JPH0355780B2 - - Google Patents
Info
- Publication number
- JPH0355780B2 JPH0355780B2 JP60184568A JP18456885A JPH0355780B2 JP H0355780 B2 JPH0355780 B2 JP H0355780B2 JP 60184568 A JP60184568 A JP 60184568A JP 18456885 A JP18456885 A JP 18456885A JP H0355780 B2 JPH0355780 B2 JP H0355780B2
- Authority
- JP
- Japan
- Prior art keywords
- scattered light
- optical detector
- particle size
- channel
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 85
- 230000003287 optical effect Effects 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 25
- 238000004458 analytical method Methods 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000011859 microparticle Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000005070 sampling Methods 0.000 claims description 2
- 238000005315 distribution function Methods 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- 239000007921 spray Substances 0.000 description 6
- 238000002485 combustion reaction Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000000691 measurement method Methods 0.000 description 5
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 5
- 238000000149 argon plasma sintering Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000809 air pollutant Substances 0.000 description 2
- 231100001243 air pollutant Toxicity 0.000 description 2
- 238000009841 combustion method Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000790 scattering method Methods 0.000 description 2
- 239000012798 spherical particle Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 238000001093 holography Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
- G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
【発明の詳細な説明】
[産業上の利用分野]
この発明は噴霧された浮遊粒子の濃度とその粒
径とを同時に測定する方法大びその装置に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method and apparatus for simultaneously measuring the concentration and particle size of sprayed suspended particles.
[従来技術]
一般に液体燃料を室内に噴射し微小な粒状物に
して燃焼させる噴霧燃焼法はデイーゼル機関、ガ
スタービン、工業炉などに広く利用されており、
この噴霧された燃料の粒径分布が各種燃焼器の着
火性能、火炎の安定性、燃焼効率、チツソ酸化物
(NOx)及び煤などの大気汚染物質の排出抑制に
重要な役割を果していることはよう知られている
ところである。しかしながら上述の噴霧と燃焼の
関係は情勢的にしか理解されていないのが実情で
あり、燃焼器の設計やこのための燃焼モデルの開
発に充分役立つような精度の高い粒径分布の測定
を開発することにより定量的かつ普遍的な噴霧と
燃焼の関係を確立することが望まれている。[Prior Art] In general, the spray combustion method, in which liquid fuel is injected into a room and burned as fine particles, is widely used in diesel engines, gas turbines, industrial furnaces, etc.
The particle size distribution of this atomized fuel plays an important role in the ignition performance of various combustors, flame stability, combustion efficiency, and control of emissions of air pollutants such as nitrogen oxides (NOx) and soot. It is a well-known place. However, the reality is that the above-mentioned relationship between spray and combustion is only understood in terms of circumstances, and we have developed a highly accurate measurement of particle size distribution that will be fully useful for combustor design and the development of combustion models for this purpose. It is hoped that this will establish a quantitative and universal relationship between spray and combustion.
そこで従来より様々な方法で微粒化された物質
の粒径や空間的分布の測定法が考えられてきた。
その第一は古くから用いられている液浸法と呼ば
れるものである。これは粒子を適当な液中に受け
止め顕微鏡でその大きさを測定するもので、正し
い試料を採取するこができれば測定精度、分解
能、信頼性に優れ、また労力をいとわなければ高
価な装置を用いることなく、かつ高度の熟練を必
要とせずに粒径を測定できるという特徴がある。
しかしながら、サンプリングに際して液滴の合
体、分裂の影響を受け、また高圧、高温雰囲気中
での測定が際めて困難である等の直接的な方法に
共通の固有の問題点がある。そこでこのような直
接的な測定方法のもつ制約や欠点を緩和できる可
能性をもつた光学的測定法が考えられた。この光
学的測定方法には液滴の像の大きさを測定する方
法と、液滴の大きさに関係する物理量から粒径を
決定する方法とがあり、古典的な瞬間写真法やこ
れを発展させたTVイメージ法、あるいはホログ
ラフイは前者に属し、後者のほとんどは粒子から
の光散乱特性を利用するものである。 Therefore, methods for measuring the particle size and spatial distribution of substances that have been atomized using various methods have been considered.
The first method is called the immersion method, which has been used for a long time. This method involves placing particles in a suitable liquid and measuring their size using a microscope.If you can collect the correct sample, the measurement accuracy, resolution, and reliability are excellent, but if you are willing to put in the effort, expensive equipment is required. It is characterized by the ability to measure particle diameters without requiring a high degree of skill.
