JPH0329183B2 - - Google Patents
Info
- Publication number
- JPH0329183B2 JPH0329183B2 JP59113212A JP11321284A JPH0329183B2 JP H0329183 B2 JPH0329183 B2 JP H0329183B2 JP 59113212 A JP59113212 A JP 59113212A JP 11321284 A JP11321284 A JP 11321284A JP H0329183 B2 JPH0329183 B2 JP H0329183B2
- Authority
- JP
- Japan
- Prior art keywords
- support plate
- alignment
- bolt
- semiconductor element
- nut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
Landscapes
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Die Bonding (AREA)
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は平型半導体素子と放熱フインとを交互
に積層した積層体を一対の支持板間に加圧力を付
与して支持した半導体装置(以下、半導体スタツ
クという)に関し、特にその組立および故障等に
伴なう組立後の平型半導体素子の交換を容易にす
る半導体スタツクの構造に関するものである。Detailed Description of the Invention [Technical Field of the Invention] The present invention relates to a semiconductor device (hereinafter referred to as "laminated body") in which a stacked body in which flat semiconductor elements and heat dissipation fins are alternately stacked is supported by applying pressure between a pair of support plates. The present invention relates to a semiconductor stack (hereinafter referred to as "semiconductor stack"), and particularly to a structure of a semiconductor stack that facilitates assembly and replacement of assembled flat semiconductor elements in the event of a failure or the like.
第4図に従来の半導体スタツクの一例を示す。 FIG. 4 shows an example of a conventional semiconductor stack.
同図において、1a,1bは支持板、2はこの
支持板1a,1b間の四隅に挿通されたボルト、
3はこのボルト2の一端に挿通された皿バネ、4
は皿バネ押え板、5a,5bはフレーム等他の外
部部材に固定するためのスタンド、6,7はボル
ト2の両端に挿通されるナツトロツクおよびナツ
トである。また、支持板1a,1b間には平型半
導体素子8と放熱フイン9とが交互に積層され、
その両端に絶縁スペーサ10a,10bが配置さ
れ、一方の絶縁スペーサ10b側にはボール11
およびこのボール11を挾んで対向配置されたボ
ール受け板12a,12bから成る調芯装置13
を備えている。 In the figure, 1a and 1b are support plates, 2 are bolts inserted into the four corners between the support plates 1a and 1b,
3 is a disc spring inserted into one end of this bolt 2;
5a and 5b are stands for fixing to other external members such as a frame, and 6 and 7 are nut locks and nuts inserted through both ends of the bolt 2. Furthermore, flat semiconductor elements 8 and heat dissipation fins 9 are alternately stacked between the support plates 1a and 1b.
Insulating spacers 10a and 10b are arranged at both ends, and a ball 11 is placed on one insulating spacer 10b side.
and an alignment device 13 consisting of ball receiving plates 12a and 12b arranged oppositely with this ball 11 in between.
It is equipped with
上記構成の半導体スタツクを組立る場合には一
般に次のような順序によつて行なつている。 When assembling the semiconductor stack having the above structure, it is generally carried out in the following order.
支持板1bの四隅に設けた透孔に4本のボ
ルト2の一端を挿通し、そのボルト2の一端に
は所定枚数の皿バネ3、皿バネ押え板4、ナツ
トロツク6およびナツト7をそれぞれ順次挿通
しかつナツト7を適当な位置までねじ込んだと
ころでナツトロツク6の爪をナツト7の一側面
に添わせて立上げる。 One end of the four bolts 2 is inserted into the through holes provided at the four corners of the support plate 1b, and a predetermined number of disc springs 3, a disc spring retaining plate 4, a nut lock 6, and a nut 7 are sequentially inserted into one end of each of the bolts 2. After inserting the nut 7 and screwing it to an appropriate position, align the claw of the nut lock 6 with one side of the nut 7 and raise it up.
上記の中間組立体を支持板1bが下面にかつ
四本のボルト2が垂直になるように作業台上に
載せる。 Place the above intermediate assembly on a workbench so that the support plate 1b is on the bottom surface and the four bolts 2 are vertical.
