JPH0333220B2 - - Google Patents
Info
- Publication number
- JPH0333220B2 JPH0333220B2 JP58031406A JP3140683A JPH0333220B2 JP H0333220 B2 JPH0333220 B2 JP H0333220B2 JP 58031406 A JP58031406 A JP 58031406A JP 3140683 A JP3140683 A JP 3140683A JP H0333220 B2 JPH0333220 B2 JP H0333220B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspected
- axis
- rotating mirror
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8812—Diffuse illumination, e.g. "sky"
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Closed-Circuit Television Systems (AREA)
Description
【発明の詳細な説明】
〔技術分野〕
この発明は微妙な正反射角度の調整を必要とす
る表面検査装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a surface inspection device that requires delicate adjustment of the specular reflection angle.
鏡面の研摩状態の検査のように、微妙な正反射
角度の調整を必要とする表面検査は、高精度の位
置決めによりはじめて可能となるものであり、正
確な位置決めのできない被検査物体の場合は微妙
な正反射角度の調整を必要とする表面検査は不可
能であつた。
Surface inspections that require delicate adjustment of the specular reflection angle, such as inspecting the polished state of mirror surfaces, are only possible with highly accurate positioning. Surface inspection requiring precise adjustment of the specular reflection angle was not possible.
この発明は微妙な正反射角度の調整を必要とす
る物体の表面検査を高度の位置決めを必要とせず
に高精度に行うことができる表面検査装置を提供
することを目的とする。
An object of the present invention is to provide a surface inspection device that can perform surface inspection of an object with high accuracy without requiring high-level positioning, which requires delicate adjustment of the specular reflection angle.
この発明の表面検査装置は、表面が平坦な被検
査物体の表面に光を照射する際の投光軸に対して
90度より小さい角度で交差する回転軸に対し、回
転ミラーの反射面が前記回転軸を回転中心とする
回転にかかわらず常に前記被検査物体の方向を向
く角度範囲で前記投光軸と回転軸との交差点を中
心として前記回転軸と直交する面に対して傾斜し
た状態に前記回転ミラーを取り付け、前記回転ミ
ラーの前記回転軸を回転中心とする回転にかかわ
らず前記回転ミラーからの反射光が常に前記被検
査物体の方向を向く角度範囲で前記回転ミラーへ
の入光軸を前記交差点の位置で前記投光軸に対し
て交差させ、前記交差点と前記被検査物体との間
に拡散板を配置した面光源と、この面光源からの
光の前記被検査物体の表面による正反射光を受光
するテレビカメラと、このテレビカメラの出力を
アナログ−デジタル変換するアナログ−デジタル
コンバータと、このアナログ−デジタルコンバー
タの出力を１画面分記憶し記憶内容を前記テレビ
カメラの垂直同期信号毎に更新するフレームメモ
リと、前記テレビカメラの画面中にその中心を挟
んで相対するように少くとも２対のマスクを設定
しこの少くとも２対のマスク内の平均光量を演算
する平均光量演算手段と、前記少くとも２対のマ
スク内の平均光量を対毎に比較し各対の平均光量
がそれぞれほぼ等しくなつたときに前記フレーム
メモリのデータを検査用画像処理回路へ転送させ
る転送制御手段とを備える構成にしたことを特徴
とする。
The surface inspection device of the present invention is directed to a light projection axis when irradiating light onto the surface of an object to be inspected that has a flat surface.
