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JPH0332740B2 - - Google Patents
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JPH0332740B2 - - Google Patents

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Publication number
JPH0332740B2
JPH0332740B2 JP56091179A JP9117981A JPH0332740B2 JP H0332740 B2 JPH0332740 B2 JP H0332740B2 JP 56091179 A JP56091179 A JP 56091179A JP 9117981 A JP9117981 A JP 9117981A JP H0332740 B2 JPH0332740 B2 JP H0332740B2
Authority
JP
Japan
Prior art keywords
sensor
combustion gas
equivalent composition
manufacturing
indicating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56091179A
Other languages
Japanese (ja)
Other versions
JPS57204446A (en
Inventor
Satoshi Sekido
Koichi Tachibana
Yoshito Ninomya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56091179A priority Critical patent/JPS57204446A/en
Priority to EP81305969A priority patent/EP0055104B1/en
Priority to DE8181305969T priority patent/DE3174435D1/en
Publication of JPS57204446A publication Critical patent/JPS57204446A/en
Priority to US06/741,209 priority patent/US4601883A/en
Publication of JPH0332740B2 publication Critical patent/JPH0332740B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Fuel Cell (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Description

【発明の詳細な説明】 本発明は燃焼ガスの当量組成を指示するセンサ
の製造方法に関し、NOx、SOx、O2などの酸化性
ガスと炭化水素、CO、アルコール、H2などの還
元性ガス(燃料)とが混在する雰囲気ガス中で化
学平衡反応(燃焼反応)が速やかに進行する触媒
作用をもち、燃焼の当量ガス組成を境として還元
性ガスが過剰の領域では抵抗が高く、酸化性ガス
が過剰の領域では低い金属導電性を示す応答性の
よい長寿命のセンサが容易に得られるようにする
ことを目的とする。
[Detailed Description of the Invention] The present invention relates to a method for manufacturing a sensor that indicates the equivalent composition of combustion gas, and is capable of reducing oxidizing gases such as NO x , SO x , O 2 and hydrocarbons, CO, alcohol, H 2 and the like. It has a catalytic effect that allows a chemical equilibrium reaction (combustion reaction) to proceed rapidly in an atmospheric gas mixed with a reactive gas (fuel), and has high resistance in a region where reducing gas is excessive at the equivalent gas composition of combustion. It is an object of the present invention to easily obtain a responsive, long-life sensor that exhibits low metal conductivity in a region where oxidizing gas is excessive.

自動車エンジンの空燃比の制御、バーナ燃焼の
空燃比の制御、ガスおよび石油機器の不完全燃焼
防止のための安全装置の動作に、安価で信頼性の
高いセンサが要望されている。これらに対して、
従来、第1図に示すような安定化ジルコニア固体
電解質1の両側にPt電極2を配置し、ガス組成
の変化によつて両電極2の間に発生する起電力が
変化する酸素濃度検出センサが市販されている。
なお、第1図において、3はPt膜リード、4は
多孔質Al2O3の保護膜である。このセンサは、酸
化性ガスと還元性ガスが混在する酸欠状態の燃焼
排気ガスのようなガスに曝らされると電極のPt
上で化学平衡反応が速やかに進行し、両者のガス
の燃焼の当量点を境として雰囲気ガス中の酸素分
圧が大きく変るので起電力も大きく変化する。し
かし、電極に多量のPtを用いることと形状が複
雑であるために価格が高い欠点があつた。
There is a need for inexpensive and highly reliable sensors for controlling the air-fuel ratio of automobile engines, controlling the air-fuel ratio of burner combustion, and operating safety devices for preventing incomplete combustion in gas and petroleum equipment. For these,
Conventionally, there has been an oxygen concentration detection sensor in which Pt electrodes 2 are arranged on both sides of a stabilized zirconia solid electrolyte 1 as shown in Fig. 1, and the electromotive force generated between the two electrodes 2 changes as the gas composition changes. It is commercially available.
In FIG. 1, 3 is a Pt film lead, and 4 is a porous Al 2 O 3 protective film. When this sensor is exposed to a gas such as oxygen-deficient combustion exhaust gas containing a mixture of oxidizing and reducing gases, the Pt of the electrode
The chemical equilibrium reaction proceeds rapidly, and the partial pressure of oxygen in the atmospheric gas changes greatly after reaching the equivalence point of combustion of both gases, resulting in a large change in the electromotive force. However, it had the disadvantage of being expensive due to the use of a large amount of Pt in the electrodes and the complicated shape.

