JPH0335049B2 - - Google Patents
Info
- Publication number
- JPH0335049B2 JPH0335049B2 JP22542585A JP22542585A JPH0335049B2 JP H0335049 B2 JPH0335049 B2 JP H0335049B2 JP 22542585 A JP22542585 A JP 22542585A JP 22542585 A JP22542585 A JP 22542585A JP H0335049 B2 JPH0335049 B2 JP H0335049B2
- Authority
- JP
- Japan
- Prior art keywords
- hard layer
- tools
- layer
- cutting
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
Description
〔産業上の利用分野〕
この発明は、基体と硬質層との界面部に欠陥の
ない、すなわち基体表面部に脱窒層やボアの存在
がなく、したがつて基体表面部の靭性低下がな
く、かつ基体表面に対する硬質層の付着強度が著
しく高い表面被覆セラミツクス工具の製造法に関
するものである。
〔従来の技術〕
従来、一般に、結合相として、MgOやY2O3、
さらにランタニド系の希土類元素の酸化物、
Al2O3、AlN、およびSiO2などのうちの１種また
は２種以上を含有し、さらに必要に応じて、分散
相として、例えばTiC、TiN、TiB2、TiCNO、
ZrN、ZrO2、HfC、VC、NbC、TaC、TaN、
Mo2C、およびWCなどの周期律表の4a，5a，お
よび6a族金属の炭化物、窒化物、酸化物、およ
びほう化物、並びにこれらの２種以上の固溶体か
らなる群のうちの１種または２種以上を含有し、
残りの主成分が硬質相としてのSi3N4あるいはサ
イアロン（αサイアロンおよび／またはβサイア
ロンからなる）で構成されたSi3N4基セラミツク
スまたはサイアロン基セラミツクスを基体とし、
この基体の表面に、TiC、TiN、TiCN、TiCO、
TiCNO、Al2O3、およびAlNOのうちの１種の単
層または２種以上の複層からなる硬質層を被覆し
てなる表面被覆セラミツクス工具が、切削工具や
耐摩工具などとして用いられていることは良く知
られるところである。
〔発明が解決しようとする問題点〕
しかし、上記の従来表面被覆セラミツクス工具
は、これを切削工具や耐摩工具などとして実用に
供した場合、硬質層に欠けや剥離を生じ易く、比
較的短時間で使用寿命に至るものであつた。
〔問題点を解決するための手段〕
そこで、本発明者等は、上記の従来表面被覆セ
ラミツクス工具に着目し、これを切削工具や耐摩
工具として使用した場合、これの使用寿命の延命
化をはかるべく研究を行なつた結果、上記の従来
表面被覆セラミツクス工具において、工具表面部
に欠けや剥離が生じるのは、基体表面に、例えば
化学蒸着法により硬質層を形成する際に、基体表
面部の主成分たるSi3N4あるいはサイアロン（Si
−Al−Ｏ−Ｎ）に分解が起つて、基体表面部に
脱窒層が形成されるようになるばかりでなく、硬
質層との界面にはポアが形成されるようになり、
この結果基体表面部の靭性が低下し、かつ硬質層
の基体表面に対する付着強度が低下するようにな
ることに原因があることが判明し、さらにこれら
の結果をふまえて研究を行なつたところ、基体を
上記のSi3N4基セラミツクスあるいはサイアロン
基セラミツクスに特定すると共に、この表面に被
覆される硬質層をTiC、TiN、TiCN、TiCO、
TiCNO、Al2O3、およびAlNOのうちの１種の単
層または２種以上の複層に特定した表面被覆セラ
ミツクス工具においては、これに、10Kg／cm2以上
の圧力を有するN2雰囲気中、1100〜1650℃の温
度に、５〜60分間保持の条件で熱処理を施すと、
雰囲気中のN2が硬質層を通して基体表面部に拡
散し、基体表面部に存在する遊離Siと反応して
Si3N4を形成するため、脱窒層が消滅し、かつ
Si3N4の形成による体積膨張によつて微細なポア
も消滅し、さらに比較的粗大なポアは雰囲気圧力
によつて消滅するようになることから、基体の表
面部は基体内部のもつ靭性と同等の靭性をもつよ
うになると共に、脱窒層およびポアの消滅によつ
て硬質層の基体表面に対する付着強度が著しく向
上するようになり、この結果切削工具や耐摩工具
として実用に供した場合、欠けや剥離の発生が著
しく抑制されるようになつて、すぐれた耐摩耗性
を示し、著しく長い使用寿命を確保することがで
きるようになるという知見を得たのである。
この発明は、上記知見にもとづいてなされたも
のであつて、Si3N4基セラミツクスまたはサイア
ロン基セラミツクスの基体表面に、TiC、TiN、
TiCN、TiCO、TiCNO、Al2O3、およびAlNO
のうちの１種の単層または２種以上の複層からな
る硬質層を被覆形成した後、さらにこれに、10
Kg／cm2以上の圧力を有するN2雰囲気中、1100〜
1650℃の温度に、５〜60分保持の条件で熱処理を
施すことによつて、工具表面部における欠けや剥
