JPH0342419B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a crystal oscillation type moisture meter system. For details, please refer to the first sample gas or other reference gas.
The present invention relates to a crystal oscillation type moisture meter system in which a moisture removal path and a sample gas introduction path are connected to a crystal oscillation type moisture meter system, and further a second moisture removal path is connected in parallel with the first moisture removal path.

Conventionally, when measuring the moisture content of a sample gas using a crystal oscillation type moisture meter, a system as shown in FIG. 1 has generally been used, and will be explained below.

First, the sample gas or other reference gas is sent to the moisture removal path 2 through the introduction path 1, where the moisture is removed, and through the opened electromagnetic valve 3, which is sent to the crystal oscillation type moisture meter 4, where it oscillates. The frequency is measured [at this time, the solenoid valve 5 is closed], then the solenoid valve 3 is closed and the solenoid valve 5 is opened, and the sample gas is sent from the sample gas introduction path 6 through the solenoid valve 5 to the moisture meter 4. Its oscillation frequency is measured. The moisture content of the sample gas is measured from the difference between the two oscillation frequency data obtained in this way. Furthermore, by continuously repeating the above operation, the water content of the sample gas can be continuously measured. And generally water remover 2
is filled with a moisture absorbing agent such as a molecular sieve or silica gel, but there is a problem in that if the moisture absorption ability of the moisture absorbing agent decreases, it may cause an error in moisture measurement.

This invention was made in order to solve the above problems, and includes an introduction path for sample gas or other reference gas, a first moisture removal path equipped with on-off valves before and after the moisture remover, and a crystal oscillation type A moisture meter is connected as appropriate in this order, a sample gas introduction path equipped with an on-off valve is connected to the crystal oscillation type moisture meter, and a second moisture remover is connected with an on-off valve before and after another moisture remover. The present invention provides a crystal oscillation type moisture meter system in which a removal path is connected in parallel to the first moisture removal path.

This system is characterized in that a second moisture removal path is installed outside and in parallel with the first moisture removal path. Introducing the sample gas into the moisture meter from the sample gas introduction path, and introducing the sample gas or other reference gas into the moisture meter from the sample gas or other reference gas introduction path via the first moisture remover. The water content of the sample gas is measured based on the difference in oscillation frequency between the two gases. Then, from time to time, a second moisture removal path is used in place of the first moisture removal path to perform moisture measurement while testing the moisture absorption capacity of the first moisture removal path, and if the moisture absorption capacity falls below a certain limit,
A second moisture removal path is used instead of the first moisture removal path. Therefore, the accuracy of moisture measurement is extremely high. Then, while the second moisture removal path is in use, treatments such as replacing the moisture remover in the first moisture removal path with one with a higher moisture absorption capacity or restoring the moisture absorption ability of the moisture absorbent are performed to remove the moisture in the sample gas. water content can be measured continuously.

Next, the present invention will be explained in detail with reference to the drawings.
FIG. 2 is an explanatory diagram of the configuration of an embodiment of the system of the present invention.

Introduction channel 10 for sample gas or other reference gas
, a first removal path 11 equipped with a solenoid valve 12, a moisture remover 13, and a solenoid valve 14, and a crystal oscillation type moisture meter 15.
On the other hand, a sample gas introduction path 16 having a solenoid valve 17 is connected to a moisture meter 15. Further, a second moisture removal path 18 including a solenoid valve 19, a moisture remover 20, and a solenoid valve 21 is connected to the first moisture removal path 1.
1 and connected in parallel.

The water content of the sample gas is measured by the following procedure.

A sample gas or other control gas is introduced through its introduction path 10 for a certain period of time, and its moisture is substantially removed via the solenoid valve 12 of the first moisture removal path 11, the moisture remover 13, and the solenoid valve 14. Moisture meter 15
[At this time, the solenoid valves 19 and 21 of the second moisture removal path 18 and the solenoid valve 17 of the sample gas introduction path 16 are closed]. Next, the sample gas is introduced from the introduction path 16 for a certain period of time, passes through the solenoid valve 17, and is sent to the moisture meter 15 (at this time, the other solenoid valves are closed).
Through these two operations, the moisture content of the sample gas is measured from the difference between the two frequencies oscillated from the moisture meter 15. Repeat this operation continuously,
The moisture content of the sample gas is continuously measured. Then, at appropriate time intervals, the first moisture removal path 11
The sample gas or other control gas is transferred to the moisture analyzer 1 using the second moisture removal path 18 instead (i.e. by closing the solenoid valves 12 and 14 and opening the solenoid valves 19 and 21).
In that case, if the difference between the oscillation frequency and the oscillation frequency obtained using the first moisture removal path 11 becomes higher than a certain limit (for example, equivalent to 1 ppm or more as a moisture content), the first moisture removal path 11 The water removal path 18 is then switched to the second water removal path 18. During this time, the moisture removal performance of the first moisture removal path 11 is restored by replacing the moisture remover 13 or the like. By repeating such operations, the water content of the sample gas is continuously measured.

