Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JPH0351642B2 - - Google Patents
[go: Go Back, main page]

JPH0351642B2 - - Google Patents

Info

Publication number
JPH0351642B2
JPH0351642B2 JP61071380A JP7138086A JPH0351642B2 JP H0351642 B2 JPH0351642 B2 JP H0351642B2 JP 61071380 A JP61071380 A JP 61071380A JP 7138086 A JP7138086 A JP 7138086A JP H0351642 B2 JPH0351642 B2 JP H0351642B2
Authority
JP
Japan
Prior art keywords
gel
hydrolysis
drying
vibration
dry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61071380A
Other languages
Japanese (ja)
Other versions
JPS62230602A (en
Inventor
Koyo Murakami
Yasuji Yamada
Toshio Fujita
Ryoji Akamine
Yojiro Kon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP61071380A priority Critical patent/JPS62230602A/en
Publication of JPS62230602A publication Critical patent/JPS62230602A/en
Publication of JPH0351642B2 publication Critical patent/JPH0351642B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/14Methods for preparing oxides or hydroxides in general
    • C01B13/32Methods for preparing oxides or hydroxides in general by oxidation or hydrolysis of elements or compounds in the liquid or solid state or in non-aqueous solution, e.g. sol-gel process
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01FCOMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F7/00Compounds of aluminium
    • C01F7/02Aluminium oxide; Aluminium hydroxide; Aluminates
    • C01F7/34Preparation of aluminium hydroxide by precipitation from solutions containing aluminium salts
    • C01F7/36Preparation of aluminium hydroxide by precipitation from solutions containing aluminium salts from organic aluminium salts

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Silicon Compounds (AREA)
  • Silicon Polymers (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

