility that the atmosphere could enter and blow out the molten metal for vacuum deposition in the evaporation tank inside the deposition chamber, causing a major accident.
本発明者等は上記したような問題点を除去すべ
く鋭意研究の結果、吸上管の材質を損傷の生じな
い丈夫で且つ厚さの厚いものとすることは非常に
高価となると共に加熱体による吸上管内を通過す
る真空蒸着用溶融金属の加熱効率を著しく低減さ
せて好ましくないため、その発生頻度は少ないが
発生すると大事故となる吸上管の損傷に対しては
その吸上管の損傷部分から大気が侵入しないよう
にすればよく、更にもし吸上管が損傷すれば損傷
の発生が直ちに判明するようにしておけばよいこ
とを究明して本発明を完成したのである。
すなわち、本発明は大気圧下にある真空蒸着用
金属の溶解炉によつて溶解された真空蒸着用溶融
金属を蒸着室の圧力と大気圧との差によつて吸上
管を通して蒸着室内の蒸発槽へ供給するに際し、
該吸上管の周囲に配置されている加熱体をその内
部に収納するジヤケツトを該吸上管に沿つて取り
付け、大気圧をＰ、真空蒸着用溶融金属の比重量
をγ、該溶解炉中の溶融金属の液面からの該ジヤ
ケツト内最高部までの高さをＨとしたときに、該
ジヤケツト内の圧力を（Ｐ−Hγ）以下の圧力に
維持して真空蒸着を行うことを特徴とする真空蒸
着用溶融金属の吹出防止方法に関するものであ
る。
As a result of intensive research in order to eliminate the above-mentioned problems, the inventors of the present invention have found that making the material of the suction pipe strong and thick enough to prevent damage would be extremely expensive and require a heating element. This is undesirable because it significantly reduces the heating efficiency of the molten metal for vacuum evaporation passing through the suction pipe, so it is important to prevent damage to the suction pipe, which does not occur frequently but can cause a major accident if it occurs. The inventors completed the present invention by discovering that it is sufficient to prevent the atmosphere from entering through the damaged portion, and furthermore, if the suction pipe is damaged, it is sufficient to immediately identify the occurrence of the damage. That is, the present invention allows molten metal for vacuum evaporation, which is melted in a melting furnace for metal for vacuum evaporation under atmospheric pressure, to be evaporated in the evaporation chamber through a suction pipe due to the difference between the pressure in the evaporation chamber and the atmospheric pressure. When supplying to the tank,
A jacket for housing a heating element placed around the suction tube is installed along the suction tube, and the atmospheric pressure is P, the specific weight of the molten metal for vacuum deposition is γ, and the temperature is set in the melting furnace. The vacuum evaporation is carried out by maintaining the pressure inside the jacket at a pressure below (P-Hγ), where H is the height from the liquid level of the molten metal to the highest point inside the jacket. The present invention relates to a method for preventing blow-out of molten metal for vacuum deposition.
以下、図面により本発明に係る真空蒸着用溶融
金属の吹出防止方法について詳細に説明する。
図は本発明方法を実施して真空蒸着を行つてい
る状態を示す真空蒸着装置の概略説明図である。
図中、１は蒸着室であり通常真空蒸着用金属の飽
和蒸気圧力により低い圧力ｐ（例えば10-2Torr程
度）の不活性ガス雰囲気下にある。２は蒸着室１
内に設置されている蒸発槽、３は蒸着室１内に設
置されている巻付けロール、４は大気圧下にある
真空蒸着用金属の溶解炉、５は溶解炉４によつて
溶解された真空蒸着用溶融金属８を蒸着室１の圧
力ｐと大気圧Ｐとの差（Ｐ−ｐ）によつて蒸着室
１内の蒸発槽２へ供給する吸上管である。６は吸
上管５の周囲に配置されており吸上管５の内部を
通過する真空蒸着用溶融金属８が冷却されるのを
防止する加熱体であり、パイプ内に高温流体を流
動させる型式のものや高周波誘導加熱用コイルを
使用可能であるが、本発明においてはジユール熱
により加熱される電気的加熱体が後記する理由に
より好ましく使用される。７は吸上管５に沿つて
取り付けられており吸上管５の周囲に配置されて
いる加熱体６をその内部に収納するジヤケツトで
あつて、このジヤケツト７内の圧力は大気圧を
Ｐ、真空蒸着用溶融金属の比重量をγ、溶解炉４
中の真空蒸着用溶融金属８の液面からのジヤケツ
ト７内最高部までの高さをＨとしたときに（Ｐ−
Hγ）以下の圧力に維持されている。７ａはジヤ
ケツト７内の圧力を上記圧力以下に維持するため
に真空ポンプ（図示なし）に連結されている吸引
管、７ｂはジヤケツト７内の圧力を検知するため
の圧力計でありこの圧力計７ｂはジヤケツト７内
の圧力が上記した所定圧力以下となる真空ポンプ
を自動的に作動させるものが好ましい。９は真空
蒸着用溶融金属８を連続的に真空蒸着される鋼帯
などの基材であり、予めその表面を清浄に前処理
され所定温度に加熱されて蒸着室１内に供給され
巻付けロール３に巻き付いてその移動方向を変向
される際に真空蒸着される。
Hereinafter, the method for preventing blow-out of molten metal for vacuum deposition according to the present invention will be explained in detail with reference to the drawings. The figure is a schematic explanatory diagram of a vacuum evaporation apparatus showing a state in which vacuum evaporation is performed by implementing the method of the present invention.
