JPH0357570B2 - - Google Patents
Info
- Publication number
- JPH0357570B2 JPH0357570B2 JP58086117A JP8611783A JPH0357570B2 JP H0357570 B2 JPH0357570 B2 JP H0357570B2 JP 58086117 A JP58086117 A JP 58086117A JP 8611783 A JP8611783 A JP 8611783A JP H0357570 B2 JPH0357570 B2 JP H0357570B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- secondary electron
- electron
- deceleration
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Tubes For Measurement (AREA)
Description
【発明の詳細な説明】 本発明は、２次電子分光装置に関する。[Detailed description of the invention] The present invention relates to a secondary electron spectroscopy device.
一般に、２次電子分光装置を用いて照射点の電
位を測定する際、１次電子線供給源からの１次電
子線を固体表面（電子被測定部）に照射して、こ
の照射点から放出される２次電子のエネルギー分
布を測定することにより、照射点の電位を検出す
るようになつている。 Generally, when measuring the potential at an irradiation point using a secondary electron spectrometer, a primary electron beam from a primary electron beam supply source is irradiated onto a solid surface (electron measurement target), and then emitted from this irradiation point. The potential at the irradiation point is detected by measuring the energy distribution of the secondary electrons.
従来の２次電子分光装置には、第１図ａ，ｂに
示すように、２次電子引出し電極１と分光用減速
電極２とが設けられている。 A conventional secondary electron spectrometer is provided with a secondary electron extraction electrode 1 and a spectroscopic deceleration electrode 2, as shown in FIGS. 1a and 1b.
第１図ａには、従来の同心球電極型２次電子分
光装置が示されていて、半径r1の球状２次電子引
出し電極１と半径r2の球状分光用減速電極２とは
同心球状をなしている。 FIG. 1a shows a conventional concentric spherical electrode type secondary electron spectrometer, in which a spherical secondary electron extraction electrode 1 with a radius r 1 and a spherical spectroscopy deceleration electrode 2 with a radius r 2 are arranged in a concentric spherical shape. is doing.
また、第１図ｂには、従来の平行電極型２次電
子分光装置が示されている。 Further, FIG. 1b shows a conventional parallel electrode type secondary electron spectrometer.
従来の同心球電極型２次電子分光装置および平
行電極型２次電子分光装置は、いずれも入射電子
のもつエネルギーの分光用減速電極２に垂直な成
分を分光している。 Both the conventional concentric sphere electrode type secondary electron spectrometer and the parallel electrode type secondary electron spectrometer separate components of the energy of incident electrons perpendicular to the spectroscopic deceleration electrode 2.
なお、第１図中の符号５は、分光用減速電極を
通過した２次電子を検出する２次電子検出器を示
している。 Note that the reference numeral 5 in FIG. 1 indicates a secondary electron detector that detects secondary electrons that have passed through the spectroscopic deceleration electrode.
このような従来の２次電子分光装置では、電位
被測定部である被測定電極３に近接している他の
電極４上に電位変化が生じれば、電極３，４間に
働く局所電界のために電子軌動が曲げられて、そ
の結果入射電子のもつエネルギーの減速電極２に
垂直な成分が変化する。 In such a conventional secondary electron spectrometer, if a change in potential occurs on another electrode 4 that is close to the electrode 3 to be measured, which is the part to be measured, the local electric field acting between the electrodes 3 and 4 changes. Therefore, the electron trajectory is bent, and as a result, the component of the energy of the incident electrons perpendicular to the deceleration electrode 2 changes.
この変化が局所電界に基づく測定誤差の要因で
あり、この従来の２次電子分光装置で測定される
電位分解能が、10％程度に制限されるという問題
点がある。 This change is a cause of measurement errors based on the local electric field, and there is a problem in that the potential resolution measured by this conventional secondary electron spectrometer is limited to about 10%.
したがつて、従来の２次電子分光装置を用い
て、集積回路内部の電極等の微細構造における電
位を測定する場合、正確な電位測定が行なえな
い。 Therefore, when measuring the potential in a fine structure such as an electrode inside an integrated circuit using a conventional secondary electron spectrometer, accurate potential measurement cannot be performed.