一方、SnO2、TiO2とかMgCoO4でセンサ基体
を構成した抵抗変化を利用する酸素濃度検出セン
サが提案されている。このセンサはSnO2、TiO
とかMgCoO4自身に燃焼触媒としての作用がほと
んどないから、高価な貴金属触媒を別に加えない
と燃焼の当量点を境とするシヤープな抵抗変化が
得られない欠点があり、また、還元性の高温ガス
に曝らすと成分変化を起して再現性が悪くなる欠
点を有していた。
On the other hand, an oxygen concentration detection sensor has been proposed that utilizes resistance change and has a sensor base made of SnO 2 , TiO 2 or MgCoO 4 . This sensor uses SnO 2 , TiO
Since MgCoO 4 itself has almost no action as a combustion catalyst, it has the disadvantage of not being able to obtain a sharp change in resistance across the equivalence point of combustion unless an expensive precious metal catalyst is added separately. It has the disadvantage that when exposed to gas, the components change, resulting in poor reproducibility.

本発明は安価な材料でセンサ基体を構成でき、
かつ燃焼触媒の作用を示し、酸化性ガス中では極
めて低い抵抗を示すが、還元性ガス雰囲気では大
きな抵抗を示すもので、従来の欠点を解消すると
ともに、熱起電力素子のような低出力の電源に直
列に挿入接続して安全弁を動作させることも可能
にするものである。
The present invention allows the sensor base to be constructed from inexpensive materials,
It exhibits the action of a combustion catalyst, exhibiting extremely low resistance in oxidizing gases, but high resistance in reducing gas atmospheres, eliminating the drawbacks of conventional devices and improving low-output devices such as thermoelectromotive elements. It also makes it possible to operate a safety valve by inserting and connecting it in series to a power source.

なお、本発明のものに近い組成のペロブスカイ
ト化合物材料を用いたセンサで空気中に含まれる
CO、炭化水素、アルコール、プロパンガスなど
のガスの濃度を測定するものが提案されている
が、本発明の対象とするガス組成より遥かに大き
な酸素分圧の領域での変化を利用するものであ
り、その動作機構は通常の酸化物半導体を用いる
ガスセンサと何ら変るものでなく、抵抗Rとガス
濃度Cとの関係も logR∝±logC のように連続的に変ることを利用するものであ
る。これらのうち、本発明の組成に近い、例えば
BサイトにCoを有するものは、化学平衡反応の
触媒作用を有するので、本発明と同様の動作をす
る。しかし、これらは還元性ガス過剰の雰囲気に
曝らされると、再び酸化性ガス過剰の雰囲気に戻
しても元の低い抵抗値を示さなくなつたり、長時
間の曝露によつて構造破壊も起つたりしていた。
In addition, a sensor using a perovskite compound material with a composition similar to that of the present invention is used to detect particles contained in the air.
Methods that measure the concentration of gases such as CO, hydrocarbons, alcohol, and propane gas have been proposed, but none utilize changes in the oxygen partial pressure range, which is much larger than the gas composition targeted by the present invention. The operating mechanism is no different from a gas sensor using a normal oxide semiconductor, and it takes advantage of the fact that the relationship between resistance R and gas concentration C changes continuously as logR∝±logC. Among these, those having a composition similar to that of the present invention, for example those having Co at the B site, have a catalytic effect for chemical equilibrium reactions, and thus operate in the same manner as the present invention. However, if these materials are exposed to an atmosphere with an excess of reducing gases, they may no longer show the original low resistance value even when returned to an atmosphere with an excess of oxidizing gases, or structural damage may occur due to long-term exposure. I was feeling tired.