調芯装置13のボール受け板12b、ボール
11、ボール受け板12aを順次重ね、次いで
絶縁スペーサ10b、放熱フイン9、平型半導
体素子8を交互に積み重ね、最上部に絶縁スペ
ーサ10aを重ねた後、四本のボルト2の上端
に支持板1a、ナツトロツク6およびナツト7
を挿通する。 The ball receiving plate 12b, ball 11, and ball receiving plate 12a of the aligning device 13 are stacked one after another, then the insulating spacers 10b, the heat dissipation fins 9, and the flat semiconductor element 8 are stacked alternately, and the insulating spacer 10a is stacked on top. , a support plate 1a, a nut lock 6 and a nut 7 are attached to the upper ends of the four bolts 2.
Insert.
次に油圧プレス等所定の加圧用機械で支持板
1aの外側から所定の加圧力を皿バネ3の弾性
力に抗して付与し皿バネ3がたわんだ量だけナ
ツト7をねじ込だ後、ナツトロツク6の爪を立
上げる。 Next, a predetermined pressurizing force is applied from the outside of the support plate 1a against the elastic force of the disc spring 3 using a predetermined pressurizing machine such as a hydraulic press, and the nut 7 is screwed in by the amount that the disc spring 3 is deflected. Raise the claws of Natsutrotsuku 6.
上記のような手順に従つて工場側において組立
てられた半導体スタツクを所定の装置に組付た
後、実際の運転中の破壊、その他の事故により平
型半導体素子を、半導体スタツクを組込んだ装置
の据付け現場において交換する必要が生ずる場合
がある。 After the semiconductor stack assembled at the factory according to the above procedure is assembled into the specified equipment, the device into which the semiconductor stack is installed may be damaged due to breakage during actual operation or other accidents. may need to be replaced at the installation site.
かかる場合には次のような手順に従つて半導体
スタツクを再組立する必要がある。 据付け現
場に規定の加圧力を付与するための加圧用プレ
スが用意されていない場合が多いため、まず皿
バネ3のたわみ量δ0をノギス、スキ間ゲージ等
の測定器具を用いて正確に測定しておく。 In such a case, it is necessary to reassemble the semiconductor stack according to the following procedure. In many cases, a pressure press to apply a specified pressure force is not available at the installation site, so first, accurately measure the amount of deflection δ 0 of the disc spring 3 using a measuring instrument such as a caliper or gap gauge. I'll keep it.
次に支持板1a又は1bのいずれか一方の側
の4箇所のナツト7をゆるめる。この時のナツ
ト7のゆるめる量は平型半導体素子8が取出せ
るのに必要にして十分な量、すなわちこの半導
体スタツクに用いる平型半導体素子3の一方の
電極ポストの中央部からは外部に約5mm程突出
する位置決め用のセンターピンが設けられてい
るが、このセンターピンが放熱フイン9に引つ
掛ることなく平型半導体素子8を外部に取出せ
るだけの量をゆるめる。 Next, loosen the four nuts 7 on either side of the support plate 1a or 1b. The amount of loosening of the nut 7 at this time is the amount necessary and sufficient to take out the flat semiconductor element 8. In other words, the amount that the nut 7 is loosened is enough to take out the flat semiconductor element 8. A center pin for positioning that protrudes by about 5 mm is provided, but the center pin is loosened enough to allow the flat semiconductor element 8 to be taken out without getting caught on the heat dissipation fins 9.
次いで故障等で交換すべき平型半導体素子8
を取出した後、新たな平型半導体素子8を入れ
換え、再びナツト7を締付け、測定器具を当て
がいながら先に測定したたわみ量δ0になるまで
締付けて行く。 Next, a flat semiconductor element 8 that should be replaced due to failure etc.
After taking it out, a new flat semiconductor element 8 is replaced, and the nut 7 is tightened again, applying the measuring instrument to the nut 7 until the previously measured deflection amount δ 0 is reached.
しかるに、上記構成の半導体スタツクでは特に
据付け現場において平型半導体素子を交換する場
合に不便である。 However, the semiconductor stack having the above structure is inconvenient, especially when replacing flat semiconductor devices at an installation site.
