JPH0359791B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an electron beam welding device, and particularly to an electron beam welding device equipped with an electron gun sliding mechanism.

[Conventional technology]

5, 6 and 7 show conventional electron beam welding equipment, FIG. 5 is a plan view, FIG. 6 is a sectional view taken along line AA in FIG. 5, and FIG. It is a BB sectional view. In the figure, 1 is a vacuum chamber, 2 is an electron gun placed on the top of the outside of the vacuum chamber 1, and 3 is an electron gun 2.
A slide sheet 4 is connected to the electron gun 2 and moves along the external top surface of the vacuum chamber 1, and is attached to the external top surface of the vacuum chamber 1 to create a vacuum seal between the vacuum chamber 1 and the slide seal 3. Patsukin, 5
Drums a and 5b are attached to both ends of the vacuum chamber 1 to take up and send out the slide seal 3, and 6 is an electron beam 8 that is perforated in the longitudinal direction of the upper wall of the vacuum chamber 1 and acts on the workpiece 7. It is a passageway for passing through.

The conventional electron beam welding apparatus is configured as described above, and in order to weld the object 7 to be welded, first the welding line of the object 7 to be welded and the moving direction of the electron gun 2 are aligned. Next, the vacuum chamber 1 is evacuated, and the electron beam 8 is emitted from the electron gun 2.
is fired and the electron gun 2 is moved at an appropriate speed along the direction of the passage port 6. At the same time, the slide sheet 3 is wound up by the drum 5a or 5b in one direction, and the slide sheet 3 is rolled up by the drum 5b or 5a in the other direction. Send out just the right amount of 3. Slide sheet 3
Since the electron gun 2 does not slide on the gasket 4 and cause air leakage, the vacuum degree of the vacuum chamber 1 can be maintained while the electron gun 2 is moving and the welding work can be carried out.

[Problem that the invention seeks to solve]

In the above welding work, when welding a large workpiece 7 having a relatively long weld line, the weld line of the workpiece 7 must be precisely aligned with the irradiation position of the electron beam 8 over a long distance. It is difficult to do so, and it is necessary to move and adjust the electron beam 8 in a direction perpendicular to the welding direction. However, in the conventional electron beam welding position, if the width of the electron beam passage port 6 is widened, the slide sheet 3 bends inside the vacuum chamber 1, causing the slide sheet 3 to bend or wrinkle and become slippery. The width of the passage port 6 is limited because air leakage occurs due to missing or wrinkled parts, making it impossible to maintain a vacuum.For this reason, the workpiece 7 with a long welding line must be installed with very high precision. There is a problem that welding cannot be performed without it, and there is also a problem that metal vapor generated during welding is deposited on the slide sheet 3 and impairs vacuum sealing performance. Furthermore, the thickness of the slide sheet 3 that can be rolled up in practical use poses a safety problem because X-rays generated from the irradiation position of the electron beam 8 during welding penetrate the slide sheet 3 and leak.

This invention was made to solve these problems, and by widening the width of the electron beam passage opening, the amount of movement adjustment of the electron gun can be increased. It is an object of the present invention to provide an electron beam welding device that can prevent vapor deposition.

[Means for solving problems]

The electron beam welding device according to the present invention divides a slide sheet receiver that is connected to the lower end protrusion of an electron gun and moves within a guide opening in the upper wall of a vacuum chamber into a plurality of pallets, and connects the pallets with links. , the gap created at the joint between the pallets is bent, and this slide sheet receiver is supported by a rail.

[Effect]

In this invention, since the slide sheet is supported by the slide sheet receiver made of a plurality of divided pallets, deformation of the slide sheet due to vacuum is prevented, and metal vapor is prevented from adhering to the sealing surface of the slide sheet. The curved gaps between each pallet also prevent leakage of X-rays.

