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JPH0365489B2 - - Google Patents
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JPH0365489B2 - - Google Patents

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Publication number
JPH0365489B2
JPH0365489B2 JP4448682A JP4448682A JPH0365489B2 JP H0365489 B2 JPH0365489 B2 JP H0365489B2 JP 4448682 A JP4448682 A JP 4448682A JP 4448682 A JP4448682 A JP 4448682A JP H0365489 B2 JPH0365489 B2 JP H0365489B2
Authority
JP
Japan
Prior art keywords
sample
analysis
titration
sampling
reagent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4448682A
Other languages
Japanese (ja)
Other versions
JPS58162852A (en
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Filing date
Publication date
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Priority to JP4448682A priority Critical patent/JPS58162852A/en
Publication of JPS58162852A publication Critical patent/JPS58162852A/en
Publication of JPH0365489B2 publication Critical patent/JPH0365489B2/ja
Granted legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G01N31/16Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using titration
    • G01N31/162Determining the equivalent point by means of a discontinuity
    • G01N31/164Determining the equivalent point by means of a discontinuity by electrical or electrochemical means

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  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、液体の濃度を自動的に測定するため
の自動滴定分析装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an automatic titration analyzer for automatically measuring the concentration of a liquid.

〔従来の技術〕[Conventional technology]

一般に化学反応装置、化学薬品を処理用薬剤と
して添加して行なう処理装置の運転管理あるいは
産業用水・産業廃水の水質管理などにおいては、
化学分析は欠くことができないものであり、特に
化学工場の生産工程における品質管理・工程管理
では常時精度の良い測定値を出し、これを生産工
程にフイードバツクすることが極めて重要であ
り、従来、分析技術の熟練度や分析装置の改良に
よつて化学分析が行なわれて来た。
In general, in the operation management of chemical reaction equipment, treatment equipment that adds chemicals as treatment agents, and water quality management of industrial water and industrial wastewater, etc.
Chemical analysis is indispensable, and in particular, for quality control and process control in the production process of chemical factories, it is extremely important to always obtain highly accurate measurement values and feed back this to the production process. Chemical analysis has been carried out with the improvement of technical proficiency and analytical equipment.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

ところが、分析者の熟練度にも限界があるばか
りか測定に時間が要し過ぎたり、分析者での個人
誤差が避けられず、また所謂繰返し式の連続分析
を行なう場合に分析員に過大な労力が掛かるなど
の問題があつた。
However, not only is there a limit to the level of skill of the analyst, measurements take too much time, individual errors on the part of the analyst are unavoidable, and when so-called repeated continuous analysis is performed, the analyst is overburdened. There were problems such as the amount of labor involved.

本発明は、これら従来の問題点を解決しようと
するもので、分析員の熟練度を要求されることな
く常時精度の良い測定値を容易に出すことのでき
る自動滴定分析装置を提供することを目的とした
ものである。
The present invention aims to solve these conventional problems, and aims to provide an automatic titration analyzer that can easily produce highly accurate measurement values at all times without requiring high levels of skill on the part of the analyst. This is the purpose.

〔課題を解決するための手段〕[Means to solve the problem]

