JPH0348485B2 - - Google Patents

Description

[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a laser drilling device.

(Prior art) When forming, for example, an annular laser spot on a processing part for drilling, conventionally, as shown in Fig. 2, a laser beam 3 output from a laser oscillator is focused toward the workpiece. The beam was irradiated through a spherical lens 4 and a conical lens 5 to form an annular spot 6.

(Problem to be Solved by the Invention) However, the energy distribution of the annularly formed focused light tends to be uneven depending on the intensity distribution of the laser beam pattern incident on the optical system, and the edges of the annular pattern tend to be uneven. The irradiation caused various problems in processing, such as blurring and irradiation that deviated from the target irradiation area.

The present invention was made to solve the above-mentioned disadvantages, and it emits an annular laser beam whose energy distribution is smoothed by a hollow transparent body, and also blows out pressurized gas from the inside of the annular shape to enable high-precision drilling. It is made so that it can be processed.

[Structure of the invention] (Means and effects for solving the problem) A laser oscillator that outputs a laser beam for processing,
Hollow whose cross section is loop-shaped, and the laser beam entering from one end surface formed on the optical surface is highly reflected and propagated inside the flesh part, and the light is output in a loop shape from the other end surface formed on the optical surface. An apparatus comprising a transparent body and an airflow generating means for generating suction or jet airflow between the opening on the one end surface side and the opening on the other end surface side of the hollow transparent body, the apparatus comprising: At the same time as the loop-shaped laser beam is irradiated onto the object, pressurized gas, for example, is blown out from inside the laser beam to blow away the processing debris.

(Example) Hereinafter, the present invention will be described based on drawings showing examples. FIG. 1 shows an embodiment of the present invention, which has a laser oscillator 10 equipped with both resonators that output laser light from both ends, and the two output laser beams 11a,
The light beams 11b are separately focused on the tips of two optical fibers 13 and 14 by condenser lenses 12 and 12, respectively. These optical fibers 1
A hollow transparent body 15 is provided at the ends of the optical fibers 3 and 14, with one end surface formed in an optical plane being close to the other end. This hollow transparent body 15 has a loop shape with a circular cross section,
It is tapered from one end surface facing the optical fibers 13 and 14 to the other end surface, which is also formed on an optical plane, and has a refractive index lower than the refractive index of the hollow transparent body 15 on its inner and outer surfaces. It is coated with a material of 10%. A supply pipe 18 for supplying pressurized gas such as compressed air generated by a pressurized gas supply device 17 is connected to an opening on one end surface side of the hollow transparent body 15 .

Next, the operation of the above configuration will be explained. After the workpiece 20 to be drilled is placed in a predetermined position facing the other tapered end surface of the hollow transparent body 15, the laser oscillator 10 and the pressurized gas supply device 1
7 is activated. Laser beams 11a and 11b output from the laser oscillator 10 are transmitted through condensing lenses 12 and 12.
The light is focused by the optical fibers 13 and 14 and then guided by the optical fibers 13 and 14 to enter the hollow transparent body 15. The incident laser beams 11a and 11b are highly reflected inside the hollow transparent body 15 while propagating, and while they overlap, the energy distribution becomes uniform, and the length of the hollow transparent body 15 in the optical axis direction is By taking a sufficient amount of light, the laser beam 21 is emitted from the other end face in the form of a loop, and the workpiece 20 is irradiated in an annular manner. Along with this irradiation, pressurized gas is injected to the workpiece 20, and the removed material is blown away from the machined hole 22, so that no excess material adheres to the hole 20.
2 is formed.

Although pressurized gas is supplied in the above embodiment, a suction device (not shown) may be provided instead of the pressurized gas supply device 17. Further, although the hollow transparent body 15 is formed in a tapered shape so that the condensing lens can be omitted, if the hollow light transmitting body 15 is not tapered but has the same diameter, a condensing lens is provided between the hollow transparent body 15 and the workpiece. The need arises. Furthermore, the cross section of the hollow transparent body 15 is not limited to a circular loop shape, but may have a cross section shape that is restricted to an arbitrary loop shape such as an ellipse. Alternatively, the light may be allowed to enter.

[Effects of the Invention] As detailed above, the hole can be clearly drilled using a loop-shaped spot with a uniform energy distribution, and since the structure is configured to prevent machining removal from adhering to the workpiece, highly accurate holes can be made. Now I can get it.
In addition, as gas flows into the hollow part, the hollow transparent body 1
5 itself is cooled, it becomes possible to guide high-power laser light to the hollow transparent body 15, and the drilling ability can be improved.

[Brief explanation of drawings]

FIG. 1 is a configuration diagram showing one embodiment of the present invention, and FIG.
The figure is a configuration diagram showing a conventional example. 10... Laser oscillator, 15... Hollow transparent body, 17
...Pressurized gas supply device (airflow generation means).

Claims (1)

[Claims] 1. A laser oscillator that outputs a laser beam for processing, and a laser beam whose cross section is loop-shaped and enters from one end surface formed on the optical surface, and is highly reflected inside the flesh part and propagated to the optical surface. A hollow light-transmitting body that outputs light in a loop form from the other end surface formed, and an air flow that generates suction or jet airflow between the opening on the one end surface side and the opening on the other end surface side of the hollow transparent body. A laser drilling device characterized by comprising a generating means.