本発明は、このような問題点を解決しようとす
るもので、局所電界効果による被測定部の測定誤
差を低減させることにより、微細構造における電
位測定の精度を向上させるようにした、２次電子
分光装置を提供することを目的とする。 The present invention aims to solve these problems, and aims to improve the accuracy of potential measurement in microstructures by reducing measurement errors in the measured part due to local electric field effects. The purpose is to provide a spectroscopic device.
このため本発明の２次電子分光装置は、試料面
における電位被測定部へ電子線を照射する電子線
供給源と、上記電位被測定部からの２次電子を引
出すための２次電子引出し電極と、同２次電子引
出し電極を通過した２次電子を減速する分光用減
速電極と、同分光用減速電極を通過した２次電子
を検出する２次電子検出器とをそなえ、上記２次
電子引出し電極が上記試料面に平行な平行電極と
して形成されるとともに、上記分光用減速電極も
上記２次電子引出し電極と平行な平行電極として
形成されて、上記分光用減速電極が上記２次電子
引出し電極を通過した２次電子を垂直に受けるべ
く、上記２次電子引出し電極と上記分光用減速電
極との間に、上記２次電子引出し電極を通過した
２次電子の接線群で構成される最小錯乱円の中心
をその焦点とする集束型電子レンズが介装された
ことを特徴としている。 For this reason, the secondary electron spectrometer of the present invention includes an electron beam supply source that irradiates an electron beam to a potential measurement target part on a sample surface, and a secondary electron extraction electrode for extracting secondary electrons from the potential measurement target part. , a spectroscopic deceleration electrode that decelerates the secondary electrons that have passed through the secondary electron extraction electrode, and a secondary electron detector that detects the secondary electrons that have passed through the spectroscopic deceleration electrode. The extraction electrode is formed as a parallel electrode parallel to the sample surface, and the spectroscopy deceleration electrode is also formed as a parallel electrode parallel to the secondary electron extraction electrode, so that the spectroscopy deceleration electrode In order to vertically receive the secondary electrons that have passed through the electrode, a minimum electrode is provided between the secondary electron extracting electrode and the spectroscopic deceleration electrode, which is composed of a group of tangents to the secondary electrons that have passed through the secondary electron extracting electrode. It is characterized by the inclusion of a focusing electron lens whose focus is at the center of the circle of confusion.
以下図面により本発明の実施例について説明す
ると、第２図は本発明の一実施例としての平行電
極型２次電子分光装置を示す模式図であり、第２
図中、第１図ａ，ｂと同じ符号はほぼ同様のもの
を示す。 Embodiments of the present invention will be described below with reference to the drawings. FIG. 2 is a schematic diagram showing a parallel electrode type secondary electron spectrometer as an embodiment of the present invention.
In the figure, the same reference numerals as in FIGS. 1a and 1b indicate substantially the same parts.
第２図に示すように、本発明の実施例では、試
料面６における電位被測定部としての測定電極３
へ電子線供給源Ａから電子線が照射されるように
なつている。 As shown in FIG.
An electron beam is irradiated from an electron beam supply source A to.
また、測定電極３からの２次電子を引出すため
の２次電子引出し電極１′が試料面６に平行な平
行電極として形成されており、この２次電子引出
し電極１′を通過した２次電子の接線群で構成さ
れる最小錯乱円の中心（仮想源）Ｐを焦点とする
焦束型電子レンズ８が、電極７，７′によつて構
成されている。 Further, a secondary electron extraction electrode 1' for extracting secondary electrons from the measurement electrode 3 is formed as a parallel electrode parallel to the sample surface 6, and the secondary electrons passing through the secondary electron extraction electrode 1' are A focusing electron lens 8 whose focal point is the center (virtual source) P of the circle of least confusion formed by the group of tangents is constituted by the electrodes 7 and 7'.
また、平板状分光用減速電極２′が、平板状２
次電子引出し電極１′および試料面６にそれぞれ
平行に設けられている。 Moreover, the flat plate-shaped deceleration electrode 2' for spectroscopy is
They are provided parallel to the secondary electron extraction electrode 1' and the sample surface 6, respectively.
このようにして、２次電子引出し電極１′と分
光用減速電極２′との間に配設された焦束型電子
レンズ８は、その一方の焦点を上述の仮想源Ｐに
一致させるように調整されている。 In this way, the focusing electron lens 8 disposed between the secondary electron extracting electrode 1' and the spectroscopic deceleration electrode 2' has one focal point aligned with the above-mentioned virtual source P. It has been adjusted.
