JPH0338728B2 - - Google Patents
Info
- Publication number
- JPH0338728B2 JPH0338728B2 JP22279083A JP22279083A JPH0338728B2 JP H0338728 B2 JPH0338728 B2 JP H0338728B2 JP 22279083 A JP22279083 A JP 22279083A JP 22279083 A JP22279083 A JP 22279083A JP H0338728 B2 JPH0338728 B2 JP H0338728B2
- Authority
- JP
- Japan
- Prior art keywords
- aluminum
- oxide
- oxide film
- film
- porous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052782 aluminium Inorganic materials 0.000 claims description 14
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
- 239000011888 foil Substances 0.000 claims description 12
- 239000003990 capacitor Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 6
- 239000011148 porous material Substances 0.000 claims description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 4
- 239000010407 anodic oxide Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 239000000243 solution Substances 0.000 claims description 3
- -1 BaTiO2 Chemical class 0.000 claims description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 235000006408 oxalic acid Nutrition 0.000 claims description 2
- 238000000197 pyrolysis Methods 0.000 claims description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims 2
- 229910015806 BaTiO2 Inorganic materials 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 7
- 229910010413 TiO 2 Inorganic materials 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000001099 ammonium carbonate Substances 0.000 description 1
- 235000012501 ammonium carbonate Nutrition 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- WYXIGTJNYDDFFH-UHFFFAOYSA-Q triazanium;borate Chemical compound [NH4+].[NH4+].[NH4+].[O-]B([O-])[O-] WYXIGTJNYDDFFH-UHFFFAOYSA-Q 0.000 description 1
Landscapes
- Diaphragms For Electromechanical Transducers (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Engine Equipment That Uses Special Cycles (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
【発明の詳細な説明】
本発明は電極箔を改良したアルミニウム電解コ
ンデンサの製造方法に関するものである。近年電
子機器分野におけるセツトの小型化に対応して、
電子部品の小型化とその高密度実装技術の発展は
目ざましく、このため新材料の開発や応用技術の
要求は極めて高いものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing an aluminum electrolytic capacitor with improved electrode foil. In response to the miniaturization of sets in the electronic equipment field in recent years,
The miniaturization of electronic components and the development of their high-density packaging technology are remarkable, and as a result, there is an extremely high demand for the development of new materials and application technologies.
受動素子として用いられるアルミニウム電解コ
ンデンサも例外ではなく、この目的に沿つて高純
度アルミニウム箔表面を化学的または電気化学的
エツチング処理方法に関する研究が古くから行わ
れ、最近ではアルミニウムと異種金属からなる合
金箔の応用なども考案されている。 Aluminum electrolytic capacitors used as passive elements are no exception, and for this purpose research has long been conducted on chemical or electrochemical etching methods for the surface of high-purity aluminum foil, and recently, alloys made of aluminum and different metals have been studied. Applications of foil have also been devised.
このようにして拡大された表面積を有するアル
ミニウム箔はエツチング処理後、陽極酸化により
その表面にAl2O3からなる誘電体皮膜を生成した
のち、電極材料として利用されていることは衆知
のことである。エツチング処理技術の優劣は製品
の形状、寸法を定める重要なポイントであり、ア
ルミニウム箔の使用量が製品コストを決定する大
きなフアクターであることはいうまでもない。こ
のため過去において、多くの研究がなされ、種々
の方法が提案されてきた。 It is well known that aluminum foil, which has an expanded surface area in this way, is used as an electrode material after being etched and then anodized to form a dielectric film made of Al 2 O 3 on its surface. be. The quality of etching technology is an important factor in determining the shape and dimensions of a product, and it goes without saying that the amount of aluminum foil used is a major factor in determining product cost. For this reason, many studies have been conducted in the past and various methods have been proposed.
一方、このように拡大された表面積を有するエ
ツチング面を有効に活かすため、陽極酸化方法に
関しても種々検討されてきたが、これらはいずれ
も誘電体皮膜として純粋なγ―Al2O3を得るため
の努力であつた。 On the other hand, in order to make effective use of the etched surface with such an expanded surface area, various studies have been conducted regarding anodizing methods, but all of these methods have been used to obtain pure γ-Al 2 O 3 as a dielectric film. It was a great effort.