すなわち、据付け現場で規定値の加圧力を維持
するために分解時および再組立時に正確にたわみ
量を測定しなければならず、その作業が煩雑かつ
わずかなたわみ量の測定誤差で加圧力に大きく影
響するのでその測定に熟練を要することやナツト
をゆるめた場合に交換すべき平型半導体素子以外
の素子までが外部に脱落し易すく組立作業に必要
以上の労力と時間を要すること、厳密な加圧力を
維持するために素子交換現場に加圧用プレスを持
参する場合があるが、この場合には、重量がかさ
み搬入その他の点で不便であること、さらに平型
半導体素子の交換時に半導体スタツク自体を据付
け装置のフレーム等外部部材からスタンド5a,
5bの取付ネジをその都度取外さなければならな
い等の不便があつた。 In other words, in order to maintain the specified pressure force at the installation site, the amount of deflection must be accurately measured during disassembly and reassembly, and this work is complicated, and a small error in measuring the deflection amount can greatly increase the pressure force. In addition, if the nut is loosened, elements other than the flat semiconductor element that should be replaced are likely to fall out, requiring more labor and time than necessary for the assembly process. In order to maintain the pressure, a pressure press is sometimes brought to the device replacement site, but in this case, it is heavy and inconvenient to transport and other aspects, and it is also difficult to handle the semiconductor stack when replacing flat semiconductor devices. itself from an external member such as the frame of the installation device to the stand 5a,
There were inconveniences such as having to remove the mounting screws of 5b each time.
本発明は上記の事情に基づいてなされたもの
で、一対の支持板間の間隔を規制する主ボルトは
一亘組立て後は平型半導体素子の交換時にもゆる
めることなく固定したままで、別に設けた副ボル
トによつて調整し、再び組立後所定の加圧力を維
持できるようにし、かつ軸方向に付勢される調芯
装置を備えることにより平型半導体素子と放熱フ
インとの積層体に適度な加圧力を加え副ボルトを
ゆるめた場合でも不用意に交換すべき平型半導体
素子以外の部品が外部に脱落するのを防止した半
導体スタツクを提供することを目的とする。
The present invention has been made based on the above-mentioned circumstances, and the main bolt that regulates the distance between the pair of support plates remains fixed without being loosened even when replacing a flat semiconductor element after assembly, and is provided separately. It is possible to maintain a predetermined pressing force after reassembly by adjusting the secondary bolt, and by providing an alignment device that is biased in the axial direction, the stacked structure of the flat semiconductor element and the heat dissipation fin can be adjusted to an appropriate level. To provide a semiconductor stack which prevents parts other than a flat semiconductor element to be inadvertently dropped to the outside even when a sub-bolt is loosened by applying a strong pressing force.
以下に本発明の一実施例を従来例を示す第4図
と同一部分には同一符号を付した第1図ないし第
3図を参照して説明する。
An embodiment of the present invention will be described below with reference to FIGS. 1 to 3, in which the same parts as in FIG. 4 showing the conventional example are given the same reference numerals.
軸方向に対向配置された支持板のうち一方の支
持板、例えば支持板1b側の略中央部に透孔14
が設けられこの透孔14内に調芯装置130が配
置される。この調芯装置130は第2図Aの拡大
断面図に示すように互いに相補形状をなす凹面1
31、凸面132を有する2個の調芯部材13
3,134と、この調芯部材133,134間に
介在させ、この部材133,134を互いに離反
する方向に付勢する弾性体、例えばコイルばね1
35とを有し、これら調芯部材133,134は
その中心部においてセンタピン136により軸方
向に調芯部材134が移動可能に結合されてい
る。 A through hole 14 is formed approximately in the center of one of the support plates arranged to face each other in the axial direction, for example, on the side of the support plate 1b.
is provided, and an alignment device 130 is disposed within this through hole 14. As shown in the enlarged cross-sectional view of FIG.
31, two alignment members 13 having convex surfaces 132
3, 134 and an elastic body, for example, a coil spring 1, which is interposed between the centering members 133, 134 and biases the members 133, 134 in a direction away from each other.
35, and these centering members 133, 134 are coupled at their centers by a center pin 136 so that the centering member 134 can move in the axial direction.
調芯部材134の一端から突出したセンターピ
ン136の後端は支持板1bの外側に配置される
加圧板15の中心孔16に挿通され簡易固定手段
17により固定される。 また、調芯部材133
の外周には後述の初期位置合せ用マークM1、規
定加圧力表示マークM2が付されている。なお、
これらのマークM1,M2はペイントにより表示、
印、溝付等いずれの方法によつても良い。 The rear end of the center pin 136 protruding from one end of the alignment member 134 is inserted into the center hole 16 of the pressure plate 15 disposed outside the support plate 1b and fixed by the simple fixing means 17. In addition, alignment member 133
An initial positioning mark M 1 and a specified pressing force display mark M 2 , which will be described later, are attached to the outer periphery. In addition,
These marks M 1 and M 2 are displayed by painting,
Any method such as marking or grooves may be used.
