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JPH0345328B2 - - Google Patents
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JPH0345328B2 - - Google Patents

Info

Publication number
JPH0345328B2
JPH0345328B2 JP56043120A JP4312081A JPH0345328B2 JP H0345328 B2 JPH0345328 B2 JP H0345328B2 JP 56043120 A JP56043120 A JP 56043120A JP 4312081 A JP4312081 A JP 4312081A JP H0345328 B2 JPH0345328 B2 JP H0345328B2
Authority
JP
Japan
Prior art keywords
optical fiber
optical
optical resonator
electrical
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56043120A
Other languages
Japanese (ja)
Other versions
JPS57168126A (en
Inventor
Toshihiko Yoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP56043120A priority Critical patent/JPS57168126A/en
Publication of JPS57168126A publication Critical patent/JPS57168126A/en
Publication of JPH0345328B2 publication Critical patent/JPH0345328B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35303Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using a reference fibre, e.g. interferometric devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K5/00Measuring temperature based on the expansion or contraction of a material
    • G01K5/48Measuring temperature based on the expansion or contraction of a material the material being a solid
    • G01K5/50Measuring temperature based on the expansion or contraction of a material the material being a solid arranged for free expansion or contraction
    • G01K5/52Measuring temperature based on the expansion or contraction of a material the material being a solid arranged for free expansion or contraction with electrical conversion means for final indication

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Optical Transform (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Description

【発明の詳細な説明】 本発明は、周囲温度、圧力、振動、電磁界強
度、音波、化学反応等の種々の物理的変化量を光
学的に検出する物理的変化検出方法に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a physical change detection method for optically detecting various physical changes such as ambient temperature, pressure, vibration, electromagnetic field strength, sound waves, and chemical reactions.

現在、周囲温度、圧力、振動等の物理的変化量
を検出する種々の検出器が用いられている。しか
し、従来技術の検出器は、一般に、電気的測定方
式を用いているのでケーブル、トランス等の電磁
誘導によつて発生する内外の雑音により測定誤差
が発生し易く、また金属を使用しているので電気
的絶縁破壊のような非測定系に対する悪影響を生
ずる欠点があつた。
Currently, various detectors are used to detect physical changes such as ambient temperature, pressure, vibration, etc. However, since conventional detectors generally use an electrical measurement method, measurement errors are likely to occur due to internal and external noise generated by electromagnetic induction from cables, transformers, etc., and they also use metal. Therefore, it has the drawback of causing adverse effects on non-measuring systems, such as electrical breakdown.

これらの欠点を回避するため、光フアイバの長
さが周囲温度等の物理的変化によつて変化するの
を利用して光フアイバーの両端面に反射膜が施さ
れたフアブリー・ペロー型光共振器を用いて物理
的変化を検出することが考えられる。
In order to avoid these drawbacks, we developed a Fabry-Perot optical resonator in which a reflective film is applied to both end faces of the optical fiber, taking advantage of the fact that the length of the optical fiber changes due to physical changes such as ambient temperature. It is conceivable to use this method to detect physical changes.

しかし、このフアブリー・ペロー型光共振器で
物理的変化を検出する場合その変化自体を検出す
ることはできてもその向きを検出することができ
ない。
However, when detecting a physical change using this Fabry-Perot optical resonator, although it is possible to detect the change itself, it is not possible to detect its direction.

本発明の目的は、物理的変化及びその向きを高
い精度で確実に検出することができる物理的変化
検出方法を提供することにある。
An object of the present invention is to provide a physical change detection method that can reliably detect physical changes and their directions with high accuracy.