離の発生を抑制し、もつてすぐれた耐摩耗性を発
揮せしめて、工具寿命の延命化をはかつた点に特
徴を有するものである。
つぎに、この発明の方法において、加熱加圧処
理条件を上記の通りに限定した理由を説明する。
(a) 雰囲気圧力
雰囲気圧力が10Kg／cm2未満では、雰囲気中の
N2の硬質層を通しての基体表面部への拡散が
遅く、脱窒層やポアの消滅をはかるのに著しく
長時間を要し、実用的でないことから、その圧
力を100Kg／cm2以上と定めた。なお、現存する
熱処理装置では2000Kg／cm2までの加圧が可能で
ある。
(b) 加熱温度
その温度が1100℃未満では、雰囲気圧力の場
合と同様に、雰囲気中のN2の硬質層を通して
の拡散が遅く、一方その温度が1650℃を越える
と、N2拡散が活発に起りすぎて硬質層に変質
粗粒化が起り、かえつて耐摩耗性の劣化をまね
くようになることから、その温度を1100〜1650
℃と定めた。
(c) 保持時間
その時間が５分未満では、高温側加熱を行な
つたとしても所望のN2拡散を満足して行なう
ことができず、一方どのような条件下でも60分
の保持時間で十分満足する結果を得ることがで
きることから、その時間を５〜60分と定めた。
〔実施例〕
つぎに、この発明の方法を実施例により具体的
に説明する。
実施例 １
セラミツクス基体として、Si3N4粉末：96.5％、
MgO粉末：３％、SiO2粉末：0.5％からなる配合
組成をもつた混合粉末より、１気圧のN2雰囲気
中、温度：1750℃に１時間保持の条件でホツトプ
レスして製造したSi3N4基セラミツクス切削工具
と、Si3N4粉末：76％、Al2O3粉末：５％、Y2O3
粉末：３％、TiN粉末：15％、AlN粉末：１％
からなる配合組成（以上重量％、以下％は重量％
を示す）をもつた混合粉末より成形した圧粉体
を、１気圧のN2雰囲気中、温度：1800℃に２時
間保持の条件で普通焼結することによつて製造し
たβサイアロン基セラミツクス切削工具とを用意
し、これらセラミツクス基体の表面に、通常の化
学蒸着法を用い、それぞれ第１表に示される組成
および平均層厚の硬質層を形成し、引続いて、こ
れに同じく第１表に示される条件で熱処理を施す
ことによつて本発明法１〜８および比較法１〜４
をそれぞれ実施した。
なお、比較法１は従来製造法に相当する熱処理
を施さない場合を示し、また、比較法２〜４は、
熱処理条件のうちの少なくともいずれかの条件
（第１表に※印を付した条件）がこの発明の範囲
から外れた条件で行なつた場合を示す。
つぎに、上記本発明法１〜８および比較法１〜
４により得られた表面被覆セラミツクス切削工具
を、JIS・SNP432の形状をもつた切削スローア
ウエイチツプとして用い、
被削材：FC25の丸棒、
切削速度：350m／min、
送り：0.35mm／rev、
切込み：２mm、
[Industrial Application Field] This invention has no defects in the interface between the base and the hard layer, that is, there is no denitrification layer or bore on the base surface, and therefore there is no decrease in toughness of the base surface. The present invention also relates to a method for producing a surface-coated ceramic tool in which the hard layer has a significantly high adhesion strength to the substrate surface. [Prior Art] Conventionally, MgO, Y 2 O 3 ,
Furthermore, oxides of lanthanide rare earth elements,
Contains one or more of Al 2 O 3 , AlN, SiO 2 , etc., and if necessary, as a dispersed phase, for example, TiC, TiN, TiB 2 , TiCNO,
ZrN, ZrO2 , HfC, VC, NbC, TaC, TaN,
One or more of the group consisting of carbides, nitrides, oxides, and borides of metals from groups 4a, 5a, and 6a of the periodic table, such as Mo 2 C and WC, and solid solutions of two or more of these. Contains two or more types,