With respect to the rotation axis intersecting at an angle smaller than 90 degrees, the light projection axis and the rotation axis are in an angular range in which the reflective surface of the rotating mirror always faces the direction of the object to be inspected regardless of rotation about the rotation axis. The rotating mirror is installed in a state where the rotating mirror is inclined with respect to a plane orthogonal to the rotating axis with the intersection of the rotating mirror as the center, and the reflected light from the rotating mirror is The axis of light entering the rotary mirror is made to intersect the light projection axis at the intersection within an angular range that always points in the direction of the object to be inspected, and a diffuser plate is provided between the intersection and the object to be inspected. an arranged surface light source; a television camera that receives specular reflection light from the surface light source of the object to be inspected; an analog-to-digital converter that converts the output of the television camera from analog to digital; a frame memory that stores the output of the digital converter for one screen and updates the stored content every time the vertical synchronization signal of the television camera; and at least two pairs of masks arranged opposite to each other across the center of the screen of the television camera. and an average light amount calculating means for calculating the average light amount in the at least two pairs of masks, and comparing the average light amounts in the at least two pairs of masks pair by pair and determining that the average light amounts of each pair are approximately equal. The present invention is characterized in that it is configured to include a transfer control means for transferring the data in the frame memory to the inspection image processing circuit when the frame memory is detected.
このように構成したことにより、被検査物体の
位置決め精度が低くても、照明光の走査により照
明光の被検査物体の表面にする照射角度が被検査
物体およびテレビカメラに対して最適なときに、
すなわち、被検査物体の表面からテレビカメラに
入射する正反射光の光量が画面内で最もバランス
がよいときの画像データに基づいて画像処理され
ることになり、被検査物体の表面検査を高精度で
行うことができる。 With this configuration, even if the positioning accuracy of the object to be inspected is low, scanning the illumination light allows the illumination light to illuminate the surface of the object to be inspected at an optimal angle relative to the object to be inspected and the television camera. ,
In other words, image processing is performed based on image data when the amount of specularly reflected light that enters the television camera from the surface of the object to be inspected is most balanced within the screen, allowing for highly accurate surface inspection of the object to be inspected. It can be done with
この発明の一実施例を第１図ないし第４図に基
づいて説明する。この表面検査装置は、第１図に
示すように、テレビカメラ１と表面が平坦な被検
査物体２とアクリル板等の乳白色の拡散板３とを
角度θ2で正反射する位置に設定し、拡散板３の後
方に反射面が回転軸４ａと直交する面に対して角
度θ1だけ傾斜し第２図Ａに示すように回転する回
転ミラー４を配置し、第２図Ｂに示すようなテレ
ビカメラ１の垂直同期信号に同期してストロボ信
号発生部５から給電することにより第２図Ｃに示
すように垂直同期信号に同期して間欠発光するス
トロボランプ６の光を光フアイバ７を通して拡散
板３と平行に回転ミラー４の反射面の中央に照射
するようにしている。この場合、回転ミラー４
は、被検査物体２の表面に光を照射する際の投光
軸４ｂに対して90度より小さい角度、例えば45度
で交差する回転軸４ａに対し、回転ミラー４の反
射面が回転軸４ａを回転中心とする回転にかかわ
らず常に被検査物体２の方向を向く角度範囲で投
光軸４ｂと回転軸４ａとの交差点を中心として回
転軸４ａと直交する面に対して例えば角度θ1だけ
傾斜した状態に回転ミラー４を取り付けている。 An embodiment of the present invention will be described based on FIGS. 1 to 4. As shown in FIG. 1, this surface inspection device sets a television camera 1, an object to be inspected 2 with a flat surface, and a milky-white diffuser plate 3 such as an acrylic plate at a position that specularly reflects the light at an angle θ 2 . A rotating mirror 4 whose reflective surface is inclined at an angle θ 1 with respect to a plane perpendicular to the rotation axis 4a and rotates as shown in FIG. 2A is arranged behind the diffuser plate 3, and a mirror 4 as shown in FIG. By supplying power from the strobe signal generator 5 in synchronization with the vertical synchronization signal of the television camera 1, the light from the strobe lamp 6, which emits intermittently in synchronization with the vertical synchronization signal, is diffused through the optical fiber 7, as shown in FIG. 2C. The light is irradiated to the center of the reflective surface of the rotating mirror 4 parallel to the plate 3. In this case, rotating mirror 4
In this case, the reflective surface of the rotating mirror 4 is aligned with the rotating axis 4a, which intersects with the projection axis 4b at an angle smaller than 90 degrees, for example, 45 degrees, when irradiating light onto the surface of the object 2 to be inspected. Regardless of the rotation around the rotation center, the angle range is such that it always points in the direction of the object 2 to be inspected, for example, by an angle θ 1 with respect to the plane orthogonal to the rotation axis 4a, with the intersection of the light projection axis 4b and the rotation axis 4a as the center. A rotating mirror 4 is attached in an inclined state.