上記の加圧板15にはその両端にそれぞれ透孔
15a,15bが設けられこの透孔15a,15
bに締付用の副ボルト18が挿通され、このボル
ト18は支持板1bにねじ込まれるように構成さ
れている。 The pressure plate 15 is provided with through holes 15a and 15b at both ends, respectively.
A secondary bolt 18 for tightening is inserted through b, and this bolt 18 is configured to be screwed into the support plate 1b.
次に上記構成の本発明に係る半導体スタツクの
組立順序について説明する。 Next, the assembly order of the semiconductor stack according to the present invention having the above structure will be explained.
支持板1aの四隅に設けた透孔に4本の主ボ
ルト2の一端を挿通した後、そのボルト2の一
端にナツトロツク6、ナツト7を固定する。 After inserting one end of four main bolts 2 into the through holes provided at the four corners of the support plate 1a, a nut lock 6 and a nut 7 are fixed to one end of the bolts 2.
作業台上に4本の主ボルト2が垂直になるよ
うに上記の組立体を載せた後、支持板1a上に
大径の複数枚の皿バネ19、絶縁スペーサ10
a、放熱フイン9、平型半導体素子8を所定の
方向、順序に従つて積層する。 After placing the above assembly on the workbench so that the four main bolts 2 are vertical, a plurality of large-diameter disc springs 19 and insulating spacers 10 are placed on the support plate 1a.
a. The heat dissipation fins 9 and the flat semiconductor element 8 are stacked in a predetermined direction and order.
最後に他方の支持板1bを主ボルト2に挿通
した後、このボルト2の一端にナツトロツク6
を通しナツト7を螺合させる。 Finally, after inserting the other support plate 1b through the main bolt 2, attach the nut lock 6 to one end of this bolt 2.
through the nut 7.
調芯装置130を支持板1bの透孔14内に
挿入し、かつ、加圧板15を支持板1bの外側
に位置させ、副ボルト18を加圧板15の透孔
15a,15b(第2図参照)を介して支持板
1bに手で締付けられる程度に螺合させて置
く。 Insert the alignment device 130 into the through hole 14 of the support plate 1b, position the pressure plate 15 on the outside of the support plate 1b, and insert the secondary bolts 18 into the through holes 15a, 15b of the pressure plate 15 (see FIG. 2). ) to the support plate 1b to the extent that it can be tightened by hand.
次に加圧板15を半導体スタツクの軸方向に
調芯装置130に内蔵したコイルばね135の
ばね力に抗して押圧し調芯部材133,134
の凹面131、凸面132を接触させる。な
お、調芯装置130内は内蔵されるコイルばね
135のばね定数、ターン数は積層体を加圧す
る初期設定時に必要とする所定の加圧力に応じ
て設計される。 Next, the pressure plate 15 is pressed in the axial direction of the semiconductor stack against the spring force of the coil spring 135 built into the alignment device 130, thereby aligning the alignment members 133, 134.
The concave surface 131 and convex surface 132 of are brought into contact. Note that the spring constant and number of turns of the coil spring 135 built into the centering device 130 are designed in accordance with a predetermined pressing force required at the time of initial setting to pressurize the stacked body.
すなわち、コイルばね135に抗して調芯部
材134を押圧し、その凸面132が調芯部材
133の凹面131に接触した時に一定の加圧
力が積層体に付与される。この状態で4本の主
ボルト2のナツト7および2本の副ボルト18
を締付ける。 That is, when the alignment member 134 is pressed against the coil spring 135 and its convex surface 132 contacts the concave surface 131 of the alignment member 133, a certain pressing force is applied to the laminate. In this state, tighten the nuts 7 of the four main bolts 2 and the two sub bolts 18.
Tighten.