Based on Si 3 N 4- based ceramics or sialon-based ceramics in which the remaining main component is Si 3 N 4 or Sialon (consisting of α-sialon and/or β-sialon) as a hard phase,
TiC, TiN, TiCN, TiCO,
Surface-coated ceramic tools coated with a hard layer consisting of a single layer or a multilayer of two or more of TiCNO, Al 2 O 3 , and AlNO are used as cutting tools, wear-resistant tools, etc. This is well known. [Problems to be Solved by the Invention] However, when the above-mentioned conventional surface-coated ceramic tools are put to practical use as cutting tools or wear-resistant tools, the hard layer tends to chip or peel, and it takes a relatively short time. It reached the end of its useful life. [Means for solving the problem] Therefore, the present inventors focused on the above-mentioned conventional surface-coated ceramic tools, and aimed to extend the service life of the tools when used as cutting tools or wear-resistant tools. As a result of our research, we found that the reason why chipping and peeling occur on the surface of the tool in the conventional surface-coated ceramic tools described above is due to the fact that when a hard layer is formed on the surface of the base by chemical vapor deposition, for example, the surface of the base is damaged. The main component is Si 3 N 4 or Sialon (Si
-Al-O-N), and not only a denitrifying layer is formed on the surface of the substrate, but also pores are formed at the interface with the hard layer.
As a result, it was found that the cause was a decrease in the toughness of the substrate surface and a decrease in the adhesion strength of the hard layer to the substrate surface.Furthermore, based on these results, research was conducted. The substrate is specified as the above-mentioned Si 3 N 4 -based ceramics or Sialon-based ceramics, and the hard layer coated on the surface is selected from TiC, TiN, TiCN, TiCO, TiC, TiN, TiCN, TiCO,
For surface-coated ceramic tools specified as a single layer or a multilayer of two or more of TiCNO, Al 2 O 3 , and AlNO, in an N 2 atmosphere with a pressure of 10 Kg/cm 2 or more When heat treatment is performed at a temperature of 1100 to 1650℃ and held for 5 to 60 minutes,
N2 in the atmosphere diffuses to the surface of the substrate through the hard layer and reacts with free Si present on the surface of the substrate.