また、回転ミラー４の入光軸７ａは、回転ミラ
ー４の回転軸４ａを回転中心とする回転にかかわ
らず回転ミラー４からの反射光が常に被検査物体
２の方向を向く角度範囲で投光軸４ｂと回転軸４
ａとの交差点の位置で投光軸４ｂに対して交差さ
せている。その角度は、例えば上記したように、
拡散板３と平行な角度である。また、拡散板３と
回転ミラー４の反射面の中央との距離はl1となつ
ている。 Furthermore, the light incident axis 7a of the rotating mirror 4 projects light within an angular range such that the reflected light from the rotating mirror 4 always points in the direction of the object to be inspected 2, regardless of the rotation of the rotating mirror 4 about the rotating axis 4a. Shaft 4b and rotating shaft 4
It intersects the light projection axis 4b at the intersection with a. For example, as mentioned above, the angle is
This angle is parallel to the diffusion plate 3. Further, the distance between the diffuser plate 3 and the center of the reflective surface of the rotating mirror 4 is l1 .
垂直同期信号に同期して間欠発生するストロボ
ランプ６の光は、光フアイバ７を通つて回転ミラ
ー４の反射面に照射され、回転ミラー４の反射光
は円を描きながら拡散散板３を照射することにな
る。このときの拡散板３上での反射光の描く円の
半径はl1・tan2θ1となる。拡散板３を透過する光
はその内部で拡散され全方向に拡がり、この拡散
板３は、前記の回転ミラー４、ストロボ信号発生
部５、ストロボランプ６および光フアイバ７等と
ともに面光源を構成することとなる。 The light from the strobe lamp 6, which is generated intermittently in synchronization with the vertical synchronization signal, passes through the optical fiber 7 and illuminates the reflective surface of the rotating mirror 4, and the reflected light from the rotating mirror 4 illuminates the diffuser plate 3 while drawing a circle. I will do it. At this time, the radius of the circle drawn by the reflected light on the diffuser plate 3 is l 1 ·tan2θ 1 . Light passing through the diffuser plate 3 is diffused inside and spreads in all directions, and the diffuser plate 3 constitutes a surface light source together with the rotating mirror 4, the strobe signal generator 5, the strobe lamp 6, the optical fiber 7, etc. That will happen.
拡散板３を通して被検査物体２の表面に照明さ
れた光のうち角度θ2に相当する正反射光だけがテ
レビカメラ１に入力される。回転ミラー４が回転
してその反射光が拡散板３上で円を描くことによ
り被検査物体２の表面に入射する光の角度が時々
刻々変化し、被検査物体３の表面の各部分からテ
レビカメラ１に入射する正反射光の光量が変化す
ることになる。 Of the light illuminated on the surface of the object to be inspected 2 through the diffuser plate 3, only specularly reflected light corresponding to the angle θ 2 is input to the television camera 1. As the rotating mirror 4 rotates and the reflected light draws a circle on the diffuser plate 3, the angle of the light incident on the surface of the object to be inspected 2 changes moment by moment, and the angle of the light incident on the surface of the object to be inspected 3 changes from moment to moment. The amount of specularly reflected light that enters the camera 1 changes.
