JPH0337671B2 - - Google Patents
Info
- Publication number
- JPH0337671B2 JPH0337671B2 JP12191883A JP12191883A JPH0337671B2 JP H0337671 B2 JPH0337671 B2 JP H0337671B2 JP 12191883 A JP12191883 A JP 12191883A JP 12191883 A JP12191883 A JP 12191883A JP H0337671 B2 JPH0337671 B2 JP H0337671B2
- Authority
- JP
- Japan
- Prior art keywords
- motor
- valve
- rotor
- case
- stator coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000696 magnetic material Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 6
- 230000005405 multipole Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 230000005415 magnetization Effects 0.000 claims 2
- 238000013459 approach Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/0041—Electrical or magnetic means for measuring valve parameters
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Magnetically Actuated Valves (AREA)
Description
【発明の詳細な説明】
本発明はモータの回転運動を弁軸の直進運動に
変換して流量を制御する電動弁について、ねじ部
にしめつけ摩擦力が発生する前にあらかじめ設定
された弁軸位置で正確に弁軸の直進運動いいかえ
るとモータの回転を停止させる制御方法に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electric valve that controls the flow rate by converting the rotational motion of a motor into a linear motion of the valve shaft, and the valve shaft position is adjusted to a preset valve shaft position before tightening and frictional force is generated on the threaded portion. This relates to a control method that accurately moves the valve stem in a straight line, or in other words, stops the rotation of the motor.
従来の電動弁においては、モータの回転を機械
的に停止させる構造を弁内に内蔵しており、その
一例を第1図によつて説明すると、弁軸1を弁座
2側から弁部3、おねじ4、円筒形の永久磁石の
外周面に多極着磁されたモータの回転子5および
軸受端6の順に一体化して形成し、おねじ4は弁
本体7に固定され中心にめねじ8を切つた推進軸
受9とはめあわされ、軸受端6は、非磁性体から
なるケース10内に固定された軸受11とはめあ
わされている。 In conventional electric valves, a structure for mechanically stopping the rotation of the motor is built into the valve. An example of this is explained with reference to FIG. 1. , a male thread 4, a rotor 5 of a multi-pole magnetized motor, and a bearing end 6 are integrally formed in this order on the outer peripheral surface of a cylindrical permanent magnet, and the male thread 4 is fixed to the valve body 7 and is centered on the outer peripheral surface of a cylindrical permanent magnet. It is fitted with a propulsion bearing 9 having a screw thread 8, and the bearing end 6 is fitted with a bearing 11 fixed in a case 10 made of a non-magnetic material.
ケース10には、モータの回転子5に対応する
位置にモータの固定子コイル12が固定され、か
つ、この固定子コイル12の軸方向の幅寸法より
もモータの回転子5の軸方向の幅寸法の方が大き
くなつている。ケース10は流体の出入口13,
14と弁座2を有する弁本体7にプラズマ溶接な
どにより気密的に一体化されている。さらに、弁
軸1上にはおねじ4の両端部より少し離れて止め
ピン15,16を圧入などの方法で固定するとと
もに、この止めピン15,16の回転を制限する
丸形ピン状のストツパー17を推進軸受9に貫通
して固定していた。 A stator coil 12 of the motor is fixed to the case 10 at a position corresponding to the rotor 5 of the motor, and the axial width of the motor rotor 5 is wider than the axial width of the stator coil 12. The dimensions are larger. The case 10 has a fluid inlet/outlet 13,
14 and the valve body 7 having the valve seat 2 by plasma welding or the like in an airtight manner. Furthermore, stop pins 15 and 16 are fixed on the valve stem 1 by a method such as press fitting at a distance from both ends of the male thread 4, and a stopper 17 in the shape of a round pin that restricts the rotation of the stop pins 15 and 16. was fixed through the propulsion bearing 9.