すなわち、焦束型電子レンズ８は、一方の焦点
が仮想源Ｐに等しくなるように構成されている。 That is, the focusing electron lens 8 is configured such that one focal point is equal to the virtual source P.
この実施例では、仮想源Ｐが焦束型電子レンズ
８の焦点上に存在するので、このレンズ８を通過
した２次電子は、すべて光軸Ｂに平行に進む。 In this embodiment, since the virtual source P exists on the focal point of the focusing electron lens 8, all the secondary electrons that have passed through this lens 8 travel parallel to the optical axis B.
したがつて、分光用減速電極２′には局所電界
の如何にかかわらず、２次電子が常に垂直に入射
することになり、他の電極４による局所電界によ
つて、分光用減速電極２′に垂直なエネルギー成
分の変化を生じることはない。したがつて、分光
用減速電極２′を通過した２次電子を検出する検
出器５を用いて測定が行なわれる際に、測定誤差
が生じない。 Therefore, regardless of the local electric field, secondary electrons are always vertically incident on the spectroscopy deceleration electrode 2', and the local electric field from the other electrode 4 causes the spectroscopy deceleration electrode 2' to be incident vertically. There is no change in the energy component perpendicular to . Therefore, no measurement error occurs when measurements are performed using the detector 5 that detects the secondary electrons that have passed through the spectroscopic deceleration electrode 2'.
第２図において、測定電極３の線幅を10μｍ、
電極３と電極４との間隔を10μｍ、他の電極４の
線幅を10μｍとして、２次電子引出し電極１′へ
引出し電圧1000Vを印加し、さらに、２次電子引
出し電極１′と測定電極３との距離を２mm，焦点
距離ｆ＝17mmとした場合について、電子軌道を計
算し分光特性を解析した結果、従来の同心球型２
次電子分光装置に比べて10〜100倍の測定精度の
向上が見られ、十分な局所電界抑圧効果がみられ
た。 In Fig. 2, the line width of the measurement electrode 3 is 10 μm,
An extraction voltage of 1000 V was applied to the secondary electron extraction electrode 1' with the interval between the electrode 3 and the electrode 4 being 10 μm, and the line width of the other electrode 4 being 10 μm. As a result of calculating the electron trajectory and analyzing the spectral characteristics when the distance from the
The measurement accuracy was improved by 10 to 100 times compared to secondary electron spectroscopy, and sufficient local electric field suppression effects were observed.
また、本発明の２次電子分光装置では、分光用
減速電極２′が、２次電子引出し電極１′と平行な
平行電極として形成されて、２次電子を垂直に受
けるようになつているので、装置全体をコンパク
トに構成できる利点もある。 Furthermore, in the secondary electron spectrometer of the present invention, the deceleration electrode 2' for spectroscopy is formed as a parallel electrode parallel to the secondary electron extraction electrode 1', so that it receives secondary electrons perpendicularly. Another advantage is that the entire device can be configured compactly.
以上詳述したように、本発明の２次電子分光装
置によれば、平行電極型の２次電子分光装置にお
いて、２次電子引出し電極と分光用減速電極との
間に、上記２次電子引出し電極を通過した２次電
子の接線群で構成される最小錯乱円の中心をその
焦点とする焦束型電子レンズが介装されるという
簡素な構成で、２次電子を分光用減速電極に常に
垂直に入射させることができる効果があり、これ
により、局所電界効果に基づく電位測定誤差が低
減して、極めて測定精度の高い電位測定を行なえ
る利点がある。 As detailed above, according to the secondary electron spectrometer of the present invention, in the parallel electrode type secondary electron spectrometer, the secondary electron It has a simple configuration in which a focusing electron lens is inserted whose focal point is the center of the circle of least confusion made up of the tangent group of secondary electrons that have passed through the electrode, and the secondary electrons are always directed to the deceleration electrode for spectroscopy. This has the advantage that it can be made vertically incident, thereby reducing potential measurement errors due to local electric field effects, and making it possible to perform potential measurement with extremely high measurement accuracy.
また、本装置では、２次電子を垂直に受ける分
光用減速電極が、２次電子引出し電極と平行に保
たれるので、装置全体をコンパクトに構成できる
利点もある。 Furthermore, in this device, the spectroscopic deceleration electrode that vertically receives secondary electrons is kept parallel to the secondary electron extracting electrode, so there is an advantage that the entire device can be configured compactly.