従つて、その比誘電体は7〜10程度と他の金属
酸化物に比べて決して高い値とは言えず、このた
め外形寸法を制約されると、エツチングによる表
面倍率の向上にたよらざるを得ず、この結果、得
られたエツチング箔は極めて複雑で深いエツチン
グ孔を有し、物理的強度が低下するという大きな
欠点を有していた。 Therefore, its relative dielectric constant is about 7 to 10, which is by no means a high value compared to other metal oxides, and therefore, if the external dimensions are restricted, it is necessary to rely on etching to improve the surface magnification. As a result, the resulting etched foil had extremely complicated and deep etched holes, and had the major drawback of reduced physical strength.
本発明は上述の欠点を改良するためになされた
もので、多孔質Al2O3からなる陽極酸化皮膜の孔
中をAl2O3より高い比誘電率を有する酸化物で封
孔処理し、この結果得られた複合酸化物膜を誘電
体として用いることにより、従来法では得られな
かつた小型で大きな静電容量を有するアルミニウ
ム電解コンデンサの製造方法を提供しようとする
ものである。 The present invention was made in order to improve the above-mentioned drawbacks, and the pores of the anodic oxide film made of porous Al 2 O 3 are sealed with an oxide having a dielectric constant higher than that of Al 2 O 3 . By using the resulting composite oxide film as a dielectric, the present invention attempts to provide a method for manufacturing an aluminum electrolytic capacitor that is small and has a large capacitance that could not be obtained using conventional methods.
以下、本発明の一実施例に基づいて詳細に説明
する。 Hereinafter, a detailed explanation will be given based on one embodiment of the present invention.
電解エツチングによつて表面積を拡大した高純
度アルミニウム箔を蓚酸5〜10%の水溶液55〜66
℃中で、2〜3A/dm2の電流密度にて5〜10分
間陽極酸化し、0.4〜0.5μm厚さの多孔質皮膜を
形成する。次いで、TiO24%のアルコラードベン
ゼン溶液の常温中に該アルミニウム箔を浸漬した
のち、30〜35cm/minの速度で引き上げ多孔質皮
膜の孔中にTiO2アルコラート溶液を吸着させ、
しかるのち、400±20℃の雰囲気中で加熱処理す
る塗膜熱分解法によつて、孔中をアモルフアス化
したTiO2で満たした。 High-purity aluminum foil whose surface area has been expanded by electrolytic etching is soaked in an aqueous solution of 55-66% oxalic acid.
C. for 5 to 10 minutes at a current density of 2 to 3 A/dm 2 to form a porous film with a thickness of 0.4 to 0.5 μm. Next, the aluminum foil was immersed in a 4% TiO 2 alcoholate benzene solution at room temperature, and then pulled up at a speed of 30 to 35 cm/min to adsorb the TiO 2 alcoholate solution into the pores of the porous film.
Thereafter, the pores were filled with amorphous TiO 2 using a coating film pyrolysis method in which heat treatment was performed in an atmosphere of 400±20°C.
引き上げ法によれば多孔質皮膜の孔中は吸着力
が強いため、比較的容易にアルコラートが吸着さ
れるが、皮膜表面は濡れ性が悪いため、TiO2酸
化物層はほとんど生成しなかつた。 According to the pulling method, the alcoholate was adsorbed relatively easily in the pores of the porous film due to its strong adsorption power, but the film surface had poor wettability, so almost no TiO 2 oxide layer was formed.
このようにして得られた陽極酸化皮膜はAl2O3
とTiO2との複合形酸化物を形成し、Al2O3の比誘
電率がみかけ上、向上した場合と同様の結果を得
ることができ、静電容量は単位面積当り通常の場
合の50〜70%向上した。 The anodic oxide film obtained in this way is Al 2 O 3
By forming a composite oxide with Al 2 O 2 and TiO 2 , it is possible to obtain the same results as when the dielectric constant of Al 2 O 3 is apparently improved, and the capacitance per unit area is 50% lower than in the normal case. ~70% improvement.