本発明は、感応体用材料としてLnCoO3(Ln:
La〜Ndまでの第1希土類元素)なる化合物が燃
焼の当量ガス組成の所を境にして抵抗が著しく変
ることを見出し、さらにLnCoO3のBサイトのCo
の一部をFe、Mn、VおよびTiよりなるグループ
のなかから選ばれた少なくとも1種の元素で、ま
たAサイトのLnをCa、Sr、およびBaよりなるグ
ループのなかより選ばれた少なくとも一種の元素
でそれぞれ置換することにより得られた化合物が
還元性ガス過剰の際に起るこのような欠点の克服
と酸化性ガス過剰の領域で抵抗を極端に小さくす
ることが出来ることを見出したことに基ずく。
The present invention uses LnCoO 3 (Ln:
We discovered that the resistance of compounds consisting of the first rare earth elements (from La to Nd) changes markedly at the combustion equivalent gas composition, and that the resistance of Co at the B site of LnCoO 3
A part of the A site is at least one element selected from the group consisting of Fe, Mn, V, and Ti, and Ln at the A site is at least one element selected from the group consisting of Ca, Sr, and Ba. It was discovered that the compounds obtained by substituting each element with the above elements can overcome these drawbacks that occur when there is an excess of reducing gases, and that the resistance can be made extremely small in the region where there is an excess of oxidizing gases. Based on.

以下にまず本発明の製造方法により製造するセ
ンサを図面に用いて説明する。第2図a,bは、
本発明の実施例において製造されたペレツト構造
のセンサを示したものである。図において、11
はセンサ基体である。原材料として感応体用化合
物の各金属元素の酸化物粉末を出発原料としても
よいが、反応をできるだけ低温で行えば、それだ
けセンサとして比表面積の大きいものが得られ、
応答性が良くなるところから、酢酸塩、シユウ酸
塩、硝酸塩のように水に溶け易い塩を所定量水に
溶解し、回転エバポレータ中で撹拌、蒸発を行な
つた粉末を空気中で約450℃に加熱し熱分解酸化
した後加圧成型し、空気中850〜950℃で5〜10hr
仮焼成し反応せしめた粉末を用いる。なお感応体
用化合物における金属元素のうちVおよびTiは
初めから酸化物粉末を用いる。もし、混合酸化物
を出発原料として用いると仮焼成は300℃ほど高
温にしないと単一生成物が得られず原料粉末が粗
大となる。このようにして得られた粉末にメチル
セルローズが20〜40%になるよう溶解した水溶液
を加え、よく混合し、50℃で加熱して水分混入率
が45容量%以下になるよう水分を取除いた粉末を
成型し、1000〜1200℃で2hr加熱し焼成したもの
である。なおここで水分混入率が45容量%を越え
ると焼成において粗大粒子が生ずるおそれがあり
好ましくない。12はセンサ基体11にプレス成
型時に埋め込んだ電極とリードを兼ねるPd族あ
るいはPt族とAgあるいはCuとの合金からなるセ
ンサリードである。センサ基体11から容易に抜
けることを防ぐため、先端を平らにつぶしたもの
を用いる。13はセンサリード12に電気的に接
続した耐熱性金属からなるリードである。14は
リード13を貫通させたセラミツク管である。1
5はリード13をセラミツク管に固定するための
セラミツクセメントである。
First, a sensor manufactured by the manufacturing method of the present invention will be described below with reference to the drawings. Figure 2 a and b are
1 shows a pellet structure sensor manufactured in an embodiment of the present invention. In the figure, 11
is the sensor base. As a raw material, oxide powder of each metal element of the compound for the sensor may be used as a starting material, but if the reaction is carried out at as low a temperature as possible, a sensor with a large specific surface area can be obtained.
In order to improve responsiveness, a predetermined amount of water-soluble salts such as acetates, oxalates, and nitrates are dissolved in water, and the powder is stirred and evaporated in a rotary evaporator for approximately 450 min in air. After heating to ℃ and pyrolysis oxidation, pressure molding and molding in air at 850 to 950℃ for 5 to 10 hours.
A powder that has been pre-calcined and reacted is used. Note that for V and Ti among the metal elements in the compound for the reactor, oxide powders are used from the beginning. If a mixed oxide is used as a starting material, a single product cannot be obtained and the raw material powder will be coarse unless calcined at a high temperature of about 300°C. Add an aqueous solution containing 20 to 40% methylcellulose to the powder thus obtained, mix well, and heat at 50°C to remove water so that the water content is 45% by volume or less. The powder was molded and fired at 1000-1200°C for 2 hours. It should be noted that if the water content exceeds 45% by volume, coarse particles may be produced during firing, which is not preferable. Reference numeral 12 denotes a sensor lead made of an alloy of Pd group or Pt group and Ag or Cu, which is embedded in the sensor base 11 during press molding and serves as both an electrode and a lead. In order to prevent it from easily coming off from the sensor base 11, a flattened tip is used. Reference numeral 13 denotes a lead made of a heat-resistant metal and electrically connected to the sensor lead 12. 14 is a ceramic tube through which the lead 13 is passed. 1
5 is a ceramic cement for fixing the lead 13 to the ceramic tube.

