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JPH033900B2 - - Google Patents
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JPH033900B2 - - Google Patents

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Publication number
JPH033900B2
JPH033900B2 JP57126555A JP12655582A JPH033900B2 JP H033900 B2 JPH033900 B2 JP H033900B2 JP 57126555 A JP57126555 A JP 57126555A JP 12655582 A JP12655582 A JP 12655582A JP H033900 B2 JPH033900 B2 JP H033900B2
Authority
JP
Japan
Prior art keywords
gas
heat
detector
ceramic insulator
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57126555A
Other languages
Japanese (ja)
Other versions
JPS5915848A (en
Inventor
Akio Takami
Toshitaka Matsura
Hideki Kudo
Tetsupei Ookawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP12655582A priority Critical patent/JPS5915848A/en
Publication of JPS5915848A publication Critical patent/JPS5915848A/en
Publication of JPH033900B2 publication Critical patent/JPH033900B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G01K7/04Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples the object to be measured not forming one of the thermoelectric materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

本発明は検知器に関するものである。更に詳し
くは本発明は感ガス特性、感温特性がよく応答性
と共に耐久性にもすぐれた検知器に係わるもので
ある。 感ガス検知器や感熱検知器は、工業用あるいは
家庭用の燃料機器や自動車エンジン部における適
切な燃料の供給や有害な燃料廃ガスの発生を制御
する機器として重要な役割を果するものであり、
最近では広く汎用されるようになつた。しかし
て、該検知器を自動車エンジンの排ガス用のもの
を例にとれば感熱素子ができるだけ速く排ガス温
度に追随し、かつ、真のガス温に近い値が示され
ることが重要である。又、感ガス素子の場合も、
エンジン始動後、排ガスにより温められ活性温度
にいち早く到達するものほど早く作動して正しい
値を示すこととなる。すなわち、このことは、排
ガス組成をフイードバツクコントロールする場合
にはいち早く作動することにより、排ガス用の浄
化触媒を有効に働かせて有害な排ガスの排出の防
止を可能にするものである。一方、感ガス、感熱
検知器は、それら自体が燃焼設備から排出直後の
高温ガス雰囲気中に曝露させるものである故、上
記のような苛酷な条件下における応答性が優れて
いることのほかに、耐久性も併せて、具備するも
のであることが要求されるが、両要件を共に満足
するものは得られていないのが現状である。 本発明は叙上の事情に鑑み、耐久性に富み定常
状態における感熱、感ガス特性のみならず、非常
時例えばエンジン始動直後における応答性特性の
改善された感熱ならび感ガス検知器を得べく種々
検討の結果、感ガスならびに感熱素子と、それに
具備される電極線を特定の材料から選択するとと
もに、その電極線を貫通させるセラミツク碍管の
材料を特定の材料から選択することにより、応答
性のみならかず、耐久性についても満足しうる検
知器を見出すに到つたものである。すなわち、本
発明は感ガス素子又は感熱素子と、これに接続す
る電極線を貫通させたセラミツク碍管とからなる
検知器において、該セラミツク碍管が、ジルコニ
ア、フオルステライト、及びステアタイトから選
ばれた材料であり、該電極線がニツケル、ニツケ
ル合金、及びステンレスから選ばれた材料であ
り、更に、電極線とセラミツク碍管とを耐熱性接
着剤で接合させて構造よりなる検知器を要旨する
ものである。 以下、本発明を図面に基いて説明する。 第1図イ,ロは本発明に係る熱電体素子を備え
た感熱検知器の一例で一部を断面で表わした側面
図及び長手方向に対する直角断面図である。1は
セラミツク碍管であり、これには貫通孔が設けら
れ2本の電極線が22が貫通している。電極線2
2とセラミツク碍管1との間には耐熱性接着剤3
を介在させ、電極線22はそれぞれ貫通孔内に固
定される。4は電極線22の先端に設けられる熱
電対素子で検知される熱雰囲気に応じて例えば
PR熱電体素子、CC熱電対素子、CRC熱電対素
子、C0O−Al2O3熱電対素子、ZrO2等のサーミス
ター、CA熱電対素子、IC熱電対素子等、その他
公知のものから選択したものが取り付けられる。
5は熱雰囲気下にある燃焼排ガスの排出管などに
固定させるための金属固定具である。上記におい
てセラミツク碍管1は、熱雰囲気に曝露したとき
雰囲気から感熱、感ガス素子へ移動する熱量を奪
い去らないようにするためには、ある程度熱伝導
率が低い材料からなるものが要求され、又、取り
扱いの容易さ、耐久性を向上させる目的からも、
強度が1000Kg/cm2以上のものが要求される。 しかして、後記の材質の電極線と結合させるた
めには、両者の間に熱歪によつて作用する熱応力
を最小にする必要から熱膨脹係数が85×10-7
C-1以上の材質のものがよく、そのような条件に
副う材料としてジルコニア、フオルステライナ、
ステアタイトが適しており、この中でも特に、フ
オルステライトはセラミツク碍管用の材料として
コスト面、および性能の点で最も優れている。電
極線22の材質としては熱雰囲気に耐える耐熱性
を備えるものとして、ニツケル、ニツケル合金ス
テンレス線があげられる。この中でもステンレス
線がコスト的に最も有利である。耐熱性接着剤3
としては通常用いられるガラス封止剤(水ガラス
セメント)、セラミツクセメント、のほか、電極
線上にニツケル、または銅メツキを施しその酸化
膜を潤滑層として利用する方法をとつてもよい。
耐熱接着剤3を設けることにより、電極線22の
セラミツク碍管1に対する保持固定を確実にする
ことができて、両者間の空隙を除き、気密性のよ
い、検知器をうることができると共に、振動下に
おける検知器の使用において、電極の揺動を防止
し、素子の機械的破損を防止できる。さらに又、
金属電極自身を被倹ガスの侵害から防止する機能
を果するものである。 第2図イ,ロは本発明に係る感ガス素子を備え
た感ガス素子検知器の一例で、一部を断面で表わ
した側面図、及び検知器先端にとりつけられる感
ガス素子の側面図である。図において、第1図と
番号の一致するものは同図と同一の意味を持つ。