However, there are inherent problems common to direct methods, such as sampling being affected by droplet coalescence and splitting, and measurement in a high-pressure, high-temperature atmosphere being extremely difficult. Therefore, an optical measurement method was considered that has the potential to alleviate the limitations and drawbacks of such direct measurement methods. This optical measurement method includes a method of measuring the size of the droplet image and a method of determining the particle size from physical quantities related to the size of the droplet. TV imaging methods, or holography, belong to the former category, while most of the latter utilize the light scattering properties of particles.
単色でコヒーレントなレーザ光源が容易に利用
できるようになつて以来この分野の研究が活発に
なつた。従来微粒子からの光散乱特性を利用する
散乱法は主として波長に比較してそう大きくない
粒子を対象としていたが最近では噴霧中の粒子の
ように波長の100倍を越える大きさのものを測定
する試みが行なわれるようになつた。 Research in this field has been active since monochromatic, coherent laser light sources became readily available. Traditionally, scattering methods that utilize the light scattering properties of fine particles mainly target particles that are not very large compared to the wavelength, but recently they have been used to measure particles that are more than 100 times the wavelength, such as particles in atomized spray. An attempt was made.
波長に比べて十分大きい粒子からなる粒子群の
粒径分布測定方法の一つに前方に散乱された光の
強度変化から粒径分布を決めるものがある。これ
は回折近似の範囲に逆変換公式を用いて分布関数
を求めるものである。しかしながら、この方法に
はこの変換に必要となる光の強度の角度に対する
微係数を精度よく評価することが極めて難しいと
いう問題点がある。他の方法としては逆変換公式
を用いるのではなく、散乱光の強度分布からある
粒径分布関数の形状パラメータを決定し、噴霧さ
れた粒状物の粒径分布を測定する方法がある。こ
の方法はパラメータそのものは決定することがで
きないが、散乱光強度の減衰からザウター平均粒
径(以下SMDと称す)を比較的簡単に決定する
ことができる。しかしながら、散乱光の強度を表
わすMieの散乱理論の公式I〓(θ)を解析する際に
直接光の干渉を受け易い中心部の影響が大きくな
つている。また重量粒径分布を散乱光強度分布か
ら得る有効的な方法も確立されていない。 One method for measuring the particle size distribution of a particle group consisting of particles that are sufficiently large compared to the wavelength is to determine the particle size distribution from changes in the intensity of forward scattered light. This calculates the distribution function using an inverse transformation formula within the range of diffraction approximation. However, this method has a problem in that it is extremely difficult to accurately evaluate the differential coefficient of the light intensity with respect to the angle, which is necessary for this conversion. Another method is to determine the shape parameters of a particle size distribution function from the intensity distribution of scattered light and measure the particle size distribution of the sprayed granules, instead of using an inverse transformation formula. Although this method cannot determine the parameters themselves, it can relatively easily determine the Sauter mean particle diameter (hereinafter referred to as SMD) from the attenuation of the scattered light intensity. However, when analyzing the formula I〓(θ) of Mie's scattering theory, which expresses the intensity of scattered light, the influence of the central region, which is susceptible to direct light interference, becomes large. Furthermore, an effective method for obtaining the weight particle size distribution from the scattered light intensity distribution has not been established.
[発明の目的]
この発明は上記事情に鑑みなされたもので、噴
霧された粒子の粒径分布の測定を粒子からの光散
乱特性を利用して行なう場合、散乱光の強度を
Mieの散乱理論の公式I〓(θ)の回折パターンを解
析するのではなく、散乱光エネルギーの角度θに
関する被積分関数であるI〓(θ)・θの回折パター
ンを解析することにより測定しようとするもの
で、従来の噴霧粒径測定法が有していた問題点の
全てを解決し、噴霧された粒状物の濃度と粒径分
布を容易にしかも正確に測定する方法及び装置を
提供することを目的とするものである。[Object of the invention] This invention was made in view of the above circumstances, and when measuring the particle size distribution of sprayed particles using the light scattering characteristics from the particles, the intensity of the scattered light is
Instead of analyzing the diffraction pattern of Mie's scattering theory formula I〓(θ), let's measure it by analyzing the diffraction pattern of I〓(θ)・θ, which is the integrand with respect to the angle θ of the scattered light energy. To provide a method and apparatus for easily and accurately measuring the concentration and particle size distribution of sprayed granules by solving all the problems of conventional spray particle size measurement methods. The purpose is to
[発明の構成]
前記目的を達成するためになされた本発明は、
被測定微粒子群にレーザビームを照射して得られ
る前方微小角散乱光をレンズで集光し、その焦点
位置上に配した少なくとも3チヤネルの同心円形
状の光電変換素子よりなる環状光デイテクタで受
光し、該光デイテクタで光電変換された微小電流
信号を増幅及びサンプルアンドホールドさせた
後、上記光デイテクタが受光した散乱光のパター
ンに比例する各チヤネンルからの信号をI〓(θ)・
θなる式〔式中I〓(θ)は粒子群からの散乱光強
度、θは散乱角〕に基づいて解析することを特徴
とする浮遊粒子の濃度及び粒径の測定方法であつ
て、噴霧された粒子群の散乱光強度の散乱角によ
る散乱光エネルギーの被積分関数の回折パターン
を解析すれば粒子の濃度を粒径分布とが測定でき
るのである。[Structure of the invention] The present invention has been made to achieve the above object,
The forward small angle scattered light obtained by irradiating a laser beam onto a group of particles to be measured is focused by a lens, and is received by an annular optical detector consisting of at least three channels of concentric photoelectric conversion elements arranged above the focal point position. , after amplifying and sample-and-holding the minute current signal photoelectrically converted by the photodetector, the signal from each channel proportional to the pattern of scattered light received by the photodetector is expressed as I〓(θ)・
A method for measuring the concentration and particle size of suspended particles, characterized by analysis based on the formula θ [where I = (θ) is the intensity of scattered light from a group of particles, and θ is the scattering angle]. By analyzing the diffraction pattern of the integrand of the scattered light energy by the scattering angle of the scattered light intensity of the particle group, the concentration of particles and the particle size distribution can be measured.