[産業上の利用分野] この発明は、高純度の粉末状乾燥ゲルを製造す
る方法に係り、特に金属アルコキシドを原料とし
て高純度の粉末状乾燥ゲルを製造する高純度粉末
状乾燥ゲルの製造方法に関する。 [従来の技術] 乾燥ゲル、例えばシルカゲルやアルミナゲル
は、脱水剤、乾燥剤、クロマトグラフ用充填剤等
の用途に使用されるほか、フアインセラミツクス
の製造原料としても利用されている。そして、シ
リカゲルについては、多成分系光フアイバー、光
学ガラス電子工業用石英、IC封止材用充填材等
の原料としても利用されており、さらに新たな用
途が見出されつつある。また、アルミナゲルにつ
いては、耐熱性が非常に優れていることから高温
焼成容器の原料として使用されているが、近年の
半導体工業の発達に伴つて製品の高純度化が強く
要請されるにつれ、製品や中間製品の焼成工程に
おける製品の汚染防止の観点からこの容器の材質
に対しても摩耗度が小さくて不純物の含有量が極
めて少ないことが強く要請されている。 このような要請は、単にシリカゲルやアルミナ
ゲルについてだけでなく、ジルコニア、チタニア
等の乾燥ゲルについても同様であり、高純度の粉
末状乾燥ゲルを製造する方法の開発が強く要請さ
れている。 ところで、従来、このような乾燥ゲル、例えば
シリカゲルを製造する方法としては、テトラメト
キシシラン、テトライソプロポキシシラン等のテ
トラアルコキシシランを鉱酸や有機酸の存在下で
加水分解することによりシラノールを経てゾル状
シリカとし、次いで静置状態に保持しながらゲル
状物にした後乾燥して乾燥シリカゲルを得る第一
の方法や、テトラアルコキシシランをナトリウム
メチラート、ナトリウムエチラート等のナトリウ
ムアルコラートの存在下に、含水アルコールで加
水分解してゾル状シリカとし、次いでゲル化を行
つた後乾燥して乾燥シリカゲルを得る第二の方法
や、シリコンの塩化物をナトリウムアルコラート
又はリチウムメトキシドと反応させてテトラアル
コキシシランにした後、水又は含水アルコールを
添加してゾル・ゲル反応によりゾル状ゲルを作
り、さらに乾燥して乾燥シリカゲルを得る第三の
方法等が知られている。 [発明が解決しようとする問題点] しかしながら、上記第一の方法では、乾燥前の
段階でゲル化物は塊となつているが、その形状は
一定していないほか、その大きさもまちまちであ
り、特に静置状態でゲル化された場合に得られる
ゲル化物は加水分解容器と同じ形状をしているた
め、このようなゲル化物を乾燥する際における乾
燥速度はゲル化物の大きさにより異なつて効率的
な乾燥が困難になり、また、乾燥に長時間を要す
る。このため、乾燥工程で摩耗により乾燥ゲルが
汚染される場合が多く、さらに乾燥ゲル中に粒子
径の大きいものが多数含まれており、粉末状の乾
燥ゲルを得るには粉砕が必要になり、この粉砕過
程で汚染する恐れもあり、高純度の粉末状乾燥ゲ
ルを製造するための好ましい方法とはいえない。 また、上記第二の方法では、アルコラートの加
水分解で生成した苛性ソーダがゲル化物に取込ま
れ、この苛性ソーダが乾燥ゲル内に残留し、さら
に乾燥機や粉砕機内でゲルと反応したり、機器の
壁面に接触して製品品質上好ましくない腐蝕等を
引起こす。従つて、この第二の方法も高純度の粉
末状のゲルを製造するという観点からすると問題
があり、好ましい方法であるとはいえない。とこ
ろで、乾燥に先駆けて加水分解により生成したゲ
ル化物を水で洗浄することも提案されているが、
ゲル内に取りこまれた苛性ソーダは容易に除去す
ることができず、また、洗浄廃水の処理(アルコ
ールの回収及び廃水処理)が複雑になつてプロセ
ス経済上好ましくない。 さらに、上記第三の方法も、ゲル化物内に苛性
ソーダや水酸化リチウムが取込まれるため上記第
二の方法と同様の問題が生じ、高純度の乾燥粉末
ゲルを製造するための好ましい方法とはいえな
い。 [問題点を解決するための手段] 本発明は、かかる観点に鑑みて創案されたもの
であり、水中において酸解離指数が3.0〜5.0とな
る触媒の存在下で金属アルコキシドを加水分解
し、得られた湿潤ゲルを乾燥して粉末状の乾燥ゲ
ルを製造する粉末状乾燥ゲルの製造方法におい
て、上記金属アルコキシドの加水分解工程及び/
又は湿潤ゲルの乾燥工程の際に振動を付与する高
純度粉末状乾燥ゲルの製造方法である。 本発明において使用する金属アルコキシドとし
ては、それが塩化水銀、ナトリウムアルコラート
等を触媒として金属とアルコールを直接接触させ
て合成する方法、金属の塩化物とアルコールとの
反応によつて合成する方法、アルコール交換反応
による方法等の如何なる方法で構成されたもので
あつてもよいが、高純度の乾燥ゲルを製造すると
いう点から、好ましくは晶析法、精密蒸溜法等の
公知の精製プロセスで精製したものがよい。 また、本発明において使用する触媒は、金属ア
ルコキシドの加水分解の速度を促進するものであ
ればよいが、高純度の乾燥ゲルを製造するという
点から、好ましくは加水分解に続いて行う乾燥工
程で乾燥ゲル中に残留しないようなものがよく、
常温でガス状又は揮発性の無機化合物あるいは乾
燥条件で揮発してしまうような有機酸であつて、
水に対しある程度の溶解度を有するものがよい。
この点についてさらに詳しく説明すると、常温で
ガス状又は揮発性の無機化合物としては、水中に
おける酸解離指数(Pka)の値が3.0〜5.0(25℃)
の酸性化合物である、例えば、アジ化水素
(HN3)、シアン化水素(HCN)、炭酸ガス
(CO2)等がある。また、乾燥工程で揮発して乾
燥ゲル内に残留しないような有機酸としては、そ
の沸点が常圧で200℃以下のものがよく、例えば
蟻酸、酢酸、プロピオン酸等がある。 上記触媒については、水に対してある程度の溶
解度をもち、その酸解離指数(Pka)が25℃で
3.0〜5.0の値の範囲内に入るものであることが必
要である。この酸解離指数(Pka)が5より大き
くなると触媒としての性能が著しく低下し、加水
分解が定量的に進行し難くなつて好ましくない。
また、酸解離指数(Pka)が3.0より小さくなる
と触媒性能はあつても、加水分解後に生成したゲ
ル化物中に取込まれる傾向が強くなるほか、ゲル
化物と反応するようになり、製品乾燥ゲルを汚染
して高純度乾燥ゲルを製造する上で好ましくな
い。さらに、有機酸についてその沸点が200℃を
超えると、乾燥過程でゲル内に残留する傾向が強
くなり、金属アルコキシドの種類によつては有機
酸が分解するものもあり、製品乾燥ゲルの汚染の
原因となるので好ましくない。 次に、本発明における金属アルコキシドの加水
分解について説明する。金属アルコキシドの加水
分解反応はゾル・ゲル反応といわれており、古く
から知られておるが、その反応過程は加水分解、
重合、脱水縮合を繰返しながら高分子化すること
により進むために非常に複雑になり、これを反応
式で完全に記述することは困難である。そこで
種々の金属アルコキシドを用いて上記触媒で加水
分解の研究をした結果、以下に示すような総括反
応を基に必要水分量を求めるのが妥当であること
がわかつた。すなわち、 M()(OR)4+4H2O =M()(OH)4+4ROH (1) M()(OH)4 =M()O2+2H2O (2) M()(OR)4+2H2O =M()O2+4ROH (3) (但し、式中MP()は4価の金属を示す。) すなわち、4価の金属のアルコキシドを例にと
ると、加水分解はほぼ定量的に進めるには上記反
応式(1)に基づき、金属アルコキシド1モルに対し
て4倍モルの水を添加する必要があり、これ以下
であると乾燥工程で残存したアルコキシドからの
炭素が生成する傾向が強まることがわかつた。 また、加水分解時に添加される水は、高純度の
乾燥ゲルを得る観点から、その中に乾燥工程で揮
発性化合物に分解しない化合物(不揮発性化合
物)及びイオンを含まない、いわゆる高純水ある
いは超純水が望ましく、その水質を比抵抗値で示
すと10〜18MΩ・cmの範囲内である。このような
水を使えば、乾燥過程で乾燥ゲル中に製品に好ま
しくない不純物が残留することがない。また、加
水分解温度は公知の方法と特に異なるところはな
く、通常室温〜80℃の範囲内である。 次に、本発明の加水分解工程及び/又は乾燥工
程で行う振動付与について説明する。 金属アルコキシドの加水分解反応は、前述の如
くゾル・ゲル反応を利用したものであり、ゾル化
過程とゲル化過程とが含まれている。そして、ゾ
ル化過程は懸濁状態で行なわれるので、効率的に
進めるために通常反応物を撹拌しながら進められ
ることは既に公知である。しかし、それに引続く
ゲル化工程ではできるだけ静止状態に保持しなが
らゾル化物のゲル化を行うのが常法となつてい
る。このために(ゲル化物)固相が加水分解反応
器内で成長し、最終的には反応器全域が連続した
強固な固相となり、反応器の器壁に付着してその
ままでは輸送が困難になる。また、一部にゲル化
過程でも撹拌することが行なわれているが、ゲル
化物の生成に伴い、撹拌動力が加水分解反応器全
域に伝達しなくなり、極く制限された領域で固相
が破砕され不連続状態になつているにすぎず、そ
の取扱においては事実上静止状態で得られたゲル
化物と同様であつてそのままでの輸送は困難であ
り、また、そのままの状態で乾燥したのでは熱源
に近いゲル化物表面は直に乾燥するが、ゲル化物
内部は表面の乾燥したところが断熱材として作用
すると考えられ、短時間での均質な乾燥が困難で
あり、たとえ乾燥ができたとしても乾燥に長時間
を要してプロセス経済上好ましくない。 このため、本発明においては、加水分解工程の
際及び/又は乾燥工程の際に、好ましくは加水分
解工程の際及び乾燥工程の際に振動を付与するも
のである。加水分解工程の際に振動を付与する
と、従来公知の方法による加水分解工程とは異な
り、ゾル化過程では金属アルコキシドの水への分
散・懸濁状態が非常に良好に保持され、ゾル化反
応が効率よく進み、さらにゲル化過程では生成し
たゲルが反応器の器壁に付着せず、連続した固相
