JPH0352554B2 - - Google Patents
Info
- Publication number
- JPH0352554B2 JPH0352554B2 JP59083214A JP8321484A JPH0352554B2 JP H0352554 B2 JPH0352554 B2 JP H0352554B2 JP 59083214 A JP59083214 A JP 59083214A JP 8321484 A JP8321484 A JP 8321484A JP H0352554 B2 JPH0352554 B2 JP H0352554B2
- Authority
- JP
- Japan
- Prior art keywords
- molybdenum oxide
- oxide film
- film
- molybdate
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims description 22
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 11
- MEFBJEMVZONFCJ-UHFFFAOYSA-N molybdate Chemical compound [O-][Mo]([O-])(=O)=O MEFBJEMVZONFCJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000007864 aqueous solution Substances 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000000243 solution Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 description 13
- 238000000151 deposition Methods 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000000862 absorption spectrum Methods 0.000 description 5
- 239000003792 electrolyte Substances 0.000 description 4
- 238000005562 fading Methods 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- 238000005868 electrolysis reaction Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000004040 coloring Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910013684 LiClO 4 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- NMHMDUCCVHOJQI-UHFFFAOYSA-N lithium molybdate Chemical compound [Li+].[Li+].[O-][Mo]([O-])(=O)=O NMHMDUCCVHOJQI-UHFFFAOYSA-N 0.000 description 1
- 229910003002 lithium salt Inorganic materials 0.000 description 1
- 159000000002 lithium salts Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- -1 molybdate ions Chemical class 0.000 description 1
- 159000000001 potassium salts Chemical class 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000007086 side reaction Methods 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Description
a 産業上の利用分野
本発明は、モリブデンの酸化物被膜の製造方法
に関し、特にエレクトロクロミツク素子(以下
EC素子と略称する)用被膜として良好なモリブ
デンの酸化物被膜の電解析出法に関する。
b 従来技術
酸化モリブデンはEC特性を示すことが知られ
ておりこれを利用したEC素子も数多く提案され
ている。酸化モリブデン被膜の形成方法としては
スパツタ法・蒸着法などのいわゆるPVD法
(Physical Vapor Deposition)が用いられてい
るが一般にPVD法は大面積にわたり均一な膜を
作成するのが困難であり生産性も悪いという欠点
があつた。
c 発明が解決しようとする問題点
本発明は、大面積にわたつて均一な被膜が得ら
れなかつた従来法の欠点を解決し、大面積にわた
つて均一なモリブデンの酸化物被膜を得ること、
特にEC素子に用いるのに適したモリブデンの酸
化物被膜を得ることをその目的とする。
d 問題点を解決するための手段
上記問題点を解決するための本発明は、少なく
とも表面に導電性を有する基板をモリブデン酸塩
水溶液中に浸漬し、該基板をカソードとして電解
析出を行なう方法を用いている。
本発明に用いるモリブデン酸塩水溶液としては
モリブデン酸イオンが0.005〜2モル/のもの
が好ましい。0.005モル/よりも小さい濃度で
は水溶液の抵抗値が増加するためにより高い電圧
を必要としたり、目的の電解析出反応以外の副反
応が激しくなるために電解効率が悪くなつたり電
極上で気体が発生したりする欠点となる。又2モ