そして又、上記方法を実施するための装置とし
ては、レーザ発振器と、レーザビームで照射され
た被測定微小粒子群からの前方微小角散乱光を集
光する光学レンズと、該光学レンスの焦点位置に
配した少なくとも3チヤンネルの同心円形状のシ
リコンフオトデイテクタ等の光電変換素子よりな
る環状光デイテクタと、該光デイテクタで光電変
換された各チヤンネルの微小電流信号を同時に増
幅する光デイテクタのチヤンネル数と同数の増幅
器と、該増幅器で増幅された電流信号を各チヤン
ネルごとにサンプルアンドホールドする回路と、
各チヤンネルの電流信号をデジタル信号に変換す
るA/D変換器と、デジタル信号化された光デイ
テクタの各チヤンネルが受光した光エネルギ量を
I〓(θ)・θなる式〔式中I〓(θ)は粒子群からの散
乱光強度、θは散乱各〕に基づいて解析する手順
を記憶させたマイクロコンピユーターとからなる
浮遊粒子の濃度及び粒径の測定装置を特定したも
のであつて、前記A/D変換器で変換された光エ
ネルギーをコンピユータのプログラムに基いて解
析演算するだけであるため正確に測定できるので
ある。 Furthermore, the apparatus for carrying out the above method includes a laser oscillator, an optical lens for condensing forward small angle scattered light from a group of measured microparticles irradiated with a laser beam, and a focal position of the optical lens. an annular optical detector consisting of at least three channels of photoelectric conversion elements such as concentric silicon photodetectors disposed in the photodetector; and a number of channels of the optical detector that simultaneously amplifies minute current signals of each channel photoelectrically converted by the optical detector. the same number of amplifiers, and a circuit that samples and holds the current signal amplified by the amplifiers for each channel;
The A/D converter converts the current signal of each channel into a digital signal, and the optical detector converts the current signal into a digital signal.The amount of light energy received by each channel is calculated.
Concentration of suspended particles consisting of a microcomputer that stores an analysis procedure based on the formula I〓(θ)・θ [where I〓(θ) is the intensity of scattered light from the particle group, and θ is the scattering value] This method specifies a particle size measuring device and can accurately measure the particle size by simply analyzing and calculating the light energy converted by the A/D converter based on a computer program.
[実施例]
以下この発明を測定原理及び図示の実施例に基
づき詳細に説明する。[Example] The present invention will be described in detail below based on the measurement principle and illustrated examples.
直径がDである等方性の単一球形粒子に偏光さ
れていない波長λのレーザ光を照射した時には球
形粒子により散乱される光の強度分布は、屈折率
mと粒径パラメータα(=πD/λ)により決定さ
れる。粒径パラメータαの値が大きくなるにつれ
て全散乱光量に対する前方微小角への散乱光量が
急激に増大し、この領域での角度に対する散乱光
強度分布の形が粒形パラメータαに応じて敏感に
変化するようになる。この特性を利用して光の波
長λに比べて大きな粒子からなる粒子群の粒径あ
るいは粒径分布を決めようとするのが広義におけ
る前方微小角散乱法であるが、散乱光強度のパタ
ーンから粒径分布を測定するのがこの発明の要点
である。 When a single isotropic spherical particle with a diameter D is irradiated with an unpolarized laser beam of wavelength λ, the intensity distribution of the light scattered by the spherical particle is determined by the refractive index m and the particle size parameter α (= πD /λ). As the value of the grain size parameter α increases, the amount of light scattered toward a small forward angle relative to the total amount of scattered light increases rapidly, and the shape of the scattered light intensity distribution with respect to angle in this region changes sensitively depending on the grain shape parameter α. I come to do it. The forward small-angle scattering method in a broad sense uses this property to determine the particle size or particle size distribution of a particle group consisting of particles larger than the wavelength λ of light. The key point of this invention is to measure the particle size distribution.