かかる場合、主ボルト2のナツト7はそれ以
上締付けない所謂本締めのためにナツトロツク
6の爪を立てる。一方、副ボルト18は仮締め
であるが、この仮締めの位置は上記の実施例で
は調芯部材133の外周に初期位置合せ用マー
クM1を付してあるので、このマークM1が支持
板1bの内縁と一致する位置とする。 In such a case, the nut 7 of the main bolt 2 is tightened by the nut lock 6 for final tightening. On the other hand, the secondary bolt 18 is temporarily tightened, but in the above embodiment, the initial positioning mark M 1 is attached to the outer periphery of the alignment member 133, so this mark M 1 supports the temporary tightening. The position coincides with the inner edge of the plate 1b.
次いで積層体に規定の加圧力を付与すべき2
本の副ボルト18を締付ける。すなわち、副ボ
ルト18をスパナ等の工具を用いて締付けるこ
とにより調芯部材133の端面によつて積層体
を押圧し、この積層体の端部に配置された絶縁
スペーサ10aの端面によつて皿ばね19をた
わませる。その時のたわみ量δ1の調整は調芯部
材133に付した規定加圧力表示マークM2を
頼りに行なうこととし、この表示マークM2の
位置まで調芯部材133が軸方向に移動するよ
うに副ボルト18を締付ければ規定の加圧力が
積層体に加わることとなる。 Next, a specified pressing force should be applied to the laminate.
Tighten the secondary bolt 18. That is, by tightening the secondary bolt 18 using a tool such as a spanner, the end face of the alignment member 133 presses the laminate, and the end face of the insulating spacer 10a arranged at the end of the laminate is pressed against the plate. Deflect the spring 19. At that time, the amount of deflection δ 1 is adjusted by relying on the specified pressure display mark M 2 attached to the alignment member 133, and the alignment member 133 is moved in the axial direction to the position of this display mark M 2 . By tightening the secondary bolt 18, a specified pressing force will be applied to the laminate.
上記の表示マークM2と支持板1bの内縁と
が一致した位置で副ボルト18の締付を終了し
た後、図示を省略したナツトロツクの爪を立上
げ副ボルト18を固定する。 After completing the tightening of the sub-bolt 18 at the position where the above-mentioned display mark M2 and the inner edge of the support plate 1b coincide with each other, the sub-bolt 18 is fixed by raising the nail of the nuts lock (not shown).
上記のようにして本発明に係る半導体スタツ
クの組立を終了する。 As described above, the assembly of the semiconductor stack according to the present invention is completed.
なお、調芯部材133に付した初期位置合せ
用マークM1および規定加圧力表示マークM2
は、例えば第3図に示すように絶縁スペーサ1
0aと皿ばね19の間に積層体の押圧力を受け
その一端が支持板1aの透孔1cに挿入され半
導体スタツクの軸方向に移動する皿ばね位置決
め部材20を設け、この部材20の支持板1a
からの突出量を規定することでマークM1,M2
と置換えることができる。 In addition, the initial alignment mark M 1 and the specified pressure display mark M 2 attached to the alignment member 133
For example, as shown in FIG.
A disc spring positioning member 20 is provided between the disc spring 19 and the disc spring 19, and one end of the disc spring positioning member 20 is inserted into the through hole 1c of the support plate 1a and moves in the axial direction of the semiconductor stack in response to the pressing force of the laminate. 1a
By specifying the amount of protrusion from the marks M 1 and M 2
It can be replaced with
すなわち、位置決め部材20の一端面が支持
板1aの外縁と一致する位置を例えば初期設定
位置とし、上記部材20がHだけ突出した位置
を規定圧力が付与された位置とすれば良い。 That is, the position where one end surface of the positioning member 20 coincides with the outer edge of the support plate 1a may be, for example, the initial setting position, and the position where the member 20 protrudes by an amount H may be the position where the specified pressure is applied.
さらに初期位置合せ用マークM1および規定
加圧力表示マークM2は調芯部材133側に限
定されることなく調芯部材134側に設けるこ
ともできる。 Furthermore, the initial alignment mark M 1 and the prescribed pressure display mark M 2 are not limited to the alignment member 133 side, but can also be provided on the alignment member 134 side.
さて、上記の半導体スタツクにおいて所定の
装置に据付けた後に平型半導体素子8の交換を
必要とする場合には次のような手順によつて行
なわれる。 Now, in the case where it is necessary to replace the flat semiconductor element 8 in the semiconductor stack described above after it has been installed in a predetermined device, the following procedure is followed.