7は感ガス素子であり、検知されるべき排出ガス
の成分に応じて電気抵抗の変化する金属酸化物半
導体が適用される。例えば自動車排ガスや、工場
における燃焼設備からの排ガス中の酸素検出に
は、酸化チタン、酸化コバルトを主体としたセラ
ミツク焼結体、該ガス中の炭化水素ガスや一散化
炭素の検出には酸化錫、酸化亜鉛を主体としたセ
ラミツク焼結体に、白金電極8を埋没したものが
用いられ、電極線22と溶接されて、セラミツク
碍管1に取付けられる。なお6はセラミツク碍管
1ならびに感ガス素子7を保護するための、雰囲
気ガス出入孔6aを設けたプロテクターである。
そのほかセラミツク碍管1の材料、電極線2の材
質については第1図の感熱検知器の場合と変ると
ころはない。 本発明は以上のべたように、感熱又は感ガス素
子を出力応答性がよく、熱応力の小さな特定の材
料範囲のセラミツク碍管に設け、該碍管内には、
セラミツク碍管と組合わせた場合に耐久性を相乗
的に発揮する特定の材質範囲の電極線を備え、さ
らに該セラミツク碍管と電極線との間にはその耐
久性を助勢する作用をなす耐熱性接着剤を充填し
て電極線のセラミツク碍管への固定化をはかつた
検知器であり、応答性を耐久性において、従来公
知の検知器に較べてはるかに優れたものであり、
その工業的利用価値は大である。 次に本発明を実施例によつて説明するが本発明
はその要旨を越ない限り以下の実施例に限定され
ることはない。 実施例 1 下記の第1表に掲げた材料を用い0.8φの貫通孔
を2本設けた直径が5φの円柱状セラミツク碍管
生地を成型後、第1表に示す温度に焼成して第1
図に示すようなセラミツク碍管1を得た。このセ
ラミツク碍管の各貫通孔にCA熱電対を挿入し、
接続する電極ニツケル線1を貫通孔内において耐
熱性接着剤3として水ガラスセメントにより固定
し、更にその先端にCA熱電対素子4を取り付け、
基部を金属固定具5に水ガラスセメントで固定
し、金属固定具5を介して、燃焼装置におけるガ
ス燃焼筒(図示せず)内に、締め付けて固定し、
排ガス雰囲気中に曝露し温度を検出した。検温は
セラミツク碍管を用いない検出器によつて測定し
たときの温度320℃を基準にして行つた。又、排
ガス検温途中における200℃に到達するまでに要
した時間を比較した。この結果を第1表に示す。
The present invention relates to a detector. More specifically, the present invention relates to a detector that has good gas-sensitive characteristics, good temperature-sensitive characteristics, responsiveness, and durability. Gas-sensitive detectors and heat-sensitive detectors play an important role as devices that control the appropriate supply of fuel and the generation of harmful fuel waste gas in industrial and household fuel equipment and automobile engines. ,
Recently, it has become widely used. For example, if the detector is for exhaust gas from an automobile engine, it is important that the heat-sensitive element follows the exhaust gas temperature as quickly as possible and indicates a value close to the true gas temperature. Also, in the case of gas-sensitive elements,
After the engine starts, the faster the engine warms up with exhaust gas and reaches its activation temperature, the sooner it will operate and show the correct value. In other words, this means that when performing feedback control on the exhaust gas composition, the exhaust gas purification catalyst can be operated effectively to prevent harmful exhaust gas from being discharged by being activated quickly. On the other hand, gas-sensitive and heat-sensitive detectors are exposed to the high-temperature gas atmosphere immediately after being discharged from combustion equipment, so they have excellent responsiveness under the harsh conditions mentioned above. However, at present, there is no material that satisfies both requirements. In view of the above-mentioned circumstances, the present invention aims to provide a heat-sensitive and gas-sensitive detector that is highly durable and has not only heat-sensitive and gas-sensitive characteristics in a steady state, but also improved response characteristics in an emergency, for example, immediately after starting an engine. As a result of our studies, we found that by selecting specific materials for the gas- and heat-sensitive elements and the electrode wires included therein, and by selecting a specific material for the ceramic insulator tube through which the electrode wires pass, we found that not only the responsiveness but also the responsiveness could be improved. First, we have found a detector that is also satisfactory in terms of durability. That is, the present invention provides a detector