第1図に示したように、レーザビーム(単色平
行光束)1′を粒子群2に照射し、その前方にレ
ンズ3を置いて散乱光を集めると、各粒子からの
散乱光の内、散乱角θ方向の成分は粒子の位置や
速度に関係なく受光レンズの焦点面4においてγ
=f・sinθf・θを半径とる円周上に集められ
る。焦点面4における散乱光強度I〓(θ)の分布
は、多重散乱の影響を無視できれば個々の単一粒
子からの散乱光強度I(θ、α)の重ね合わせと
考えられる。すなわち、個数粒径分布をN(α)
とすると次の関係が成り立つ、
I〓(θ)=c∫∞ 0I(θ,α)N(α)dα ……(1)
I(θ・α)はMieの与えた散乱方程式の級数
解として計算される。I〓(θ)の測定さら粒径分布
を決定することは(1)式の積分方程式を解くことに
ほかならない。 As shown in Figure 1, when a laser beam (monochromatic parallel beam) 1' is irradiated onto a particle group 2 and a lens 3 is placed in front of it to collect the scattered light, the scattered light from each particle is The component in the angle θ direction is γ at the focal plane 4 of the light receiving lens, regardless of the position and velocity of the particle.
It is collected on the circumference of a circle whose radius is =f・sinθf・θ. The distribution of the scattered light intensity I (θ) at the focal plane 4 can be considered to be a superposition of the scattered light intensities I (θ, α) from individual single particles if the influence of multiple scattering can be ignored. In other words, the number particle size distribution is N(α)
Then, the following relationship holds, I〓(θ)=c∫ ∞ 0 I(θ,α)N(α)dα...(1) I(θ・α) is the series solution of the scattering equation given by Mie. It is calculated as Measuring I〓(θ) and determining the particle size distribution is nothing but solving the integral equation of equation (1).
また散乱光強度分布から重量粒径分布を得る解
析にI〓(θ)式の代わりにI〓(θ)・θ式なる関数を
用いると、I〓(θ)・θの値がある散乱角において
必ずピーク値を持つことになるので分布の特徴を
把えるのに非常に都合がよい。ここでI〓(θ)・θ
式は散乱光エネルギの散乱角度θに関する被積分
関数である。また解析において直接光の干渉を受
けやすい中心部の影響を小さくできる利点があ
る。回折近似が成立する場合に(1)式は
I〓(θ)・θ=
c∫∞ 0[2J1(αθ)]2/αθα3N(α)dα……(2)
となり、これに重量分布関数W(α)を導入する
と、
I(θ)・θ=c=
c∫∞ 0[2J1(αθ)]2/αθW(α)dα ……(3)
となる。(3)式よりW(α)を求めることは対称核
[2J1(α,θ)]2/αθを持ち第一種フレドホルム型
積分方程式を解くことに相当する。この関係より
粒子の濃度を得ることができる。 In addition, if the function I〓(θ)・θ formula is used instead of the I〓(θ) formula for analysis to obtain the weight particle size distribution from the scattered light intensity distribution, the scattering angle with the value of I〓(θ)・θ Since there will always be a peak value at , it is very convenient for understanding the characteristics of the distribution. Here I〓(θ)・θ
The expression is an integrand with respect to the scattering angle θ of the scattered light energy. There is also the advantage that the influence of the central area, which is susceptible to direct light interference, can be reduced in analysis. When the diffraction approximation holds, equation (1) becomes I〓(θ)・θ= c∫ ∞ 0 [2J 1 (αθ)] 2 /αθα 3 N(α)dα……(2), and the weight When the distribution function W(α) is introduced, I(θ)·θ=c= c∫ ∞ 0 [2J 1 (αθ)] 2 /αθW(α)dα (3). Obtaining W(α) from equation (3) corresponds to solving a Fredholm integral equation of the first kind with a symmetric kernel [2J 1 (α, θ)] 2 /αθ. From this relationship, the concentration of particles can be obtained.