第１図ａは従来の同心球電極型２次電子分光装
置の模式図であり、第１図ｂは従来の平行電極型
２次電子分光装置の模式図であり、第２図は本発
明の一実施例としての２次電子分光装置を示す模
式図である。
１′…平板状２次電子引出し電極、２…球状分
光用減速電極、２′…平板状分光用減速電極、３
…電位被測定部としての測定電極、４…他の電
極、５…２次電子検出器、６…試料面、７，７′
…電極、８…焦束型電子レンズ、Ａ…電子線供給
源、Ｂ…光軸、Ｐ…中心（仮想源）。
FIG. 1a is a schematic diagram of a conventional concentric spherical electrode type secondary electron spectrometer, FIG. 1b is a schematic diagram of a conventional parallel electrode type secondary electron spectrometer, and FIG. 2 is a schematic diagram of a conventional parallel electrode type secondary electron spectrometer. FIG. 1 is a schematic diagram showing a secondary electron spectrometer as an example. 1'... Flat secondary electron extraction electrode, 2... Spherical deceleration electrode for spectroscopy, 2'... Flat deceleration electrode for spectroscopy, 3
...Measurement electrode as potential measured part, 4...Other electrodes, 5...Secondary electron detector, 6...Sample surface, 7, 7'
... Electrode, 8... Focusing electron lens, A... Electron beam source, B... Optical axis, P... Center (virtual source).
Claims (1)
する電子線供給源と、上記電位被測定部からの２
次電子を引出すための２次電子引出し電極と、同
２次電子引出し電極を通過した２次電子を減速す
る分光用減速電極と、同分光用減速電極を通過し
た２次電子を検出する２次電子検出器とをそな
え、上記２次電子引出し電極が上記試料面に平行
な平行電極として形成されるとともに、上記分光
用減速電極も上記２次電子引出し電極と平行な平
行電極として形成されて、上記分光用減速電極が
上記２次電子引出し電極を通過した２次電子を垂
直に受けるべく、上記２次電子引出し電極と上記
分光用減速電極との間に、上記２次電子引出し電
極を通過した２次電子の接線群で構成される最小
錯乱円の中心をその焦点とする集束型電子レンズ
が介装されたことを特徴とする、２次電子分光装
置。1. An electron beam source that irradiates an electron beam to the potential measured part on the sample surface, and 2.
A secondary electron extraction electrode for extracting secondary electrons, a spectroscopy deceleration electrode for decelerating the secondary electrons that have passed through the secondary electron extraction electrode, and a secondary electron deceleration electrode for detecting the secondary electrons that have passed through the spectroscopy deceleration electrode. an electron detector, the secondary electron extracting electrode is formed as a parallel electrode parallel to the sample surface, and the spectroscopic deceleration electrode is also formed as a parallel electrode parallel to the secondary electron extracting electrode, In order for the spectroscopic deceleration electrode to vertically receive the secondary electrons that have passed through the secondary electron extraction electrode, the secondary electron extraction electrode is provided between the secondary electron extraction electrode and the spectroscopic deceleration electrode. 1. A secondary electron spectroscopy device, characterized in that a focusing electron lens is interposed, the focus of which is the center of a circle of least confusion formed by a group of tangents to secondary electrons.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58086117A JPS59211953A (en) | 1983-05-17 | 1983-05-17 | Secondary electron spectral device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58086117A JPS59211953A (en) | 1983-05-17 | 1983-05-17 | Secondary electron spectral device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59211953A JPS59211953A (en) | 1984-11-30 |
| JPH0357570B2 true JPH0357570B2 (en) | 1991-09-02 |
Family
ID=13877747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58086117A Granted JPS59211953A (en) | 1983-05-17 | 1983-05-17 | Secondary electron spectral device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59211953A (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3138929A1 (en) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | IMPROVED SECONDARY ELECTRON SPECTROMETER FOR POTENTIAL MEASUREMENT ON A SAMPLE WITH AN ELECTRON PROBE |
| DE3138901A1 (en) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | IMPROVED COUNTERFIELD SPECTROMETER FOR ELECTRON BEAM MEASUREMENT TECHNOLOGY |
-
1983
- 1983-05-17 JP JP58086117A patent/JPS59211953A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59211953A (en) | 1984-11-30 |
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| EXPY | Cancellation because of completion of term |