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JPH0368109B2 - - Google Patents
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JPH0368109B2 - - Google Patents

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Publication number
JPH0368109B2
JPH0368109B2 JP59179265A JP17926584A JPH0368109B2 JP H0368109 B2 JPH0368109 B2 JP H0368109B2 JP 59179265 A JP59179265 A JP 59179265A JP 17926584 A JP17926584 A JP 17926584A JP H0368109 B2 JPH0368109 B2 JP H0368109B2
Authority
JP
Japan
Prior art keywords
steel
gas
nitrogen
internal
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59179265A
Other languages
Japanese (ja)
Other versions
JPS6160874A (en
Inventor
Imao Tamura
Bunji Kondo
Koichi Kuwabara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OYO KAGAKU KENKYUSHO
Original Assignee
OYO KAGAKU KENKYUSHO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OYO KAGAKU KENKYUSHO filed Critical OYO KAGAKU KENKYUSHO
Priority to JP17926584A priority Critical patent/JPS6160874A/en
Publication of JPS6160874A publication Critical patent/JPS6160874A/en
Publication of JPH0368109B2 publication Critical patent/JPH0368109B2/ja
Granted legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/24Nitriding
    • C23C8/26Nitriding of ferrous surfaces
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C23C8/38Treatment of ferrous surfaces

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Description

【発明の詳細な説明】 本発明は硬度の優れた表面硬化鋼に関する。更
に詳しくは、鉄の他に更に窒化物生成金属元素を
含有する鋼の表面から内部に向けて高濃度の窒素
が侵入拡散した内部窒化層を有し、該内部窒化層
における鋼表面から内部側へ向けての窒素濃度減
少勾配が小さく、即ち内部窒化層内の窒素濃度分
布が実質的に均一であつて、該内部窒化層の硬さ
の優れた表面硬化鋼に関する。本発明はまた、該
表面硬化鋼を得るための鋼の表面硬化法に関す
る。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface hardened steel with excellent hardness. More specifically, the steel contains a nitride-forming metallic element in addition to iron, and has an internal nitrided layer in which a high concentration of nitrogen penetrates and diffuses from the surface of the steel toward the inside, The present invention relates to a surface hardened steel having a small nitrogen concentration decreasing gradient toward the inner nitrided layer, that is, the nitrogen concentration distribution in the inner nitrided layer is substantially uniform, and the inner nitrided layer has excellent hardness. The invention also relates to a method for surface hardening of steel to obtain said surface hardened steel.