本発明は、分析用試料の所定量をサンプリング
ビユレツトで採取して分析セルに供給するサンプ
リング機構と、該分析セルに試料の物性変化を電
気量に変換して出力する酸化環元電位測定電極及
びPH測定電極並びに試料と試薬を撹拌混合し排出
する撹拌排出部材を備えた分析機構と、前記分析
セルに酸化環元試薬及びアルカリ試薬の試薬の所
定量をそれぞれ滴定ビユレツトで滴定する滴定機
構とを装備し、前記サンプリング機構、分析機構
及び滴定機構の各機構をそれぞれ各別に所定時間
所定順序に作動するように起動、停止操作を指示
する制御機構を備えたことを特徴とする自動滴定
分析装置である。
The present invention consists of a sampling mechanism that collects a predetermined amount of a sample for analysis using a sampling burlet and supplies the sample to an analysis cell, and an oxidation ring source potential measuring electrode that converts changes in the physical properties of the sample into electrical quantities and outputs them to the analysis cell. and an analysis mechanism equipped with a PH measuring electrode and a stirring/discharging member for stirring and discharging the sample and reagent, and a titration mechanism for titrating predetermined amounts of an oxidation ring reagent and an alkaline reagent into the analysis cell using a titration bottle, respectively. An automatic titration analyzer characterized in that it is equipped with a control mechanism that instructs to start and stop the sampling mechanism, the analysis mechanism, and the titration mechanism so that each mechanism operates separately for a predetermined time and in a predetermined order. It is.

〔作用〕[Effect]

本発明の分析装置では、プリント基板などの電
気回路基板から特定量の銅を溶解除去するための
エツチング液の濃度管理に適用されるものであつ
て、エツチング液の過酸化水素、硫酸及び銅の濃
度を自動的に所定範囲に維持し、エツチング工程
を大幅に合理化することができるものである。
The analyzer of the present invention is applied to the concentration control of an etching solution for dissolving and removing a specific amount of copper from an electric circuit board such as a printed circuit board, and is used to control the concentration of an etching solution containing hydrogen peroxide, sulfuric acid, and copper. The concentration can be automatically maintained within a predetermined range, greatly streamlining the etching process.

すなわち、この装置はエツチング液の濃度をシ
ーケンス制御によつて自動的に滴定分析すると共
に、その分析結果をエツチング液の濃度調節機構
にフイードバツクしてエツチング液の濃度を簡便
かつ的確に管理できるようにしてある。
In other words, this device automatically titrates and analyzes the concentration of the etching solution using sequence control, and feeds back the analysis results to the etching solution concentration adjustment mechanism to easily and accurately manage the concentration of the etching solution. There is.

〔実施例〕〔Example〕

本発明の一実施例を図面によつて説明すると、
分析用試料であるエツチング液の濃度簡易に適用
した例で、試料のサンプリング機構S、試薬の滴
定機構T、分析機構A及び制御機構Cとからな
り、前記エツチング液の濃度調節には、過酸化水
素定量注入ポンプP1、硫酸定量注入ポンプP2
びエツチング液循環ポンプP3からなり、注入ポ
ンプP1,P2の吐出側はエツチング装置(図示せ
ず)に連絡され、前記循環ポンプP3の吐出側は
管路により硫酸銅晶析回収装置(図示せず)を介
してエツチング装置に連絡されている。
An embodiment of the present invention will be described with reference to the drawings.
This is an example in which the concentration of an etching solution, which is a sample for analysis, is simply applied. It consists of a sample sampling mechanism S, a reagent titration mechanism T, an analysis mechanism A, and a control mechanism C. Consisting of a hydrogen metering injection pump P 1 , a sulfuric acid metering injection pump P 2 and an etching liquid circulation pump P 3 , the discharge sides of the injection pumps P 1 and P 2 are connected to an etching device (not shown), and the circulation pump P 3 The discharge side of is connected to an etching device via a copper sulfate crystallization and recovery device (not shown) by a pipe line.

前記サンプリング機構Sは主な要素として分析
用試料の循環ポンプ1、溢流函(オーバーフロー
セル)2及びピストンポンプ式の定量ポンプ(逆
止弁を備えている)であるサンプリングビユレツ
ト3を備えていて、電磁弁SV4,SV5のある配管
で分析セル9に連絡してある。前記循環ポンプ
1、溢流函2及び試料貯留槽4は試料循環系を構
成し、試料(エツチング液)は循環ポンプ1によ
り溢流函2に入り常にフレツシユされるようにな
つている。
The sampling mechanism S includes, as main elements, a circulation pump 1 for a sample to be analyzed, an overflow box (overflow cell) 2, and a sampling module 3 which is a piston pump type metering pump (equipped with a check valve). It is connected to the analysis cell 9 through piping with solenoid valves SV 4 and SV 5 . The circulation pump 1, the overflow box 2, and the sample storage tank 4 constitute a sample circulation system, and the sample (etching solution) enters the overflow box 2 by the circulation pump 1 and is constantly refreshed.