従来、この種の多孔質皮膜はそのままでは電気
的な耐圧が低く実用に耐えないため、硼酸アンモ
ニウムや炭酸アンモニウムまたは燐酸などの水溶
液中で、二次的陽極酸化処理を行つているが、そ
の際孔を満たすものはAl2O3である。 Conventionally, this type of porous coating has a low electrical withstand voltage and cannot be put to practical use as it is, so a secondary anodization treatment is performed in an aqueous solution of ammonium borate, ammonium carbonate, or phosphoric acid. What fills the pores is Al 2 O 3 .
このようにして得られた、陽極酸化皮膜は耐熱
性が高いなど、物理的な特性が優れているため、
大きなリツプル電流が連続的に印加されたり、交
流が断続的に印加させる回路など、特殊用途で大
きな効果があることが認められた。 The anodic oxide film obtained in this way has excellent physical properties such as high heat resistance, so
It has been found to be highly effective in special applications, such as circuits where large ripple currents are continuously applied or where alternating current is applied intermittently.
従つて、このような目的で用いられる従来のア
ルミニウム電解コンデンサの陽極箔は、一般に低
倍率エツチング処理したりあるいはエツチング処
理を施さないプレイン箔などを使用するため、回
路設計上必要な静電容量を得るために、必然的に
通常のアルミニウム電解コンデンサより、広い電
極面積を必要とするため、その結果、巻回したコ
ンデンサ素子も大きくなり、寸法、コストともに
必ずしも満足できるものではなかつたが、上述の
ように本発明によれば、小型で特性の優れた電解
コンデンサの製造が可能となり、工業的ならびに
実用的価値の大なるものである。 Therefore, the anode foil of conventional aluminum electrolytic capacitors used for this purpose is generally etched at a low magnification or plain foil without etching, which reduces the capacitance required for circuit design. In order to achieve this, a larger electrode area is inevitably required than that of a normal aluminum electrolytic capacitor, and as a result, the wound capacitor element also becomes larger, and the size and cost are not necessarily satisfactory. According to the present invention, it is possible to manufacture a small electrolytic capacitor with excellent characteristics, which is of great industrial and practical value.
Claims (1)
化された多孔質陽極酸化被膜を有するアルミニウ
ム電解コンデンサ用電極箔を、Ta2O5、TiO2、
BaTiO2などの酸化アルミニウムより高い比誘電
率を有する金属酸化物や、複合酸化物の単独、ま
たはそれらの混合されたアルコラート溶液中に浸
漬もしくは塗布したのち、塗膜熱分解法によつ
て、アルミニウム多孔質酸化被膜の孔中を該酸化
物で満たし、複合型誘電体被膜を生成した電極箔
を用いたことを特徴とするアルミニウム電解コン
デンサの製造方法。 1 Electrode foil for aluminum electrolytic capacitors having a porous anodic oxide film anodized in an aqueous solution of phosphoric acid, oxalic acid, sulfuric acid, etc.
After immersing or coating metal oxides such as BaTiO2 , which have a dielectric constant higher than aluminum oxide, or composite oxides alone or in an alcoholate solution containing a mixture thereof, aluminum is processed using a coating pyrolysis method. A method for manufacturing an aluminum electrolytic capacitor, comprising using an electrode foil in which the pores of a porous oxide film are filled with the oxide to form a composite dielectric film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22279083A JPS60115215A (en) | 1983-11-26 | 1983-11-26 | Aluminum electrolytic condenser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22279083A JPS60115215A (en) | 1983-11-26 | 1983-11-26 | Aluminum electrolytic condenser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60115215A JPS60115215A (en) | 1985-06-21 |
| JPH0338728B2 true JPH0338728B2 (en) | 1991-06-11 |
Family
ID=16787936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22279083A Granted JPS60115215A (en) | 1983-11-26 | 1983-11-26 | Aluminum electrolytic condenser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60115215A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4225920A1 (en) * | 1992-08-05 | 1994-02-10 | Roederstein Kondensatoren | Capacitor, especially electrolytic capacitor |
| SE522898C2 (en) * | 2001-06-14 | 2004-03-16 | Aluwave Ab | Method for reducing the dimensions of mechanical components intended for microwave applications using aluminum |
| CN106757274B (en) * | 2016-11-23 | 2018-10-19 | 南京航空航天大学 | The method that one-step method prepares black oxidation titanium/alumina composite ceramic coating |
-
1983
- 1983-11-26 JP JP22279083A patent/JPS60115215A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60115215A (en) | 1985-06-21 |
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