がなくなり、ほぼ同じ大きさに粉砕されて移送も
容易にできるようになる。また、このようにして
ほぼ均質に粉砕されたゲル化物を同一加水分解反
応器内又は移送して乾燥機で振動させながら50〜
200℃で減圧下又は常圧下に乾燥を行うと、ゲル
化物に対して局部的な加熱が起こらず、乾燥過程
でゲル化物の粉砕が進むと共に伝熱が促進され、
短時間でほぼ粒径が揃い、かつ、汚染の少ない高
純度の粉末状乾燥ゲルを製造することができ、さ
らに振動条件を変化させることにより、粒径や粒
径分布を制御できる。 このような目的で付与される振動の条件につい
ては、金属アルコキシドを無機酸性化合物あるい
はPkaが3.0〜5.0で沸点が200℃以下の有機酸等を
用いて加水分解する場合の最適の振動条件は、金
属アルコキシドの種類によつても多少異なるが、
振動数については毎分1000〜1300回(vpm)であ
り、振幅については0.5〜3mm程度である。この
ような振動条件の基に加水分解を行えば、金属ア
ルコキシドの水への分散、懸濁状態が極めて良好
になり、ゾル化過程が効果的に進行し、ゲル化過
程においても生成したゲル化物が大きな塊状の固
相にならず、ほぼ均一に破砕、粉砕された状態に
なる。 また、乾燥工程で付与する振動の条件について
は、どの程度の平均粒径の粒度分布を有する粉末
状乾燥ゲルを製造するかによつて異なるが、加水
分解工程での振動条件よりその振動数において多
く、このように振動数を大きくすることにより乾
燥むらを無くし、かつ、乾燥ゲルの平均粒径、粒
度分布を加水分解後のゲル化物に比べて細粒側に
移行させることができる。通常、この乾燥工程で
の振動数は1100〜1600vpmであり、振幅は2〜5
mmで、このような振動条件で行うと、通常、平均
粒径20〜50μm、最大粒径100〜200μmの粉末状
の乾燥ゲルが得られる。従つて、加水分解工程で
の振動条件と乾燥工程での振動条件をうまく組合
せにすることによつて最終的に得られる粉末状乾
燥ゲルの平均粒径と粒度分布を調節できる。 次に、加水分解工程及び乾燥工程を振動状態に
保持する方法について言及する。振動状態に保持
する方法としては、公知方法でよく、例えば2台
の振動モータを加水分解反応器あるいは乾燥機の
側面に付設する方法、超音波等の振動源を加水分
解反応器あるいは乾燥機の下部に直接付設する方
法等でよい。金属アルコキシドの加水分解工程
(特にゲル化工程)及び生成したゲル化物の乾燥
工程を振動を与えながら行うことはこれらの工程
中に存在する固体、固相に対して一種の剪断力を
与えるものと考えられるので、剪断力を供与する
ような解砕機等を加水分解工程や乾燥工程に付設
しても同様の目的を達成することができ、これら
の手段も本発明にいう振動を付与する手段の概念
に包含されるものである。 本発明による加水分解反応は、回分式でも連続
式でもよいが、この反応ゾル・ゲル反応の一種で
あつて相転移を伴うので、運転管理上回分式で行
う方がやや有利といえる。使用する触媒は加水分
解反応器内にそのまま添加してもよく、また、水
溶液の状態で供給してもよく、この触媒の添加に
よつて反応時のPH値は通常3.0〜5.0となる。ま
た、触媒は1種でも2種以上混合してもよい。こ
の加水分解工程に続いて行うゲル化物の乾燥工程
についても回分式でも連続式でもよいが、振動条
件として振動数が1000〜1600vpm、振幅2〜5mm
が確保できるような汎用の機種を選定し、金属ア
ルコキシドの加水分解で生成するアルコールの種
類に応じて乾燥条件(温度、圧力)を設定してゲ
ル化物の乾燥を行う。乾燥温度は通常50〜200℃
である。最高温度の200℃は触媒として使用する
有機酸の乾燥時の熱安定性により規定されてい
る。 本発明で得られる高純度の粉末状乾燥ゲルは、
その製造工程において振動条件を選定することに
より、任意の平均粒径及び粒径分布のものとして
取り出すことができるので取扱い易く、さらにそ
の用途は高純度容器用原料、高熱伝導性セラミツ
クス原料、各種充填材、ICパツケージ素材等の
分野に亘り極めて広い。 [実施例] 以下、実施例及び比較例に基づいて本発明方法
につき具体的に説明する。 実施例 1 振動源を付設したSUS304製の加水分解容器に
公知の方法で合成して得られた正珪酸メチル100
重量部とメタノール15部とを装入し、さらに超純
水(比抵抗値15MΩ・cm)47重量部を装入し、次
いで酸解離指数Pkaが3.32のシアン化水素水を添
加してPH4.0とした。装入後、振動数1000vpm、
振幅2mmの振動条件下で振動を付与しながら、反
応温度20〜25℃で3時間加水分解を行つた。加水
分解終了後、加水分解反応容器内を観察するとゲ
ル化物は容器壁に付着することがなく、連続した
固相でなくて数mm以下に破砕されていた。 このようにして得られたゲル化物をSUS304製
の振動乾燥機に移し、乾燥温度50〜150℃、真空
度100〜300Torrで振動数毎分1200、振幅2mmに
て2時間乾燥し、39.5重量部の乾燥ゲルを得た。
得られた乾燥ゲルの平均粒径と不純物の測定を行
つた。結果を第1表に示す。 実施例 2 触媒として蟻酸(酸解離指数Pka:3.76、沸点
100.8℃)を用いてPHを4.0とし、加水分解時の振
動条件を振動数1000vpm及び振幅1mm、また、乾
燥時の振動条件を振動数1000vpm及び振幅2mmと
し、実施例と同様にして乾燥ゲル39.4重量部を得
た。得られた乾燥ゲルの平均粒径と不純物の測定
を行つた。結果を第1表に示す。 比較例 1 触媒として塩酸(酸解離指数Pka:7.0)を用
いてPHを4.0とし、実施例1と同様にして乾燥ゲ
ル39.5重量部を得た。得られた乾燥ゲルの平均粒
径と不純物の測定を行つた。結果を第1表に示
す。
[Industrial Application Field] The present invention relates to a method for producing a high purity dry gel powder, and in particular, a method for producing a high purity dry gel powder using a metal alkoxide as a raw material. Regarding. [Prior Art] Dry gels, such as silica gel and alumina gel, are used not only as dehydrating agents, desiccant agents, and fillers for chromatography, but also as raw materials for manufacturing fine ceramics. Silica gel is also used as a raw material for multi-component optical fibers, quartz for optical glass and electronic industry, fillers for IC sealants, and new uses are being discovered. In addition, alumina gel has excellent heat resistance and is used as a raw material for high-temperature firing containers, but as the semiconductor industry has developed in recent years, there has been a strong demand for higher purity products. From the viewpoint of preventing product contamination during the firing process of products and intermediate products, it is strongly required that the material of this container has a low degree of abrasion and an extremely low content of impurities. Such requirements apply not only to silica gel and alumina gel, but also to dry gels such as zirconia and titania, and there is a strong demand for the development of a method for producing highly pure powdered dry gels. By the way, conventionally, as a method for manufacturing such dry gel, for example, silica gel, tetraalkoxysilane such as tetramethoxysilane or tetraisopropoxysilane is hydrolyzed in the presence of mineral acid or organic acid to form silanol. The first method is to obtain a dry silica gel by forming silica in a sol form, then forming it into a gel form while keeping it still, and drying it, or by preparing a tetraalkoxysilane in the presence of a sodium alcoholate such