JPH0341767B2 - - Google Patents
Info
- Publication number
- JPH0341767B2 JPH0341767B2 JP1419582A JP1419582A JPH0341767B2 JP H0341767 B2 JPH0341767 B2 JP H0341767B2 JP 1419582 A JP1419582 A JP 1419582A JP 1419582 A JP1419582 A JP 1419582A JP H0341767 B2 JPH0341767 B2 JP H0341767B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- nozzle
- frequency
- signal
- nozzle flapper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/42—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using fluid means
- G01D5/44—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using fluid means using jets of fluid
- G01D5/46—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using fluid means using jets of fluid by deflecting or throttling the flow
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Feedback Control In General (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
Description
【発明の詳細な説明】
この発明はノズルフラツパとして電歪素子を用
いた電・空変換器に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electro-pneumatic converter using an electrostrictive element as a nozzle flapper.
これまでに、電歪素子でノズルフラツパを構成
し、この電歪素子に入力電圧(直流電圧)を印加
しその印加した電圧に応じた歪を電歪素子に生起
させ、この歪によるフラツパの変化によりノズル
口を開閉し入力電圧に応じた背圧を得るようにし
た電・空変換器が提案されている。しかしながら
上記のすでに提案されている電・空変換器は電歪
素子に印加される電圧が直流電圧であるためにノ
ズルフラツパの変位が小さいという欠点があつ
た。 Until now, we have constructed a nozzle flapper using an electrostrictive element, applied an input voltage (DC voltage) to this electrostrictive element, and caused strain in the electrostrictive element according to the applied voltage. An electric/pneumatic converter has been proposed in which a nozzle opening is opened and closed to obtain back pressure according to the input voltage. However, the previously proposed electro-pneumatic converters described above have the disadvantage that the displacement of the nozzle flapper is small because the voltage applied to the electrostrictive element is a DC voltage.
この発明の目的は上記したすでに提案された
電・空変換器の欠点を解消しノズルフラツパの変
位が大きくとれノズルフラツパを安定した位置で
駆動し得る電・空変換器を提供するにある。 An object of the present invention is to provide an electro-pneumatic converter which eliminates the drawbacks of the previously proposed electro-pneumatic converters mentioned above, allows a large displacement of the nozzle flapper, and can drive the nozzle flapper in a stable position.
以上の目的を達成するためにこの発明の電・空
変換器は入力電圧に応じて周波数が変化し、かつ
瞬時値が三角波・鋸歯状波・正弦波等のように時
間的に変化する交流電圧を発生する回路を設け、
この交流電圧発生回路の信号周波数の変化範囲が
電歪素子の機械的共振周波数の近傍でこの共振周
波数よりも低域側もしくは高域側の一方となるよ
うに設定し、入力電圧の変化による周波数の変化
に対応してノズルフラツパの変位振幅値が変化す
ることによりノズルの全閉時間の比率を変えて入
力電圧に応じた背圧を得るようにしている。 In order to achieve the above object, the electro-pneumatic converter of the present invention uses an AC voltage whose frequency changes depending on the input voltage and whose instantaneous value changes over time like a triangular wave, sawtooth wave, sine wave, etc. A circuit is provided to generate
The change range of the signal frequency of this AC voltage generation circuit is set to be near the mechanical resonance frequency of the electrostrictive element and either lower or higher than this resonance frequency, and the frequency due to changes in the input voltage is By changing the displacement amplitude value of the nozzle flapper in response to a change in the nozzle, the ratio of the nozzle fully closed time is changed to obtain a back pressure corresponding to the input voltage.
以下図面に示す実施例によりこの発明を詳細に
説明する。 The present invention will be explained in detail below with reference to embodiments shown in the drawings.