In the figure, reference numeral 1 denotes a deposition chamber, which is usually under an inert gas atmosphere at a pressure p (for example, about 10 -2 Torr) lower than the saturated vapor pressure of the metal for vacuum deposition. 2 is vapor deposition chamber 1
3 is a winding roll installed in the deposition chamber 1, 4 is a melting furnace for vacuum deposition metal under atmospheric pressure, and 5 is a melting furnace 4. This is a suction pipe that supplies molten metal 8 for vacuum deposition to the evaporation tank 2 in the deposition chamber 1 based on the difference (P-p) between the pressure p in the deposition chamber 1 and the atmospheric pressure P. Reference numeral 6 denotes a heating body that is arranged around the suction pipe 5 and prevents the molten metal 8 for vacuum deposition passing through the inside of the suction pipe 5 from being cooled, and is a type of heating body that allows high-temperature fluid to flow inside the pipe. Although it is possible to use a heating element or a high-frequency induction heating coil, in the present invention, an electric heating element heated by Joule heat is preferably used for the reason described later. A jacket 7 is installed along the suction pipe 5 and stores therein a heating element 6 arranged around the suction pipe 5, and the pressure inside this jacket 7 is atmospheric pressure P, The specific weight of molten metal for vacuum deposition is γ, melting furnace 4
When the height from the liquid level of the molten metal 8 for vacuum deposition inside to the highest part of the jacket 7 is defined as H, (P-
The pressure is maintained below Hγ). 7a is a suction pipe connected to a vacuum pump (not shown) to maintain the pressure inside the jacket 7 below the above pressure, and 7b is a pressure gauge for detecting the pressure inside the jacket 7. Preferably, the vacuum pump automatically operates so that the pressure inside the jacket 7 becomes equal to or less than the above-mentioned predetermined pressure. Reference numeral 9 designates a base material such as a steel strip on which the molten metal 8 for vacuum deposition is continuously vacuum deposited, the surface of which is pretreated to be clean, heated to a predetermined temperature, and supplied into the deposition chamber 1 to be wrapped around a roll. 3 and is vacuum-deposited when the direction of movement is changed.
かかる構成において、もし溶解炉４中の真空蒸
着用溶融金属８の液面からの高さがｈ（但しＨ＞
ｈ）である吸上管５のＡ部が損傷すると、そのＡ
部における吸上管５の周囲の圧力が（Ｐ−hγ）
であれば圧力バランスが保たれてジヤケツト７内
の気体は吸上管５内に流入しないことになるが、
ジヤケツト７内の圧力は（Ｐ−Hγ）以下の圧力
に維持されており且つＨ＞ｈであるから吸上管５
内の真空蒸着用溶融金属８は吸上管５の損傷部か
らその圧力が低いジヤケツト７内に流入すること
になり、蒸着室１内にジヤケツト７内の気体が侵
入することがないから、蒸着室１内の蒸発槽２内
の真空蒸着用溶融金属８が蒸着室１内に吹き出す
ことがないのである。またこのように吸上管５に
損傷が発生して真空蒸着用溶融金属８がジヤケツ
ト７内に流入すると当然ジヤケツト７内の加熱体
６は流入した真空蒸着用溶融金属８によつて損傷
することになるが、加熱体６をジユール熱によつ
て加熱する電気的加熱体とすればその加熱体６が
流入した真空蒸着用溶融金属８によつてシヨート
するため直ちに吸上管５の損傷を知つて真空蒸着
装置の稼動を停止させて大事故の発生を防止する
ことができるものである。なお、ジヤケツト７内
の圧力を（Ｐ−Hγ）以下の圧力に維持するに際
し、ジヤケツト７内に存在する気体の圧力を著し
く低くすると熱伝導効果が損なわれて熱効率が低
下すると共に不必要に強力な真空ポンプを設置し
なければならないので、ジヤケツト７内の圧力は
ジヤケツト７内に存在する気体の熱伝導効果を損
わない圧力以上の圧力に維持することが好まし
く、この気体の熱伝導効果を損わない圧力以上の
圧力としては10Torr程度以上の圧力である。
In such a configuration, if the height of the molten metal 8 for vacuum deposition in the melting furnace 4 from the liquid level is h (however, H>
h) If part A of the suction pipe 5 is damaged, the
The pressure around the suction pipe 5 at (P-hγ)
If so, the pressure balance will be maintained and the gas in the jacket 7 will not flow into the suction pipe 5.
