JPH0353964B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a filter device, and particularly to a filter device that supplies clean air to a clean room.

[Conventional technology]

Traditionally, in semiconductor, electronic, precision machinery, pharmaceutical, food, and biotechnology-related factories and laboratories, as well as in hospital operating rooms, in order to eliminate the effects of minute floating dust in the air, A clean room is used. The structure of this clean room is generally as shown in FIG.

That is, a plurality of filter devices 3 are arranged in parallel on almost the entire surface of the ceiling 2 of the clean room 1, a suction port 5 is provided near the floor surface 4, and an air conditioner 6 and a blower 7 are installed outside the clean room 1.
Then, by operating the blower 7, the outside air taken in from the outside air intake port 8 is air-conditioned and filtered within the air conditioner 6, and then supplied to each filter device 3 via the feed duct 9, where it is further filtered inside. so that it blows out into clean room 1. The blown clean air is sent from the suction port 5 through the return duct 10 to the air conditioner 6, and is sent to the filter device 3 again together with the outside air.

In the conventional filter device 3 installed in such a clean room 1, as shown in FIG. A grill 13 made of punched metal or the like is removably attached to the top. A large number of holes in the grill 13 serve as air outlets 14. The casing 11 is attached to the ceiling 2 closely at its lower peripheral edge, and is connected to the feed duct 9 via a connecting duct 15 at its upper portion.

[Problem that the invention seeks to solve]

However, in the conventional filter device 3, it is necessary to accommodate the high-performance filter 12 inside the casing 11 and provide a space 16 above it, so the casing 11 has to be considerably larger than the filter 12. Nakatsuta. In addition, when a large number of them are installed on the ceiling 2 of the clean room 1, since they are connected to the feed duct 9 via the connecting duct 15, it is necessary to install the ducts 9 and 15 and seal the connecting part, which makes the construction troublesome. Ta.

This invention was made in view of the above circumstances,
The purpose of this is that it occupies a small space, is low in bulk, is easy to manufacture, and is very easy to install in a clean space such as a clean room, reducing equipment costs for the clean space. An object of the present invention is to provide a filter device for clean spaces such as clean rooms.

Another object of the present invention is to provide a system for clean spaces such as clean rooms in which the airflow within the clean space is almost constant throughout the space, and there is very little risk of unpurified air leaking into the clean space. An object of the present invention is to provide a filter device.

[Means for solving problems]

In order to achieve the above object, the technical means taken by the present invention are as follows: In a filter device for supplying clean air to a clean space such as a clean room, the filter device is provided on both the inside and outside of a cylindrical filter element. A plurality of cylindrical filters are formed by providing a cylindrical perforated plate to cover the filter element, and having flanges fixed to both ends of the perforated plate; The cylindrical filters are connected to each other in the longitudinal direction by joining their flanges, and the internal spaces of the respective cylindrical filters communicate with each other.Furthermore, the filter device is connected along the peripheral wall of the clean space by a holding member. The device is characterized in that it is held in place and is configured such that air is supplied into the interior through an opening at one end and is blown out radially into the clean space from the holes in the perforated plate.

[Effect]

As described above, a cylindrical filter consisting of a cylindrical filter element, a cylindrical perforated plate provided on both the inner and outer sides of the cylindrical filter element, and a collar fixed to both ends of the perforated plate is provided. When a plurality of cylindrical filters are connected in the longitudinal direction to form a filter device, the internal spaces of each cylindrical filter are connected to each other, and a single cylindrical space extending over the entire length of the filter device is formed inside the filter device. Ru.

Therefore, when this filter device is held along the peripheral wall of a clean space and air is supplied to the internal cylindrical space from the opening at one end, the air passes through the filter element of each cylindrical filter and the holes in the inner and outer perforated plates. After passing through and being cleaned, it is blown out radially into the clean space. This airflow is blown out from the side of each cylindrical filter in the same way.