以下実施例の装置に基づきこの発明を更に詳し
く説明する。第2図は本発明の方法を実施する装
置の基本概念を示すもので、ヘリウム・ネオンレ
ーザ発振器(以下単にHe−Neレーザと称す)1
からのレーザビーム1′をビームエクスパンダー
又はコリメータレンズ5で拡大し、そのレーザビ
ームを被測定粒子群2に照射すると、粒子群2に
衝突したレーザビームの散乱光の内、散乱角のθ
方向の成分は粒子の位置や速度に関係なく受光レ
ンズ3の焦点面において、γ=f・sinθf・θ
を半径とする円周上に集められる。この焦点面に
少なくとも3チヤンネルの受光部を有する同心円
形状のシリコンフオトデイテクタ等の環状光デイ
テクタ6を位置させることにより前記したような
個々の粒子の散乱光強度の重ね合わせと考えられ
る光の強度分布I〓(θ)を直接受光することができ
る。環状光デイテクタ6で受光された散乱光の強
度分布は光電変換されて微小電流信号として光エ
ネルギ量測定装置7の入力となる。光エネルギ量
測定装置7は第3図にブロツクダイヤグラムで示
すように、環状光デイテクタの各チヤンネル(チ
ヤンネル数i)に対応する増幅器711〜71i及
びサンプルアンドホールド回路721〜72iと、
A/D変換器73と、コンピユータのインターフ
エース74と、マイクロコンピユーター75とか
ら構成されている。 The present invention will be explained in more detail below based on the apparatus of the embodiment. Figure 2 shows the basic concept of an apparatus for carrying out the method of the present invention, in which a helium-neon laser oscillator (hereinafter simply referred to as a He-Ne laser) 1
When the laser beam 1' is expanded by the beam expander or collimator lens 5 and the laser beam is irradiated onto the particle group 2 to be measured, the scattering angle θ of the scattered light of the laser beam colliding with the particle group 2 is
The direction component is γ=f・sinθf・θ at the focal plane of the light receiving lens 3, regardless of the position and velocity of the particle.
are collected on the circumference of a circle with radius. By positioning an annular optical detector 6 such as a concentric silicon photodetector having at least three channels of light receiving sections on this focal plane, the intensity of light that can be considered to be a superposition of the scattered light intensities of individual particles as described above can be obtained. The distribution I〓(θ) can be directly received. The intensity distribution of the scattered light received by the annular optical detector 6 is photoelectrically converted and becomes an input to the optical energy measuring device 7 as a minute current signal. As shown in the block diagram in FIG. 3, the optical energy measuring device 7 includes amplifiers 71 1 to 71 i and sample-and-hold circuits 72 1 to 72 i corresponding to each channel (channel number i) of the annular optical detector.
It is composed of an A/D converter 73, a computer interface 74, and a microcomputer 75.
マイクロコンピユータ75における解析手順は
以下の通りである。まず前記第(3)式を解析するた
めにRosim−Rammlerの分布関数
W(D)=C(D/X3)X2−1
EXP〔−(D/X3)X2〕 ……(4)
を採用した。その理由はパラメータX2及びX3が、
X2:分布の広がりぐあい、X3:代表粒径(この
粒径よりも小さい粒子の重量が全体の重量の1/
eとなる)とわかりやすいためである。(4)式で∫∞ 0
W(D)dD=1となる時、
C=X2/X3(C:定数)となり重量比例定数X1
を導入すると(4)式は
W(D)=X1X2/X3(D/X3)X2-1
・EXP〔−(D/X3)X2〕 ……(5)
となる。パラメータX2,X3を変化させ、前記I〓
(θ)・θ式のパターンを(5)式により求める。測定
されたI〓(θ)・θ式のパターンよりX1,X2,X3を
求める。平均粒径
SMD=∫∞ 0N(D)D3dD/∫∞ 0N(D)D2dD
はX2,X3より次式から計算される。 The analysis procedure in the microcomputer 75 is as follows. First, in order to analyze the above equation (3), Rosim-Rammler's distribution function W(D)=C(D/X 3 ) X 2-1 EXP[-(D/X 3 ) X 2] ...(4 ) It was adopted. The reason is that parameters X 2 and X 3 are
X 2 : Distribution spread, X 3 : Representative particle size (the weight of particles smaller than this particle size is 1/1/2 of the total weight)
This is because it is easy to understand. In equation (4), ∫ ∞ 0
When W(D)dD=1, C=X 2 /X 3 (C: constant) and the weight proportionality constant X 1
Introducing equation (4) becomes W(D)=X 1 X 2 /X 3 (D/X 3 ) X2-1 ·EXP [−(D/ X 3 ) By changing the parameters X 2 and X 3 , the above I〓
Find the pattern of (θ)/θ equation using equation (5). Find X 1 , X 2 , and X 3 from the pattern of the measured I〓(θ)・θ equation. The average particle diameter SMD=∫ ∞ 0 N(D)D 3 dD/∫ ∞ 0 N(D)D 2 dD is calculated from the following equation using X 2 and X 3 .