以上のごとく構成されているためモータの固定
子コイル12に所定量の通電をすると回転子5が
回転し、おねじ4とめねじ8のねじ作用により弁
軸1は回転しながら前方の閉弁方向(図面では左
方向)あるいは後方の開弁方向(図面では右方
向)に移動し、あらかじめ設定された弁軸位置
(この位置は、たとえば閉弁方向においては弁部
3が弁座2に着座して閉弁し、ねじ部4,8に強
いねじつけ摩擦力が発生し、次の開弁運動が不能
になるといつたことを避けるよう、弁部3と弁座
2間にきわめてわずかな隙間があるように設定さ
れる)で止めピン15あるいは16とストツパ1
7が接触して弁軸の直進運動が停止させられる。
止めピン16は閉弁方向運動を停止し、止めピン
15は開弁方向運動を停止するときにはたらくも
のである。ここで、ピン状のストツパ17は第2
図のように推進軸受9面上に等角度で複数個うが
つた固定穴19のうちの1ケ所に選択的に挿入す
ることによつて、ねじピツチP内での軸方向の止
め位置バラツキを少なくするよう調整されてい
る。 With the above structure, when a predetermined amount of current is applied to the stator coil 12 of the motor, the rotor 5 rotates, and the valve shaft 1 rotates in the forward valve closing direction due to the screw action of the male thread 4 and the female thread 8. (to the left in the drawing) or rearward in the valve opening direction (to the right in the drawing) to a preset valve shaft position (for example, in the valve closing direction, the valve part 3 is seated on the valve seat 2). In order to avoid the situation where the valve closes and a strong screwing friction force is generated in the threaded parts 4 and 8, making the next valve opening movement impossible, an extremely small gap is provided between the valve part 3 and the valve seat 2. ) with stop pin 15 or 16 and stopper 1
7 comes into contact and the linear movement of the valve stem is stopped.
The stop pin 16 works when the movement in the valve closing direction is stopped, and the stop pin 15 works when stopping the movement in the valve opening direction. Here, the pin-shaped stopper 17 is the second
As shown in the figure, by selectively inserting the screw into one of the fixing holes 19 formed at equal angles on the surface of the propulsion bearing 9, variations in the axial stop position within the screw pitch P can be reduced. It has been adjusted to
以上のように構成された従来の電動弁では機械
的にモータの回転運動を停止させる方法であるた
め、弁の停止機能としては確実なものであるが、
次のような欠点を有していた。 In the conventional electric valve configured as described above, the rotational movement of the motor is stopped mechanically, so the valve's stopping function is reliable.
It had the following drawbacks.
(1) 止めピン15,16とストツパ17が衝撃的
に当たることによつて騒音が発生する。(1) Noise is generated when the stopper pins 15 and 16 hit the stopper 17 with an impact.
とくに本電動弁を低騒音が厳しく要求される
ルームエアコンやガス燃焼器具などの家庭用機
器に適用しようとする場合に問題となるもので
ある。 This is particularly a problem when applying this electric valve to household appliances such as room air conditioners and gas combustion appliances that require strict low noise levels.
(2) 止めピン15,16とストツパ17の部品加
工精度、組付精度に高いレベルが要求されした
がつて高価となる。(2) A high level of accuracy is required in the processing and assembly of the retaining pins 15, 16 and the stopper 17, resulting in high costs.
本発明は前記のような欠点を解決するためのも
のであり、くわしくは従来品と同様に、モータの
回転子5が永久磁石製であることと、この回転子
5と弁軸1とが一体になつて回転をともなう直進
運動することを利用して弁軸1の軸方向位置を磁
気的に検出し、所定位置に達した際モータの回転
を停止させようとするものである。 The present invention is intended to solve the above-mentioned drawbacks, and in detail, like the conventional products, the rotor 5 of the motor is made of a permanent magnet, and the rotor 5 and the valve stem 1 are integrated. The axial position of the valve shaft 1 is magnetically detected by utilizing the rectilinear movement accompanied by rotation, and the rotation of the motor is stopped when the valve shaft 1 reaches a predetermined position.
以下、本発明の電動弁の構成例を第3図により
詳細に説明する。 Hereinafter, a configuration example of the electric valve of the present invention will be explained in detail with reference to FIG. 3.