Further, since the joint portion of each cylindrical filter is very small compared to the filter device, the air flow is generated seamlessly over almost the entire length of the filter device.

Furthermore, in a conventional filter device in which a filter is housed in a box-shaped casing, some space is required on the upstream side of the filter inside the casing, and when connecting multiple filter devices installed, It is necessary to provide a feed duct leading to the blower and then separately connect the upstream space within each filter device to the feed duct through a connecting duct.

However, in the present invention, since the cylindrical space formed inside the filter device plays the role of a connecting duct with the upstream space in the casing of the conventional filter device, these are completely unnecessary.

Further, in this invention, when installing the filter device, it is sufficient to hold the integrally formed filter device along the peripheral wall of the clean space with the holding member and connect the feed duct to the opening at one end. Unlike conventional filter devices, it is not necessary to install a large number of filter devices one by one or to connect a large number of filter devices to a feed duct via a connecting duct.

〔Example〕

Embodiments of the present invention will be described below based on the accompanying drawings.

In FIGS. 1 to 3, reference numeral 17 denotes a filter device according to the present invention, which is constructed by connecting a plurality of cylindrical filters 18 with both ends open in the longitudinal direction. In this embodiment, the cylindrical filter 18 is
The filter element 19 bent in a zigzag shape is formed into a cylindrical shape, and its inner and outer surfaces are covered with a pair of cylindrical perforated plates 20 and 21 having different diameters, and flanges 22 and 22 are provided at both ends. It is fixed. As the perforated plates 20 and 21, perforated metal plates such as punched metal are suitable.

Each cylindrical filter 18 has a flange 2 adjacent to each other.
2 and 22 are opposed to each other with an annular gasket 23 interposed therebetween, and are connected by tightening and holding the periphery of the flanges 22 and 22 with a connecting member 24.
The opening at the tip of the most advanced cylindrical filter 18 of the filter device 17 is closed by tightening and holding the closing plate 25 to the collar 22 at the tip of the filter 18 in the same manner as described above. Further, the opening at the rear end of the rearmost cylindrical filter 18 is an air supply port to the filter device 17, and is connected to, for example, the feed duct 9 of the clean room 1. in this case,
If a flange 26 similar to the flange 22 is attached to the tip of the feed duct 9, connection can be conveniently performed using the coupling member 24 in the same manner as described above.

As the coupling member 24, two opposing collars 2 are used.
Any material that can tighten and hold 2 and 22 will suffice.
For example, several bolts arranged on one collar 22 can be screwed into threaded holes formed in the other collar 22 and tightened. However, in this embodiment, the cylindrical filter 18 is made of a semicircular member with a U-shaped cross section so that the cylindrical filter 18 can be easily connected and detached, and two bolts 27, 27 are screwed into one side piece 24a. It matches. Connect the concave portion of the connecting member 24 to both collars 2.
By fitting the outer peripheries of the filters 2 and 22 and tightening the bolts 27, both the cylindrical filters 18 and 18 can be connected in a sealed state. To release the connection, loosen each bolt 27 and remove the connecting members 24, 24.
can be removed from the collars 22, 22.

FIG. 4 shows an embodiment in which a filter device 17 according to the present invention is installed on the ceiling 2 of a clean room 1. The filter device 17 is installed on the ceiling 2
The upper half of the clean room 1 is installed in a housing part 28 formed by recessing a part of the clean room 1 upward in a band shape, and the opening at the rear end is connected to the feed duct 9 at a position close to the side wall of the clean room 1. The filter device 17 is held by a plurality of holding members 29 in the form of narrow bands. These holding members 2
9 has a substantially arc shape except for both ends, one end of which is rotatably attached to the ceiling 2 by a hinge 30, and the other end is screwed to the ceiling 2 by a bolt 31. ing. At approximately the center of the holding member 29, a pair of support protrusions 3 having an approximately L-shaped cross section are provided.
2 and 32 are formed, and these support protrusions 3
2 and 32 are each cylindrical filter 1 of the filter device 17
It comes into contact with and supports the outer surface of 8. Therefore, since the cylindrical filter 18 does not directly contact the holding member 29, the influence on air blowing from the side surface thereof can be reduced.