第3図a,bは、本発明の他の実施例において
製造されたセンサを示す。第2図の構造との相違
は電極とリードを兼ねる合金線12の埋め込み方
向が異なることにある。同図aはセンサを上部か
ら見た図であり、bは側面図である。その他の記
号は第2図の説明のものと同じである。
Figures 3a and 3b show a sensor manufactured in another embodiment of the invention. The difference from the structure shown in FIG. 2 is that the direction of embedding the alloy wire 12, which also serves as an electrode and a lead, is different. Figure a is a view of the sensor from above, and figure b is a side view. Other symbols are the same as those explained in FIG.

次に特性の面について説明する。ここで、第2
図、第3図の構造の違いによる特性上の大きな差
はないので、第3図の構造のもので代表させて説
明する。なお、この場合センサ径は4mmφ、厚さ
2.5mm、Pd線外径0.3mmφ、線の中心間距離1.0mm
である。
Next, characteristics will be explained. Here, the second
Since there is no major difference in characteristics between the structures shown in FIG. 3 and FIG. 3, the structure shown in FIG. 3 will be used as a representative for explanation. In this case, the sensor diameter is 4mmφ and the thickness
2.5mm, Pd wire outer diameter 0.3mmφ, distance between wire centers 1.0mm
It is.

センサを850℃に保つた管状炉の中に入れ、初
めに100PPmの酸素を含んだN2を送入し、次いで
100ppmのCOを含んだN2に切替えるサイクルを
繰返した。各ガスの通気時間は1hrである。
The sensor was placed in a tube furnace maintained at 850℃, and N2 containing 100PPm of oxygen was first introduced, and then
The cycle of switching to N2 containing 100 ppm CO was repeated. The ventilation time for each gas is 1 hr.

還元性ガス過剰の雰囲気に曝されることによる
抵抗の増大は、電極間の電流通過路のすべてに行
なわれないと急瞬に行われない。それにはセンサ
基体焼結体からなる通過路が細いものであるか、
あるいは細い部分が存在することが必要と思われ
る。La0.4Sr0.6Co0.8Fe0.2O3を例にとり、その製造
法の相違による応答性の相違を説明する。
An increase in resistance due to exposure to an atmosphere containing an excess of reducing gas will not occur instantaneously unless all of the current paths between the electrodes are exposed. For this purpose, the passageway made of the sintered body of the sensor must be narrow.
Alternatively, it seems necessary that a thin portion exists. Using La 0.4 Sr 0.6 Co 0.8 Fe 0.2 O 3 as an example, differences in responsiveness due to differences in manufacturing methods will be explained.

第4図は原料をすべて酸化物粉末を用いた場合
(線47)と水溶液混合を行なつた場合(線48)
の反応温度と応答時間との関係を示したものであ
る。メチルセルローズはすべて30重量%で水に溶
かして添加し、焼成温度は1100℃一定とした。い
ずれの試料とも応答時間が最も速くなる反応温度
が存在し、それ以下では、単一ペルブスカイト構
造が得られず、また、反応温度が高くなると粒子
が大きくなることが認められた。水溶液混合の効
果は成分元素の混合が均一に行われるので反応温
度が低くともペルブスカイト単一相が出来やす
く、粒子の粗大化が防止できることにあると考え
られる。
Figure 4 shows the case where all oxide powders are used as raw materials (line 47) and the case where aqueous solution mixing is performed (line 48).
This figure shows the relationship between reaction temperature and response time. Methyl cellulose was added as a 30% by weight solution in water, and the firing temperature was kept constant at 1100°C. For all samples, there is a reaction temperature at which the response time is the fastest, below which a single pervskite structure cannot be obtained, and it was observed that as the reaction temperature increases, the particles become larger. It is thought that the effect of aqueous solution mixing is that since the component elements are mixed uniformly, a pervskite single phase is easily formed even at a low reaction temperature, and coarsening of the particles can be prevented.