本発明は、非磁性体からなるケース10の外周
部で、モータの回転子5に対応する位置に固定さ
れたモータの固定子コイル12の前方と後方ある
いはどちらか一方のケース上にモータの回転子5
の磁力を検出する磁気センサ20を固定し、この
磁気センサ20の出力をモータの駆動回路(図示
せず)に入力させ、ある一定以上のセンサ出力と
なつた時にモータの回転を停止させるようにした
ものである。 The present invention is directed to a case 10 which is made of a non-magnetic material, and which is fixed at a position corresponding to the rotor 5 of the motor on the outer periphery of the case 10. Child 5
A magnetic sensor 20 that detects magnetic force is fixed, and the output of this magnetic sensor 20 is input to a motor drive circuit (not shown), and when the sensor output exceeds a certain level, the rotation of the motor is stopped. This is what I did.
本発明におけるモータの回転子5は従来品と全
く同じもので、この回転子5は円筒形の永久磁石
の外周面に多極着磁されており、その軸方向の幅
寸法lはモータの固定子コイル12の軸方向の幅
寸法Wより長く構成される。 The rotor 5 of the motor in the present invention is exactly the same as the conventional product, and the rotor 5 is multi-pole magnetized on the outer circumferential surface of a cylindrical permanent magnet, and its width l in the axial direction is fixed to the motor. It is configured to be longer than the axial width dimension W of the child coil 12.
したがつてモータの回転子5と一体的に形成さ
れ、おねじ4を有する弁軸1の弁座2に対する位
置が全閉あるいは全開の位置となるとモータの回
転子5はモータの固定子コイル12から△=l−
Wだけ突出されるよう構成される。 Therefore, when the valve shaft 1, which is integrally formed with the motor rotor 5 and has the male thread 4, is in the fully closed or fully open position with respect to the valve seat 2, the motor rotor 5 is connected to the motor stator coil 12. From △=l−
It is configured so that only W is protruded.
本発明は以上のように構成されるため、弁軸1
が全閉あるいは全開位置に達していないときには
モータの回転子5の磁力は磁気センサ20に作用
せず、モータは固定子コイル12への通電量(ス
テツピングモータの時にはパルス数、インダクタ
形交流同期モータの時はサイクル数)に比例して
回転する。 Since the present invention is configured as described above, the valve shaft 1
When the motor has not reached the fully closed or fully open position, the magnetic force of the motor rotor 5 does not act on the magnetic sensor 20, and the motor changes the amount of current to the stator coil 12 (the number of pulses in the case of a stepping motor, the inductor type AC synchronous In the case of a motor, it rotates in proportion to the number of cycles).
弁軸1が全閉あるいは全開位置に近くなつてく
ると、モータの回転子5の片側端面はモータの固
定子コイル12内から次第に抜け出て、磁気セン
サ20に近づき、磁気センサ20はモータの回転
子5の磁力を検出するようになる。その検出量が
あらかじめ弁軸1の全閉、全開位置と関連づけら
れた量に達するとモータの駆動回路からモータ停
止の信号が出され、モータ回転停止→弁軸1の直
進運動が停止する。 When the valve stem 1 approaches the fully closed or fully open position, one end surface of the motor rotor 5 gradually comes out of the motor stator coil 12 and approaches the magnetic sensor 20, and the magnetic sensor 20 detects the rotation of the motor. The magnetic force of the child 5 is now detected. When the detected amount reaches an amount previously associated with the fully closed and fully open positions of the valve stem 1, a signal to stop the motor is issued from the motor drive circuit, and the motor rotation stops → the linear movement of the valve stem 1 stops.
本発明による磁気センサ20としては第4図〜
第6図に示すものが一例として考えられる。この
磁気センサは、軟磁性の板材料からなり、その形
状としては、磁極21をケース10の外径と同じ
円周上にモータの回転子5の極数の1/2の数だけ
等分に配置し、各磁極21の一端を円環状のヨー
ク22で一体的に構成することによつて磁気回路
を形成させ、磁極21外周上に電気導線23を巻
くとともに、この電気導線23の両端を開放した
ものである。 The magnetic sensor 20 according to the present invention is shown in FIGS.