一方、第３図に示すように、テレビカメラ１は
被検査物体２の表面からの正反射光を受光して画
像信号を出力し、この画像信号は、Ａ−Ｄコンバ
ータ８でアナログ−デジタル変換され、１画面分
のデジタル値がフレームメモリ９に記憶される。
このデジタル値は垂直同期信号毎に更新される。
また、平均光量演算回路１０，１２は、画面が１
フイールド走査される間にテレビカメラ１により
撮像されるテレビ画面Ａ（第４図）中に設定した
マスクM1，M3内の画像のデジタル値を平均する
ことによりマスクM1，M3内の画像の平均光量
VA，VCをそれぞれ求め、平均光量演算回路１１，
１３は、画面が１フイールド走査される間にテレ
ビ画面中においてその中心を挟んでマスクM1，
M3と相対向する位置に設定したマスクM2，M4
内の画像のデジタル値を平均することによりマス
クM2，M4内の画像の平均光量VB，VDをそれぞ
れ求めるようになつている。マスクM1〜M4の設
定はＡ−Ｄコンバータ８のサンプリングクロツク
および水平同期パルスをそれぞれカウントし、カ
ウント値に基づいてＡ−Ｄコンバータ８の出力ゲ
ートを開閉することにより簡単に行える。 On the other hand, as shown in FIG. 3, the television camera 1 receives specularly reflected light from the surface of the object to be inspected 2 and outputs an image signal, and this image signal is converted from analog to digital by an A-D converter 8. The digital values for one screen are stored in the frame memory 9.
This digital value is updated every vertical synchronization signal.
Further, the average light amount calculation circuits 10 and 12 are configured so that the screen is 1
By averaging the digital values of the images within the masks M 1 and M 3 set on the television screen A (Fig. 4) captured by the television camera 1 during field scanning, the images within the masks M 1 and M 3 are calculated. Average light intensity of the image
After determining V A and V C , the average light amount calculation circuit 11,
13, masks M 1 ,
Masks M 2 and M 4 set in positions opposite to M 3
The average light amounts V B and V D of the images in the masks M 2 and M 4 are calculated by averaging the digital values of the images in the masks M 2 and M 4, respectively. Masks M 1 to M 4 can be easily set by counting the sampling clock and horizontal synchronizing pulse of the AD converter 8, respectively, and opening and closing the output gate of the AD converter 8 based on the count values.
割算回路１４は、各フイールドにおいて平均光
量VBを平均光量VAで割つて割算結果を求め、割
算回路１５は平均光量VDを平均光量VCで割つて
割算結果a2を求めるようになつている。比較回路
１６は割算結果a1，a2がともにほぼ１となつたと
きにデータ処理受付回路１７を制御してフレーム
メモリ９にそのときに記憶されているデータを検
査用画像処理回路へ転送するようになつている。 The division circuit 14 divides the average light amount V B by the average light amount V A in each field to obtain the division result, and the division circuit 15 divides the average light amount V D by the average light amount V C to obtain the division result a 2 . I'm starting to look for it. When the division results a 1 and a 2 are both approximately 1, the comparison circuit 16 controls the data processing reception circuit 17 to transfer the data stored at that time in the frame memory 9 to the inspection image processing circuit. I'm starting to do that.
なお、第２図には各フイールド期間における割
算回路a1，a2の概略値を合わせて示しており、回
転ミラー４の界転角度が120度ないし180度のとき
が最適な状態であることを示している。 In addition, FIG. 2 also shows the approximate values of the divider circuits a 1 and a 2 for each field period, and the optimum state is when the rotation angle of the rotating mirror 4 is 120 degrees to 180 degrees. It is shown that.