第5図には、メチルセルローズ40重量%を水に
溶かすことなく粉末で混合したもの(線49)と
水に溶かして加えたもの(線53)との比較を示
している。なお同図にはメチルセルローズの添加
量の効果をいずれも水に溶かした場合について示
している(線50〜54)。原料粉末は、いずれ
も水溶液混合したものを900℃で反応させたもの
である。メチルセルローズを水に溶いた方が応答
性がすぐれているが、水に溶いた方が粒子の周囲
にメチルセルローズが均一につき均一焼結が得ら
れるためと考えている。メチルセルローズの最適
添加量は20〜40重量%(線51〜53)にあり、
それ以下(添加量10重量%、線50)で悪くなる
のは基体の気孔率が小さくなり、外部からのガス
の拡散が阻害されるためであり、また、それ以上
(添加量50重量%、線54)で悪くなるのは気孔
率が大きくなり過ぎて焼結が阻害されるためと考
えられる。
FIG. 5 shows a comparison between 40% by weight of methyl cellulose mixed as a powder without dissolving it in water (line 49) and adding it dissolved in water (line 53). The same figure shows the effect of the amount of methylcellulose added when it is dissolved in water (lines 50 to 54). The raw material powders were all mixed with an aqueous solution and reacted at 900°C. The responsiveness is better when methylcellulose is dissolved in water, but we think this is because methylcellulose is more uniform around the particles and uniform sintering can be achieved when it is dissolved in water. The optimum amount of methylcellulose added is between 20 and 40% by weight (lines 51-53).
Below that level (addition amount: 10% by weight, line 50), the problem worsens because the porosity of the base material decreases, inhibiting the diffusion of gas from the outside; The reason why the line 54) deteriorates is considered to be because the porosity becomes too large and sintering is inhibited.

以上のように、本発明は特定金属元素を含む金
属塩の各水溶液を混合する工程があるため、出発
物質としている成分元素の混合が均一に行われ、
反応温度が低くても、ペロプスカイト単一相がで
き易く粒子の粗大化が防止でき、センサの比表面
積を大きくできるので、センサの応答性が向上で
きる。
As described above, since the present invention includes a step of mixing each aqueous solution of a metal salt containing a specific metal element, the component elements used as starting materials are uniformly mixed,
Even if the reaction temperature is low, a perovskite single phase is easily formed, particles can be prevented from becoming coarse, and the specific surface area of the sensor can be increased, so the responsiveness of the sensor can be improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のセンサの一つである酸素濃度検
出センサの断面図、第2図a,bはそれぞれ本発
明の一実施例において製造されるセンサの正断面
図および側断面図、第3図a,bは本発明の他の
実施例において製造されるセンサの上面図および
側面図、第4図は比較例としての酸化物粉末を用
いた場合と、本発明の実施例としての水溶液混合
を行つた場合のそれぞれについて反応温度と応答
時間との関係図、第5図は同じく本発明の実施例
においてメチルセルローズを水に溶かして原料粉
末と混合した場合の添加量と応答時間との関係を
水に溶かさずに混合したものと比較して示す図で
ある。 11……センサ基体、12……センサリード。
FIG. 1 is a sectional view of an oxygen concentration detection sensor, which is one of the conventional sensors, FIGS. Figures a and b are a top view and a side view of a sensor manufactured in another example of the present invention, and Figure 4 is a comparative example using oxide powder and an aqueous solution mixture as an example of the present invention. Figure 5 shows the relationship between reaction temperature and response time for each case in which methyl cellulose is dissolved in water and mixed with raw material powder in an example of the present invention. FIG. 2 is a diagram showing a comparison with that obtained by mixing without dissolving in water. 11...Sensor base, 12...Sensor lead.

Claims (1)