従来、鋼を窒化処理することにより表面硬化し
た鋼については知られている。窒化処理について
は溶融青酸塩浴中で鋼を処理する液体窒化法とア
ンモニアガス雰囲気下で鋼を処理するガス窒化法
が知られている。〔荒木透ら編、鉄鋼工学講座8、
鋼の熱処理技術、朝倉書店(1972年)、173〜179
頁、及び田村今男ら、鉄鋼材料学、朝倉書店
(1981年)、219〜228頁〕。液体窒化法としては液
体加圧窒化やタフトライド処理があり、ガス窒化
法としては、一段窒化法、二段窒化法、ガス加圧
窒化法などの技術がある。窒化法は例えば、焼入
れ硬化することのできなかつたステンレス鋼もそ
の表面を硬化することができるというような利点
を有するので種々研究が行なわれている。上記の
窒化法で得られる表面硬化鋼はいずれもその最表
面に数μm〜十数μmの厚さのいわゆる化合物層
(以後屡々“白層”と称し、主としてFe2〜3N層又
はFe4N、或いは両者の混合物からなる層)を有
し、その下層に窒素を固溶するいわゆる拡散層を
有するが、該化合物層は非常にもろく実用的でな
いので削り取るなどする必要がありそれに煩雑な
工程を要するという欠点がある。また該拡散層は
それに含まれる窒素の濃度分布が均一ではなく、
鋼の表面側から内部へ向かうにつれてその窒素濃
度が急激に低下しそれに比例して硬さも急激に低
下しており表面硬度としては十分なものが得られ
ていない。また、上記窒化法のうち、液体窒化法
では毒性の強いシアン化合物を主成分とする溶融
塩浴を用いるので万全の公害対策が必要である
し、ガス窒化法では窒化に長時間要するという欠
点がある。更に、上述のような従来の窒化法でス
テンレス鋼の表面硬化を行なうには、あらかじ
め、酸洗してステンレス鋼表面の強固な酸化被膜
を除去しなければならなかつた。例えば、工業的
にはステンレス鋼を弗硝酸で洗浄した後高温アン
モニアガス雰囲気下で処理する方法が行なわれて
いるが、ステンレス鋼表面の強固な酸化被膜を除
去するのは容易でなく煩雑な工程を必要とすると
いう欠点があつた。そこで、有毒なシアン化合物
を使用せず、窒化に要する時間が比較的短く、且
つ他の鉄鋼材料同様に酸洗することなくステンレ
ス鋼を窒化する方法としてイオン窒化法がある。
イオン室化法はN2ガスとH2ガスの混合ガス雰囲
気下、所望の鋼を陰極とする一対の電極間に電圧
を連続的に印加し放電させることによりN2をイ
オン化し、電位差により窒素を鋼に侵入拡散させ
る方法である。イオン窒化法の原理を詳述すると
次のようである。密閉した容器にの電極を入
れ容器内を減圧し、300V〜1000Vの直流電圧を
かけると電極間にグロー放電が発生する。表面硬
化を施そうとする鋼製品を陰極と同極化し、窒素
及び水素との混合ガス雰囲気中で両極間に電圧を
加えると鋼製品の数百〜数mm手前で急激な電圧降
下が起こり、グロー放電中にあるN2ガスは陰極
近くでイオン化され、N+イオンは電位差により
陰極空間において高速に加速されて鋼表面に衝突
する。このとき、イオンの高い運動エネルギーの
大部分は熱エネルギーとなつて鋼を加熱し、同時
に窒素が浸透する。イオン窒化法によれば窒素ガ
スの分圧、電圧、混合ガス圧、温度及び時間の調
節により、第1図に示すような鋼表面上の白層の
生成を制御できるという特徴がある。しかしなが
ら、イオン窒化法では放電を続けるとN+イオン
が鋼にぶつかり続けるためその時に生じる熱エネ
ルギーで鋼の温度が上昇し続ける。一般的に窒化
温度が高いほど窒素の侵入拡散はするが窒素濃度
の高い均質な窒化物層を形成せず硬さも低くな
る。従つて窒素濃度の高い実質的に均質で硬さの
良好な表面硬化層を得るためには温度が上がりす
ぎないように調節する必要がある。従来のイオン
窒化法ではこの温度調節を行うために、電極に印
加する直流出力、具体的には電圧を増減すること
により窒素イオンの運動エネルギーひいては窒素
イオンのもたらす熱エネルギーを調節して鋼の温
度を制御していた。しかしながら、上述のような
温度制御の仕方では窒素イオン雰囲気中の窒素イ
オンエネルギーが印加電圧の増減に比例して増減
するために不安定であり、従つて鋼の温度を一定
に保持しても均質で硬度の良好な表面硬化層を得
るのは困難であつた。
BACKGROUND ART Conventionally, steel whose surface is hardened by nitriding the steel is known. Regarding the nitriding treatment, there are known liquid nitriding methods in which steel is treated in a molten cyanide bath, and gas nitriding methods in which steel is treated in an ammonia gas atmosphere. [Edited by Toru Araki, Steel Engineering Course 8,
Heat treatment technology for steel, Asakura Shoten (1972), 173-179
and Imao Tamura et al., Steel Materials Science, Asakura Shoten (1981), pp. 219-228]. Liquid nitriding methods include liquid pressure nitriding and tuftride treatment, and gas nitriding methods include single-stage nitriding, two-stage nitriding, and gas pressure nitriding. The nitriding method has the advantage of being able to harden the surface of stainless steel, which cannot be hardened by quenching, and various studies are being conducted on it. All of the surface-hardened steels obtained by the above nitriding method have a so-called compound layer (hereinafter often referred to as the "white layer") with a thickness of several μm to several tens of μm on the outermost surface, mainly an Fe 2 to 3 N layer or an Fe 4 The compound layer has a so-called diffusion layer that solidly dissolves nitrogen (N, or a mixture of both), but the compound layer is very brittle and impractical, so it needs to be scraped off, and it requires a complicated process. The disadvantage is that it requires In addition, the concentration distribution of nitrogen contained in the diffusion layer is not uniform,
The nitrogen concentration rapidly decreases from the surface side toward the inside of the steel, and the hardness also decreases rapidly in proportion to this, making it impossible to obtain a sufficient surface hardness. Furthermore, among the above nitriding methods, the liquid nitriding method uses a molten salt bath containing highly toxic cyanide as the main component, so thorough pollution countermeasures are required, and the gas nitriding method has the disadvantage of requiring a long time for nitriding. be. Furthermore, in order to harden the surface of stainless steel using the conventional nitriding method as described above, it is necessary to remove the strong oxide film on the surface of the stainless steel by pickling in advance. For example, industrially, stainless steel is cleaned with fluoronitric acid and then treated in a high-temperature ammonia gas atmosphere, but it is not easy to remove the strong oxide film on the surface of stainless steel and is a complicated process. The disadvantage was that it required . Therefore, there is an ion nitriding method as a method for nitriding stainless steel without using toxic cyanide compounds, in a relatively short time required for nitriding, and without pickling like other steel materials.
The ionization chamber method ionizes N 2 by continuously applying a voltage between a pair of electrodes with a desired steel as the cathode in a mixed gas atmosphere of N 2 gas and H 2 gas to cause a discharge. This is a method of infiltrating and diffusing steel. The principle of the ion nitriding method is explained in detail as follows. When electrodes are placed in a sealed container, the pressure inside the container is reduced, and a DC voltage of 300V to 1000V is applied, a glow discharge occurs between the electrodes. When the steel product to be surface hardened is made the same polarity as the cathode and a voltage is applied between the two electrodes in a mixed gas atmosphere of nitrogen and hydrogen, a sudden voltage drop occurs several hundred to several millimeters in front of the steel product. The N2 gas in the glow discharge is ionized near the cathode, and the N + ions are accelerated at high speed in the cathode space due to the potential difference and collide with the steel surface. At this time, most of the high kinetic energy of the ions becomes thermal energy and heats the steel, and at the same time nitrogen permeates. The ion nitriding method is characterized in that the formation of a white layer on the steel surface as shown in FIG. 1 can be controlled by adjusting the nitrogen gas partial pressure, voltage, mixed gas pressure, temperature and time. However, in the ion nitriding method, as the discharge continues, N + ions continue to collide with the steel, and the thermal energy generated at that time causes the temperature of the steel to continue to rise. Generally, the higher the nitriding temperature, the more nitrogen penetrates and diffuses, but a homogeneous nitride layer with a high nitrogen concentration is not formed and the hardness becomes lower. Therefore, in order to obtain a substantially homogeneous hardened surface layer with a high nitrogen concentration and good hardness, it is necessary to adjust the temperature so that it does not rise too much. In the conventional ion nitriding method, in order to adjust the temperature, the temperature of the steel is adjusted by adjusting the kinetic energy of the nitrogen ions and the thermal energy provided by the nitrogen ions by increasing or decreasing the DC output, specifically the voltage, applied to the electrode. was under control. However, with the temperature control method described above, the nitrogen ion energy in the nitrogen ion atmosphere increases or decreases in proportion to the increase or decrease of the applied voltage, making it unstable. It was difficult to obtain a hardened surface layer with good hardness.