また前記滴定機構Tは、アルカリ試薬タンク
5、過マンガン酸カリ試薬タンク6及びこれらの
試薬を分析セル9内の試料に滴定するための、前
記酸ビユレツト3と同様構造の滴定ビユレツト
7,8を備えている。
The titration mechanism T also includes an alkaline reagent tank 5, a potassium permanganate reagent tank 6, and titration bottles 7 and 8 having the same structure as the acid bottle 3 for titrating these reagents to the sample in the analysis cell 9. We are prepared.

次に、分析機構Aとしては、前記試料と試薬を
受け入れる容器即ち分析セル9と、その内壁を洗
浄するための洗浄液或いは分析セル9内の試料を
希釈するための希釈液を供給する電磁弁SV1のあ
る供給配管16と、洗浄液と希釈液の供給量を所
定量に制御するための液面制御器(レベルスイツ
チ)10と、PH測定電極11と、酸化還元電位測
定電極12と、分析セル9内の内容液を撹拌する
ためのエアポンプ13(吐出側に炭酸ガス除去用
のソーダライム管が接続されている)と、該内容
液の排出ポンプ14とを電磁弁SV2,SV3のある
配管で備えてある。
Next, the analysis mechanism A includes a container that receives the sample and reagent, that is, an analysis cell 9, and a solenoid valve SV that supplies a cleaning liquid for cleaning the inner wall of the container or a dilution liquid for diluting the sample in the analysis cell 9. 1 , a liquid level controller (level switch) 10 for controlling the supply amount of cleaning liquid and diluting liquid to a predetermined amount, a PH measuring electrode 11, an oxidation-reduction potential measuring electrode 12, and an analysis cell. An air pump 13 (a soda lime pipe for removing carbon dioxide gas is connected to the discharge side) for stirring the content liquid in 9 and a discharge pump 14 for the content liquid are connected to electromagnetic valves SV 2 and SV 3 . It is provided with piping.

一方、前記制御機構Cとしては、マイクロコン
ピユータ、デイスプレイ及び変換器を備えている
制御部15が用いられ、電磁弁SV1〜SV5、サン
プリングビユレツト3、滴定ビユレツト7,8、
エアポンプ13及び排出ポンプ14を所定の順序
により所定時間作動せしめること、レベルスイツ
チ10からの信号を受けて電磁弁SV1を開閉する
こと、PH測定電極11、酸化還元電位測定電極1
2からの信号を受けて、所定のPH又は電位に到達
したときに滴定ビユレツト7,8の作動を停止す
ると共に滴定の終点を検出し、該終点における試
薬の滴定量をこれら滴定ビユレツト7,8から読
み取ること、この読取量から試料の過酸化水素水
濃度又は硫酸濃度を演算し、得られた濃度が予め
設定された濃度より低いときに該設定濃度と測定
濃度との差を時間に変換し、その時間だけ前記注
入ポンプP1又はP2を作動せしめること、同様に
して得られた試料の銅濃度が予め設定された濃度
より高いときに前記循環ポンプP3を作動せしめ
余分の銅を前記晶析回収装置へ移送して硫酸銅を
分離回収すると共に分離液をエツチング装置に返
送すること、前記過酸化水素・硫酸・銅の測定濃
度を表示、記録すると共にこれらが異常値になつ
たときに警報を発すること、などの機能を果たす
ように構成されている。
On the other hand, as the control mechanism C, a control section 15 equipped with a microcomputer, a display, and a converter is used, and includes solenoid valves SV 1 to SV 5 , a sampling chamber 3, a titration chamber 7, 8,
Operating the air pump 13 and discharge pump 14 in a predetermined order for a predetermined time; Opening and closing the solenoid valve SV 1 in response to a signal from the level switch 10; PH measuring electrode 11; redox potential measuring electrode 1.
2, when a predetermined pH or potential is reached, the operation of the titration bottles 7, 8 is stopped, the end point of the titration is detected, and the titration amount of the reagent at the end point is determined by the titration bottles 7, 8. The hydrogen peroxide concentration or sulfuric acid concentration of the sample is calculated from this reading amount, and when the obtained concentration is lower than a preset concentration, the difference between the set concentration and the measured concentration is converted into time. , operating the injection pump P 1 or P 2 for that time; and operating the circulation pump P 3 when the copper concentration of the sample obtained in the same manner is higher than a preset concentration to remove the excess copper. Transfer to a crystallization recovery device to separate and recover copper sulfate, and return the separated liquid to the etching device; display and record the measured concentrations of hydrogen peroxide, sulfuric acid, and copper; and when these become abnormal values. It is configured to perform functions such as issuing an alarm.