Note that these operations can be performed manually, but they can also be performed automatically using an electronic control system. An example of a chart of oscillation frequencies obtained automatically is shown in FIG. That is, B, D,
F, I, K and M levels are set by solenoid valves 12,1
4, 19, and 21 are closed, the solenoid valve 17 is opened, and the sample gas is introduced from the sample gas introduction path 16.
This is the oscillation frequency obtained by sending the signal to Also A,
Levels C, E, and G are oscillation frequencies obtained by passing the sample gas through the first moisture removal path 11 to substantially remove moisture therefrom and sending it to the moisture meter 15. The level of H is the oscillation frequency obtained by switching the moisture removal path from the first to the second, and since the difference between the levels of G and H was equivalent to a moisture content of 1 ppm or more, after H, the A second moisture removal path 18 is used instead of the first moisture removal path 11, and J, L and N
The oscillation frequency was obtained.

Furthermore, diagrams illustrating the configuration of another embodiment of the system of the present invention are shown in FIGS. 4 and 5.

The embodiment of the system of the present invention shown in FIG.
39 is connected to dry gas introduction paths 42 and 44 for drying the moisture absorbent in each remover, and the other valve 3 of each removal path is connected to
4 and 41 are connected to exhaust passages 43 and 45 for the gas. For example, when measuring moisture using the first moisture removal path 31, when it is found that the moisture absorption capacity of the moisture remover 33 has decreased,
The solenoid valves 32 and 34 are closed, while the solenoid valves 39 and 41 are opened to allow the sample gas or other control gas to pass from its inlet 30 through the second water removal passage 38, and the first water removal passage 31 to the second moisture removal passage 38. Switch to the moisture removal path 38 and continue measuring the sample gas moisture. During this time, the three-way solenoid valves 32 and 34 are switched, and the dry gas is sent from the dry gas introduction path 42 through the solenoid valve 32, passes through the moisture remover 33, passes through the solenoid valve 34, and is discharged from the dry gas discharge path 43. Moisture absorbents such as molecular sieves and silica gel filled in the moisture remover 33 are dried. In this way, the moisture absorption capacity of the desiccant is regenerated and is ready for switching when the moisture absorption capacity of the moisture remover 40 in the second moisture removal path 38 falls below a certain limit. The system of this embodiment can regenerate its moisture absorption capacity without removing the moisture remover except in special cases. Furthermore, a system in which these moisture removers are equipped with a heater is also included in the present invention, and by heating the moisture remover with this heater when regenerating the moisture absorption capacity of the moisture remover, the moisture remover can be heated more quickly. It can regenerate its moisture absorption ability.

The embodiment of the system of the invention shown in FIG. 5 has a thermomodule placed between and adjacent to the two moisture removers of the system of the embodiment shown in FIG.

For example, while measuring the moisture content of a sample gas using the second moisture removal path 58, the three-way solenoid valves 52 and 54 of the first moisture removal path 51 are switched to supply dry gas to its introduction path 58.
The operation will be described in the case where the moisture absorbent is introduced from the dry gas discharge path 63, is introduced through the moisture remover 53, is dried, and is discharged from the dry gas discharge path 63. In this case, direct current is passed through the thermo module 67 to generate heat on the surface 68 on the side that is in contact with the moisture remover 53, thereby heating the moisture remover 53, thereby speeding up regeneration of the moisture absorbing ability of the moisture remover 53 and removing moisture. The surface 69 in contact with the remover 60 absorbs heat to cool the moisture remover 60 and increase its moisture absorption ability. In addition, reverse heating and cooling can be performed by passing current in the opposite direction.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram of the configuration of a conventional example of a crystal oscillation type moisture meter system, FIGS. 2, 4, and 5 are configuration explanatory diagrams of an embodiment of the crystal oscillation type moisture meter system of the present invention. is a chart of oscillation frequencies obtained by the crystal oscillation type moisture meter system shown in FIG. 1, 10, 30, 50...Sample gas or other control gas introduction path, 2, 13, 20, 33, 40,
53,60...moisture remover, 4,15,35,5
5...Crystal oscillation type moisture meter, 6, 16, 36, 56
...Sample gas introduction path, 3, 5, 12, 14, 1
9, 21... Solenoid valve, 32, 34, 39, 41,
52, 54, 59, 61...Three-way solenoid valve, 42,
44, 62, 64...Dry gas introduction path, 43, 4
5, 63, 65... Dry gas discharge path, 67... Thermo module, 68, 69... Heat generating or endothermic surface of thermo module.

Claims (1)

[Claims] 1. Connect the sample gas or other control gas introduction path, the first moisture removal path each equipped with a three-way on-off valve before and after the moisture remover, and the crystal oscillation type moisture meter in this order, and connect the on-off valves. A sample gas introduction path provided therein is connected to the crystal oscillation type moisture meter, and a second moisture removal path each having a three-way opening/closing valve before and after another moisture remover is connected in parallel to the first moisture removal path. In addition, a crystal oscillation type moisture meter system consists of a thermo module installed between the two moisture removers mentioned above.