SMD=X3/Γ(1−1/X2)
Γ:ガンマ関数 ……(6)
環状光デイテクタの場合、i番目のチヤネンル
への光エネルギ量Eiに基づいて粒径分布を決定す
る。Eiは次式により与えられる。SMD=X 3 /Γ(1-1/X 2 ) Γ: Gamma function (6) In the case of an annular optical detector, the particle size distribution is determined based on the amount of optical energy Ei to the i-th channel. Ei is given by the following equation.
Ei=C∫〓i+〓i-I〓(θ)・θdθ……(7)
θi+及びθi-は環状光デイテクタの外形を
ROUT、内径をRio、受光レンズの焦点距離をf
とすると、θi+=Rput/f、θi-=Rio/fで散乱角
である。粒径パラメータα=πD/λが十分に大
きく回折近似が成り立つ場合(3)式の近似を用いる
と、
Ei=C∫〓i+〓i-∫∞ 0
[2J1(αθ)]2/αθ W(α)dαdθ ……(8)
Ei=∫∞ 0W(α)
{∫〓i+〓i-[2J1(αθ)]2/dθdθ}dα……(9)
となり、これを積分すると、
Ei=C∫∞ 0W(D){J0 2(αθi-)
+J1 2(αθi-)−J2 2(αθi+)
−J1 2(αθi+)}/Ddα ……(10)
となり、(10)式から光エネルギ量Eiに基き要求され
る値が求められる。即ち環状光デイテクタ6の各
チヤンネルの巾や中心からの角度に基づくデータ
と、(10)式の演算手順とをマイクロコンピユータ7
5のメモリーに記憶させておくことにより、環状
光デイテクタが受けた散乱光パターンから粒子の
濃度と粒径を同時に測定することができる。 Ei=C∫〓 i+ 〓 i- I〓(θ)・θdθ……(7) θ i+ and θ i- are the outer shape of the annular optical detector.
ROUT, the inner diameter is Rio , and the focal length of the receiving lens is f
Then, θ i+ = R put /f and θ i- = R io /f, which are the scattering angles. When the particle size parameter α=πD/λ is sufficiently large and the diffraction approximation holds true, using the approximation of equation (3), E i =C∫〓 i+ 〓 i- ∫ ∞ 0 [2J 1 (αθ)] 2 /αθ W(α)dαdθ ……(8) E i =∫ ∞ 0 W(α) {∫〓 i+ 〓 i- [2J 1 (αθ)] 2 /dθdθ}dα……(9), and integrating this , E i = C∫ ∞ 0 W(D) {J 0 2 (αθ i- ) +J 1 2 (αθ i- )−J 2 2 (αθ i+ ) −J 1 2 (αθ i+ )}/Ddα …… (10), and the required value based on the amount of light energy E i can be found from equation (10). That is, data based on the width of each channel of the annular optical detector 6 and the angle from the center and the calculation procedure of equation (10) are input to the microcomputer 7.
By storing the information in the memory No. 5, it is possible to simultaneously measure the particle concentration and particle size from the scattered light pattern received by the annular light detector.
また前記各式に用いた記号の意味は下記の通り
である。 Furthermore, the meanings of the symbols used in each of the above formulas are as follows.
α:粒径パラメータ、c:定数、D:粒子径、
Ei:光エネルギ量、I(θ)、I(α,θ):単一粒
子から散乱光強度、I(θ):粒子群からの散乱光
強度、J0(α,θ):第1種0次、Bessel関数、J1
(α,θ):第1種1次Bessel関数、N(D)、N
(α):個数粒径分布関数、SMD:ザウター平均
粒径、W(D)、W(α):重量粒径分布関数、X1:
重量比例定数のパラメータ、X2:分布の広がり
ぐあいのパラメータ、X3:代表粒径のパラメー
タ、f:レンズの焦点距離、θ:散乱角、θi-:
環状光デイテクタのiチヤンネルの内径に対する
散乱角、θi+:環状光デイテクタのiチヤンネル
の外径に対応する散乱角、λ:レーザ光の波長、
Γ:ガンマ関数。 α: particle size parameter, c: constant, D: particle size,
E i : amount of light energy, I(θ), I(α, θ): intensity of scattered light from a single particle, I(θ): intensity of scattered light from a group of particles, J 0 (α, θ): first Zero-order seed, Bessel function, J 1
(α, θ): linear Bessel function of the first kind, N(D), N
(α): Number particle size distribution function, SMD: Sauter average particle size, W(D), W(α): Weight particle size distribution function, X 1 :
Parameter of weight proportionality constant, X 2 : Parameter of distribution spread, X 3 : Parameter of representative particle size, f: Focal length of lens, θ: Scattering angle, θ i- :
Scattering angle with respect to the inner diameter of the i-channel of the annular optical detector, θ i+ : Scattering angle corresponding to the outer diameter of the i-channel of the annular optical detector, λ: wavelength of the laser beam,
Γ: Gamma function.