comprising a gas-sensitive element or a heat-sensitive element and a ceramic insulator tube through which electrode wires connected to the element are passed, wherein the ceramic insulator tube is made of a material selected from zirconia, forsterite, and steatite. , the electrode wire is made of a material selected from nickel, nickel alloy, and stainless steel, and the detector is constructed by bonding the electrode wire and a ceramic insulator tube with a heat-resistant adhesive. . Hereinafter, the present invention will be explained based on the drawings. FIGS. 1A and 1B are a partially sectional side view and a sectional view at right angles to the longitudinal direction of an example of a heat-sensitive detector equipped with a thermoelectric element according to the present invention. Reference numeral 1 denotes a ceramic insulator tube with a through hole through which two electrode wires 22 pass. Electrode wire 2
A heat-resistant adhesive 3 is placed between 2 and the ceramic insulator 1.
The electrode wires 22 are respectively fixed in the through holes. 4, for example, depending on the thermal atmosphere detected by the thermocouple element provided at the tip of the electrode wire 22.
From PR thermocouple elements, CC thermocouple elements, CRC thermocouple elements, C 0 O−Al 2 O 3 thermocouple elements, thermistors such as ZrO 2 , CA thermocouple elements, IC thermocouple elements, and other known items. The selected item will be installed.
Reference numeral 5 denotes a metal fixture for fixing to a combustion exhaust gas exhaust pipe or the like in a hot atmosphere. In the above, the ceramic insulator 1 is required to be made of a material with a certain degree of low thermal conductivity in order to prevent the transfer of heat from the atmosphere to the heat-sensitive or gas-sensitive element when exposed to a hot atmosphere. , for the purpose of improving ease of handling and durability.
A strength of 1000 kg/cm 2 or more is required. However, in order to bond with the electrode wire made of the material described later, it is necessary to minimize the thermal stress that acts between the two due to thermal strain, so the coefficient of thermal expansion is 85 × 10 -7 .
Materials with a rating of C -1 or higher are preferred; zirconia, forster liner,
Steatite is suitable, and among these, forsterite is the most excellent material for ceramic insulators in terms of cost and performance. Examples of the material for the electrode wire 22 include nickel and nickel alloy stainless wire, which have heat resistance to withstand a hot atmosphere. Among these, stainless steel wire is the most advantageous in terms of cost. Heat resistant adhesive 3
In addition to the commonly used glass sealants (water glass cement) and ceramic cement, it is also possible to use nickel or copper plating on the electrode wire and use the oxide film as a lubricating layer.
By providing the heat-resistant adhesive 3, it is possible to securely hold and fix the electrode wire 22 to the ceramic insulator tube 1, eliminate the gap between the two, and obtain a detector with good airtightness. When using the detector below, it is possible to prevent the electrode from swinging and mechanical damage to the element. Furthermore,