The one shown in FIG. 6 can be considered as an example. This magnetic sensor is made of a soft magnetic plate material, and its shape is such that the magnetic poles 21 are equally divided into half the number of poles of the motor rotor 5 on the same circumference as the outer diameter of the case 10. A magnetic circuit is formed by integrally configuring one end of each magnetic pole 21 with an annular yoke 22, an electric conductor 23 is wound around the outer circumference of the magnetic pole 21, and both ends of this electric conductor 23 are opened. This is what I did.
第5図は上記した本発明の磁気センサ20を電
動弁に装着した例を示すものであり、弁軸1がほ
ぼ全閉の位置に達した時の状態であるが、磁気セ
ンサ20はモータの固定子コイル12と同様、ケ
ース10上に挿入、固定されている。 FIG. 5 shows an example in which the above-mentioned magnetic sensor 20 of the present invention is attached to a motor-operated valve, and shows the state when the valve stem 1 has almost reached the fully closed position. Like the stator coil 12, it is inserted and fixed onto the case 10.
磁力の検出状態を第6図で説明すると、第6図
では磁極21はモータの回転子5のN極と対応し
ているため、磁極21、ヨーク22はS極になる
よう帯磁され、磁気回路を形成している。この状
態から、モータの回転子5が右あるいは左方向に
回転すると磁極21は、これまでと反対のS極続
いてN、S、…、と互いに反対の永久磁石の磁力
と対応することになるため電気導線23に誘導電
圧(電流)が発生する。 To explain the detection state of magnetic force using FIG. 6, in FIG. 6, the magnetic pole 21 corresponds to the N pole of the rotor 5 of the motor, so the magnetic pole 21 and the yoke 22 are magnetized to become the S pole, and the magnetic circuit is formed. From this state, when the motor rotor 5 rotates to the right or left, the magnetic poles 21 correspond to the opposite magnetic forces of the permanent magnets, such as the opposite S pole, then the N, S, etc. Therefore, an induced voltage (current) is generated in the electric conductor 23.
この時の誘導電圧(電流)は磁気センサ20の
磁極21の下に、モータの回転子5が有るときと
無いときでは大きく異なることから、モータの回
転子5の軸方向位置すなわち弁軸1の全閉、全開
を判別できるものである。 The induced voltage (current) at this time differs greatly depending on whether or not the motor rotor 5 is located under the magnetic pole 21 of the magnetic sensor 20. Therefore, the axial position of the motor rotor 5, that is, the valve shaft 1 It is possible to distinguish between fully closed and fully open.
本発明では以上のように、円筒形の永久磁石の
外周面に多極着磁され、かつ、モータの固定子コ
イル12の軸方向の幅寸法Wよりも軸方向の幅の
寸法lの方を長くしたモータの回転子5の磁力
を、簡単な構成の磁気センサ20によつて検出す
ることによつて、回転子5と一体化された弁軸1
の軸方向位置を判別する構成のため、従来の電動
弁のような止めピン15,16や、ストツパ17
が不要となり問題となつていた機械的な衝撃当た
り音は完全になくなる実用上きわめて有益な発明
である。 As described above, in the present invention, the outer circumferential surface of a cylindrical permanent magnet is multi-pole magnetized, and the axial width l is larger than the axial width W of the stator coil 12 of the motor. The valve shaft 1 integrated with the rotor 5 is detected by detecting the magnetic force of the rotor 5 of the elongated motor with a magnetic sensor 20 having a simple configuration.
Because of the configuration that determines the axial position of the
This is an extremely useful invention in practice, as it eliminates the need for mechanical impact noise, which had been a problem, and completely eliminates it.
