JPH0349638B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application This invention relates to an apparatus for cleaning the inner periphery of a quartz electric furnace used in a part of the process of manufacturing semiconductor wafers.

Prior Art An electric furnace used as part of the semiconductor wafer manufacturing process is a relatively long tubular body. However, since this type of cleaning required a relatively large work area, in the next generation, the pipe was installed vertically and washing was carried out from the upper opening. The invention of suspending a nozzle head from which liquid is spouted and moving the nozzle head up and down to perform cleaning work was disclosed in Patent Application No. 45066 (1981) (Japanese Unexamined Patent Application No. 1981-190281) and No. 45067 (Japanese Patent Application No. 1983). 1986-190282)
There is a leading technology.

Problems to be Solved The object to be cleaned using the above-mentioned prior art is a completely cylindrical body with both ends open. Therefore, the nozzle head that sprays the cleaning liquid is suspended from the upper opening, and the sprayed cleaning liquid is suspended from the upper opening. After cleaning, the liquid could be discharged from the lower opening after flowing along the inner periphery of the furnace, but the usage of this electric furnace and its equipment have changed over time. The latest type of quartz tube electric furnace is
It is being converted into a cylindrical body with a hemispherical bottom. It is not possible to wash an object to be washed whose shape has changed in this manner using the prior art method and apparatus described above.

Means for Solving the Problems In view of the above, the present invention relates to an apparatus for cleaning the inner periphery of the latest quartz tube electric furnace having the shape described above or a bottomed tubular body having the shape.

A plurality of horizontal axes protrude horizontally and radially from a central base that rotates horizontally around a vertical axis at equal angles, and a plurality of injection holes are provided for injecting a plurality of cleaning liquids directed upward onto each horizontal axis. The nozzle heads formed in this way are installed so that each of the nozzle heads can rotate in the vertical direction within a range of 180 degrees above the horizontal position, and all the nozzle heads formed in this way can be inserted. It is constructed so that a bottomed tube, which is an object to be washed, can be covered and engaged with the bottomed tube in a face down state with its bottom facing up.

Embodiment Next, an embodiment of the present invention will be described with reference to the drawings. The bottomed pipe body 1 to be cleaned is turned upside down, and an upper plate 2 equipped with a drainage facility in which an opening can be installed is inserted through a bearing 3. A vertical shaft 4 is passed through the upper plate 2 and connected to a rotation source 5 such as a motor installed at the bottom of the upper plate 2 to obtain rotational movement, and a central base 6 is fixed to a portion protruding above the upper plate 2. A plurality of horizontal axes 7 extend horizontally and radially from the outer periphery of the central base 6.
are made to protrude horizontally at equal angles, and a nozzle head 8 is installed on each of the protruding horizontal shafts 7. A plurality of injection holes 9 are opened on the upper surface of the nozzle head 8, and each injection hole 9 is provided with a cleaning liquid supply path 10 passing through the vertical shaft 4, the central base 6, and the horizontal shaft 7. Original source 11
It is connected to the.

The nozzle head 8 having the injection hole 9 rotates around the horizontal axis 7 at a minimum angle of 90 degrees from the horizontal position to the vertical position, and rotates at the maximum angle of 180 degrees in the vertical plane from the horizontal position to the horizontal position. It is made by reciprocating rotation within an arbitrarily set angle range up to the moving angle. There are a plurality of embodiments of the configuration for rotating.

Embodiment 1 An arm 32 is provided with an oblique cam groove 30 recessed in the outer surface of the nozzle head 8, and a pin 31 that engages with the cam groove 30 is connected to an outer tube 32 that covers the vertical shaft 4.
The outer tube 32 is slid on the vertical shaft 4 to move it up and down.

Embodiment 2 The nozzle head 8 and the horizontal shaft 7 are fixed to each other, and the horizontal shaft 7 is rotatably supported at the edge of the central base 6, and bevel gears 33 provided at the inner ends of the horizontal shafts 7 are engaged with each other. The bevel gear 34 provided on the rotating shaft of the motor 35 installed on the upper part of the base 6 meshes with the bevel gear 33 to transmit the power of the motor 35.