この自動滴定分析制御装置は、制御機構Cから
の出力によつて以下の順序に従い、一連の分析動
作及びエツチング液の濃度調節動作を行なう。
This automatic titration analysis control device performs a series of analysis operations and etching solution concentration adjustment operations in accordance with the output from the control mechanism C in the following order.

分析動作 (1) 試料の準備 (i) 試料による分析セル9の共洗い 電磁弁SV4,SV5を開としサンプリング
ビユレツト3を作動して一定量の試料を分
析セル9に注入する。電磁弁SV3を開とし
エアポンプ13を作動して試料を一定時間
空気撹拌する。
Analysis operation (1) Preparation of sample (i) Co-washing of analysis cell 9 with sample Open solenoid valves SV 4 and SV 5, operate sampling chamber 3, and inject a certain amount of sample into analysis cell 9. Open the solenoid valve SV 3 and operate the air pump 13 to agitate the sample for a certain period of time.

次いで電磁弁SV2を開とし排出ポンプ1
4を一定時間作動して試料を排出する。以
上の操作を設定回数だけ繰り返す。
Next, open solenoid valve SV 2 and discharge pump 1.
4 for a certain period of time to discharge the sample. Repeat the above operation for the set number of times.

(ii) 分析セル9の水洗い 電磁弁SV1を開として洗浄レベルL1まで
水道水を注入したのち電磁弁SV3を開けエ
アポンプ13を作動して水道水を一定時間
撹拌する。
(ii) Washing the analysis cell 9 After opening the solenoid valve SV 1 and injecting tap water to the cleaning level L 1 , open the solenoid valve SV 3 and operate the air pump 13 to stir the tap water for a certain period of time.

次いで上記(i)と同様の容量で水道水の排
出を行なう。この操作は設定回数だけ繰返
して行なわれる。
Next, tap water is discharged in the same volume as in (i) above. This operation is repeated a set number of times.

(iii) 希釈水及び試料の分析セル9への注入 (ii)と同様にして水道水を希釈レベルL2
まで注入したのち(i)と同様にして一定量の
試料を注入する。次いでエアポンプ13に
より一定時間、希釈と試料の撹拌混合を行
なう。
(iii) Injecting dilution water and sample into analysis cell 9 In the same manner as in (ii), tap water was diluted to level L 2.
After injecting up to 100 ml, inject a certain amount of sample in the same manner as in (i). Next, the air pump 13 performs dilution and stirring and mixing of the sample for a certain period of time.

(2) 滴定分析 (i) 硫酸濃度の滴定 試薬としてNaOH又はNa2CO3を使用す
る。
(2) Titration analysis (i) Titration of sulfuric acid concentration NaOH or Na 2 CO 3 is used as the reagent.