To form Si 3 N 4 , the denitrification layer disappears and
Fine pores also disappear due to the volume expansion caused by the formation of Si 3 N 4 , and relatively coarse pores disappear due to atmospheric pressure, so the surface part of the base has the same toughness as the inside of the base. In addition to having the same toughness, the adhesion strength of the hard layer to the substrate surface is significantly improved due to the disappearance of the denitrification layer and pores, and as a result, when used as a cutting tool or a wear-resistant tool, They found that the occurrence of chipping and peeling is significantly suppressed, exhibiting excellent wear resistance, and making it possible to ensure an extremely long service life. This invention was made based on the above knowledge, and it is possible to add TiC, TiN,
TiCN, TiCO, TiCNO, Al2O3 , and AlNO
After forming a hard layer consisting of a single layer of one type or a multilayer of two or more types, further coated with 10
In a N2 atmosphere with a pressure of Kg/ cm2 or more, 1100~
By applying heat treatment at a temperature of 1650℃ and holding it for 5 to 60 minutes, the occurrence of chipping and peeling on the tool surface is suppressed, and excellent wear resistance is exhibited, extending the tool life. It is unique in that it extends lifespan. Next, the reason why the heating and pressurizing treatment conditions are limited as described above in the method of the present invention will be explained. (a) Atmospheric pressure If the atmospheric pressure is less than 10Kg/ cm2 ,
The diffusion of N 2 through the hard layer to the substrate surface is slow, and it takes an extremely long time to eliminate the denitrification layer and pores, making it impractical. Therefore, the pressure is set at 100 kg/cm 2 or more. Ta. Note that existing heat treatment equipment is capable of pressurizing up to 2000 kg/cm 2 . (b) Heating temperature When the temperature is below 1100°C, the diffusion of N 2 in the atmosphere through the hard layer is slow, as in the case of atmospheric pressure, while when the temperature exceeds 1650°C, the diffusion of N 2 is active. The temperature should be set at 1100 to 1650.
It was set as ℃. (c) Holding time If the holding time is less than 5 minutes, the desired N 2 diffusion cannot be achieved even if heating is performed on the high temperature side; on the other hand, under any conditions, a holding time of 60 minutes will not The time was set at 5 to 60 minutes because it was possible to obtain sufficiently satisfactory results. [Example] Next, the method of the present invention will be specifically explained with reference to Examples. Example 1 As a ceramic substrate, Si 3 N 4 powder: 96.5%,
Si 3 N produced by hot pressing a mixed powder with a composition of MgO powder: 3% and SiO 2 powder: 0.5% in an N 2 atmosphere of 1 atm at a temperature of 1750°C for 1 hour. 4 ceramic cutting tools, Si 3 N 4 powder: 76%, Al 2 O 3 powder: 5%, Y 2 O 3
Powder: 3%, TiN powder: 15%, AlN powder: 1%
Compound composition (the above is weight%, the following % is weight%)
Cutting β-SiAlON-based ceramics produced by normal sintering of a green compact formed from a mixed powder with 1 atm of N2 atmosphere at a temperature of 1800°C for 2 hours. A hard layer having the composition and average layer thickness shown in Table 1 is then formed on the surface of these ceramic substrates using a conventional chemical vapor deposition method. Methods 1 to 8 of the present invention and comparative methods 1 to 4 can be obtained by heat treatment under the conditions shown in
were carried out respectively. In addition, Comparative Method 1 shows the case where heat treatment equivalent to the conventional manufacturing method is not performed, and Comparative Methods 2 to 4,
This shows a case where at least one of the heat treatment conditions (conditions marked with * in Table 1) is outside the scope of the present invention. Next, the above-mentioned methods 1 to 8 of the present invention and comparative methods 1 to