as sodium methylate or sodium ethylate. The second method is to obtain dry silica gel by hydrolyzing it with hydrous alcohol to obtain sol-like silica, then gelling it and drying it, or by reacting silicon chloride with sodium alcoholate or lithium methoxide to obtain tetrasilica. A third method is known in which, after forming an alkoxysilane, water or a hydrous alcohol is added to form a sol-like gel through a sol-gel reaction, and the resulting product is further dried to obtain a dry silica gel. [Problems to be Solved by the Invention] However, in the first method described above, although the gelled material is in the form of a lump before drying, the shape is not constant and the size is also different. In particular, the gelled product obtained when it is gelled in a stationary state has the same shape as the hydrolysis container, so the drying speed when drying such a gelled product varies depending on the size of the gelled product, and the efficiency is drying becomes difficult and takes a long time. For this reason, the dried gel is often contaminated due to abrasion during the drying process, and furthermore, the dried gel contains many particles with large particle sizes, and pulverization is required to obtain a powdered dry gel. There is also a risk of contamination during this pulverization process, so it cannot be said to be a preferred method for producing a highly pure powdered dry gel. In addition, in the second method, the caustic soda generated by hydrolysis of alcoholate is incorporated into the gelled product, and this caustic soda remains in the dried gel and reacts with the gel in the dryer or pulverizer, or causes damage to the equipment. Contact with walls may cause corrosion, etc. that is undesirable in terms of product quality. Therefore, this second method also has problems from the viewpoint of producing a highly pure powdered gel, and cannot be said to be a preferable method. By the way, it has also been proposed to wash the gelled product generated by hydrolysis with water prior to drying.
The caustic soda incorporated into the gel cannot be easily removed, and the treatment of washing wastewater (alcohol recovery and wastewater treatment) becomes complicated, which is unfavorable from the economic point of view of the process. Furthermore, the third method described above also has the same problem as the second method because caustic soda and lithium hydroxide are incorporated into the gelled product, so it is not a preferable method for producing a high-purity dry powder gel. I can't say that. [Means for Solving the Problems] The present invention was devised in view of this point of view, and consists of hydrolyzing a metal alkoxide in water in the presence of a catalyst having an acid dissociation index of 3.0 to 5.0. In the method for producing a powdered dry gel, the wet gel is dried to produce a powdered dry gel, and the above metal alkoxide hydrolysis step and/or
Alternatively, there is a method for producing a high-purity powdered dry gel in which vibration is applied during the drying process of the wet gel. The metal alkoxide used in the present invention can be synthesized by directly contacting a metal with an alcohol using mercury chloride, sodium alcoholate, etc. as a catalyst, by a reaction between a metal chloride and an alcohol, or by a method in which it is synthesized by a reaction between a metal chloride and an alcohol. It may be formed by any method such as an exchange reaction method, but from the viewpoint of producing a highly pure dry gel, it is preferably purified by a known purification process such as crystallization method or precision distillation method. Things are good. Further, the catalyst used in the present invention may be any catalyst as long as it accelerates the rate of hydrolysis of the metal alkoxide, but from the viewpoint of producing a high-purity dry gel, it is preferable to use a catalyst in the drying step that follows the hydrolysis. It is best to use something that does not remain in the dry gel.
An inorganic compound that is gaseous or volatile at room temperature or an organic acid that evaporates under dry conditions,
It is preferable to have a certain degree of solubility in water.
To explain this point in more detail, inorganic compounds that are gaseous or volatile at room temperature have an acid dissociation index (Pka) value of 3.0 to 5.0 in water (at 25℃).