(ii) 全銅濃度の滴定 上記(i)と同じ、なお、酸度と全銅の分析
はこの例のように試料採取点が同一の場合
1階の滴定で行なうことができる。酸度又
は全銅の滴定が終了したのち排出ポンプ1
4を一定時間作動して分析セル9内の内容
液の排出を行なう。
(ii) Titration of total copper concentration Same as in (i) above, but acidity and total copper analysis can be performed by titration on the first floor if the sampling points are the same as in this example. After titration of acidity or total copper is completed, discharge pump 1
4 is operated for a certain period of time to discharge the liquid inside the analysis cell 9.

(iii) 過酸化水素水濃度の滴定 予め上記(1)−(i)と同じ容量で分析セル9
の共洗いを行なつてから(1)−(ii)、(iii)の容量
に従つて試料希釈液を分析セル9内に収容
する。次いで試薬としてKMnO4を使用し
て滴定を行なう。滴定終了後排出ポンプ1
4を一定時間作動して分析セル9内の内容
液の排出を行なう。
(iii) Titration of hydrogen peroxide concentration Prepare analysis cell 9 with the same volume as in (1)-(i) above.
After performing co-washing, the sample dilution liquids are accommodated in the analysis cell 9 according to the volumes (1)-(ii) and (iii). Titration is then carried out using KMnO 4 as reagent. Discharge pump 1 after titration
4 is operated for a certain period of time to discharge the liquid inside the analysis cell 9.

エツチング液の濃度調節動作、試料濃度の表
示など (1) 滴定の終点における分析用試薬の滴定量を
読み取り、硫酸濃度など試料の濃度を演算す
る。
Etching solution concentration adjustment operation, sample concentration display, etc. (1) Read the titration amount of the analytical reagent at the end point of titration and calculate the sample concentration such as sulfuric acid concentration.

(2) 得られた過酸化水素水濃度又は硫酸濃度が
予め設定された濃度より低いとき、設定濃度
と測定濃度との差を時間に変換し、その時間
だけ前記注入ポンプP1又はP2を作動させて
硫酸又は過酸化水素水を補充するほか、前記
したような測定濃度の表示などが行われる。
(2) When the obtained hydrogen peroxide concentration or sulfuric acid concentration is lower than the preset concentration, convert the difference between the set concentration and the measured concentration into time, and operate the injection pump P 1 or P 2 for that time. In addition to replenishing sulfuric acid or hydrogen peroxide when activated, it also displays the measured concentration as described above.

ここでPH測定電極11、酸化還元電位測定電極
12と制御機構Cと滴定ビユレツト7,8の関連
について補足説明すると、滴定操作による試料の
物性変化が前記各電極により刻々制御機構Cに出
力されるが、該制御機構Cは試薬滴定量に対する
前記物性変化の速度の検出と、これによる滴定の
終点の検出を行い、該終点の記憶操作を行うと共
に、前記物性変化の大、小に対応して試薬滴定速
度をそれぞれ小、大に調節し、さらに予め設定さ
れたPH又は酸化環元電位に達したときに前記滴定
ビユレツト7,8の作動を停止するようになつて
いる。
Here, to provide a supplementary explanation of the relationship between the PH measuring electrode 11, the redox potential measuring electrode 12, the control mechanism C, and the titration modules 7 and 8, changes in the physical properties of the sample due to the titration operation are momentarily output to the control mechanism C by each of the electrodes. However, the control mechanism C detects the rate of change in the physical properties with respect to the reagent titration amount, detects the end point of the titration based on this, performs a memorization operation for the end point, and also performs an operation corresponding to the magnitude or small change in the physical properties. The reagent titration rate is adjusted to be low or high, respectively, and the operation of the titration chambers 7 and 8 is stopped when a preset pH or oxidation ring potential is reached.