This serves to prevent the metal electrode itself from being attacked by the gas it absorbs. Figures 2A and 2B show an example of a gas-sensitive element detector equipped with a gas-sensitive element according to the present invention, and show a partially sectional side view and a side view of the gas-sensitive element attached to the tip of the detector. be. In the figures, the same numbers as in FIG. 1 have the same meanings as in the same figure.
Reference numeral 7 denotes a gas-sensitive element, to which a metal oxide semiconductor whose electrical resistance changes depending on the components of the exhaust gas to be detected is applied. For example, ceramic sintered bodies mainly made of titanium oxide and cobalt oxide are used to detect oxygen in automobile exhaust gas or exhaust gas from combustion equipment in factories, and oxidized bodies are used to detect hydrocarbon gases and monodispersed carbon in the gas. A ceramic sintered body mainly composed of tin and zinc oxide with a platinum electrode 8 embedded therein is used, and is welded to an electrode wire 22 and attached to the ceramic insulator tube 1. Note that 6 is a protector provided with atmospheric gas inlet/outlet holes 6a for protecting the ceramic insulator tube 1 and the gas-sensitive element 7.
In other respects, the materials of the ceramic insulator tube 1 and the electrode wires 2 are the same as those of the heat-sensitive detector shown in FIG. As described above, the present invention provides a heat-sensitive or gas-sensitive element in a ceramic insulator tube made of a specific material range with good output response and low thermal stress, and in the insulator tube,
Equipped with an electrode wire made of a specific material range that synergistically exhibits durability when combined with a ceramic insulator tube, and a heat-resistant adhesive between the ceramic insulator tube and the electrode wire that acts to enhance the durability. This is a detector that fixes electrode wires to a ceramic insulator tube by filling it with a chemical agent, and it is far superior to conventionally known detectors in terms of response and durability.
Its industrial utility value is great. Next, the present invention will be explained using Examples, but the present invention is not limited to the following Examples unless the gist of the invention is exceeded. Example 1 Using the materials listed in Table 1 below, a cylindrical ceramic insulator tube material with a diameter of 5φ with two through holes of 0.8φ was molded, and then fired at the temperature shown in Table 1.
A ceramic insulator 1 as shown in the figure was obtained. Insert a CA thermocouple into each through hole of this ceramic insulator,
The electrode nickel wire 1 to be connected is fixed in the through hole with water glass cement as a heat-resistant adhesive 3, and a CA thermocouple element 4 is attached to the tip of the wire.
The base is fixed to a metal fixture 5 with water glass cement, and is tightened and fixed in a gas combustion cylinder (not shown) in a combustion device via the metal fixture 5,
It was exposed to the exhaust gas atmosphere and the temperature was detected. Temperature measurement was performed based on a temperature of 320°C when measured by a detector that did not use a ceramic insulator tube. We also compared the time required to reach 200°C during exhaust gas temperature measurement. The results are shown in Table 1.