ル/よりも大きな濃度では液PHの調整が難しく
なる。
又均一で密着性の良好な被膜を得るためには、
上記モリブデン酸塩水溶液は酸性であること、特
にPH5以下であることが好まれる。
又モリブデン酸塩水溶液のPHを0.8〜1.5とする
と近赤外部に吸収極大をもつ青色のモリブデンの
酸化物被膜が得られ、又PHを2以上とすることに
よつて400〜500nmに吸収帯をもつ褐色のモリブ
デンの酸化物被膜が得られる。
モリブデン酸塩水溶液を作成するのに使用され
るモリブデン酸塩としては、各種金属との塩が使
用できる。中でもリチウム塩、ナトリウム塩、カ
リウム塩などイオン半径の小さなカチオンの塩を
使用することが、本製造方法によつて得られたモ
リブデンの酸化物被膜を用いて応答の早いEC素
子が得られるので好ましい。
電解析出の電圧印加方法としては定電流電解法
がその析出膜厚を制御する上で望ましいが、
5A/m2よりも大きな電流密度で電解析出を行な
うと生成される膜の均一性および密着性が悪くな
るので電流密度5A/m2以下で電解析出すること
が望ましい。
又本発明のモリブデンの酸化物被膜を製造でき
る基板は、電解析出を行なう際に電極となりえる
基板であればどの様な材質、形状であつてもかま
わず、少なくとも表面に導電性を有する材料であ
れば金属又は酸化物の基板であつても使用でき
る。又該製造方法で作成した被膜をEC素子用被
膜として使用するためには基板は透明であること
が好まれ、特に導電被膜つきガラス板が望まし
い。
e 実施例
PH値を1.0、1.5、2.0、3.0、4.0に硫酸を用いて
調整した0.07モル/のモリブデン酸リチウムの
水溶液をそれぞれ100mlずつ作成した。この電解
液をそれぞれ恒温槽中に入れ25℃に保持しながら
この電解液中にSnO2透明導電膜付ガラス(たて
20mm、よこ50mm、厚さ1.1mm)および白金板(た
て20mm、よこ50mm、厚さ0.3mm)を浸漬し、白金
板をアノード、透明導電膜つきガラスをカソード
として3A/m2の電流密度でそれぞれ90秒間定電
流電解を行なつた。
上記操作により透明導電膜上にそれぞれ約2000
Åのモリブデンの酸化物被膜(以後被膜と略称)
が形成されていたが、上記5種類の被膜はいずれ
も均一性・密着性の良好な被膜であつた。ここで
電解液PHが1および1.5で得られた被膜は青色を
示し、電解液PHが2.0、3.0、4.0で得られた被膜は
褐色であつた。
その後こうして得られた5種類の被膜つきガラ
ス基板およびPt板(たて16cm、よこ2cm、厚さ
0.3mm)を1モル/のLiClO4のプロピレンカー
ボネート溶液中に浸漬し、簡易EC素子とした。
この簡易EC素子の被膜つきガラス基板およびPt
板を両電極として、両極間に±2Vの直流電圧を
印加し、その時の光学密度(以後optical
density O.D.と略称)を測定した。被膜つきガラ
ス側をそれぞれアノードおよびカソードとして電
圧を印加した時のO.D.値O.D.(+)、O.D.(−)お
よびそれらO.D.値の差△O.D.の値を第1表に示
す。ここで各O.D.値は電圧を印加した後O.D.が
ほぼ一定となつた時点でのO.D.値(λ=600nm)
を示す。
PH1.0および1.5の条件で作成した被膜は上記操
作で無色−青色の発消色を示し、PH2.0、3.0、4.0
の条件で作成した被膜は褐色(淡)−褐色(濃)
の間で可逆的なO.D.の変化が起つていた。PH1.0
で作成した被膜の着消色時の可視光吸収スペクト
ルを第1図にPH3.0の条件で作成した被膜の着消
色時の可視吸収スペクトルを第2図に示す。
a. Field of Industrial Application The present invention relates to a method for producing a molybdenum oxide film, and in particular to an electrochromic device (hereinafter referred to as
This paper relates to an electrolytic deposition method for a molybdenum oxide film that is suitable as a film for EC devices. b. Prior Art Molybdenum oxide is known to exhibit EC characteristics, and many EC elements using this have been proposed. The so-called PVD method (Physical Vapor Deposition), such as the sputtering method and vapor deposition method, is used to form molybdenum oxide films, but in general, with the PVD method, it is difficult to create a uniform film over a large area, and productivity is low. It had the drawback of being bad. c Problems to be Solved by the Invention The present invention solves the drawbacks of the conventional method in which a uniform coating cannot be obtained over a large area, and obtains a uniform molybdenum oxide coating over a large area.