半導体スタツクの2本の副ボルト8をゆる
めると、皿ばね19の復元力によつて積層体が
図示右側に押圧され調芯部材133を押し、こ
の部材133が右方向に移動し初期位置合せ用
マークM1と支持板1bの内縁とが一致した位
置で一旦停止させる。 When the two sub-bolts 8 of the semiconductor stack are loosened, the restoring force of the disc spring 19 pushes the stack to the right in the figure and pushes the alignment member 133, which moves to the right for initial positioning. It is temporarily stopped at a position where the mark M1 and the inner edge of the support plate 1b coincide.
次いで、さらに副ボルト18をゆるめると、
コイルばね135のばね力により次第に調芯部
材133と134との間が離れて行くが、平型
半導体素子8のセンタピンの突出量よりも若
干、大きな間隔、すなわちこの実施例ではセン
タピンの突出量を5mm程度としたので、それよ
り若干大きな間隔である6〜10mm程度の間隔が
形成されるまで副ボルト18をゆるめる。 Next, when the sub bolt 18 is further loosened,
The alignment members 133 and 134 are gradually separated by the spring force of the coil spring 135, but the spacing is slightly larger than the amount of protrusion of the center pin of the flat semiconductor element 8, that is, in this embodiment, the amount of protrusion of the center pin is Since the distance is about 5 mm, loosen the sub bolt 18 until a slightly larger distance of about 6 to 10 mm is formed.
上記の状態では調芯装置130内に配置した
コイルばね135のばね力によつて積層体に所
定の加圧力が付与されている。 In the above state, a predetermined pressing force is applied to the stacked body by the spring force of the coil spring 135 disposed within the alignment device 130.
次に交換すべき平型半導体素子8の両側の放
熱フイン9をコイルばね135のばね力に抗し
て外側に押広げ当該素子8を取出し新たな平型
半導体素子8を挿入する。 Next, the heat radiation fins 9 on both sides of the flat semiconductor element 8 to be replaced are pushed outward against the spring force of the coil spring 135, and the element 8 is taken out and a new flat semiconductor element 8 is inserted.
再び副ボルト18を締付け、加圧板15、調
芯装置130、絶縁スペーサ10b、放熱フイ
ン9と平型素子8の積層体および絶縁スペーサ
10aを介して皿ばね19を押圧し前記の規定
加圧力表示ヤークM2等を基準にして所定量た
わませ規定加圧力を出す。 Tighten the auxiliary bolt 18 again and press the disc spring 19 through the pressure plate 15, alignment device 130, insulating spacer 10b, the laminate of the heat dissipation fin 9 and flat element 8, and the insulating spacer 10a to display the specified pressing force. Deflect by a specified amount based on Yak M 2 etc. to apply specified pressure.
本発明は上記のように構成したので、半導体ス
タツクの据付け現場において、故障等した平型半
導体素子を容易に交換することができる。すなわ
ち、積層体への加圧力を副ボルトの締付けによる
変位に比例させ表示マーク等によりそれを目視し
得るようにしたので、他の測定器具、ゲージ等を
用いることなく、また加圧用プレス等を用いるこ
となく正確かつ容易に規定の加圧力を維持させる
と共に重量のかさむ加圧用プレスを据付現場に搬
入する不便も解消する。また、平型半導体素子の
交換時に調芯装置のコイルばねによつて軸方向の
所定の加圧力が積層体に付与されているために従
来のように他の平型半導体素子や放熱フイン等の
構成部品が組立体から脱落することなく、したが
つて再組立に要する労力の軽減および時間の短縮
を図ることができる。
Since the present invention is constructed as described above, flat semiconductor elements having a malfunction can be easily replaced at the installation site of a semiconductor stack. In other words, the pressure applied to the laminate is made proportional to the displacement due to the tightening of the sub-bolts, and this can be visually confirmed by means of display marks, etc., so there is no need to use other measuring instruments, gauges, etc., or a pressure press, etc. To accurately and easily maintain a specified pressing force without using it, and also to eliminate the inconvenience of transporting a heavy pressing press to an installation site. In addition, when replacing a flat semiconductor element, a predetermined pressure force in the axial direction is applied to the laminate by the coil spring of the alignment device. Components do not fall off from the assembly, thus reducing the labor and time required for reassembly.