【特許請求の範囲】 1 LnCoO3のBサイトのCoの一部をFeもしく
はMnの少なくとも1種の元素で、またAサイト
のLnの一部をCa、SrおよびBaからなるグループ
のなかから選ばれた少なくとも1種の元素でそれ
ぞれ置換した化合物を感応体として有し、燃焼ガ
スの当量組成を境にして前記感応体の電気抵抗が
大きく変化する燃焼ガスの当量組成を指示するセ
ンサの製造方法において、前記化合物に含まれる
金属元素を含む金属塩の各水溶液を互いに混合し
熱分解した後、空気中で加熱反応せしめて前記感
応体用の原料粉末を得る工程と、前記原料粉末に
水に溶かしたメチルセルローズを加えて混合し乾
燥してから成型し空気中で1000〜1200℃の温度で
燃成して前記感応体を得る工程を介することを特
徴とする燃焼ガスの当量組成を指示するセンサの
製造方法。 2 空気中で850〜950℃の温度で加熱反応せしめ
ることを特徴とする特許請求の範囲の範囲第1項
記載の燃焼ガスの当量組成を指示するセンサの製
造方法。 3 金属塩が酢酸塩、シユウ酸塩および硝酸塩の
何れかであることを特徴とする特許請求の範囲第
1項記載の燃焼ガスの当量組成を指示するセンサ
の製造方法。 4 原料粉末にメチルセルローズを20〜40重量%
を加えることを特徴とする特許請求の範囲第1項
記載の燃焼ガスの当量組成を指示するセンサの製
造方法。 5 メチルセルローズ混合後の乾燥を水分混入率
が45容量%以下になるよう乾燥することを特徴と
する特許請求の範囲第1項記載の燃焼ガスの当量
組成を指示するセンサの製造方法。
[Claims] 1 Part of Co at the B site of LnCoO 3 is selected from the group consisting of at least one element of Fe or Mn, and a part of Ln at the A site is selected from the group consisting of Ca, Sr and Ba. A method for producing a sensor that has a compound substituted with at least one element, respectively, as a sensitive body, and that indicates the equivalent composition of a combustion gas, such that the electrical resistance of the sensitive body changes greatly with the equivalent composition of the combustion gas as a boundary. a step of mixing each aqueous solution of a metal salt containing a metal element contained in the compound with each other and thermally decomposing the mixture, and then performing a heating reaction in air to obtain a raw material powder for the sensitive body; The equivalent composition of the combustion gas is specified by adding melted methyl cellulose, mixing, drying, molding, and burning in air at a temperature of 1000 to 1200°C to obtain the reactor. How to manufacture the sensor. 2. A method for manufacturing a sensor for indicating the equivalent composition of combustion gas according to claim 1, characterized in that a heating reaction is carried out in air at a temperature of 850 to 950°C. 3. The method for manufacturing a sensor for indicating the equivalent composition of combustion gas according to claim 1, wherein the metal salt is any one of acetate, oxalate, and nitrate. 4 20-40% by weight of methylcellulose in raw material powder
2. A method for manufacturing a sensor for indicating the equivalent composition of combustion gas according to claim 1, characterized in that: 5. The method for manufacturing a sensor for indicating the equivalent composition of combustion gas according to claim 1, characterized in that the methyl cellulose is mixed and then dried so that the water content is 45% by volume or less.
JP56091179A 1980-12-19 1981-06-12 Preparation of sensor indicating equivalent composition of combustion gas Granted JPS57204446A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP56091179A JPS57204446A (en) 1981-06-12 1981-06-12 Preparation of sensor indicating equivalent composition of combustion gas
EP81305969A EP0055104B1 (en) 1980-12-19 1981-12-18 Sensor element and method for fabricating same
DE8181305969T DE3174435D1 (en) 1980-12-19 1981-12-18 Sensor element and method for fabricating same
US06/741,209 US4601883A (en) 1980-12-19 1985-06-05 Sensor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56091179A JPS57204446A (en) 1981-06-12 1981-06-12 Preparation of sensor indicating equivalent composition of combustion gas

Publications (2)

Publication Number Publication Date
JPS57204446A JPS57204446A (en) 1982-12-15
JPH0332740B2 true JPH0332740B2 (en) 1991-05-14

Family

ID=14019224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56091179A Granted JPS57204446A (en) 1980-12-19 1981-06-12 Preparation of sensor indicating equivalent composition of combustion gas

Country Status (1)

Country Link
JP (1) JPS57204446A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60253859A (en) * 1984-05-30 1985-12-14 Doudensei Muki Kagoubutsu Gijutsu Kenkyu Kumiai Gas sensor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329194A (en) * 1976-08-31 1978-03-18 Matsushita Electric Works Ltd Production of combustible gas detecting element
JPS5848057B2 (en) * 1978-01-18 1983-10-26 株式会社東芝 Manufacturing method of gas-sensitive element

Also Published As

Publication number Publication date
JPS57204446A (en) 1982-12-15

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