The purpose is to obtain a molybdenum oxide film particularly suitable for use in EC devices. d Means for Solving the Problems The present invention for solving the above problems is a method in which a substrate having conductivity at least on the surface is immersed in an aqueous molybdate solution, and electrolytic deposition is performed using the substrate as a cathode. is used. The molybdate aqueous solution used in the present invention preferably contains 0.005 to 2 mol/molybdate ion. If the concentration is less than 0.005 mol/ml, the resistance of the aqueous solution will increase, requiring a higher voltage, or side reactions other than the desired electrolytic deposition reaction will become more intense, resulting in poor electrolytic efficiency or gas formation on the electrode. This is a drawback that may occur. Furthermore, if the concentration is greater than 2 mol/mol, it becomes difficult to adjust the liquid pH. In addition, in order to obtain a uniform film with good adhesion,
The molybdate aqueous solution is preferably acidic, particularly preferably at a pH of 5 or less. Furthermore, when the pH of the molybdate aqueous solution is set to 0.8 to 1.5, a blue molybdenum oxide film having an absorption maximum in the near-infrared region can be obtained, and by setting the pH to 2 or higher, an absorption band can be obtained between 400 and 500 nm. A brown molybdenum oxide film is obtained. As the molybdate used to prepare the molybdate aqueous solution, salts with various metals can be used. Among them, it is preferable to use cationic salts with a small ionic radius, such as lithium salts, sodium salts, and potassium salts, because an EC element with a quick response can be obtained using the molybdenum oxide film obtained by this manufacturing method. . As a voltage application method for electrolytic deposition, constant current electrolysis is preferable in terms of controlling the deposited film thickness.
If electrolytic deposition is performed at a current density higher than 5 A/m 2 , the uniformity and adhesion of the resulting film will deteriorate, so it is desirable to perform electrolytic deposition at a current density of 5 A/m 2 or less. Further, the substrate on which the molybdenum oxide film of the present invention can be manufactured may be of any material or shape as long as it can serve as an electrode during electrolytic deposition, and any material having conductivity on at least the surface may be used. If so, even metal or oxide substrates can be used. Furthermore, in order to use the film produced by this manufacturing method as a film for an EC device, it is preferable that the substrate be transparent, and a glass plate with a conductive film is particularly desirable. e Example 100 ml of each 0.07 mol/aqueous lithium molybdate aqueous solution whose pH value was adjusted to 1.0, 1.5, 2.0, 3.0, and 4.0 using sulfuric acid was prepared. Each of these electrolytes was placed in a thermostat and maintained at 25°C, while glass with a SnO 2 transparent conductive film (vertical) was added to the electrolyte.
20mm, width 50mm, thickness 1.1mm) and a platinum plate (vertical 20mm, width 50mm, thickness 0.3mm) were immersed, and the platinum plate was used as an anode and the glass with transparent conductive film was used as a cathode, and a current density of 3A/ m2 was applied. Constant current electrolysis was performed for 90 seconds each. Approximately 2,000 cells each are placed on the transparent conductive film by the above operation.
Å molybdenum oxide coating (hereinafter abbreviated as coating)
However, all of the above five types of coatings had good uniformity and adhesion. The coatings obtained with electrolyte pH of 1 and 1.5 were blue, and the coatings obtained with electrolyte pH of 2.0, 3.0, and 4.0 were brown. Afterwards, five types of glass substrates with coatings and Pt plates (vertical 16cm, width 2cm, thickness
0.3 mm) was immersed in a 1 mol/LiClO 4 propylene carbonate solution to prepare a simple EC element.
The coated glass substrate and Pt of this simple EC element
Using the plate as both electrodes, a DC voltage of ±2V is applied between the two electrodes, and the optical density at that time (hereinafter referred to as optical
density OD) was measured. Table 1 shows the OD values OD (+), OD (-) and the difference ΔOD between these OD values when a voltage was applied using the coated glass side as an anode and a cathode, respectively. Here, each OD value is the OD value at the point when the OD becomes almost constant after applying the voltage (λ = 600 nm)
shows. The coatings prepared under the conditions of PH1.0 and 1.5 showed colorless-blue color development and fading in the above procedure,
The film created under these conditions is brown (light) - brown (dark).
A reversible change in OD occurred between PH1.0
Fig. 1 shows the visible light absorption spectrum of the film prepared under the conditions of pH 3.0, and Fig. 2 shows the visible absorption spectrum of the film prepared under the conditions of pH 3.0.