〔Example〕

1, 2, and 3 show an embodiment of the present invention, FIG. 1 is a plan view, and FIG. 2 is a cross-sectional view taken along line AA in FIG. 1 with some parts omitted; Figure 3 is the first
It is a BB sectional view of the figure. 1 to 4, 5 in the figure
a, 5b, 7 and 8 are the same as those in the conventional example. Reference numeral 11 denotes a guide opening formed in a wide rectangular shape on the upper wall of the vacuum chamber 1. A protrusion 2a at the lower end of the electron gun 2 engages with the guide opening 11. Patsukin 4 is placed in the area. Reference numeral 12 denotes a slide sheet receiver connected to the protrusion 2a at the lower end of the electron gun 2, and as shown in FIG.
Consists of 4. Each pallet 13 has a protruding shape at one end and a concave shape at the other end.
The protruding end face and the recessed end face are connected by a link 14 so as to be in contact with each other.
Reference numeral 15 denotes a rail provided within the vacuum chamber 1, and the slide sheet receiver 12 is supported by this rail 15 and moves within the guide opening 11.

When performing welding work using the electron beam welding apparatus configured as described above, first align the welding line of the workpiece 7 with the moving direction of the electron gun 2, then move the vacuum chamber 1
is evacuated, the electron beam 8 is emitted from the protrusion 2a at the lower end of the electron gun 2, the electron gun 2 is moved at an appropriate speed along the direction of the guide opening 11, and at the same time the slide sheet 3 is moved to one of the drums 5a or 5b. It is wound up and sent out from the other drum 5b or 5a in just the right amount. As the electron gun 2 moves, the slide sheet receiver 12 also moves toward the slide sheet 3.
Move while supporting. Therefore, even if the guide opening 11 is wide, the slide sheet 3 will not bend inward to the vacuum chamber 1 due to the vacuum, and the slide sheet 3 will not bend or wrinkle, so the vacuum can be maintained. . In addition, even if the installation precision of the workpiece 7 having a long welding line is low, since the guide opening 11 is wide, the electron gun 2 can be moved widely in the direction perpendicular to the welding line (in the direction of arrow C-D in Fig. 3). can do.

Furthermore, as shown in FIG. 4, since the gaps between each pallet 13 are bent, the slide sheet 3 is not directly exposed to the X-rays generated from the irradiation position of the electron beam 8 during welding, and the pallets 13
X-rays can be shielded by the pallet 13, and metal vapor can be similarly shielded by the pallet 13.

[Effects of the Invention] As explained above, the present invention supports the slide sheet from the vacuum side by bent pallets with gaps, and connects each pallet with links, so that the present invention has the following effects.

(a) Since the slide sheet is supported by the pallet from the vacuum side, the guide opening width of the vacuum chamber can be increased without deforming the slide sheet.

(b) Since the width of the guide opening can be increased, the amount of movement adjustment of the electron gun can be increased, and there is no need to increase the accuracy of the installation of the workpiece.

(c) Since the gap between the pallets is curved, the slide sheet is not directly exposed to X-rays, and the pallets can shield the X-rays.

(d) Since the slice sheet is protected by the pallet, the slide sheet is not directly exposed to metal vapor and the vacuum sealing performance is not impaired.

(E) Each palette is connected by a link, so
Pallets can be stored compactly in a vacuum chamber and taken out.

[Brief explanation of drawings]

Figure 1 is a plan view showing an embodiment of the invention, Figure 2 is a plan view showing an embodiment of the invention.
The figure shows a sectional view taken along the line AA in FIG. 1 with some parts omitted, FIG. 3 shows a sectional view taken along the BB line in FIG. 1, and FIG. Fig. 5 is a plan view of the conventional device, and Fig. 6 is a perspective view of the conventional device.
FIG. 7 is a sectional view taken along line AA in the figure, and FIG. 7 is a sectional view taken along line BB in FIG. 1; Vacuum chamber, 2; Electron gun, 3; Slide sheet, 4; Packing, 5a, 5b; Drum, 7; To be welded, 8; Electron beam, 11; Guide opening, 1
2; Slide sheet holder, 13; Palette, 1
4; Link, 15; Rail. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

[Scope of Claims] 1. A vacuum chamber in which a guide opening into which a lower end protrusion of the electron gun enters and moves is formed in the upper wall, and a slide that moves on the external upper surface of the vacuum chamber to move the electron gun. In an electron beam welding device equipped with a sheet, a sliding sheet is comprised of a plurality of pallets connected by links and bent at the gaps between the connecting portions, and engages with the lower protrusion of the electron gun and moves within the guide opening. An electron beam welding device comprising a receiver and a rail that supports the slide sheet receiver. 2. The electron beam welding apparatus according to claim 1, wherein the pallets have one end surface protruding and the other end surface recessed, and the gaps between each pallet are curved.