[発明の効果]
以上説明したように本発明に係る浮遊粒子濃度
及び粒径の測定方法は、空気中に噴霧した被測定
微粒子群にレーザビームを照射し、該微粒子群を
通じて出た散乱光をレンズで集光し、該レンズの
焦点位置上に配した少なくとも3チヤンネルの環
状光デイテクタで受光し、該光デイテクタが受光
した散乱光パターンに比例する各チヤンネルから
の信号をI〓(θ)・θなる式で解析することで、従
来非常に困難とされていて浮遊微粒子の濃度と粒
径とが簡単に測定できるという優れた効果を奏す
る。[Effects of the Invention] As explained above, the method for measuring suspended particle concentration and particle size according to the present invention irradiates a group of particles to be measured sprayed into the air with a laser beam, and collects the scattered light emitted through the group of particles. The light is collected by a lens, received by an annular light detector with at least three channels arranged above the focal point of the lens, and a signal from each channel proportional to the scattered light pattern received by the light detector is expressed as I〓(θ)・Analysis using the equation θ has the excellent effect of allowing the concentration and particle size of suspended particles to be easily measured, something that has been considered extremely difficult in the past.
又、前記測定方法を実施する装置として、レー
ザ発振器及びレーザビームのエクスパンダと、微
小粒子を通した散乱光を集光する光学レンズと、
その焦点位置に配した少なくとも3チヤンネルの
環状光デイテクタと、増幅器と、信号をホールド
する回路と、A/D変換器とを有機的に結合する
と共に、A/D変換された光エネルギーを散乱光
強度と散乱角とによる被積分関数を解析演算する
コンピユーターとで装置が構成され、簡単な構成
でありながら正確な粒子と濃度が測定できるので
ある。 Further, as a device for carrying out the measurement method, a laser oscillator, a laser beam expander, and an optical lens that condenses the scattered light passing through the microparticles,
At least a three-channel annular optical detector placed at the focal point, an amplifier, a signal hold circuit, and an A/D converter are organically coupled, and the A/D converted light energy is converted into scattered light. The device consists of a computer that analyzes and calculates the integrand function based on intensity and scattering angle, and is able to accurately measure particles and concentration despite its simple configuration.
更に、前記測定の効果によつて、噴霧燃焼方式
を採用している各種燃焼器の燃焼効率を高め、省
エネルギーに寄与すると共に、大気汚染物値の排
出軽減に大きく寄与する等の種々の優れた効果も
奏する。 Furthermore, the effects of the above measurements will improve the combustion efficiency of various combustors that employ the spray combustion method, contributing to energy conservation and greatly contributing to the reduction of air pollutant emissions. It is also effective.
第1図はこの発明の原理を説明するための説明
図、第2図はこの発明の方法を実施するための装
置の略示的構成図、第3図は同装置における光エ
ネルギ測定装置のブロツク図である。
1……発振器、2……粒子群、3……受光レン
ズ、4……焦点面、5……コリメーターレンズ、
6……環状光デイテクタ、7……光エネルギ測定
装置、711〜71i……増幅器、721〜72i…
…サンプルアンドホールド回路、73……A/D
変換器、74……インターフエース、75……マ
イクロコンピユーター。
Fig. 1 is an explanatory diagram for explaining the principle of this invention, Fig. 2 is a schematic configuration diagram of an apparatus for carrying out the method of this invention, and Fig. 3 is a block diagram of a light energy measuring device in the same apparatus. It is a diagram. 1... Oscillator, 2... Particle group, 3... Light receiving lens, 4... Focal plane, 5... Collimator lens,
6... Annular optical detector, 7... Optical energy measuring device, 71 1 to 71 i ... Amplifier, 72 1 to 72 i ...
...Sample and hold circuit, 73...A/D
Converter, 74...interface, 75...microcomputer.