本発明者らは、窒素イオン雰囲気中の窒素イオ
ンエネルギーと鋼の窒化処理温度を同時に制御し
て均質で硬度の優れた表面硬化層を有する鋼を得
るため鋭意研究を行なつた結果、電圧は変化させ
ないで実質的に一定電圧を間欠的に電極に印加す
ることにより、窒素イオンエネルギーと鋼の温度
を同時に調節してそれぞれ実質的に一定レベルに
保ちながら窒化処理した鋼が、従来の窒化処理法
で得られる鋼の窒化層とは異なつた窒化層を表面
硬化層として有し、その層が従来のものに比べて
硬く強固であることを意外にも知見した。即ち、
従来の窒化法により処理して得られた鋼は前述の
ようにその最表面層にもろい実用に耐えない化合
物層を有し、その下層に実用上の表面硬化層であ
る窒素の拡散層を有するが、その最表層側の窒素
濃度は高々0.1%程度で該拡散層において鋼の表
面側から内部側へ向かうにつれて窒素濃度が急激
に小さくなつていき、それに伴つて、硬さも低下
する。これに対し、上記のように実質的に一定の
窒素イオンエネルギーと実質的に一定の温度条件
下で窒化処理を行なつて得られた鋼は脆い化合物
層(白層)がなく、最表層の窒素濃度が0.1〜10
重量%であり、鋼の表面側から内部側へ向けての
窒素濃度減少勾配が小さく即ち窒化層全体におけ
る窒素濃度の差が少なく、従つて硬さも鋼の表面
からの深さが深くなるにつれて減少することもな
くほぼ一定である窒化層を有する。またその硬さ
も従来のものに比べて優れている。本発明はこれ
らの知見に基づき、完成するに致つたものであ
る。
The present inventors conducted intensive research to obtain a steel with a homogeneous hardened surface layer with excellent hardness by simultaneously controlling the nitrogen ion energy in the nitrogen ion atmosphere and the nitriding temperature of the steel.As a result, the voltage By intermittently applying a substantially constant voltage to the electrode without any change, the nitrogen ion energy and the temperature of the steel are simultaneously adjusted and kept at substantially constant levels. It was surprisingly discovered that the steel has a nitrided layer as a surface hardening layer, which is different from the nitrided layer of steel obtained by the method, and that this layer is harder and stronger than conventional ones. That is,
As mentioned above, steel obtained by conventional nitriding has a compound layer on its outermost layer that is too brittle to be practical, and below that a nitrogen diffusion layer that is a practical surface hardening layer. However, the nitrogen concentration on the outermost layer side is about 0.1% at most, and the nitrogen concentration decreases rapidly from the surface side to the inside of the steel in the diffusion layer, and the hardness also decreases accordingly. On the other hand, steel obtained by nitriding under substantially constant nitrogen ion energy and substantially constant temperature conditions as described above does not have a brittle compound layer (white layer), and the outermost layer is Nitrogen concentration is 0.1-10
% by weight, and the decreasing gradient of nitrogen concentration from the surface side to the inside of the steel is small, that is, there is little difference in nitrogen concentration throughout the nitrided layer, and therefore the hardness also decreases as the depth from the surface of the steel increases. It has a nitrided layer that is almost constant without any oxidation. Also, its hardness is superior to conventional ones. The present invention has been completed based on these findings.