第1図は従来の電動弁の一構成例を示す縦断側
面図、第2図は従来の推進軸受の斜視図、第3図
は本発明に係る電動弁の一構成例を示す縦断側面
図、第4図は本発明の磁気センサの磁極構成を示
す斜視図、第5図は本発明の磁気センサを装着し
た一例を示す電動弁の部分縦断側面図、第6図は
第5図の−断面図。
1…弁軸、2…弁座、3…弁部、4…おねじ、
5…モータの回転子、6…軸受端、7…弁本体、
8…めねじ、9…推進軸受、10…ケース、11
…軸受、12…モータの固定子コイル、13,1
4…流体の出入口、15,16…止めピン、17
…ストツパ、19…固定穴、20…磁気センサ、
21…磁極、22…ヨーク、23…電気導線。
FIG. 1 is a longitudinal sectional side view showing an example of the configuration of a conventional electric valve, FIG. 2 is a perspective view of a conventional propulsion bearing, and FIG. 3 is a longitudinal sectional side view showing an example of the configuration of an electric valve according to the present invention. FIG. 4 is a perspective view showing the magnetic pole configuration of the magnetic sensor of the present invention, FIG. 5 is a partial longitudinal sectional side view of an electric valve equipped with the magnetic sensor of the present invention, and FIG. 6 is a cross section along the line shown in FIG. figure. 1...Valve stem, 2...Valve seat, 3...Valve part, 4...Male thread,
5... Motor rotor, 6... Bearing end, 7... Valve body,
8...Female thread, 9...Propulsion bearing, 10...Case, 11
...Bearing, 12...Motor stator coil, 13,1
4... Fluid inlet/outlet, 15, 16... Stopping pin, 17
...stopper, 19...fixing hole, 20...magnetic sensor,
21...Magnetic pole, 22...Yoke, 23...Electric conductor.
Claims (1)
したモータの固定子コイル12への通電により、
ケース10内に収納したおねじ4を有する弁軸1
と一体的に形成したモータの回転子5を回転さ
せ、この回転をめねじ8を切つた推進軸受9によ
り弁軸1の直進運動に変換することによつて弁座
2の開口度を制御する電動弁において、 非磁性体からなるケース10の外周部で、円筒
形の永久磁石の外周面に多極着磁してなるモータ
の回転子5に対応する位置に固定子コイル12を
設け、前記モータの回転子5の軸方向の幅寸法l
を、固定子コイル12の軸方向の幅寸法Wよりも
大きく形成し、前記モータの固定子コイル12端
部の前方と後方あるいはどちらか一方のケース上
に、モータの回転子5の磁力を検出する磁気セン
サ20を固定し、この磁気センサ20の出力が所
定量以上になつた際にモータ回転を停止させるよ
うにしたことを特徴とする電動弁の弁位置検出・
停止方法。 2 非磁性体からなるケース10の外周部に固定
したモータの固定子コイル12への通電により、
ケース10内に収納したおねじ4を有する弁軸1
と一体的に形成したモータの回転子5を回転さ
せ、この回転をめねじ8を切つた推進軸受9によ
り弁軸1の直進運動に変換することによつて弁座
2の開口度を制御する電動弁において、 非磁性体からなるケース10の外周部で、円筒
形の永久磁石の外周面に多極着磁してなるモータ
の回転子5に対応する位置に固定子コイル12を
設け、前記モータの回転子5の軸方向の幅寸法l
を、固定子コイル12の軸方向の幅寸法Wよりも
大きく形成し、前記モータの固定子コイル12端
部の前方と後方あるいはどちらか一方のケース上
に、軟磁性の材料からなる磁極21をケース10
の外径と同じ円周上にモータの回転子5の極数の
1/2の数だけ等分に配置し、各磁極21の一端側
を円環状のヨーク22により磁気的に一体となす
よう連結し、磁極21外周上に電気導線23を巻
くとともに、この電気導線23の両端を開放し、
この両端にあらわれる誘導電圧(電流)を出力と
する磁気センサ20を固定し、この磁気センサ2
0の出力が所定量以上になつた際にモータ回転を
停止させるようにしたことを特徴とする電動弁の
弁位置検出・停止方法。[Claims] 1. By energizing the stator coil 12 of the motor fixed to the outer periphery of the case 10 made of a non-magnetic material,
Valve shaft 1 with male thread 4 housed in case 10
The degree of opening of the valve seat 2 is controlled by rotating the rotor 5 of a motor integrally formed with the valve and converting this rotation into linear movement of the valve shaft 1 by means of a propulsion bearing 9 having a female thread 8. In the electric valve, a stator coil 12 is provided on the outer periphery of a case 10 made of a non-magnetic material at a position corresponding to the rotor 5 of the motor, which is formed by multipole magnetization on the outer periphery of a cylindrical permanent magnet. Axial width dimension l of motor rotor 5
is formed to be larger than the axial width W of the stator coil 12, and the magnetic force of the rotor 5 of the motor is detected on the case at the front and rear of the end of the stator coil 12 of the motor, or either one of them. Valve position detection of an electric valve, characterized in that a magnetic sensor 20 is fixed, and the motor rotation is stopped when the output of the magnetic sensor 20 exceeds a predetermined amount.