Claims (1)
られる前方微小角散乱光をレンズで集光し、その
焦点位置上に配した少なくとも3チヤンネルの同
心円形状の光電変換素子よりなる環状光デイテク
タで受光し、該光デイテクタで光電変換された微
小電流信号を増幅及びサンプルアンドホールドさ
せた後、上記光デイテクタが受光した散乱光のパ
ターンに比例する各チヤネルからの信号をI〓
(θ)・θなる式〔式中I〓(θ)は粒子群からの散乱
光強度、θは散乱角〕に基づいて解析することを
特徴とする浮遊粒子の濃度及び粒径の測定方法。 2 レーザ発振器と、レーザビームで照射された
被測定微小粒子群からの前方微小角散乱光を集光
する光学レンズと、該光学レンズの焦点位置に配
した少なくとも3チヤンネルの同心円形状のシリ
コンフオトデイテクタ等の光電変換素子よりなる
環状光デイテクタと、該光デイテクタで光電変換
された各チヤンネルの微小電流信号を同時に増幅
する光デイテクタのチヤンネル数と同数の増幅器
と、該増幅器で増幅された電流信号を各チヤンネ
ルごとにサンプルアンドホールドする回路と、各
チヤンネルの電流信号をデジタル信号に変換する
A/D変換器と、デジタル信号化された光デイテ
クタの各チヤンネルが受光した光エネルギ量をI〓
(θ)・θなる式〔式中I〓(θ)は粒子群からの散乱
光強度、θは散乱角〕に基づいて解析する手順を
記憶させたマイクロコンピユーターとからなる浮
遊粒子の濃度及び粒径の測定装置。 3 前記レーザ発振器のレーザビームをコリメー
トするコリメータレンズを設けたことを特徴とす
る前記第2項記載の浮遊粒子の濃度及び粒径の測
定装置。[Scope of Claims] 1. Forward small-angle scattered light obtained by irradiating a laser beam onto a group of particles to be measured is focused by a lens, and from at least three channels of concentric photoelectric conversion elements arranged on the focal point position. After amplifying, sampling and holding the minute current signal that was received by the annular optical detector and photoelectrically converted by the optical detector, the signal from each channel proportional to the pattern of scattered light received by the optical detector is
A method for measuring the concentration and particle size of suspended particles, characterized by analysis based on the formula (θ)·θ [where I = (θ) is the intensity of scattered light from a particle group, and θ is the scattering angle]. 2. A laser oscillator, an optical lens that condenses forward small angle scattered light from a group of microparticles to be measured irradiated with a laser beam, and a concentric silicon photodiode with at least three channels arranged at the focal point of the optical lens. An annular optical detector consisting of a photoelectric conversion element such as a photodetector, an amplifier of the same number as the number of channels of the optical detector that simultaneously amplifies minute current signals of each channel photoelectrically converted by the optical detector, and a current signal amplified by the amplifier. The amount of light energy received by each channel of the circuit that samples and holds each channel, the A/D converter that converts the current signal of each channel into a digital signal, and the optical detector that has been converted into a digital signal is expressed as I〓
(θ)・θ [In the formula I, (θ) is the intensity of scattered light from the particle group, and θ is the scattering angle]. Diameter measuring device. 3. The device for measuring the concentration and particle size of suspended particles according to item 2 above, further comprising a collimator lens for collimating the laser beam of the laser oscillator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60184568A JPS6244646A (en) | 1985-08-22 | 1985-08-22 | Method and apparatus for measuring concentration and grain size of suspended particles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60184568A JPS6244646A (en) | 1985-08-22 | 1985-08-22 | Method and apparatus for measuring concentration and grain size of suspended particles |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6244646A JPS6244646A (en) | 1987-02-26 |
| JPH0355780B2 true JPH0355780B2 (en) | 1991-08-26 |
Family
ID=16155482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60184568A Granted JPS6244646A (en) | 1985-08-22 | 1985-08-22 | Method and apparatus for measuring concentration and grain size of suspended particles |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6244646A (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63223543A (en) * | 1987-03-13 | 1988-09-19 | Canon Inc | Particle analysis device |
| JPH01284738A (en) * | 1988-05-10 | 1989-11-16 | Natl Aerospace Lab | Method and device for measuring particulate size and its distribution |
| JPH0643950B2 (en) * | 1989-09-29 | 1994-06-08 | 株式会社島津製作所 | Particle size distribution measuring device |
| US5229839A (en) * | 1989-10-06 | 1993-07-20 | National Aerospace Laboratory Of Science & Technology Agency | Method and apparatus for measuring the size of a single fine particle and the size distribution of fine particles |
| JP2664042B2 (en) * | 1994-01-21 | 1997-10-15 | 科学技術庁航空宇宙技術研究所長 | Method and apparatus for measuring the concentration and particle size spatial distribution of suspended particles |
| JP3266107B2 (en) * | 1998-07-29 | 2002-03-18 | 株式会社島津製作所 | Particle counting method and particle measuring device |
| JP4951869B2 (en) * | 2004-08-11 | 2012-06-13 | 富士通株式会社 | Sample analysis method and analysis system |
| US7612871B2 (en) * | 2004-09-01 | 2009-11-03 | Honeywell International Inc | Frequency-multiplexed detection of multiple wavelength light for flow cytometry |
| CN107121364B (en) * | 2017-06-20 | 2023-06-23 | 兰州大学 | Multifunctional measuring device for influence of particle system on laser signal |
-
1985
- 1985-08-22 JP JP60184568A patent/JPS6244646A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6244646A (en) | 1987-02-26 |
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