Examples of acidic compounds include hydrogen azide (HN 3 ), hydrogen cyanide (HCN), and carbon dioxide gas (CO 2 ). In addition, organic acids that do not volatilize during the drying process and remain in the dried gel preferably have a boiling point of 200° C. or lower at normal pressure, such as formic acid, acetic acid, propionic acid, and the like. The above catalyst has a certain degree of solubility in water and its acid dissociation index (Pka) at 25℃.
It must be within the value range of 3.0 to 5.0. If the acid dissociation index (Pka) is greater than 5, the performance as a catalyst will be significantly lowered, making it difficult for hydrolysis to proceed quantitatively, which is undesirable.
In addition, if the acid dissociation index (Pka) is less than 3.0, even if the catalyst has good performance, there is a strong tendency for it to be incorporated into the gelled product produced after hydrolysis, and it will also react with the gelled product, resulting in a product drying gel. contamination, which is undesirable in producing high-purity dry gel. Furthermore, if the boiling point of an organic acid exceeds 200°C, there is a strong tendency for it to remain in the gel during the drying process, and depending on the type of metal alkoxide, the organic acid may decompose, resulting in contamination of the dried gel product. This is not desirable as it may cause Next, hydrolysis of metal alkoxide in the present invention will be explained. The hydrolysis reaction of metal alkoxides is called the sol-gel reaction, and has been known for a long time.
Because polymerization proceeds by repeating polymerization and dehydration condensation, it becomes extremely complex, and it is difficult to completely describe it with a reaction formula. Therefore, as a result of research on hydrolysis using the above catalyst using various metal alkoxides, it was found that it is appropriate to determine the required amount of water based on the general reaction shown below. That is, M()(OR) 4 +4H 2 O =M()(OH) 4 +4ROH (1) M()(OH) 4 =M()O 2 +2H 2 O (2) M()(OR) 4 +2H 2 O = M()O 2 +4ROH (3) (However, in the formula, MP() indicates a tetravalent metal.) In other words, if we take an alkoxide of a tetravalent metal as an example, the hydrolysis is almost quantitative. In order to proceed to the above reaction formula (1), it is necessary to add 4 times the mole of water per mole of metal alkoxide, and if it is less than this, carbon tends to be generated from the alkoxide remaining in the drying process. It was found that it became stronger. In addition, from the viewpoint of obtaining a high-purity dry gel, the water added during hydrolysis is so-called high-pure water or ultra-pure water that does not contain compounds (non-volatile compounds) and ions that do not decompose into volatile compounds during the drying process. Water is preferable, and the specific resistance value of the water is within the range of 10 to 18 MΩ·cm. By using such water, no undesirable impurities remain in the dried gel during the drying process. Further, the hydrolysis temperature is not particularly different from known methods and is usually within the range of room temperature to 80°C. Next, vibration application performed in the hydrolysis step and/or drying step of the present invention will be explained. The hydrolysis reaction of metal alkoxide utilizes the sol-gel reaction as described above, and includes a sol-forming process and a gel-forming process. Since the solization process is carried out in a suspended state, it is already known that the process is usually carried out while stirring the reactants in order to proceed efficiently. However, in the subsequent gelation step, it is a common practice to gel the sol while keeping it as stationary as possible. For this reason, a solid phase (gelled product) grows inside the hydrolysis reactor, and eventually the entire area of the reactor becomes a continuous, strong solid phase that adheres to the walls of the reactor and becomes difficult to transport as it is. Become. In addition, stirring is sometimes used during the gelation process, but as gelation occurs, the stirring power is no longer transmitted throughout the hydrolysis reactor, causing