第1図はこの発明の一実施例を示す電・空変換
器のブロツク図である。図において入力端子1
a,1bは入力電圧Viが加えられるようになつ
ている。2はPI調節器であつてコンデンサC1,
C2、抵抗R及び演算増幅器3で構成されている
がこの回路自体はすでによく知られた回路であ
る。PI調節器2の出力は電圧/周波数変換器4
に加えられるようになつている。この電圧/周波
数変換器4は、入力側に加えられる電圧値に対応
した周波数の交流信号を出力するようになつてい
る(第2図参照)。この実施例では電圧/周波数
変換器4より出力される交流信号は三角波となつ
ている。電圧/周波数変換器4より出力された三
角波信号はノズルフラツパ5に印加されるように
なつている。ノズルフラツパ5は電歪素子6a,
6bが金属薄板7をサンドイツチ状にはさむ形で
構成されている。電歪素子6a,6bには上記電
圧/周波数変換器4よりの三角波信号が加えら
れ、金属薄板7はアース接続されている。さらに
ノズルフラツパ5は一方端で支持部8に片持して
おり他方端の金属薄板7の突出部7aが加えられ
る交流電圧に応じて振動するようになつている。 FIG. 1 is a block diagram of an electric/pneumatic converter showing one embodiment of the present invention. In the figure, input terminal 1
The input voltage Vi is applied to a and 1b. 2 is a PI regulator with capacitor C1,
This circuit, which is composed of C2, a resistor R, and an operational amplifier 3, is already a well-known circuit. The output of PI regulator 2 is connected to voltage/frequency converter 4
It is now being added to This voltage/frequency converter 4 is adapted to output an alternating current signal of a frequency corresponding to the voltage value applied to the input side (see FIG. 2). In this embodiment, the AC signal output from the voltage/frequency converter 4 is a triangular wave. A triangular wave signal output from the voltage/frequency converter 4 is applied to a nozzle flapper 5. The nozzle flapper 5 includes an electrostrictive element 6a,
6b is constructed in such a manner that a thin metal plate 7 is sandwiched between the metal plates 7 in the shape of a sandwich. A triangular wave signal from the voltage/frequency converter 4 is applied to the electrostrictive elements 6a and 6b, and the thin metal plate 7 is grounded. Furthermore, one end of the nozzle flapper 5 is cantilevered on the support part 8, and the protrusion 7a of the thin metal plate 7 at the other end vibrates in response to the applied alternating current voltage.
一方給気口9より加えられる給気圧はパイロツ
ト弁10に加えられるとともに絞り11を介して
ノズル12に供給されるようになつている。ノズ
ル12は噴気口がフラツパ5で開閉されるように
突出部7aに対設されている。ノズル12よりの
背圧はパイロツト弁10で出力圧に変換され出力
口13より導出されるとともに圧力センサ14に
加えられるようになつている。圧力センサ14は
加えられた出力圧に応じた電気信号を出力し、こ
れを演算増幅器3の入力に帰還するようにしてい
る。 On the other hand, the air supply pressure applied from the air supply port 9 is applied to a pilot valve 10 and is also supplied to a nozzle 12 via a throttle 11. The nozzle 12 is disposed opposite to the protrusion 7a so that the blowhole is opened and closed by the flapper 5. The back pressure from the nozzle 12 is converted into output pressure by the pilot valve 10 and is led out from the output port 13 and applied to the pressure sensor 14. The pressure sensor 14 outputs an electrical signal according to the applied output pressure, and feeds this back to the input of the operational amplifier 3.
電歪素子の機械的共振周波数をfmrとすると第
3図に示すように周波数fmrの信号を電歪素子6
a,6bに印加するとノズルフラツパ5の先端部
は最も大きく変位する。この実施例では電圧/周
波数変換器4より出力される信号周波数の最高値
fmax最低値fminがいずれも機械的共振周波数
fmrの低域側に入るように構成している。このよ
うに構成することによりノズルフラツパ5に加印
される信号電圧の周波数すなわち入力電圧に比例
したフラツパの変位を得ることができる。またノ
ズルフラツパ5の先端部7aのフリー時(交流電
圧の無印加時)における先端部7aとノズル12
との空隙dは信号周波数fmin時の変位よりも、
さらに小さくなるようにしている。 Assuming that the mechanical resonance frequency of the electrostrictive element is fmr, the signal of frequency fmr is transmitted to the electrostrictive element 6 as shown in Fig. 3.