Since the pressure inside the jacket 7 is maintained at a pressure below (P-Hγ) and H>h, the suction pipe 5
The molten metal 8 for vacuum evaporation inside will flow from the damaged part of the suction pipe 5 into the jacket 7 where the pressure is low, and the gas in the jacket 7 will not enter into the evaporation chamber 1. This prevents the molten metal 8 for vacuum deposition in the evaporation tank 2 in the chamber 1 from blowing out into the deposition chamber 1. Furthermore, if the suction pipe 5 is damaged and the molten metal 8 for vacuum evaporation flows into the jacket 7, the heating element 6 in the jacket 7 will naturally be damaged by the molten metal 8 for vacuum evaporation that has flowed into the jacket 7. However, if the heating element 6 is an electric heating element that heats with Joule heat, damage to the suction pipe 5 will be immediately detected because the heating element 6 will be shot by the inflowing molten metal 8 for vacuum deposition. This makes it possible to stop the operation of the vacuum evaporation apparatus and prevent a major accident from occurring. Note that when maintaining the pressure inside the jacket 7 at a pressure below (P-Hγ), if the pressure of the gas existing inside the jacket 7 is significantly lowered, the heat conduction effect will be impaired, the thermal efficiency will decrease, and the jacket will be unnecessarily strong. Since a vacuum pump must be installed, it is preferable to maintain the pressure inside the jacket 7 at a pressure higher than that which does not impair the heat conduction effect of the gas existing in the jacket 7. The pressure above the pressure that does not cause damage is about 10 Torr or above.
以上詳述した如く本発明は、工業的規模で連続
的に真空蒸着を行うために大気圧下にある真空蒸
着用金属の溶解炉によつて溶解された真空蒸着用
溶融金属を蒸着室の圧力と大気圧との差によつた
吸上管を通して蒸着室内の蒸発槽へ供給するに際
し、吸上管の周囲に配置されている加熱体によつ
て加熱されることにより生ずる真空蒸着用金属と
の電位腐食や熱疲労などの原因で吸上管が損傷し
て大気が蒸着室内の蒸発槽内へ侵入して蒸発槽内
の真空蒸着用溶融金属を蒸着室内に吹き出すとい
う大事故を確実に防止できる画期的な方法であ
り、この方法を実施するための装置は非常に安価
であつて容易に製造できるのであり、更に加熱体
をジユール熱により加熱される電気的加熱体とす
れば加熱体のシヨートにより吸上管の損傷を容易
且つ確実に検知することも可能であるなど種々の
利点を有しており、真空蒸着を工業的に効率良く
実施できる本発明の工業的価値は非常に大きなも
のがある。
As described in detail above, the present invention aims to melt molten metal for vacuum evaporation in a melting furnace for vacuum evaporation metal under atmospheric pressure in order to perform continuous vacuum evaporation on an industrial scale. When the suction pipe is supplied to the evaporation tank in the deposition chamber through the suction pipe due to the difference between It is possible to reliably prevent a major accident in which the suction pipe is damaged due to potential corrosion or thermal fatigue, causing air to enter the evaporation tank in the evaporation chamber and blowing out the molten metal for vacuum evaporation in the evaporation tank into the evaporation chamber. This is an innovative method, and the equipment for carrying out this method is very inexpensive and easy to manufacture.Furthermore, if the heating element is an electric heating element heated by Joule heat, the heating element can be heated easily. The present invention has various advantages such as being able to easily and reliably detect damage to the suction pipe by shooting, and the industrial value of the present invention, which allows vacuum evaporation to be carried out industrially and efficiently, is extremely large. There is.