以上述べた動作は繰返して行われるが、前記循
環ポンプP3は以後の滴定分析により銅濃度が設
定濃度以下であるとの出力が出るまでは作動を継
続する。このように循環ポンプP3は測定濃度>
設定濃度ではON、(作動)となり、測定濃度≦
設定濃度ではOFFとなるようなON−OFF作動を
する。
The above-described operations are repeated, and the circulation pump P3 continues to operate until the subsequent titration analysis outputs that the copper concentration is below the set concentration. In this way, circulation pump P 3 measures concentration>
At the set concentration, it becomes ON (activated), and when the measured concentration ≦
It performs ON-OFF operation such that it turns OFF at the set concentration.

なお、上記実施例の自動滴定分析装置はエツチ
ング液の濃度調節機構を兼備したものであつた
が、これを省略してもよい。
Although the automatic titration analyzer of the above embodiment was equipped with an etching solution concentration adjustment mechanism, this may be omitted.

上記実施例の変形例として、試料貯留槽4から
の溢流函を溢流函2に流入させるようにしたも
の、エアポンプ13の代わりに撹拌羽根付の撹拌
機を使用したもの、分析セル9内の容液をその自
重により排出するようにし排出ポンプ14を省略
したもの、排出ポンプ14の吐出側を分析セル9
内に開口して分析セル9の洗浄又はその内容液の
撹拌を行うようにしたもの、前記サンプリングビ
ユレツト3、滴定ビユレツト7,8にこれらの接
液部を洗浄するための洗浄液供給管を連絡したも
の、前記サンプリング機構S、滴定機構T及び分
析機構Aを複数並列配備し、常時いずれかの分析
セル9において分析操作が行われるようにしたも
のなどが可能であり、試料液が高粘度の場合はサ
ンプリングビユレツト3の代わりにギアポンプを
使用するとよい。
As a modification of the above embodiment, the overflow box from the sample storage tank 4 is made to flow into the overflow box 2, the air pump 13 is replaced by a stirrer with stirring blades, the analysis cell 9 is The discharge pump 14 is omitted, and the discharge side of the discharge pump 14 is connected to the analysis cell 9.
A cleaning liquid supply pipe is connected to the sampling chamber 3 and the titration chamber 7, 8 to clean the parts in contact with the liquid. It is also possible to arrange a plurality of sampling mechanisms S, titration mechanisms T, and analysis mechanisms A in parallel, so that analysis operations are always performed in one of the analysis cells 9. In this case, it is recommended to use a gear pump instead of the sampling chamber 3.

なお、前記エアポンプ13の吐出側には炭酸ガ
ス除去用のソーダライム管が接続されているが、
これは空気を分析セル9の内容液に対し化学的に
不活性なガスにするためのものであり、炭酸ガス
を除去した空気の代わりにN2ガスなどの不活性
ガスが使用でき、また、前記内容液の種類によつ
ては直接空気を供給して撹拌することもできる。
Note that a soda lime pipe for removing carbon dioxide gas is connected to the discharge side of the air pump 13;
This is to make air a gas that is chemically inert to the liquid contained in the analysis cell 9, and inert gas such as N2 gas can be used instead of air from which carbon dioxide has been removed. Depending on the type of the content liquid, air may be directly supplied for stirring.

本発明の装置は、試料の物性すなわち物理的性
質又は化学的性質が、試薬の滴定により変化する
ものであれば、いかなる滴定分析法でも適用する
ことができ、化学反応装置の運転管理、化学薬品
など任意の薬剤、原材料あるいは補助材料の供給
量の管理、種々の産業分野における中間製品又は
最終製品の品質管理、産業用水・産業廃水の水質
管理などにおける分析操作の合理化に極めて有効
に利用することができる。
The device of the present invention can be applied to any titration analysis method as long as the physical properties or chemical properties of the sample change by titration of a reagent. It can be used extremely effectively for controlling the supply amount of any drug, raw material, or auxiliary material, controlling the quality of intermediate or final products in various industrial fields, and streamlining analytical operations in water quality control of industrial water and industrial wastewater. I can do it.

