JPH0329535B2 - - Google Patents

Description

Detailed Description of the Invention [Industrial Application Field] The present invention is applicable to a workpiece having a reference plane, such as when processing a surface of a microelectrode formed on a silicon diode parallel to a substrate. The present invention relates to a machine tool that processes parallel to the reference plane.

[Prior Art] Conventionally, in a machine tool that processes a minute part of a workpiece parallel to a reference plane of the workpiece, in order to improve the parallelism described above, it is necessary to increase the accuracy of the reference plane and to Each was individually devised to improve surface accuracy.

[Problems to be Solved by the Invention] Even if the precision of the reference surface and the precision of the machined surface are improved to the utmost limit, it is impossible with the current state of technology to completely reduce the error to zero.

Therefore, from the viewpoint of "parallelism of the processed surface with respect to the reference surface", the reference surface error and the processed surface error appear as an addition. Since the above addition means vector sum, they may cancel by chance, or they may overlap and become larger. However, when looking at this from a quality control perspective, we cannot expect that they will cancel each other out by chance, but we must deal with the worst-case scenario in which they overlap.

The present invention was made in view of the above circumstances, and
If there is an actual reference plane on the surface of the workpiece, the axis of the main shaft that supports the cutter of the machine tool should be in a predetermined attitude (generally perpendicular) to the reference plane of the workpiece, not to the table. It is an object of the present invention to provide a machine tool equipped with a correction function that can prevent addition of standard surface errors. The actual reference surface in the case where the surface has an actual reference surface is not the reference surface assumed on the design drawing, but is the surface of the actual member and is the surface that is used as the reference for processing. I mean it. However, when the device of the present invention is applied, it is also possible to control the actual reference plane to match the designed reference plane.

[Means for Solving the Problems] In order to achieve the above object, the machine tool of the present invention has a bed and a cutter attached to a rotationally driven main shaft which is placed at a machining position set at one end of the bed. a processing section that is held; a measurement section that is placed at a measurement position set at the other end of the bed and has at least three measurement sensors arranged at predetermined intervals; and a guide surface formed on the bed. At least three sensors corresponding to the at least three measurement sensors are arranged to reciprocate between the processing position and the measurement position along the line, and are arranged to reciprocate between the processing position and the measurement position, and are arranged to correct the inclination of the mounting surface on which the workpiece is placed. The present invention is characterized by comprising: a table equipped with minute displacement means;

[Function] According to the above configuration, the workpiece is placed on the table and moved to the measurement section, and the measurement section measures the inclination direction and inclination angle of the reference surface using at least three sensors. The position of the workpiece on the table is corrected using at least three micro-displacement means to make the reference plane and the machining surface parallel, and the table is moved to the machining section for machining (finishing). ), the error of the actual reference plane will not be included in the parallelism related to machining accuracy.

[Example] Fig. 1 is a front view of an example of a machine tool configured to correct table inclination by applying the present invention, and Fig. 2 is a partially cutaway detailed view of the vicinity of the part shown in Fig. 1. be.

In the embodiment shown in this figure, the left half is a processing section, and the right half is a measurement section. However, the table 8 and table base 7 are driven on the guide surface 12 of the bed 1 as indicated by arrows A and B, and reciprocate between the processing section and the measurement section. 8 drawn with a solid line represents the table position in the processing section, and 8' drawn with a chain line represents the table position in the measurement section.

A column 2 of a processing section is installed on a bed 1 and supports a spindle head 3 via a guide surface 16. The main shaft 4 is rotatably driven by a main shaft motor 6, and has a cutter 5 attached to its tip.

In this embodiment, the main shaft 4 is arranged vertically, and the cutting edge of the cutter 5 rotates within a horizontal plane. This horizontal plane is the machining surface in this example, and the spindle head 3
It moves vertically in parallel with the vertical movement of . 9 is a workpiece fixed on the table 8.

On the other hand, a measurement column 11 is installed on the bed 1 to support the measurement head 10. This measurement head 10 is provided with three minute displacement measurement sensors 13.

Since at least three measurement sensors are arranged on the table in the machine tool of the present invention, it is possible to measure the inclination of the reference plane of the surface of the workpiece 9' on the table 8'.

In this embodiment, three
The micro displacement measurement sensor 13 is configured to measure the vector of the normal to the reference plane.

As shown in FIG. 2, the table base 7 and the table 8 are tightened with bolts 15 via a piezo actuator 14. When a voltage is applied to the piezo actuator 14, the piezo actuator 14 expands and contracts in the vertical direction, and the bolt 1
5 is elastically expanded and contracted. By intervening and installing a plurality of such piezo actuators 14, the inclination (inclination direction and inclination angle) of the table 8 with respect to the table base 7 can be arbitrarily controlled. In this example, three piezo actuators 14 are provided.

When implementing the present invention, control is facilitated if the number of measurement sensors 13 and piezo actuators 14 are the same (however, three or more each) and arranged in a similar relationship to each other.

Further, instead of the piezo actuator 14, a wedge member, a DC motor for driving the wedge member, and a transmission member may be provided to control the inclination of the table 8.

By using the machine tool of this example configured as described above, a specific minute portion (for example, an electrode surface) is placed on the reference surface based on the surface that forms most of the surface of the workpiece (workpiece 9). FIG. 3 shows a flowchart of an example of cutting with the cutter 5 in parallel with the cutter 5.

When machining is started in step a, a workpiece (workpiece 9) is first set on the table 8 (step b). The above table 8 is moved to the measuring section as indicated by arrow B and set at the 8' position (step c), and the normal vector of the workpiece surface is measured (step d).
That is, the inclination direction and inclination angle of the reference plane that occupies most of the workpiece surface are measured.

Next, the table 8 is moved to the machining section as indicated by arrow A (step e), and first rough machining is performed (step f).

After the rough machining, the table 8 is moved to the measuring section again (step g), an accuracy check is performed (step h), and the normal vector of the reference surface is measured (step h) unless the table passes the inspection standard. i) actuate the piezo actuator 14 (FIG. 2) to correct the inclination of the table 8' (step j), and move the table to the processing section (step k);
Finishing is performed (step 1).

[Effects of the Invention] As explained above, when the present invention is applied, when there is an actual reference plane on the surface of the workpiece, the axis of the main shaft that supports the cutter of the machine tool is aligned not with respect to the table. This has an excellent practical effect in that it allows the workpiece to have a predetermined attitude (generally perpendicular) to the reference plane and prevents addition of reference plane errors.

[Brief explanation of the drawing]

FIG. 1 is a front view of an example of a machine tool configured to correct the inclination of a table by applying the present invention, and FIG. 2 is a partially cutaway detailed view of the vicinity of the portion shown in FIG. FIG. 3 is a flow diagram showing an example of use of the above embodiment. 7...table base, 8...table, 9...
...Workpiece, 13...Minute displacement measurement sensor.

Claims (1)

[Scope of Claims] 1. A bed, a processing section that is arranged at a processing position set at one end of the bed and has a cutter held on a rotationally driven main shaft, and a measurement section set at the other end of the bed. a measurement unit arranged at a position and having at least three measurement sensors arranged at predetermined intervals; and a measurement unit configured to reciprocate between the processing position and the measurement position along a guide surface formed on the bed. and a table provided with at least three micro-displacement means corresponding to the at least three measurement sensors in order to correct the inclination of the mounting surface on which the workpiece is placed. A machine tool with a table tilt correction type.