本発明の実施例を図面を参照して詳細にのべる
と、第1図は本発明の方法に用いられる物理的変
化検出装置10を系統的に示し、この検出装置は
所定長さのシングル又は複数モード光フアイバー
12とその両端面に形成された反射膜14,1
4′とから成るフアブリー・ペロー型光共振器1
6を備えている。光フアイバー12はコア12a
とクラツド12bと被覆12cとから成つている
が、この光フアイバーの伝搬モードはシングルモ
ードである場合はコア径はきわめて小さい。反射
膜14,14′はSiO2とTiO2を交互に蒸着等によ
つて付着した誘電体多層膜であるのが好ましい。
これらの反射膜は光フアイバー12のコア12a
とクラツド12bとの端面に施される。光フアイ
バー12の長さLは測定対象によつて数mmから数
Kmの間とし、また反射膜14,14′の反射率は
10〜100%とする。このような光フアイバーから
成るフアブリー・ペロー型共振器は一方の端面か
らレーザ光が入射すると、反射膜14,14′の
半径d、光フアイバーの長さL及び光の波長λに
一定の関係が成立すれば共振が発生する。
Embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 systematically shows a physical change detection device 10 used in the method of the present invention, which includes a single or multiple physical change detection device of a predetermined length. Mode optical fiber 12 and reflective films 14 and 1 formed on both end faces thereof
Fabry-Perot optical resonator 1 consisting of
It is equipped with 6. The optical fiber 12 has a core 12a
The optical fiber is composed of a cladding 12b and a coating 12c, but if the propagation mode of this optical fiber is a single mode, the core diameter is extremely small. The reflective films 14, 14' are preferably dielectric multilayer films in which SiO 2 and TiO 2 are alternately deposited by vapor deposition or the like.
These reflective films cover the core 12a of the optical fiber 12.
and cladding 12b. The length L of the optical fiber 12 varies from several mm to several mm depending on the object to be measured.
Km, and the reflectance of the reflective films 14 and 14' is
10-100%. When a laser beam enters from one end face of a Fabry-Perot resonator made of such an optical fiber, there is a certain relationship between the radius d of the reflective films 14 and 14', the length L of the optical fiber, and the wavelength λ of the light. If established, resonance will occur.

半導体レーザの如きレーザ光源18がこの光共
振器16の一方の端面に設けられて光共振器16
に2つの周波数から成るレーザ光を入射し、アバ
ランシエフオトダイオードの如き光−電気変換手
段20が光共振器16の他方の端面に設けられて
光共振器16からの光を検知し電気信号を発生す
る。この電気信号は電気検出手段22で検出され
る。この電気検出手段は後にのべる理由から例え
ば電気信号のパルス数を計数するパルスカウンタ
ーとすることができる。
A laser light source 18 such as a semiconductor laser is provided on one end face of the optical resonator 16.
A laser beam consisting of two frequencies is incident on the optical resonator 16, and an optical-to-electrical conversion means 20 such as an avalanche photodiode is provided on the other end face of the optical resonator 16 to detect the light from the optical resonator 16 and generate an electrical signal. Occur. This electrical signal is detected by electrical detection means 22. This electrical detection means can be, for example, a pulse counter that counts the number of pulses of the electrical signal for reasons to be described later.

次に、上記装置の動作をのべると、フアブリ
ー・ペロー型光共振器16は既にのべたように反
射膜14,14′の半径d、光フアイバー12の
長さL及び入射光の波長λに一定の関係が成立す
ると共振を発生する。従つて、光フアイバー12
の長さが変化すると、共振が外れ、また上記一定
の関係が成立する長さLに達すると、共振状態と
なる。光フアイバー12の長さLは、例えば、周
囲温度によつて変化し、従つて、この周囲温度の
変化に応じて光共振器16の共振状態と非共振状
態とが繰返される。
Next, describing the operation of the above device, the Fabry-Perot optical resonator 16 is fixed to the radius d of the reflective films 14, 14', the length L of the optical fiber 12, and the wavelength λ of the incident light, as described above. When the relationship holds true, resonance occurs. Therefore, the optical fiber 12
When the length of changes, the resonance goes out, and when the length L at which the above-mentioned constant relationship is established is reached, a resonance state occurs. The length L of the optical fiber 12 changes depending on, for example, the ambient temperature, and therefore, the resonant state and non-resonant state of the optical resonator 16 are repeated in response to changes in the ambient temperature.