the solid phase to fragment in a very limited area. It is difficult to transport the gel as it is because it is virtually the same as a gel obtained in a static state. The surface of the gelled material near the heat source dries directly, but the dry surface inside the gelled material is thought to act as a heat insulator, making it difficult to dry homogeneously in a short time, and even if drying is possible, it will be difficult to dry. It takes a long time to process the process, which is unfavorable from a process economic point of view. Therefore, in the present invention, vibration is applied during the hydrolysis step and/or the drying step, preferably during the hydrolysis step and the drying step. When vibration is applied during the hydrolysis process, unlike the hydrolysis process using conventionally known methods, the dispersion/suspension state of the metal alkoxide in water is maintained very well during the solization process, and the solization reaction is accelerated. The process proceeds efficiently, and the gel produced during the gelation process does not adhere to the walls of the reactor, there is no continuous solid phase, and the gel is pulverized to approximately the same size, making it easier to transport. In addition, the gelled product pulverized almost homogeneously in this way is dried in the same hydrolysis reactor or transferred and shaken in a dryer for 50 to 50 minutes.
When drying is performed at 200°C under reduced pressure or normal pressure, local heating does not occur to the gelled material, and as the gelled material is crushed during the drying process, heat transfer is promoted.
A highly purified powdered dry gel with almost uniform particle size and less contamination can be produced in a short time, and furthermore, by changing the vibration conditions, the particle size and particle size distribution can be controlled. Regarding the vibration conditions given for this purpose, the optimal vibration conditions when hydrolyzing metal alkoxides using an inorganic acid compound or an organic acid with a Pka of 3.0 to 5.0 and a boiling point of 200℃ or less are as follows. Although it varies somewhat depending on the type of metal alkoxide,
The frequency is 1000 to 1300 vibrations per minute (vpm), and the amplitude is about 0.5 to 3 mm. If hydrolysis is carried out under such vibration conditions, the dispersion and suspension of the metal alkoxide in water will be very good, the solization process will proceed effectively, and the gelled product produced during the gelation process will be removed. does not become a large lumpy solid phase, but is almost uniformly crushed and pulverized. In addition, the vibration conditions applied in the drying process vary depending on the average particle size distribution of the powdered dry gel to be produced, but the vibration frequency is determined by the vibration conditions in the hydrolysis process. In many cases, by increasing the vibration frequency in this manner, uneven drying can be eliminated and the average particle size and particle size distribution of the dried gel can be shifted to the finer particle side compared to the gelled product after hydrolysis. Normally, the frequency in this drying process is 1100 to 1600 vpm, and the amplitude is 2 to 5.
mm and under such vibration conditions, a dry gel in the form of powder with an average particle size of 20 to 50 μm and a maximum particle size of 100 to 200 μm is usually obtained. Therefore, by appropriately combining the vibration conditions in the hydrolysis step and the vibration conditions in the drying step, the average particle size and particle size distribution of the finally obtained powdered dry gel can be controlled. Next, a method of maintaining the hydrolysis step and drying step in a vibrating state will be mentioned. The method of maintaining the vibration state may be any known method, such as attaching two vibration motors to the side of the hydrolysis reactor or dryer, or attaching a vibration source such as ultrasonic waves to the side of the hydrolysis reactor or dryer. A method such as attaching it directly to the bottom may be used. Performing the metal alkoxide hydrolysis process (particularly the gelling process) and the drying process of the gelled product while applying vibration imparts