Embodiment 3 Similar to Embodiment 2, a link 37 that engages the bevel gears 33 of each horizontal shaft 7 and is attached to the rotating shaft of the motor 35 via a crank 36 is attached to one side of one nozzle head 8 by a shaft 38. It pivots and transmits the swing motion to the nozzle head 8.

Embodiment 4 (not shown) Similarly to the embodiment 2, the bevel gears 33 of each horizontal shaft 7 are engaged with each other, and the motor 35 is fixed to the central base 6 at a position corresponding to one horizontal shaft 7. The gears are engaged with the rotating shaft and the horizontal shaft 7, respectively.

Embodiment 5 (not shown) A horizontal shaft 7 fixed to each nozzle head 8 and equipped with a gear in the middle is rotatably supported by the central base 6, and has a rotating shaft equipped with a gear that meshes with the gear. Each of the motors 35 is fixed to the central base 6.

Function The present invention configured as described above is capable of uniformly displacing the entire inner periphery of the body 1 to be cleaned, which is a tube with a bottom and resting face down on the upper plate 2 so as to cover the entire cleaning device of the present invention. The cleaning action can be performed by spraying the cleaning liquid without any need for cleaning.

That is, in the cleaning device inside the object to be cleaned 1, a plurality of nozzle heads 8 horizontally rotate on the same radius around the central base 6, and are placed in a horizontal position with the horizontal shaft 7 that supports the nozzle heads 8 as the axis. The minimum rotation angle is 90 degrees from the horizontal position to the vertical position, and the maximum rotation angle is 180 degrees from the horizontal position to the horizontal position. The cleaning liquid sprayed from the injection hole 9 provided on the top surface is uniformly applied to the entire inner surface area of the object to be cleaned 1, which is a tube with a bottom, so that the attached dirt is removed. It is washed off, flows down, falls onto the upper plate 2, and is discharged to an appropriate location from a drainage section provided.

Effects The first purpose of this invention is to clean the periphery of a bottomed tube. Therefore, if the container-shaped body 1 to be cleaned is placed with the bottom downward, the cleaning liquid will naturally flow. It exhibits a storage form and can be expected to remove dirt and cleanse by spraying pressure fluid, so if the cleaning fluid stagnates, the jetting action will be inhibited, so the force-bottomed tube is The opening has to be installed in reverse with the bottom end, and under this reverse installation situation, it is not possible to spray the cleaning liquid in the form of pressurized fluid from the built-in cleaning device to thoroughly clean the entire inner circumferential area of the object to be cleaned 1. , and is characterized by the effect that the cleaning work can be carried out without any residual accumulation of cleaning liquid after cleaning being allowed due to the laws of nature.

[Brief explanation of drawings]

Fig. 1 is an overall front view, Fig. 2 is an enlarged plan view of the device, Fig. 3 is a side view of Fig. 2, and Fig. 4 is a partially cutaway plan schematic diagram for explaining embodiment 2. ,
FIG. 5 is a partially cutaway schematic plan view for explaining the third embodiment. 1... Body to be cleaned, 4... Vertical axis, 6... Central base, 7... Horizontal axis, 8... Nozzle head, 9...
Injection hole.

Claims (1)

[Claims] 1. Injection holes that project horizontally and radially through a plurality of horizontal axes at equal angles from a central base that rotates horizontally around a vertical axis, and inject a plurality of cleaning liquids directed upward onto each horizontal axis. The nozzle head is equipped with a nozzle head having a vertical position, and each of the nozzle heads is made to be able to swing in the vertical direction within an upward range of 180 degrees based on the horizontal position, so that all the nozzle heads formed in this way can be inserted. A device for cleaning the inner periphery of a bottomed tubular body, characterized in that the bottomed tubular body, which is an object to be cleaned, can be covered and engaged with the bottomed tubular body in a face down state with its bottom portion facing up.