The surface-coated ceramic cutting tool obtained in step 4 was used as a cutting throw-away tip with the shape of JIS/SNP432, workpiece material: FC25 round bar, cutting speed: 350 m/min, feed: 0.35 mm/rev, Depth of cut: 2mm,
実施例１の第１表に示される結果から、それぞ
れ本発明法１〜８によつて製造された表面被覆セ
ラミツクス切削工具としての切削スローアウエイ
チツプは、いずれも熱処理を行わない比較法１に
よつて製造された切削スローアウエイチツプに比
して、すぐれた耐摩耗性を示すばかりでなく、切
刃における欠けや欠損の発生がなく、耐欠損性に
もすぐれていることが明らかである。
一方比較例２〜４に見られるように、熱処理条
件のうちのいずれかの条件でもこの発明の範囲か
ら外れると、所望のすぐれた耐摩耗性および耐欠
損性を確保することができないものである。
また、実施例２に見られるように、本発明法に
したがつて熱処理を施した表面被覆セラミツクス
耐摩工具としてのプラグは、これを施さないプラ
グに比して、著しく長い使用寿命を示すようにな
ることが明らかである。
上述のように、この発明の方法によれば、基体
表面部に脱窒層が存在せず、かつ基体表面に対す
る硬質層の付着強度が良好な表面被覆セラミツク
ス工具を製造することができ、これを切削工具や
耐摩工具などとして実用に供した場合には、欠け
や剥離の発生なく、すぐれた耐摩耗性を示し、著
しく長期に亘つてすぐれた性能を発揮するなど工
業上有用な効果がもたらされるのである。
From the results shown in Table 1 of Example 1, the cutting throw-away chips as surface-coated ceramic cutting tools manufactured by Methods 1 to 8 of the present invention, respectively, were manufactured by Comparative Method 1, which did not undergo heat treatment. It is clear that the cutting throw-away tip not only exhibits superior wear resistance, but also has excellent fracture resistance, with no chipping or chipping occurring on the cutting edge. On the other hand, as seen in Comparative Examples 2 to 4, if any of the heat treatment conditions deviates from the scope of the present invention, the desired excellent wear resistance and chipping resistance cannot be ensured. . Furthermore, as seen in Example 2, the plug as a surface-coated ceramic wear-resistant tool that was heat-treated according to the method of the present invention exhibited a significantly longer service life than the plug that was not heat-treated. It is clear that As described above, according to the method of the present invention, it is possible to produce a surface-coated ceramic tool in which there is no denitrification layer on the surface of the substrate and the hard layer has good adhesion strength to the surface of the substrate. When used as cutting tools or wear-resistant tools, it exhibits excellent wear resistance without chipping or peeling, and has industrially useful effects such as excellent long-term performance. It is.
Claims (1)
基セラミツクスからなる基体の表面に、 Tiの炭化物、窒化物、炭窒化物、炭酸化物、
および炭窒酸化物、並びにAlの酸化物および窒
酸化物のうちの１種の単層または２種以上の複層
からなる硬質層を被覆形成した後、 さらに、これに、 100Kg／cm2以上の圧力を有する窒素雰囲気中、
1100〜1650℃の温度に、 ５〜60分保持、 の条件で熱処理を施すこと、 を特徴とする表面被覆セラミツクス工具の製造
法。[Claims] 1. Ti carbide, nitride, carbonitride, carbonide,
After coating with a hard layer consisting of a single layer or a multilayer of two or more of carbonitrides, carbonitride oxides, and aluminum oxides and nitricoxides, furthermore, 100Kg/cm 2 or more. In a nitrogen atmosphere with a pressure of
A method for manufacturing a surface-coated ceramic tool, characterized by heat treatment at a temperature of 1100 to 1650°C for 5 to 60 minutes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22542585A JPS6284905A (en) | 1985-10-09 | 1985-10-09 | Manufacture of surface coated ceramics tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22542585A JPS6284905A (en) | 1985-10-09 | 1985-10-09 | Manufacture of surface coated ceramics tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6284905A JPS6284905A (en) | 1987-04-18 |
| JPH0335049B2 true JPH0335049B2 (en) | 1991-05-24 |
Family
ID=16829168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22542585A Granted JPS6284905A (en) | 1985-10-09 | 1985-10-09 | Manufacture of surface coated ceramics tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6284905A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3691833B2 (en) * | 2003-07-28 | 2005-09-07 | 株式会社Ｎｅｏｍａｘ | Thin film magnetic head substrate and manufacturing method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59232985A (en) * | 1983-06-16 | 1984-12-27 | 三菱マテリアル株式会社 | Surface coated sialon base ceramic tool member |
-
1985
- 1985-10-09 JP JP22542585A patent/JPS6284905A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6284905A (en) | 1987-04-18 |
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