第3図は第1図の装置を用いて本発明の方法に
より周囲温度の変化及びその向きを検出した場合
の時間Tと光−電気変換手段20の出力電圧Vと
の関係を示し、時間Tの推移と共に出力電圧Vが
パルス状に変化することが判る。従つて、光−電
気変換手段20の出力を電気検出手段22である
パルスカウンターによつてパルス計数することに
よつて時間Tの推移と共に周囲温度の変化を検出
することができるが、各パルスの波形は主ピーク
と従ピークとから成つているので、主ピークと従
ピークとが出現する順序から温度の変化の向き、
即ち温度の上昇、下降を知ることができる。本発
明の一実施例においてコア4μ、外径125μ、長さ
4cmのシングルモード光フアイバーの両端面に
SiO2とTiO2とを交互に多重蒸着して反射膜を形
成したフアブリー・ペロー型光共振器を用い、ヘ
リウム−ネオンレーザから波長0.6328μm前後の
レーザ光を光共振器の一方の端面に入射し光共振
器の他方の端面から光をアバランシエフオトダイ
オードに当てた。この時周囲温度の変化に対する
パルス数は1パルス/1〜2℃であつた。
FIG. 3 shows the relationship between the time T and the output voltage V of the optical-to-electrical conversion means 20 when a change in ambient temperature and its direction are detected by the method of the present invention using the apparatus shown in FIG. It can be seen that the output voltage V changes in a pulse-like manner as . Therefore, by counting pulses of the output of the optical-to-electrical converting means 20 using the pulse counter, which is the electrical detecting means 22, it is possible to detect changes in the ambient temperature with the passage of time T. Since the waveform consists of a main peak and a sub-peak, the direction of temperature change can be determined from the order in which the main peak and sub-peak appear.
In other words, it is possible to know whether the temperature is rising or falling. In one embodiment of the present invention, on both end faces of a single mode optical fiber with a core of 4 μ, an outer diameter of 125 μ, and a length of 4 cm.
Using a Fabry-Perot optical resonator in which a reflective film is formed by alternately depositing SiO 2 and TiO 2 in multiple layers, laser light with a wavelength of around 0.6328 μm from a helium-neon laser is incident on one end face of the optical resonator. Light was applied to the avalanche photodiode from the other end of the optical resonator. At this time, the number of pulses corresponding to the change in ambient temperature was 1 pulse/1 to 2°C.

尚、上記実施例では温度を検出する場合につい
てのべたが、光共振器の長さ等が圧力、振動、音
波等の歪によつて変化する場合には圧力、振動等
を検出することができる。更に電磁界によつて光
フアイバーに複屈折が発生しても出力が変化する
ので電界強度を測定することができ、また化学反
応、放射線、機械的衝撃、火災等による光フアイ
バーの被覆の損傷でクラツドの反射率を変化させ
てこれらの物理的変化を検出することができる。
また、上記実施例ではシングルモード光フアイバ
ーを用いたが、グレーデツドインデツクス形光フ
アイバー又はモード数の少ない複数モード光フア
イバーを用いることもできる。
Note that although the above embodiment deals with detecting temperature, it is also possible to detect pressure, vibration, etc. if the length of the optical resonator changes due to pressure, vibration, distortion such as sound waves, etc. . Furthermore, even if birefringence occurs in the optical fiber due to an electromagnetic field, the output changes, making it possible to measure the electric field strength.Also, damage to the optical fiber coating due to chemical reactions, radiation, mechanical shock, fire, etc. These physical changes can be detected by changing the reflectance of the cladding.
Further, although a single mode optical fiber is used in the above embodiment, a graded index type optical fiber or a multimode optical fiber having a small number of modes may also be used.

また、同様な構成を用いて光のスペクトル分析
を行うことができる。
Furthermore, spectrum analysis of light can be performed using a similar configuration.

検出するが、このフアブリー・ペロー型光共振
器に入射する−レーザ光は2つの周波数から成つ
ているので、物理的変化のみでなくそのの向きも
高い精度で確実に検出することができる実益があ
る。
Since the laser light incident on this Fabry-Perot optical resonator consists of two frequencies, it has the practical benefit of being able to reliably detect not only physical changes but also their orientations with high precision. be.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る物理的変化検出装置の概
略系統図、第2図は光フアイバーの横断面図、第
3図は物理的変化の一例としての時間と出力電圧
との関係を示す線図である。 10……物理的変化検出装置、12……光フア
イバー、14,14′……反射膜、16……フア
ブリー・ペロー型光共振器、18……レーザ光
源、20……光−電気変換手段、22……電気検
出手段。
Fig. 1 is a schematic system diagram of a physical change detection device according to the present invention, Fig. 2 is a cross-sectional view of an optical fiber, and Fig. 3 is a line showing the relationship between time and output voltage as an example of a physical change. It is a diagram. 10... Physical change detection device, 12... Optical fiber, 14, 14'... Reflective film, 16... Fabry-Perot type optical resonator, 18... Laser light source, 20... Optical-electric conversion means, 22... Electricity detection means.