When the voltage is applied to ports a and 6b, the tip of the nozzle flapper 5 is displaced the most. In this embodiment, the highest value of the signal frequency output from the voltage/frequency converter 4
Both fmax and minimum value fmin are mechanical resonance frequencies.
It is configured to enter the low frequency side of FMR. With this configuration, it is possible to obtain a displacement of the flapper that is proportional to the frequency of the signal voltage applied to the nozzle flapper 5, that is, the input voltage. In addition, when the tip 7a of the nozzle flapper 5 is free (when no AC voltage is applied), the tip 7a and the nozzle 12
The air gap d between the two and the displacement at the signal frequency fmin is
I'm trying to make it even smaller.
次に以上のように構成される実施例の電−空変
換器の動作について説明する。 Next, the operation of the electro-pneumatic converter of the embodiment configured as above will be explained.
今、入力端子1a,1b、PI調節器2を経て
電圧/周波数変換器4に制御可能な最低電圧
Vminが加えられるとすると出力される三角波の
信号周波数はfmin(第2図参照)となる。この時
の信号電圧波形を図示すると第4図のaとなる。
この場合の信号周波数fminは共振周波数fmrより
離れているので、ノズルフラツパ5の変位は小さ
く、ノズル12が設けられていない場合には、そ
の変位がノズルフラツパ5のフリー位電とノズル
12位置間の距離dより大となる期間はt1とな
る。しかしノズル12が設けられているので、こ
の期間t1中は第5図Aに示すようにノズルフラツ
パ5はノズル12の位置にとどまることになる。
すなわち三角波の周期T1に対して期間t1だけノ
ズルフラツパ5によつてノズル12が全閉され
る。 Now, the lowest voltage that can be controlled is sent to the voltage/frequency converter 4 via the input terminals 1a and 1b and the PI regulator 2.
If Vmin is added, the signal frequency of the output triangular wave will be fmin (see Figure 2). The signal voltage waveform at this time is illustrated as a in FIG. 4.
Since the signal frequency fmin in this case is far from the resonance frequency fmr, the displacement of the nozzle flapper 5 is small, and if the nozzle 12 is not provided, the displacement is the distance between the free potential of the nozzle flapper 5 and the nozzle 12 position. The period greater than d is t1. However, since the nozzle 12 is provided, the nozzle flapper 5 remains in the position of the nozzle 12 during this period t1, as shown in FIG. 5A.
That is, the nozzle 12 is fully closed by the nozzle flapper 5 for a period t1 with respect to the period T1 of the triangular wave.
一方電圧/周波数変換器4に制御可能な最高電
圧Vmaxが加えられると三角波の信号周波数は入
力電圧に比例してfmax(第2図参照)となる。こ
の場合の信号電圧波形は第4図に示すbとなる。
信号周波数fmaxは共振周波数fmrに近接してい
るのでこの周波数fmaxの三角波がノズルフラツ
パ5に印加されるともしノズル12がなければ大
なる振幅で振動することになる。ノズル12が設
けられているのでノズルフラツパ5はノズル12
の位置以上に変位しないが、第5図Bに示すよう
に三角波の周期T2に対してノズル12が全閉さ
れる期間はt2となる。周期Tに対するノズル12
が全閉される期間tの比率を比べると周波数
fminと周波数fmaxでは
t1/T1<t2/T2
となる。すなわち全閉時間比率は周波数fmaxの
信号が印加された方が大となる。電圧/周波数変
換器4に加えられる電圧VnがVmin<Vn<
Vmaxの場合には、ノズルの全閉時間比率もt1/
T1<tn/Tn<t1/T2となる。 On the other hand, when the maximum controllable voltage Vmax is applied to the voltage/frequency converter 4, the signal frequency of the triangular wave becomes fmax (see FIG. 2) in proportion to the input voltage. The signal voltage waveform in this case becomes b shown in FIG.