【表】【table】

【表】 以上の結果から明らかとおり、本発明品は、温
度に対する応答性が比較例のものに比べ速いこと
が分る。 実施例 2 粒径が1μの酸化チタンに白金黒を5重量%混
合したチタニア原料に、直径0.3φ、長さ8mmの
PR13%電極8を埋設し、サイズが2×4×1t
第2図に示すような形状に成形して1200℃で1時
間焼成して同図に示す感ガス素子7を得た。上記
PR電極の端部に長さ80mm、直径0.6φのニツケル
線2を溶液し、実施例1の場合と同様の各種材料
からなるセラミツク碍管1の貫通孔に通し、耐熱
性接着剤3としてセラミツクリン酸セメントで固
定した。そして基部をセラミツクリン酸セメント
で金属固定具15に固定し、更に、セラミツク碍
管及び感ガス素子を覆うようにプロテクター6を
接合し、第3図に示すような感ガス検知器を作成
した。これを金属固定具5を介して燃焼装置にお
けるガス燃焼筒(図示せず)内に締め付けて固定
し、温度320℃、CO含有量が0.5%の排ガス雰囲
気中に曝露した。このとき、第3図ロに示す電気
回路により出力を測定し、これと応答時間との関
係を調査した。この結果を第4図のグラフで示
す。因みに同図において番号は、前記の実施例1
における第1表と同一の番号を意味する。この結
果から明らかなように本発明品は比較的に比べて
著しく出力に対する応答性が優れていることが分
る。 実施例 3 実施例2と同一の感ガス素子を用い、次の第2
表に示す各種電極線及びセラミツク材料からなる
セラミツク碍管を用いて実施例2と同タイプの感
ガス検知器を作成した。この検知器の感ガス素子
部分をバーナーで850℃に加熱し、次に圧縮空気
で200℃に冷却し、これを5分毎に反覆して、電
極線とセラミツク碍管との熱歪による電極線の切
数の発生するまでのサイクル数をカウントした。
この結果を第2表に示す。
[Table] As is clear from the above results, it can be seen that the products of the present invention have faster response to temperature than those of the comparative examples. Example 2 A titania material with a diameter of 0.3φ and a length of 8 mm was added to a titania raw material made by mixing titanium oxide with a particle size of 1μ with 5% by weight of platinum black.
A 13% PR electrode 8 was buried therein, formed into a shape of 2×4×1 t as shown in FIG. 2, and fired at 1200° C. for 1 hour to obtain the gas-sensitive element 7 shown in the figure. the above
A nickel wire 2 with a length of 80 mm and a diameter of 0.6φ is dissolved at the end of the PR electrode, passed through the through hole of a ceramic insulator tube 1 made of various materials similar to those in Example 1, and a ceramic wire is used as a heat-resistant adhesive 3. Fixed with acid cement. Then, the base was fixed to the metal fixture 15 with ceramic phosphate cement, and the protector 6 was further bonded to cover the ceramic insulator tube and the gas-sensitive element, thereby creating a gas-sensitive detector as shown in FIG. 3. This was fastened and fixed in a gas combustion tube (not shown) in a combustion device via a metal fixture 5, and exposed to an exhaust gas atmosphere having a temperature of 320° C. and a CO content of 0.5%. At this time, the output was measured using the electric circuit shown in FIG. 3B, and the relationship between this and the response time was investigated. The results are shown in the graph of FIG. Incidentally, in the figure, the numbers refer to the above-mentioned Example 1.
means the same numbers as in Table 1. As is clear from these results, the product of the present invention has a comparatively superior response to output. Example 3 Using the same gas-sensitive element as in Example 2, the following second
A gas-sensitive detector of the same type as in Example 2 was prepared using the various electrode wires shown in the table and a ceramic insulator made of ceramic material. The gas-sensitive element part of this detector is heated to 850℃ with a burner, then cooled to 200℃ with compressed air, and this is repeated every 5 minutes. The number of cycles until the cutoff occurred was counted.
The results are shown in Table 2.