Claims (1)

【特許請求の範囲】[Claims] 1 光フアイバーの両端面に反射膜が施されたフ
アブリー・ペロー型光共振器と、前記光共振器の
一方の端面にレーザ光を入射するレーザ光源と、
前記光共振器の他方の端面からレーザ光を検知し
電気信号に変換する光−電気変換手段と、前記電
気信号を検出する電気検出手段とを用い、2つの
周波数から成るレーザ光を前記フアブリー・ペロ
ー型光共振器の一方の端面に入射し前記電気検出
手段が検出する電気信号のピークの出現順序から
前記光フアイバーに加わる物理的変化とその向き
を検出することを特徴とする物理的変化検出方
法。
1. A Fabry-Perot optical resonator in which a reflective film is applied to both end faces of an optical fiber; a laser light source that enters a laser beam into one end face of the optical resonator;
Using optical-to-electrical conversion means that detects laser light from the other end face of the optical resonator and converts it into an electrical signal, and electrical detection means that detects the electrical signal, the laser light consisting of two frequencies is converted to the fabric. Physical change detection characterized by detecting a physical change applied to the optical fiber and its direction from the appearance order of peaks of an electric signal incident on one end face of a Perot type optical resonator and detected by the electric detection means. Method.
JP56043120A 1981-03-26 1981-03-26 Device for detecting physical change Granted JPS57168126A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56043120A JPS57168126A (en) 1981-03-26 1981-03-26 Device for detecting physical change

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56043120A JPS57168126A (en) 1981-03-26 1981-03-26 Device for detecting physical change

Publications (2)

Publication Number Publication Date
JPS57168126A JPS57168126A (en) 1982-10-16
JPH0345328B2 true JPH0345328B2 (en) 1991-07-10

Family

ID=12654970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56043120A Granted JPS57168126A (en) 1981-03-26 1981-03-26 Device for detecting physical change

Country Status (1)

Country Link
JP (1) JPS57168126A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008064747A (en) * 2006-08-08 2008-03-21 Watanabe Seisakusho:Kk Fiber sensing system

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5983018A (en) * 1982-11-04 1984-05-14 Furukawa Electric Co Ltd:The Method for measuring vibration of optical fiber
JPS5998329U (en) * 1982-12-22 1984-07-03 古河電気工業株式会社 fiber optic vibration detector
FR2612649B1 (en) * 1987-03-16 1990-09-14 Comp Generale Electricite METHOD FOR MODIFYING THE COEFFICIENT OF REFLECTION OF THE END OF A SINGLE-MODE OPTICAL FIBER AND FIBER-OPTIC INTERFEROMETER CARRIED OUT USING THE SAME
US5208886A (en) * 1990-01-17 1993-05-04 At&T Bell Laboratories Methods of making an optical fiber filter
US5682447A (en) * 1994-09-22 1997-10-28 Washington State University Research Foundation Photomechanical positioning and stabilization method and devices using optical fibers and feedback

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104942A (en) * 1976-02-28 1977-09-02 Agency Of Ind Science & Technol Fiber, laser, plate device
US4329058A (en) * 1979-01-22 1982-05-11 Rockwell International Corporation Method and apparatus for a Fabry-Perot multiple beam fringe sensor
FR2474694B1 (en) * 1980-01-29 1983-09-02 Thomson Csf
JPS56112627A (en) * 1980-02-11 1981-09-05 Toshiba Corp Detecting device for water leakage in rotary body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008064747A (en) * 2006-08-08 2008-03-21 Watanabe Seisakusho:Kk Fiber sensing system

Also Published As

Publication number Publication date
JPS57168126A (en) 1982-10-16

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