Since the signal frequency fmax is close to the resonant frequency fmr, if a triangular wave of this frequency fmax is applied to the nozzle flapper 5, it would vibrate with a large amplitude if the nozzle 12 were not present. Since the nozzle 12 is provided, the nozzle flapper 5 is connected to the nozzle 12.
However, as shown in FIG. 5B, the period during which the nozzle 12 is fully closed with respect to the period T2 of the triangular wave is t2. Nozzle 12 for period T
Comparing the ratio of the period t during which the is fully closed, the frequency
At fmin and frequency fmax, t1/T1<t2/T2. In other words, the fully closed time ratio is greater when the signal of frequency fmax is applied. The voltage Vn applied to the voltage/frequency converter 4 is Vmin<Vn<
In the case of Vmax, the nozzle fully closed time ratio is also t1/
T1<tn/Tn<t1/T2.
以上のように入力電圧が大となるほど信号周波
数が大となり周波数が大となるほどノズル12の
全閉時間比率が上昇する。ノズル12の全閉時間
比率が上昇すると積分的にノズル背圧も上がりそ
れに応じてパイロツト弁10の出力空気圧も上昇
する。パイロツト弁10の出力空気圧は出力圧と
して出力口13より導出されるが、圧力センサ1
4にも加えられ出力圧に応じた電気信号に変換さ
れPI調節器2の演算増幅器3に帰還され入力電
圧帰還された出力圧に対応する電圧の平衡がとら
れる。 As described above, as the input voltage increases, the signal frequency increases, and as the frequency increases, the fully closed time ratio of the nozzle 12 increases. When the fully closed time ratio of the nozzle 12 increases, the nozzle back pressure also increases integrally, and the output air pressure of the pilot valve 10 increases accordingly. The output air pressure of the pilot valve 10 is derived from the output port 13 as an output pressure, but the pressure sensor 1
4, it is converted into an electrical signal according to the output pressure, and is fed back to the operational amplifier 3 of the PI regulator 2 to balance the voltage corresponding to the input voltage fed back output pressure.
なおノズル12の背圧はノズルフラツパ5の電
歪素子6a,6bが交流信号で駆動されるため脈
動するが、パイロツト弁10の容量大、及び絞り
10が設けられているため出力圧まで脈動が及ぶ
心配はない。 Note that the back pressure of the nozzle 12 pulsates because the electrostrictive elements 6a and 6b of the nozzle flapper 5 are driven by an alternating current signal, but because the pilot valve 10 has a large capacity and the throttle 10 is provided, the pulsations extend to the output pressure. No worries.
また上記実施例において交流信号として三角波
を例にあげ説明したが、この交流信号は時間的に
瞬時値が変化するものであればよくたとえば鋸歯
状波、正弦波等であつてもよい、
さらにまた上記実施例において電歪素子を含む
ノズルフラツパは片持ハリのものを使用している
が、両持ハリや円周固定のものを用いてもよい。 Further, in the above embodiments, a triangular wave was used as an example of the AC signal, but the AC signal may be any signal whose instantaneous value changes over time, and may be a sawtooth wave, a sine wave, etc. In the above embodiments, the nozzle flapper including the electrostrictive element has a cantilevered structure, but a double-sided structure or a fixed circumferential structure may also be used.
さらにまた上記実施例において入力電圧の変化
に対する交流信号の周波数変化範囲を電歪素子の
機械的共振周波数近傍の低域側となるようにして
いるが、これは逆に高域側に入るようにしてもよ
い。 Furthermore, in the above embodiment, the frequency change range of the AC signal in response to a change in input voltage is set to be on the low range side near the mechanical resonance frequency of the electrostrictive element, but this is conversely set to be on the high range side. It's okay.