〔発明の効果〕〔Effect of the invention〕

本発明は、分析用試料の所定量をサンプリング
ビユレツトで採取して分析セルに供給するサンプ
リング機構と、該分析セルに試料の物性変化を電
気量に変換して出力する酸化還元電位測定電極及
びPH測定電極並びに試料と試薬を撹拌混合し排出
する撹拌排出部材を備えた分析機構と、前記分析
セルに酸化還元試薬及びアルカリ試薬の試薬の所
定量をそれぞれ滴定ビユレツトで滴定する滴定機
構とを装備し、前記サンプリング機構、分析機構
及び滴定機構の各機構をそれぞれ各別に所定時間
所定順序に作動するように起動、停止操作を指示
する制御機構を備えたことにより、精度の良い測
定値を殆ど無人で迅速にかつ繰り返し連続して得
ることが可能となり、フイードバツク制御ができ
て試料発生源(例えばエツチング工程)の工程管
理・品質管理も著しく合理化され大幅な省力化、
試料発生源装置の維持管理の簡便化、製品品質の
改良と安定化などが達成できる効果がある。
The present invention consists of a sampling mechanism that collects a predetermined amount of a sample for analysis using a sampling chamber and supplies the sample to an analysis cell; Equipped with an analysis mechanism equipped with a PH measuring electrode and a stirring/discharging member for stirring and discharging the sample and reagent, and a titration mechanism that titrates predetermined amounts of a redox reagent and an alkaline reagent into the analysis cell using titration bottles. By providing a control mechanism that instructs the sampling mechanism, analysis mechanism, and titration mechanism to start and stop each mechanism individually for a prescribed time and in a prescribed order, highly accurate measurement values can be obtained almost unattended. It is now possible to obtain samples quickly and repeatedly in a continuous manner, enabling feedback control and significantly streamlining process and quality control of the sample source (e.g. etching process), resulting in significant labor savings.
This has the effect of simplifying the maintenance and management of the sample source device and improving and stabilizing product quality.

【図面の簡単な説明】[Brief explanation of drawings]

図面は本発明の実施例のフローシートである。 1……循環ポンプ、2……溢流函、3……サン
プリングビユレツト、4……試料貯留槽、5……
アルカリ試薬タンク、6……過マンガン酸カリ試
薬タンク、7,8……滴定ビユレツト、9……分
析セル、10……レベルスイツチ、11……PH測
定電極、12……酸化還元電位測定電極、13…
…エアポンプ、14……排出ポンプ、15……制
御部、16……供給管、L1……洗浄レベル、L2
……希釈レベル、P1,P2……注入ポンプ、P3
…循環ポンプ、SV1〜SV5……電磁弁。
The drawing is a flow sheet of an embodiment of the present invention. 1...Circulation pump, 2...Overflow box, 3...Sampling barrel, 4...Sample storage tank, 5...
Alkaline reagent tank, 6...Potassium permanganate reagent tank, 7, 8...Titration bottle, 9...Analysis cell, 10...Level switch, 11...PH measurement electrode, 12...Redox potential measurement electrode, 13...
... Air pump, 14 ... Discharge pump, 15 ... Control section, 16 ... Supply pipe, L 1 ... Cleaning level, L 2
…Dilution level, P 1 , P 2 … Infusion pump, P 3
...Circulation pump, SV 1 to SV 5 ... Solenoid valve.