【表】
上記結果において、EC特性としては着消色時
の吸光度の差△O.D.が大きいことが好まれるの
で、青色発色のEC素子用被膜としてはPH1.0で作
成した被膜が、又褐色発色のEC素子用被膜とし
てはPH3.0で作成した被膜が上記実施例中でEC素
子用被膜として適していることがわかる。
f 発明の効果
本発明によれば、少なくとも表面に伝導性を有
する任意の基板上に大面積にわたつて均一なモリ
ブデンの酸化物被膜を形成することができる。こ
うして得られたモリブデンの酸化物被膜はエレク
トロクロミツク特性を示し、エレクトロクロミツ
ク素子を製造するのに適している。又本発明によ
れば従来得られなかつた褐色(淡)−褐色(濃)
の発消色を示すエレクトロクロミツク素子が作成
できるモリブデンの酸化物被膜を得ることが出来
る。又モリブデン酸イオンを含む溶液のPHを変化
させるという簡単な手段によつて、青色および褐
色という異つた発色を示すエレクトロクロミツク
素子用被膜が得られるという利点を有す。又本発
明は電解析出法を利用するものであるので電解量
によりその生成される膜厚を正確に制御すること
ができる。[Table] In the above results, it is preferable for the EC characteristics to have a large difference in absorbance △OD when coloring and decoloring. Therefore, as a coating for blue-colored EC elements, a coating prepared at PH1.0 is preferable, and a coating prepared at PH1.0 is also suitable for brown-coloring. It can be seen that the film prepared at PH3.0 is suitable as the EC element film in the above examples. f Effects of the Invention According to the present invention, a uniform molybdenum oxide film can be formed over a large area on any substrate having conductivity at least on the surface. The molybdenum oxide film thus obtained exhibits electrochromic properties and is suitable for manufacturing electrochromic devices. In addition, according to the present invention, brown (light)-brown (dark) which could not be obtained conventionally.
It is possible to obtain a molybdenum oxide film that can be used to create an electrochromic device that exhibits color development and fading. It also has the advantage that coatings for electrochromic devices that exhibit different colors, blue and brown, can be obtained by simply changing the pH of a solution containing molybdate ions. Furthermore, since the present invention utilizes electrolytic deposition, the thickness of the produced film can be accurately controlled by the amount of electrolysis.
第1図はPH1.0の条件で作成したモリブデンの
酸化物被膜を用いた簡易EC素子の発消色を示す
可視光吸収スペクトルを示す図、第2図はPH3.0
で作成した被膜を用いた簡易EC素子の場合の可
視光吸収スペクトルの図である。
Figure 1 shows the visible light absorption spectrum showing the color development and fading of a simple EC element using a molybdenum oxide film prepared under the conditions of PH 1.0, and Figure 2 shows the visible light absorption spectrum showing the color development and fading of a simple EC element using a molybdenum oxide film prepared under PH 1.0 conditions.
FIG. 2 is a diagram of the visible light absorption spectrum of a simple EC device using the film prepared in FIG.
Claims (1)
ブデン酸塩水溶液中に浸漬し、該基板をカソード
として電解析出を行ない該基板基表面にモリブデ
ンの酸化物被膜を形成することを特徴とするモリ
ブデンの酸化物被膜の製造方法。 2 該モリブデン酸塩水溶液のPHが0.8〜1.5であ
り、形成されるモリブデンの酸化物被膜が青色で
ある特許請求の範囲第1項記載のモリブデンの酸
化物被膜の製造方法。 3 該モリブデン酸塩水溶液のPHが2以上であ
り、形成されるモリブデンの酸化物被膜が褐色で
ある特許請求の範囲第1項記載のモリブデンの酸
化物被膜の製造方法。[Claims] 1. A substrate having conductivity at least on the surface is immersed in an aqueous molybdate solution, and electrolytic deposition is performed using the substrate as a cathode to form a molybdenum oxide film on the base surface of the substrate. A method for producing a characteristic molybdenum oxide film. 2. The method for producing a molybdenum oxide film according to claim 1, wherein the molybdate aqueous solution has a pH of 0.8 to 1.5, and the formed molybdenum oxide film is blue in color. 3. The method for producing a molybdenum oxide film according to claim 1, wherein the molybdate aqueous solution has a pH of 2 or more, and the molybdenum oxide film formed is brown.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59083214A JPS60228698A (en) | 1984-04-25 | 1984-04-25 | Production of molybdenum oxide film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59083214A JPS60228698A (en) | 1984-04-25 | 1984-04-25 | Production of molybdenum oxide film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60228698A JPS60228698A (en) | 1985-11-13 |
| JPH0352554B2 true JPH0352554B2 (en) | 1991-08-12 |
Family
ID=13796064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59083214A Granted JPS60228698A (en) | 1984-04-25 | 1984-04-25 | Production of molybdenum oxide film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60228698A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018056932A2 (en) * | 2016-08-16 | 2018-03-29 | ARVAS, Melih Beşir | Method of production of molybdenum blue at high purity and in solid state |
-
1984
- 1984-04-25 JP JP59083214A patent/JPS60228698A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60228698A (en) | 1985-11-13 |
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