a type of shearing force to the solids and solid phases that are present during these processes. Therefore, the same purpose can be achieved even if a crusher or the like that applies shearing force is attached to the hydrolysis process or drying process, and these means also serve as the means for applying vibration according to the present invention. It is included in the concept. The hydrolysis reaction according to the present invention may be carried out either batchwise or continuously, but since this reaction is a type of sol-gel reaction and involves a phase transition, it is somewhat more advantageous to carry it out in a batchwise manner for better operational management. The catalyst used may be added as is into the hydrolysis reactor, or may be supplied in the form of an aqueous solution, and the addition of this catalyst usually brings the pH value during the reaction to 3.0 to 5.0. Further, the catalyst may be used alone or in a mixture of two or more. The drying process of the gelled product that follows this hydrolysis process may be either a batch process or a continuous process, but the vibration conditions include a frequency of 1000 to 1600 vpm and an amplitude of 2 to 5 mm.
Select a general-purpose model that can ensure the following conditions, and dry the gelled product by setting the drying conditions (temperature, pressure) according to the type of alcohol produced by hydrolysis of metal alkoxide. Drying temperature is usually 50-200℃
It is. The maximum temperature of 200°C is determined by the thermal stability of the organic acid used as a catalyst during drying. The highly pure powdered dry gel obtained by the present invention is
By selecting the vibration conditions in the manufacturing process, particles with arbitrary average particle size and particle size distribution can be extracted, making them easy to handle.Furthermore, they are used as raw materials for high-purity containers, raw materials for high thermal conductivity ceramics, and various fillings. It has an extremely wide range of fields including materials, IC package materials, etc. [Example] Hereinafter, the method of the present invention will be specifically explained based on Examples and Comparative Examples. Example 1 Methyl orthosilicate 100 synthesized by a known method in a SUS304 hydrolysis container equipped with a vibration source
parts by weight and 15 parts of methanol were charged, and further 47 parts by weight of ultrapure water (specific resistance value 15 MΩ cm) were charged, and then hydrogen cyanide water with an acid dissociation index Pka of 3.32 was added to adjust the pH to 4.0. did. After charging, frequency 1000vpm,
Hydrolysis was carried out at a reaction temperature of 20 to 25° C. for 3 hours while applying vibration under vibration conditions with an amplitude of 2 mm. When the inside of the hydrolysis reaction vessel was observed after the hydrolysis was completed, it was found that the gelled product did not adhere to the vessel wall, was not a continuous solid phase, and was crushed into pieces of several mm or less. The gelled product thus obtained was transferred to a vibration dryer made of SUS304, and dried for 2 hours at a drying temperature of 50 to 150°C, a degree of vacuum of 100 to 300 Torr, a vibration frequency of 1200 per minute, and an amplitude of 2 mm. A dry gel was obtained.
The average particle size and impurities of the obtained dried gel were measured. The results are shown in Table 1. Example 2 Formic acid (acid dissociation index Pka: 3.76, boiling point
100.8℃), the pH was set to 4.0, the vibration conditions during hydrolysis were a frequency of 1000 vpm and an amplitude of 1 mm, and the vibration conditions during drying were a frequency of 1000 vpm and an amplitude of 2 mm, and the dried gel was dried in the same manner as in the example. Parts by weight were obtained. The average particle size and impurities of the obtained dried gel were measured. The results are shown in Table 1. Comparative Example 1 39.5 parts by weight of a dry gel was obtained in the same manner as in Example 1 except that the pH was adjusted to 4.0 using hydrochloric acid (acid dissociation index Pka: 7.0) as a catalyst. The average particle size and impurities of the obtained dried gel were measured. The results are shown in Table 1.