図面は本発明方法を実施して真空蒸着を行つて
いる状態を示す真空蒸着装置の概略説明図であ
る。
１……蒸着室、２……蒸発槽、３……巻付けロ
ール、４……溶解炉、５……吸上管、６……加熱
体、７……ジヤケツト、７ａ……吸引管、７ｂ…
…圧力計、８……真空蒸着用溶融金属、９……基
材。
The drawing is a schematic explanatory diagram of a vacuum evaporation apparatus showing a state in which vacuum evaporation is performed by implementing the method of the present invention. 1... Vapor deposition chamber, 2... Evaporation tank, 3... Winding roll, 4... Melting furnace, 5... Suction pipe, 6... Heating body, 7... Jacket, 7a... Suction pipe, 7b …
...Pressure gauge, 8... Molten metal for vacuum deposition, 9... Base material.
Claims (1)
つて溶解された真空蒸着用溶融金属を蒸着室の圧
力と大気圧との差によつて吸上管を通して蒸着室
内の蒸発槽へ供給するに際し、該吸上管の周囲に
配置されている加熱体をその内部に収納するジヤ
ケツトを該吸上管に沿つて取り付け、大気圧を
Ｐ、真空蒸着用溶融金属の比重量をγ、該溶解炉
中の溶融金属の液面からの該ジヤケツト内最高部
までの高さをＨとしたときに、該ジヤケツト内の
圧力を（Ｐ−Hγ）以下の圧力に維持して真空蒸
着を行うことを特徴とする真空蒸着用溶融金属の
吹出防止方法。 ２ ジヤケツト内の圧力を該ジヤケツト内に存在
する気体の熱伝導効果を損わない圧力以上の圧力
に維持する特許請求の範囲第１項に記載の真空蒸
着用溶融金属の吹出防止方法。 ３ ジヤケツト内に存在する気体の該ジヤケツト
内の圧力が10Torr以上の圧力である特許請求の
範囲第２項に記載の真空蒸着用溶融金属の吹出防
止方法。 ４ 加熱体としてジユール熱により加熱される電
気的加熱体を使用する特許請求の範囲第１項から
第３項までのいずれか１項に記載の真空蒸着用溶
融金属の吹出防止方法。[Claims] 1. Molten metal for vacuum deposition melted in a melting furnace for metal for vacuum deposition under atmospheric pressure is passed through a suction pipe into the deposition chamber due to the difference between the pressure in the deposition chamber and atmospheric pressure. When supplying the metal to the evaporation tank, a jacket is attached along the suction tube to accommodate the heating element placed around the suction tube, and the atmospheric pressure is set to P, and the ratio of the molten metal for vacuum evaporation is adjusted. When the weight is γ and the height from the liquid level of the molten metal in the melting furnace to the highest point inside the jacket is H, the pressure inside the jacket is maintained at a pressure below (P-Hγ). A method for preventing blow-out of molten metal for vacuum deposition, characterized by performing vacuum deposition. 2. The method for preventing blow-out of molten metal for vacuum deposition according to claim 1, wherein the pressure inside the jacket is maintained at a pressure higher than the pressure that does not impair the heat conduction effect of the gas existing within the jacket. 3. The method for preventing blow-out of molten metal for vacuum deposition according to claim 2, wherein the pressure of the gas present in the jacket is 10 Torr or more. 4. The method for preventing blow-out of molten metal for vacuum deposition according to any one of claims 1 to 3, which uses an electric heating element heated by Joule heat as the heating element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14448385A JPS627857A (en) | 1985-07-03 | 1985-07-03 | Method for preventing blowing out of molten metal for vacuum deposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14448385A JPS627857A (en) | 1985-07-03 | 1985-07-03 | Method for preventing blowing out of molten metal for vacuum deposition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS627857A JPS627857A (en) | 1987-01-14 |
| JPH0328511B2 true JPH0328511B2 (en) | 1991-04-19 |
Family
ID=15363363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14448385A Granted JPS627857A (en) | 1985-07-03 | 1985-07-03 | Method for preventing blowing out of molten metal for vacuum deposition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS627857A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH063546Y2 (en) * | 1990-09-04 | 1994-02-02 | 株式会社貝印刃物開発センター | Replacement blade type disposable blade case |
| JPH051404U (en) * | 1991-06-26 | 1993-01-14 | 株式会社貝印刃物開発センター | Nail clippers, T-type razors and replaceable knife |
| ATE526431T1 (en) * | 2006-09-29 | 2011-10-15 | Ardenne Anlagentech Gmbh | VACUUM COATING PROCESS AND ARRANGEMENT FOR IMPLEMENTING THE PROCESS |
| CN111983831A (en) * | 2020-08-07 | 2020-11-24 | 深圳市华星光电半导体显示技术有限公司 | Liquid crystal panel reflectivity detection device and detection method |
-
1985
- 1985-07-03 JP JP14448385A patent/JPS627857A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS627857A (en) | 1987-01-14 |
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