以上のようにこの発明の電・空変換器によれ
ば、ノズルフラツパを構成する電歪素子の駆動を
入力電圧に応じて周波数の変化するしかもその周
波数が電歪素子の機械的共振周波数の近傍となる
交流信号で行なうものであるから、小さい入力電
圧でノズルフラツパに大きな変位を得ることがで
き、ノズルの全閉される時間比率で背圧が決まる
ものであるから、これまでの直流駆動による電・
空変換器で変位が小さいために問題となつた温度
変化給気圧の変動、フラツパの自重による傾き等
が影響してループ全体の安定性が害されるという
心配は解消され、安定度の高い電・空変換器を得
ることができる。 As described above, according to the electro-pneumatic converter of the present invention, the frequency of driving the electrostrictive element constituting the nozzle flapper changes according to the input voltage, and the frequency is close to the mechanical resonance frequency of the electrostrictive element. Since the operation is performed using an AC signal, it is possible to obtain a large displacement in the nozzle flapper with a small input voltage, and the back pressure is determined by the time ratio during which the nozzle is fully closed.
The concerns that the stability of the entire loop would be affected by changes in temperature, fluctuations in supply pressure, and tilt due to the flapper's own weight, which were problems caused by the small displacement of air converters, have been eliminated, and the stability of the entire loop has been eliminated. You can get an empty transducer.
第1図はこの発明の一実施例を示す電・空変換
器のブロツク図、第2図は第1図実施例の電・空
変換器に使用される電圧/周波数変換器の入力電
圧・周波数特性を示す図、第3図は電歪素子を用
いたノズルフラツパの周波数・変位特性を示す
図、第4図は第1図実施例の電・空変換器の電歪
素子に印加される三角波信号の波形例を示す図、
第5図は第4図に示す三角波信号が印加された場
合のノズルフラツパの変位を示す図であつて第5
図Aは第4図に示す信号aが印加された場合、第
5図Bは第4図に示す信号bが印加された場合を
示す図である。
1a,1b:入力端子、2:PI調節器、3:
演算増幅器、4:電圧/周波数変換器、5:ノズ
ルフラツパ、6a,6b:電歪素子、7:金属薄
板、7a:金属薄板の突出部、8:支持部、9:
給気口、10:パイロツト弁、11:絞り、1
2:ノズル、13:出力口、14:圧力センサ。
Fig. 1 is a block diagram of an electric/pneumatic converter showing one embodiment of the present invention, and Fig. 2 shows the input voltage/frequency of the voltage/frequency converter used in the electric/pneumatic converter of the embodiment shown in Fig. 1. Figure 3 is a diagram showing the frequency and displacement characteristics of a nozzle flapper using an electrostrictive element, and Figure 4 is a triangular wave signal applied to the electrostrictive element of the electro-pneumatic converter of the embodiment shown in Figure 1. A diagram showing an example waveform of
FIG. 5 is a diagram showing the displacement of the nozzle flapper when the triangular wave signal shown in FIG. 4 is applied.
FIG. 5A shows a case where the signal a shown in FIG. 4 is applied, and FIG. 5B shows a case where the signal b shown in FIG. 4 is applied. 1a, 1b: Input terminal, 2: PI controller, 3:
Operational amplifier, 4: Voltage/frequency converter, 5: Nozzle flapper, 6a, 6b: Electrostrictive element, 7: Thin metal plate, 7a: Projection of thin metal plate, 8: Support part, 9:
Air supply port, 10: Pilot valve, 11: Throttle, 1
2: Nozzle, 13: Output port, 14: Pressure sensor.