第1図は本発明の一実施例を示す半導体スタツ
クであつて同図Aはその平面図、同図Bはその正
面図、同図Cはその右側面図、第2図は上記半導
体スタツクにおける調芯装置部分を示す図であつ
て同図Aは加圧力を付与していない状態の拡大断
面図、同図Bは所定の加圧力を付与した状態の拡
大断面図、第3図は規定加圧力表示部の他の実施
例を説明するための一部を断面とした正面図、第
4図は従来の半導体スタツクの一例を示す正面図
である。
1a,1b……支持板、2……主ボルト、8…
…平型半導体素子、9……放熱フイン、10a,
10b……絶縁スペーサ、15……加圧板、18
……幅ボルト、19……皿ばね、130……調芯
装置、131……凹面、132……凸面、13
3,134……調芯部材、135……コイルば
ね。
FIG. 1 shows a semiconductor stack showing an embodiment of the present invention, in which FIG. A is a plan view thereof, FIG. B is a front view thereof, FIG. C is a right side view thereof, and FIG. Figure 3 is an enlarged cross-sectional view of the aligning device, with Figure A being an enlarged cross-sectional view with no pressure applied, Figure B being an enlarged cross-sectional view with a predetermined pressure being applied, and Figure 3 being an enlarged cross-sectional view with a predetermined pressure applied. FIG. 4 is a partially cross-sectional front view for explaining another embodiment of the pressure display section, and FIG. 4 is a front view showing an example of a conventional semiconductor stack. 1a, 1b...Support plate, 2...Main bolt, 8...
... Flat semiconductor element, 9 ... Heat dissipation fin, 10a,
10b... Insulating spacer, 15... Pressure plate, 18
... Width bolt, 19 ... Belleville spring, 130 ... Alignment device, 131 ... Concave surface, 132 ... Convex surface, 13
3,134... Aligning member, 135... Coil spring.
Claims (1)
板間に平型半導体素子と放熱フインとの積層体を
介在させた半導体装置において、互いに相補形状
をなす凹面と凸面とが対向配置された2個の調芯
部材の外周部に対向配置の溝を設け、該溝内にコ
イルバネが内蔵され、かつ、一方の調芯部材の裏
面に当接する加圧板がセンタピンによつて当該調
芯部材に仮固定されて成る調芯装置を備え、該調
芯装置を介して前記平型半導体素子と放熱フイン
との積層体に所定の加圧力を付与するための副ボ
ルトを前記支持板の一方に設けたことを特徴とす
る半導体装置。1. In a semiconductor device in which a main bolt is inserted between a pair of support plates and a laminate of a flat semiconductor element and a heat dissipation fin is interposed between the support plates, a concave surface and a convex surface having mutually complementary shapes are arranged opposite to each other. Grooves are provided in the outer peripheries of the two alignment members to face each other, and a coil spring is built in the grooves, and a pressure plate that comes into contact with the back surface of one of the alignment members is moved by a center pin to the centering member. an alignment device temporarily fixed to the support plate, and a secondary bolt for applying a predetermined pressing force to the laminate of the flat semiconductor element and the heat dissipation fin through the alignment device, on one side of the support plate. A semiconductor device characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59113212A JPS60257552A (en) | 1984-06-04 | 1984-06-04 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59113212A JPS60257552A (en) | 1984-06-04 | 1984-06-04 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60257552A JPS60257552A (en) | 1985-12-19 |
| JPH0329183B2 true JPH0329183B2 (en) | 1991-04-23 |
Family
ID=14606402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59113212A Granted JPS60257552A (en) | 1984-06-04 | 1984-06-04 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60257552A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090108441A1 (en) * | 2007-10-31 | 2009-04-30 | General Electric Company | Semiconductor clamp system |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51109776A (en) * | 1975-03-24 | 1976-09-28 | Hitachi Ltd | HIRAGATASEIRYUSOSHINO KAATSUSOCHI |
| JPS626701Y2 (en) * | 1980-12-15 | 1987-02-16 | ||
| JPH0214203Y2 (en) * | 1980-12-15 | 1990-04-18 |
-
1984
- 1984-06-04 JP JP59113212A patent/JPS60257552A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60257552A (en) | 1985-12-19 |
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| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |