JPH0334777B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an apparatus for plasma-treating a continuous body such as a sheet-like article such as a fabric or a film or a yarn article.

[Prior art and its problems]

Conventionally, recontamination (darkening) due to washing of textile products
SR processing (hereinafter referred to as SR processing) is strongly required for hydrophobic synthetic fibers. The conventional method has been to apply a hydrophilic resin to the fiber surface to make the surface of the hydrophobic fiber hydrophilic and impart SR properties. However, such resin processing methods lack durability against washing during wear. In addition, since it promotes transfer sublimation in which the dye dyed onto the resin attached to the fiber surface is transferred, the color fastness is reduced. Furthermore, since the hydrophilic resin used is generally a polyethylene glycol resin or a derivative thereof, the treated fabric has many drawbacks such as a strong waxy feel. Therefore, it does not have these drawbacks and can be produced at low cost on an industrial scale.
It has been desired to develop a technology that can impart SR properties to fiber fabrics, especially synthetic fiber fabrics.

As a way to solve these problems, it has recently been discovered that instead of resin treatment, the fiber surface can be directly hydrophilized by plasma treatment, giving it an excellent SR property equivalent to or better than that of cotton. came.

However, various problems occur with plasma processing apparatuses that can continuously process continuous objects such as sheet-like materials and fibers, and many proposals have been made to improve these problems. Broadly speaking, there are two types: a type in which sheet-like materials are fed out of the atmosphere, introduced into a depressurized processing chamber with a continuous sheet mechanism, and then rolled up again in the atmosphere; There are two types: batch continuous type, which is all carried out in one evacuated container. The former type, which has a continuous sealing mechanism, has the advantage of being able to downsize the vacuum processing chamber and being able to change the level without releasing the vacuum state, making it easy to work with, but it is not suitable for high-containing materials such as textiles. When processing airy sheets, volatile substances such as air contained in the sheets are
It cannot be removed sufficiently by the seal portion alone, and there is a problem with the sealing performance when the processing speed increases.

On the other hand, the latter continuous batch type has the advantage that the degree of vacuum does not change even during high-speed processing because the processing is performed in a sealed space. However, since the process is carried out in a closed space, it takes time to transfer the object to be processed onto the conveying means, resulting in poor workability.

[Problem to be solved by the invention]

The purpose of the present invention is to take advantage of the features of the batch continuous system in which the degree of decompression does not change even during high-speed processing.
It is an object of the present invention to provide a plasma processing apparatus which facilitates workability such as transferring a workpiece and enables easy switching between single-sided processing and double-sided processing of a workpiece.

[Means to solve the problem]

To achieve the above object, the present invention provides a batch continuous type plasma processing apparatus in which a feeding means 19 and a winding means 20 for a continuous workpiece 23 and a plasma irradiation means 22 are arranged in a reduced pressure processing container 1. Two or more units of the plasma irradiation means 22 are arranged in parallel, and conveyance means 21 consisting of guide rollers or guide bars are respectively disposed at both longitudinal ends of these plasma irradiation means 22, and two types of guides are disposed on these conveyance means 21. Chain 8′,
9' as a guide means for switching the passing route of the object to be processed, and the guide chain 8' at one end.
The guide chain 9' at the other end extends between the adjacent plasma irradiation means 22 so as to form a passage path 8 that spans the transport means 21 at the same end. It is characterized in that it is spanned so as to form a passage path 9 that crosses diagonally across the conveying means 21 on opposite end sides between them.

In this way, between adjacent plasma irradiation means, a guide chain that crosses the same end side and a guide chain that crosses the opposite end side are provided, and these two types of guide chains are selectively used as route switching guide means. As a result, the same plasma processing apparatus can be used for switching between processing a workpiece on one side and processing both sides, and the switching operation can be performed automatically.

As the plasma irradiation means used in the present invention, any conventionally known means can be used, but it is preferable to arrange two plate-shaped cathodes facing each other and arrange a plurality of rod-shaped anodes between them. It is better to have a structure that

Further, in the present invention, objects to be treated with plasma include fabrics such as woven fabrics, knitted fabrics, non-woven fabrics, and webs; sheet-like objects such as films, foils, and paper;
Alternatively, composites of these, fabrics or sheets coated with resin, and yarns such as spun yarns and filament yarns can be used.

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view of the entire device according to the present invention, and FIG. 2 is a plan view thereof. 3 is an enlarged side view of the plasma irradiation means portion of FIG. 1, and FIG. 4 is a front view thereof.

In FIGS. 1 and 2, 1 is a reduced-pressure processing container, and 12 and 13 are movable doors forming a part of the reduced-pressure processing container 1. As shown in FIG. 8 and 9 are the objects to be processed 2
Route 8 shows the case where only one side of the object to be processed 23 is processed, and route 9 shows the case where both sides are processed.

The reduced pressure processing container 1 is connected to a reduced pressure pump 10 via an exhaust pipe 14, and is maintained at a reduced pressure of about 10 ^-3 Torr, and the object to be processed 23 is subjected to low temperature plasma treatment under this reduced pressure.

The workpiece 23 is wound up as a feeding roll 2 on a shaft 4 constituting a feeding means 19, and from there passes through a path 8 or 9 to a winding means 20.
It is completed when it is wound up as a roll 3 around a shaft 5 that constitutes a. These objects to be processed 23 are transported by a drive motor 11 using shafts 4 and/or 5.
This is done by driving the .

As can be seen from FIG. 1, in the plasma processing apparatus of the present invention, a feeding means 19 and a winding means 20 for the object to be processed 23 are arranged adjacent to each other in one reduced pressure processing container 1. . That is, as shown in FIG. 1, the feeding means 19 and the winding means 20 are arranged so that the virtual outer circumferential lines thereof overlap each other when the entire amount of the workpiece 23 is wound up, and also to prevent Feeding means 19 and winding means 20
and are arranged adjacent to each other so that their outer peripheries are not in contact with each other and maintain a clearance. Furthermore, since the area where the feeding means 19 and the winding means 20 are arranged adjacent to each other and the plasma irradiation means 22 are arranged opposite to each other, a compact structure is achieved within the reduced pressure processing container 1. Further, conveying means 21 each consisting of a guide roll, a guide bar, etc. are arranged at both ends of the plasma irradiation means 22 in the longitudinal direction. By passing through these conveying means 21, the workpiece 23 fed out from the feeding means 19 is transferred to the path 8.
It is selectively conveyed in two cases: one where only one side is subjected to plasma treatment by being guided as shown in path 9, and the other where both sides are subjected to plasma treatment by being guided as shown in path 9. It's starting to wind up.

The plasma irradiation means 22 has a plurality of rod-shaped anodes 7, 7' arranged at intervals between two opposing plate-shaped cathodes 6, 6; 6', 6'. The object to be treated 23 is plasma-treated while moving on both sides of the anodes 7, 7'.
At least two plasma irradiation means having such a configuration are arranged facing each other. With this, when processing only one side of the workpiece 23, it is sufficient to transport the workpiece 23 along the path 8.
Further, in the case of double-sided processing, the object to be processed 23 may be transported along the path 9.

As described above, the workpiece 23 can be easily switched to the two paths 8 or 9 by using a guide chain. That is, in FIGS. 3A, B and 4, 8' and 9' are
These guide chains 8' and 9' respectively represent guide chains for forming paths for single-sided processing and double-sided processing, and as shown in FIG. has been done. The path of the workpiece 23 can be switched by connecting one end of the workpiece 23 to a guide chain 8' or 9' that forms the desired path 8 or 9 after the workpiece 23 has been completely removed. By rotating the guide chain 8' or 9', the workpiece 23 can be set to automatically pass through the intended path 8 or 9. Therefore, the object to be processed 2 in the narrow vacuum processing container 1
3 on the conveyance means 21 and the work of switching between the sets can be made more efficient.

〔Effect of the invention〕

With the apparatus of the present invention, a highly air-containing sheet material,
For example, when processing woven or knitted fabrics, non-woven fabrics, tows, fibers, coated materials, porous films, etc.
In particular, while maintaining the characteristic of a batch processing machine that the degree of decompression in the vacuum processing chamber does not change due to changes in processing speed, it is possible to significantly improve workability, which is a disadvantage of batch processing machines, and Single-sided or double-sided processing of objects can be easily changed depending on the purpose.

[Brief explanation of drawings]

FIG. 1 is a sectional view of a plasma processing apparatus according to the present invention, and FIG. 2 is a plan view thereof. In addition, Figures 3A and 3B are enlarged views of the plasma irradiation means, with Figure 3A showing the case where one side of the object to be treated is treated, and Figure 3B showing the case where both sides of the object to be treated are being treated. 4 is a front view of the plasma irradiation means portion. DESCRIPTION OF SYMBOLS 1... Decompression processing container, 2... Feeding roll, 3... Winding roll, 4, 5... Rotating shaft, 6, 6'... Cathode, 7,
7'... Anode, 8... (for single-sided processing) route, 9... (for double-sided processing) route, 8'... (for single-sided processing) guide chain, 9'... (for double-sided processing) guide chain, 19... Unwinding means, 20...winding means, 21...transporting means, 22...plasma irradiation means.

Claims (1)

[Scope of Claims] 1. In a batch continuous type plasma processing apparatus in which a feeding means 19 and a winding means 20 for a continuous workpiece 23 and a plasma irradiation means 22 are arranged in a reduced pressure processing container 1, the plasma irradiation means 22 are arranged in parallel in two or more units, and these plasma irradiation means 2
Conveying means 21 each consisting of a guide roller or a guide bar are disposed at both ends in the longitudinal direction of 2, and two types of guide chains 8' and 9' are sequentially installed in these conveying means 21 as means for switching the passage route of the processed object. The guide chain 8' at one end is spanned so as to form a passage path 8 between the adjacent plasma irradiation means 22 and the conveying means 21 at the same end, and the guide chain 8' at the other end is A plasma processing apparatus characterized in that the guide chain 9' is stretched across the transport means 21 at opposite ends between the adjacent plasma irradiation means 22 so as to form a passage path 9 diagonally across. 2. The feeding means 19 and the winding means 20 are brought into a state in which the virtual outer circumferential lines of the continuous workpiece 23 are overlapped with each other when the entire amount of the continuous workpiece 23 is wound up, and the feeding means 19 and the winding means 20 are placed in a state where they overlap each other during the feeding and winding operations. 2. The plasma processing apparatus according to claim 1, wherein the plasma irradiation means 22 are arranged adjacently so that the outer peripheries thereof are not in contact with each other and maintain a clearance, and the plasma irradiation means 22 is arranged to face the areas so arranged adjacently.