このように、この実施例は、ストロボ光を回転
軸に対してθ1の角度をもつた回転ミラー４で反射
させ、その反射光で拡散板３を照明し、拡散板３
からの光で被検査物体２の表面を照明してテレビ
カメラ１でその正反射光を受光し、テレビカメラ
１の画面内の４個のマスクM1〜M4の平均光量を
監視するようにしたため、被検査物体２の表面の
撮像領域の上下左右でテレビカメラ１に対する正
反射光量がバランスしている状態で画像処理を行
うことができ、被検査物体２の位置決め精度がそ
れほど高くなくても検査を精度良く行える。 In this way, in this embodiment, the strobe light is reflected by the rotating mirror 4 having an angle of θ 1 with respect to the rotation axis, and the diffuser plate 3 is illuminated with the reflected light.
The surface of the object to be inspected 2 is illuminated with light, the specularly reflected light is received by the television camera 1, and the average light intensity of the four masks M1 to M4 within the screen of the television camera 1 is monitored. Therefore, image processing can be performed in a state where the amount of specularly reflected light to the television camera 1 is balanced at the top, bottom, left and right of the imaging area on the surface of the object to be inspected 2, and even if the positioning accuracy of the object to be inspected 2 is not very high. Inspections can be performed with high accuracy.
なお、実施例ではストロボ光源を用いたが、連
続発光する光源を用いてもよい。 Note that although a strobe light source is used in the embodiment, a light source that emits light continuously may also be used.
以上のように、この発明の表面検査装置によれ
ば、被検査物体の位置決め精度が低くても、照明
光の走査により、照明光の被検査物体の表面に対
する照射角度が被検査物体およびテレビカメラに
対して最適なとき、すなわち被検査物体の表面か
らテレビカメラに入射する正反射光の光量が画面
内で最もバランスがよいときの画像データに基づ
いて画像処理を行うことができ、微妙な正反射角
度の調整を必要とする被検査物体の表面検査を高
精度の位置決めを必要とせずに行うことができ
る。
As described above, according to the surface inspection apparatus of the present invention, even if the positioning accuracy of the object to be inspected is low, by scanning the illumination light, the irradiation angle of the illumination light with respect to the surface of the object to be inspected can be adjusted between the object to be inspected and the television camera. Image processing can be performed based on the image data at the optimum time for the inspection, that is, when the amount of specularly reflected light that enters the TV camera from the surface of the object to be inspected is most well balanced within the screen. Surface inspection of an object to be inspected that requires adjustment of the reflection angle can be performed without requiring highly accurate positioning.
第１図はこの発明の一実施例の光学的な構成
図、第２図Ａは回転ミラーの回転角度を示す説明
図、第２図Ｂは垂直同期信号の波形図、第２図Ｃ
はストロボランプの発光タイミング図、第３図は
実施例の電気的なブロツク図、第４図は画面のマ
スクの説明図である。
１…テレビカメラ、２…被検査物体、３…拡散
板、４…回転ミラー、５…ストロボ信号発生部、
６…ストロボランプ、７…光フアイバ、８…Ａ−
Ｄコンバータ、９…フレームメモリ、１０〜１３
…平均光量演算回路、１４，１５…割算回路、１
６…比較回路、１７…データ処理受付回路。
Fig. 1 is an optical configuration diagram of an embodiment of the present invention, Fig. 2A is an explanatory diagram showing the rotation angle of a rotating mirror, Fig. 2B is a waveform diagram of a vertical synchronization signal, and Fig. 2C
3 is a light emission timing diagram of a strobe lamp, FIG. 3 is an electrical block diagram of the embodiment, and FIG. 4 is an explanatory diagram of a screen mask. DESCRIPTION OF SYMBOLS 1...TV camera, 2...Object to be inspected, 3...Diffusion plate, 4...Rotating mirror, 5...Strobe signal generator,
6... Strobe lamp, 7... Optical fiber, 8... A-
D converter, 9...Frame memory, 10 to 13
...Average light amount calculation circuit, 14, 15...Divide circuit, 1
6... Comparison circuit, 17... Data processing reception circuit.