【表】 以上の結果から明らかなように、本発明のセラ
ミツク碍管と電極線との組み合わせよりなる検知
器は比較例に比べて、熱歪みが少なく、従つて断
線発生が少なくて耐久性に優れていることが分
る。
[Table] As is clear from the above results, the detector made of the combination of the ceramic insulator tube and electrode wire of the present invention has less thermal distortion than the comparative example, and therefore has excellent durability with less occurrence of wire breakage. I can see that

【図面の簡単な説明】[Brief explanation of drawings]

第1図イは一部を断面で表わした本発明の感熱
検知器の一例の側面図、ロ図はイ図のA−A′線
における断面図、第2図イは一部を断面で表わし
た本発明の感ガス検知器の一例の側面図、ロは図
はイ図における感ガス素子の電極線の接合状態を
示す側面図、第3図は第2図イの感ガス検知器の
出力と応答性との関係を示すグラフで、第4図は
そのときの電気回路図である。 1……セラミツク碍管、2……電極線、3……
耐熱性接着剤、4……熱電対素子、5……金属固
定具、6……プロテクター、7……感ガス素子、
8……白金電極。
Figure 1A is a side view of an example of the heat-sensitive detector of the present invention, partially shown in cross section, Figure B is a sectional view taken along line A-A' in Figure A, and Figure 2A is partially shown in cross section. Figure 3 is a side view of an example of the gas-sensitive detector of the present invention; FIG. 4 is a graph showing the relationship between response and responsiveness, and FIG. 4 is an electrical circuit diagram at that time. 1... Ceramic insulator tube, 2... Electrode wire, 3...
Heat-resistant adhesive, 4... thermocouple element, 5... metal fixture, 6... protector, 7... gas sensitive element,
8...Platinum electrode.

Claims (1)

【特許請求の範囲】 1 感ガス素子又は感熱素子と、これに接続する
電極線を貫通させたセラミツク碍管とからなる検
知器において、該セラミツク碍管が、ジルコニ
ア、フオルステライト及びステアタイトから選ば
れた材料であり、該電極線がニツケル、ニツケル
合金、及びステンレスから選ばれた材料であり、
更に電極線とセラミツク碍管とを耐熱性接着剤で
接合させた構造よりなることを特徴とする検知
器。 2 感ガス素子が、検知されるべきガスの種類に
応じて電気抵抗の変化する金属酸化物半導体から
なる特許請求の範囲第1項記載の検知器。 3 感熱素子が、検知されるべき雰囲気温度に応
じて電気抵抗の変化するサーミスターからなる特
許請求の範囲第1項記載の検知器。
[Scope of Claims] 1. A detector comprising a gas-sensitive element or a heat-sensitive element and a ceramic insulator tube through which an electrode wire connected to the element is passed, wherein the ceramic insulator tube is selected from zirconia, forsterite, and steatite. the electrode wire is made of a material selected from nickel, nickel alloy, and stainless steel;
Furthermore, the detector is characterized in that it has a structure in which an electrode wire and a ceramic insulator are bonded together using a heat-resistant adhesive. 2. The detector according to claim 1, wherein the gas-sensitive element is made of a metal oxide semiconductor whose electrical resistance changes depending on the type of gas to be detected. 3. The detector according to claim 1, wherein the heat-sensitive element is a thermistor whose electrical resistance changes depending on the ambient temperature to be detected.
JP12655582A 1982-07-19 1982-07-19 Detector Granted JPS5915848A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12655582A JPS5915848A (en) 1982-07-19 1982-07-19 Detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12655582A JPS5915848A (en) 1982-07-19 1982-07-19 Detector

Publications (2)

Publication Number Publication Date
JPS5915848A JPS5915848A (en) 1984-01-26
JPH033900B2 true JPH033900B2 (en) 1991-01-21

Family

ID=14938061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12655582A Granted JPS5915848A (en) 1982-07-19 1982-07-19 Detector

Country Status (1)

Country Link
JP (1) JPS5915848A (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5656685A (en) * 1979-10-15 1981-05-18 Hitachi Ltd Electrostrictive substrate

Also Published As

Publication number Publication date
JPS5915848A (en) 1984-01-26

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