【表】【table】

【表】 比較例 2 触媒として塩酸(酸解離指数Pka:−7.0)を
用いてPHを3.0とし、振動に代えて撹拌しながら
実施例1と同様に加水分解を行つた。加水分解終
了後、加水分解容器内を観察すると撹拌力の及ば
ない容器壁付近のところでは連続固相となつてお
り、そのままでは加水分解反応容器よりゲル化物
の取出しが不可能で、取出しには振動を与えるか
剪断力を与える必要があり、また、分析の結果、
反応時間3時間では珪酸メチルの加水分解が定量
的に進んでいないことが明らかとなつた。 [発明の効果] 本発明によれば、加水分解工程及び/又は乾燥
工程において不純物の混入がなく、得られる乾燥
ゲルは粉末状となつており、取扱いや輸送が極め
て容易であるほか、高純度であるのでその用途が
極めて広く、また、製造プロセスが簡単であるこ
とから操作性が良好である。
[Table] Comparative Example 2 Hydrolysis was carried out in the same manner as in Example 1, using hydrochloric acid (acid dissociation index Pka: -7.0) as a catalyst to adjust the pH to 3.0, and stirring instead of vibration. When the inside of the hydrolysis container was observed after the hydrolysis was completed, a continuous solid phase was formed near the wall of the container where stirring power could not reach. It is necessary to apply vibration or shear force, and as a result of analysis,
It became clear that hydrolysis of methyl silicate did not proceed quantitatively during the reaction time of 3 hours. [Effects of the Invention] According to the present invention, there is no contamination of impurities in the hydrolysis step and/or drying step, and the resulting dry gel is in the form of a powder, which is extremely easy to handle and transport, and has high purity. Therefore, its uses are extremely wide, and since the manufacturing process is simple, it is easy to operate.

Claims (1)

【特許請求の範囲】 1 水中において酸解離指数が3.0〜5.0となる触
媒の存在下で金属アルコキシドを加水分解し、得
られた湿潤ゲルを乾燥して粉末状の乾燥ゲルを製
造する粉末状乾燥ゲルの製造方法において、上記
金属アルコキシドの加水分解工程及び/又は湿潤
ゲルの乾燥工程の際に振動を付与することを特徴
とする高純度粉末状乾燥ゲルの製造方法。 2 触媒として、沸点が200℃以下である有機酸
を使用する特許請求範囲第1項記載の高純度粉末
状乾燥ゲルの製造方法。
[Claims] 1. Powder drying in which a metal alkoxide is hydrolyzed in water in the presence of a catalyst with an acid dissociation index of 3.0 to 5.0, and the resulting wet gel is dried to produce a powdered dry gel. A method for producing a high-purity dry gel powder, characterized in that vibration is applied during the metal alkoxide hydrolysis step and/or the wet gel drying step. 2. The method for producing a high purity powdered dry gel according to claim 1, which uses an organic acid having a boiling point of 200° C. or less as a catalyst.
JP61071380A 1986-03-31 1986-03-31 Method for producing high purity powdered dry gel Granted JPS62230602A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61071380A JPS62230602A (en) 1986-03-31 1986-03-31 Method for producing high purity powdered dry gel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61071380A JPS62230602A (en) 1986-03-31 1986-03-31 Method for producing high purity powdered dry gel

Publications (2)

Publication Number Publication Date
JPS62230602A JPS62230602A (en) 1987-10-09
JPH0351642B2 true JPH0351642B2 (en) 1991-08-07

Family

ID=13458839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61071380A Granted JPS62230602A (en) 1986-03-31 1986-03-31 Method for producing high purity powdered dry gel

Country Status (1)

Country Link
JP (1) JPS62230602A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3873512T2 (en) * 1988-02-19 1992-12-03 Tohru Yamamoto CATALYST FOR THE SOL GEL METHOD USING A METAL ALKOXIDE AND THE SOL GEL METHOD USING OXIDE.

Also Published As

Publication number Publication date
JPS62230602A (en) 1987-10-09

Similar Documents

Publication Publication Date Title
EP1657283B1 (en) Process for producing hydrophobic silica powder
US5516350A (en) Process for producing synthetic quartz glass powder
Lazareva et al. Synthesis of high-purity silica nanoparticles by sol-gel method
KR100294312B1 (en) Synthetic quartz glass powder and its manufacturing method
JPH0710535A (en) Production of alumina sol excellent in transparency and having satisfactory viscosity stability
US2945817A (en) Silica-silicone aerogels and their preparation
JP4888633B2 (en) Method for producing hydrophobic silica powder
JPH0351642B2 (en)
JP3877827B2 (en) Method for producing ultra high purity spherical silica fine particles
JPH10287415A (en) Production of highly pure spherical silica
CN115872411A (en) Preparation device and preparation method of high-purity spherical quartz sand
JP3318946B2 (en) Powdery dry gel, silica glass powder, and method for producing silica glass melt molded article
JP2532933B2 (en) Method for producing high-purity silica
JP3216875B2 (en) Silica and method for producing silica
JP3689926B2 (en) High-purity synthetic quartz glass powder, method for producing the same, and high-purity synthetic quartz glass molded body using the same
KR20150004207A (en) Manufacture method of Silica nanoparticles and Silica Nonoparticles
JPS6259515A (en) Production of high-purity silicic acid hydrate
JPH08231214A (en) Method for producing synthetic quartz glass powder
JPH0127003B2 (en)
JPS61197417A (en) Production of high-purity mullite powder
JPH03159911A (en) Production of spherical silica particle
JPH0986918A (en) Method for producing synthetic quartz glass powder
JPH0521855B2 (en)
JPH11189408A (en) Method for producing silicon for solar cells
JPS629523B2 (en)