Claims (1)
じた電圧を出力するPI調節器と、このPI調節器
の出力電圧を受け、その電圧に応じた周波数で瞬
時値が時間的に変化する交流電圧を発生する交流
電圧発生回路と、電歪素子を含んで構成されこの
電歪素子に前記交流電圧が印加されるノズルフラ
ツパと、このノズルフラツパの振動部に対設され
給気圧を受け背圧を導出するノズルと、この背圧
を出力圧に変換するパイロツト弁と、前記出力圧
を受け電圧信号に変換して、帰還電圧として前記
PI調節器に加える圧電変換回路とを備え、前記
交流電圧発生回路の信号周波数の変化範囲が前記
電歪素子の機械的共振周波数の近傍でこの共振周
波数よりも低域側もしくは高域側の一方となるよ
うに設定し、入力電圧の変化による周波数の変化
に対応して前記ノズルフラツパの変位振幅値が変
化することにより前記ノズルの全閉時間の比率を
変えて入力電圧に応じた背圧を得るようにしたこ
とを特徴とする電・空変換器。1. A PI regulator that receives input voltage and feedback voltage and outputs a voltage according to the difference between the two voltages, and receives the output voltage of this PI regulator, and the instantaneous value changes over time at a frequency that corresponds to the voltage. An AC voltage generation circuit that generates an AC voltage, a nozzle flapper that includes an electrostrictive element and to which the AC voltage is applied, and a nozzle flapper that is disposed opposite to the vibrating part of the nozzle flapper and receives supply pressure and generates back pressure. a pilot valve that converts this back pressure into output pressure, and a pilot valve that receives the output pressure and converts it into a voltage signal and outputs the voltage as a feedback voltage.
a piezoelectric conversion circuit added to the PI regulator, the change range of the signal frequency of the AC voltage generating circuit is near the mechanical resonance frequency of the electrostrictive element, and is either lower or higher than the resonance frequency. By setting the displacement amplitude value of the nozzle flapper to change in response to a change in frequency due to a change in input voltage, the ratio of the fully closed time of the nozzle is changed to obtain back pressure in accordance with the input voltage. An electric/pneumatic converter characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1419582A JPS58129322A (en) | 1982-01-29 | 1982-01-29 | Electropneumatic transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1419582A JPS58129322A (en) | 1982-01-29 | 1982-01-29 | Electropneumatic transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58129322A JPS58129322A (en) | 1983-08-02 |
| JPH0341767B2 true JPH0341767B2 (en) | 1991-06-25 |
Family
ID=11854335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1419582A Granted JPS58129322A (en) | 1982-01-29 | 1982-01-29 | Electropneumatic transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58129322A (en) |
-
1982
- 1982-01-29 JP JP1419582A patent/JPS58129322A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58129322A (en) | 1983-08-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5130619A (en) | Drive control apparatus for an ultrasonic motor | |
| US5341061A (en) | Piezoelectric transformer circuit using a piezoelectric transformer unit of a thickness extensional vibration mode | |
| KR100325648B1 (en) | Voltage converter using piezoelectric transformer | |
| US3689781A (en) | Voltage transforming devices utilizing piezoelectric elements | |
| US5541543A (en) | Regulating device for a telephone loud-speaker | |
| JPH0341767B2 (en) | ||
| JPS6280301A (en) | Electro-pneumatic transducer | |
| KR20000070806A (en) | Pulse-position-modulation driving for piezoelectric transformers | |
| JPS6317843Y2 (en) | ||
| EP0322679A2 (en) | Acoustic apparatus | |
| JPH0341768B2 (en) | ||
| JPS5726987A (en) | Earphone | |
| US6118206A (en) | Piezoelectric signal converter | |
| US5986384A (en) | Self-oscillation type signal converter | |
| JPH08233581A (en) | Driving device for electrostatic converting means | |
| JPH04145874A (en) | Driving circuit for vibrator type actuator | |
| JPS59138922A (en) | Electro-pneumatic converter | |
| US4734659A (en) | Ultrasonic oscillator | |
| SU1597234A1 (en) | Ultrasonic radiator | |
| JPS6174901A (en) | Displacement adjusting system of nozzle-flapper mechanism | |
| JPS6158482A (en) | Displacement amount controlling method of piezoelectric vibrator | |
| JPS63212298A (en) | Piezoelectric transducer | |
| JPS635183A (en) | Piezo pump | |
| JPS63126399A (en) | ultrasonic vibration device | |
| SU587764A1 (en) | Mass flow meter |