How to stop. 2. By energizing the stator coil 12 of the motor fixed to the outer periphery of the case 10 made of non-magnetic material,
Valve shaft 1 with male thread 4 housed in case 10
The degree of opening of the valve seat 2 is controlled by rotating the rotor 5 of a motor integrally formed with the valve and converting this rotation into linear movement of the valve shaft 1 by means of a propulsion bearing 9 having a female thread 8. In the electric valve, a stator coil 12 is provided on the outer periphery of a case 10 made of a non-magnetic material at a position corresponding to the rotor 5 of the motor, which is formed by multipole magnetization on the outer periphery of a cylindrical permanent magnet. Axial width dimension l of motor rotor 5
is formed to be larger than the axial width W of the stator coil 12, and a magnetic pole 21 made of a soft magnetic material is provided on the case at the front and rear of the stator coil 12 end of the motor, or either one of them. case 10
1/2 of the number of poles of the rotor 5 of the motor are equally spaced on the same circumference as the outer diameter of the motor, and one end of each magnetic pole 21 is magnetically integrated by an annular yoke 22. and wind the electric conductor 23 on the outer circumference of the magnetic pole 21, and open both ends of the electric conductor 23.
A magnetic sensor 20 that outputs the induced voltage (current) appearing at both ends of this magnetic sensor 20 is fixed, and this magnetic sensor 2
A method for detecting and stopping a valve position of an electric valve, characterized in that a motor rotation is stopped when a zero output exceeds a predetermined amount.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12191883A JPS6014679A (en) | 1983-07-04 | 1983-07-04 | Method of detecting valve position of motor driven valve and stopping thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12191883A JPS6014679A (en) | 1983-07-04 | 1983-07-04 | Method of detecting valve position of motor driven valve and stopping thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6014679A JPS6014679A (en) | 1985-01-25 |
| JPH0337671B2 true JPH0337671B2 (en) | 1991-06-06 |
Family
ID=14823130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12191883A Granted JPS6014679A (en) | 1983-07-04 | 1983-07-04 | Method of detecting valve position of motor driven valve and stopping thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6014679A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62104910U (en) * | 1985-12-23 | 1987-07-04 | ||
| DE19718454B4 (en) * | 1997-04-30 | 2006-04-13 | Samson Ag | differential pressure gauge |
| JP4335364B2 (en) * | 1999-06-29 | 2009-09-30 | 株式会社不二工機 | Electric valve opening degree detection device and electric valve opening degree control device |
| US6661125B2 (en) | 2000-03-02 | 2003-12-09 | Shinano Electronics Co., Ltd. | Linear motor |
| KR100453983B1 (en) | 2000-05-12 | 2004-10-26 | 가부시키가이샤 시나노 일렉트로닉스 | Platen for flat linear motor |
-
1983
- 1983-07-04 JP JP12191883A patent/JPS6014679A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6014679A (en) | 1985-01-25 |
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