When using this filter device 17, when air is sent into the internal space 33 from its open end, it will blow out radially from the holes in the outer perforated plate 21 through the holes in the inner perforated plate 20 and the filter element 19. . Therefore, the direction and flow velocity distribution of the airflow can be made constant over the entire length and circumference of the filter device 17.

Incidentally, the total length of the filter device 17 can be easily adjusted by changing the number of connected cylindrical filters 18 depending on the installation location.

〔Effect of the invention〕

As is clear from the above description, the filter device for clean spaces such as clean rooms according to the present invention has the following effects.

(a) Since the filter device is constructed by connecting multiple cylindrical filters in the longitudinal direction, it is possible to install multiple filter devices in parallel, each of which has a high-performance filter built into a conventional box-shaped casing, and to combine them. Compared to a device connected to a feed duct via a connecting duct, it occupies less space and can be made lower in bulk.

(b) Since a plurality of identical cylindrical filters can be manufactured in advance and an appropriate number of filters can be connected as needed, manufacturing is very easy.

(c) There is no need for a connecting duct used when connecting a conventional filter device to a feed duct;
Since there is no need to connect each filter device to the connection duct, it is only necessary to hold one cylindrical filter device along the peripheral wall of a clean space such as a clean room during installation. Therefore,
The installation work of the filter device in the clean space becomes extremely easy, and equipment costs can be significantly reduced, and there is also a strong possibility that unpurified air will leak into the clean space from the connection part with the connecting duct. There are few.

(d) Since it is composed of a plurality of cylindrical filters connected in the longitudinal direction, the airflow is blown out from the side of each cylindrical filter in the same way, and the joint part of each cylindrical filter is small. The air flow blown out from the entire length of the filter device is almost uniform and continuous. Therefore, the air flow can be made almost constant throughout a clean space such as a clean room.

(e) Since the overall length of the filter device can be changed arbitrarily simply by changing the number of cylindrical filters connected, it is possible to easily respond to changes in the size of the installation location, etc. This contributes to ease of installation work.

[Brief explanation of drawings]

FIG. 1 is a partially sectional front view of the tip of the filter device according to the present invention. FIG. 2 is a partially sectional front view of the rear end. FIG. 3 is a sectional view of this filter device installed on the ceiling of a clean room. FIG. 4 is a cross-sectional explanatory diagram of a clean room using this filter device. FIG. 5 is a cross-sectional explanatory diagram of a conventional clean room. FIG. 6 is a sectional view of a conventional filter device. 17... Filter device, 18... Cylindrical filter, 19... Filter element, 20, 21...
...Perforated plate, 22, 26...Brim, 23...Gasket, 24...Connecting member, 25...Closing plate, 27...
...Bolt, 33...Inner space.

Claims (1)

[Scope of Claims] 1. A filter device for supplying clean air to a clean space such as a clean room, wherein the filter device includes a cylindrical perforated plate provided on both the inside and outside of a cylindrical filter element. It is composed of a plurality of cylindrical filters that cover a filter element and have flanges fixed to both ends of the perforated plate, and the plurality of cylindrical filters are arranged in the longitudinal direction by joining the flanges to each other. are connected to each other, and the internal spaces of the respective cylindrical filters communicate with each other, and further, the filter device is held along the peripheral wall of the clean space by a holding member, and the filter device is held from an opening at one end thereof. A filter device characterized in that it is configured to supply air inside and blow it out radially into the clean space from the holes in the perforated plate. 2. The filter device according to claim 1, wherein the holding member of the filter device is a band-shaped body that traverses the filter device and is connected to the peripheral wall of the clean space on both sides thereof. 3. According to claim 1 or 2, the filter device is held so as to be partially accommodated in a band-shaped accommodating portion formed by recessing the circumferential wall of the clean space. filter device.