Claims (1)

【特許請求の範囲】 1 分析用試料の所定量をサンプリングビユレツ
トで採取して分析セルに供給するサンプリング機
構と、該分析セルに試料の物性変化を電気量に変
換して出力する酸化環元電位測定電極及びPH測定
電極並びに試料と試薬を撹拌混合し排出する撹拌
排出部材を備えた分析機構と、前記分析セルに酸
化環元試薬及びアルカリ試薬の試薬の所定量をそ
れぞれ滴定ビユレツトで滴定する滴定機構とを装
備し、前記サンプリング機構、分析機構及び滴定
機構の各機構をそれぞれ各別に所定時間所定順序
に作動するように起動、停止操作を指示する制御
機構を備えたことを特徴とする自動滴定分析装
置。 2 前記サンプリング機構が、前記試料の試料貯
留槽と溢流函とを循環ポンプを含む管路を介して
接続された試料循環系を持ち、前記溢流函に前記
試料を所定量吸引して排出するサンプリングビユ
レツトを備えたものである特許請求の範囲第1項
記載の装置。 3 前記分析機構が、前記分析セルの接液部を洗
浄するための洗浄液供給手段を備えたものである
特許請求の範囲第1項記載の装置。 4 前記サンプリングビユレツト及び前記滴定ビ
ユレツトが、逆止弁を備えたピストンポンプであ
る特許請求の範囲第1項記載の装置。
[Scope of Claims] 1. A sampling mechanism that collects a predetermined amount of a sample for analysis using a sampling chamber and supplies the sample to an analysis cell, and an oxidation ring element that converts changes in the physical properties of the sample into electrical quantities and outputs them to the analysis cell. An analysis mechanism equipped with a potential measuring electrode, a pH measuring electrode, and a stirring/discharging member for stirring and discharging a sample and a reagent, and a titration bottle for titrating predetermined amounts of an oxidation ring source reagent and an alkaline reagent into the analysis cell, respectively. an automatic titration mechanism, and a control mechanism for instructing start and stop operations to operate each of the sampling mechanism, analysis mechanism, and titration mechanism separately for a predetermined time and in a predetermined order. Titration analyzer. 2. The sampling mechanism has a sample circulation system in which a sample storage tank for the sample and an overflow box are connected via a pipe line including a circulation pump, and sucks a predetermined amount of the sample into the overflow box and discharges the sample. 2. The apparatus according to claim 1, further comprising a sampling chamber. 3. The apparatus according to claim 1, wherein the analysis mechanism is provided with a cleaning liquid supply means for cleaning the liquid contact part of the analysis cell. 4. The apparatus of claim 1, wherein the sampling chamber and the titration chamber are piston pumps equipped with check valves.
JP4448682A 1982-03-23 1982-03-23 Analyzing apparatus of automatic titration Granted JPS58162852A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4448682A JPS58162852A (en) 1982-03-23 1982-03-23 Analyzing apparatus of automatic titration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4448682A JPS58162852A (en) 1982-03-23 1982-03-23 Analyzing apparatus of automatic titration

Publications (2)

Publication Number Publication Date
JPS58162852A JPS58162852A (en) 1983-09-27
JPH0365489B2 true JPH0365489B2 (en) 1991-10-14

Family

ID=12692869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4448682A Granted JPS58162852A (en) 1982-03-23 1982-03-23 Analyzing apparatus of automatic titration

Country Status (1)

Country Link
JP (1) JPS58162852A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0433462A4 (en) * 1989-06-16 1992-05-06 Mitsui Toatsu Chemicals, Inc. Automatic analyzing method and device
KR101242877B1 (en) 2010-12-28 2013-03-12 주식회사 포스코 On-line analysis emthod and device for mixed acid usning spectorscopy and titration
WO2013077261A1 (en) * 2011-11-22 2013-05-30 シャープ株式会社 Concentration control method and concentration control device
CN105699615B (en) * 2016-02-01 2017-11-21 深圳市清时捷科技有限公司 Water quality on-line selection detection method and equipment
CN107462664A (en) * 2016-06-02 2017-12-12 镇江腾龙智能科技有限公司 Streaming potential titrator

Also Published As

Publication number Publication date
JPS58162852A (en) 1983-09-27

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