Claims (1)
る際の投光軸に対して90度より小さい角度で交差
する回転軸に対し、回転ミラーの反射面が前記回
転軸を回転中心とする回転にかかわらず常に前記
被検査物体の方向を向く角度範囲で前記投光軸と
回転軸との交差点を中心として前記回転軸と直交
する面に対して傾斜した状態に前記回転ミラーを
取り付け、前記回転ミラーの前記回転軸を回転中
心とする回転にかかわらず前記回転ミラーからの
反射光が常に前記被検査物体の方向を向く角度範
囲で前記回転ミラーへの入光軸を前記交差点の位
置で前記投光軸に対して交差させ、前記交差点と
前記被検査物体との間に拡散板を配置した面光源
と、この面光源からの光の前記被検査物体の表面
による正反射光を受光するテレビカメラと、この
テレビカメラの出力をアナログ−デジタル変換す
るアナログ−デジタルコンバータと、このアナロ
グ−デジタルコンバータの出力を１画面分記憶し
記憶内容を前記テレビカメラの垂直同期信号毎に
更新するフレームメモリと、前記テレビカメラの
画面中にその中心を挟んで相対するように少くと
も２対のマスクを設定しこの少くとも２対のマス
ク内の平均光量を演算する平均光量演算手段と、
前記少くとも２対のマスク内の平均光量を対毎に
比較し各対の平均光量がそれぞれほぼ等しくなつ
たときに前記フレームメモリのデータを検査用画
像処理回路へ転送させる転送制御手段とを備えた
表面検査装置。1 With respect to a rotation axis that intersects at an angle smaller than 90 degrees with the projection axis when irradiating light onto the surface of an object to be inspected with a flat surface, the reflective surface of the rotating mirror has the rotation axis as the center of rotation. The rotating mirror is mounted so as to be tilted with respect to a plane perpendicular to the rotating axis with the intersection of the light projection axis and the rotating axis as the center in an angular range in which it always points in the direction of the inspected object regardless of rotation, and The axis of light incident on the rotating mirror is set at the intersection point within an angular range in which the reflected light from the rotating mirror always points in the direction of the object to be inspected regardless of the rotation of the rotating mirror about the rotation axis. A surface light source intersecting a light projection axis and having a diffuser disposed between the intersection and the object to be inspected, and a television that receives specular reflection light from the surface light source by the surface of the object to be inspected. a camera, an analog-to-digital converter for converting the output of the television camera from analog to digital, and a frame memory for storing the output of the analog-to-digital converter for one screen and updating the stored contents every time the vertical synchronization signal of the television camera is received. , an average light amount calculating means for setting at least two pairs of masks in the screen of the television camera so as to face each other across the center thereof, and calculating an average light amount within the at least two pairs of masks;
Transfer control means that compares the average light intensities in the at least two pairs of masks pair by pair and transfers the data in the frame memory to the inspection image processing circuit when the average light intensities of each pair become substantially equal. surface inspection equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58031406A JPS59157545A (en) | 1983-02-25 | 1983-02-25 | surface inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58031406A JPS59157545A (en) | 1983-02-25 | 1983-02-25 | surface inspection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59157545A JPS59157545A (en) | 1984-09-06 |
| JPH0333220B2 true JPH0333220B2 (en) | 1991-05-16 |
Family
ID=12330370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58031406A Granted JPS59157545A (en) | 1983-02-25 | 1983-02-25 | surface inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59157545A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2721199B2 (en) * | 1988-10-06 | 1998-03-04 | 株式会社東芝 | Scratch detection device |
| JPH06129995A (en) * | 1992-10-16 | 1994-05-13 | Nippon Steel Corp | Optical surface defect inspection system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57182715A (en) * | 1981-05-07 | 1982-11-10 | Canon Inc | Optical face scanning method |
-
1983
- 1983-02-25 JP JP58031406A patent/JPS59157545A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59157545A (en) | 1984-09-06 |
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