すなわち、本発明の1つの目的は表面窒素濃度
が高く、且つ表面から内部へ向けての窒素濃度減
少勾配の小さい硬さの優れた窒化層を表面硬化層
として有する表面硬化鋼を提供することにある。
That is, one object of the present invention is to provide a surface hardened steel having an excellent hardness nitrided layer with a high surface nitrogen concentration and a small nitrogen concentration decreasing gradient from the surface to the inside as a surface hardening layer. be.

また、本発明のもう1つの目的は表面窒素濃度
が高く、且つ表面から内部へ向けての窒素濃度減
少勾配の小さい硬さの優れた窒化層を表面硬化層
として有する表面硬化鋼を得るための鋼の表面硬
化法を提供することにある。
Another object of the present invention is to obtain a surface hardened steel having an excellent hardness nitrided layer with a high surface nitrogen concentration and a small nitrogen concentration decreasing gradient from the surface to the inside. The object of the present invention is to provide a method for surface hardening steel.

本発明によれば、鉄の他に更に少なくとも1種
の窒化物生成金属元素を含有する鋼からなり、該
鋼の表面から内部に向けて窒素が侵入拡散した内
部窒化層を有する表面硬化鋼にして、該内部窒化
層の厚さが0.01mm以上であり、鋼の最表面部分の
窒素濃度が0.1〜10重量%であり、内部窒化層の
窒素濃度が鋼の表面側から内部側に向かうにつれ
て減少し、該内部窒化層における鋼の表面からの
μm単位の厚さ(t)と窒素濃度(c)が次式: |Δc/Δt|≦0.5(%/μm) () を満足することを特徴とする表面硬化鋼が提供さ
れる。
According to the present invention, the surface hardened steel is made of steel containing at least one nitride-forming metal element in addition to iron, and has an internal nitrided layer in which nitrogen penetrates and diffuses from the surface of the steel toward the inside. The thickness of the internal nitrided layer is 0.01 mm or more, the nitrogen concentration at the outermost surface of the steel is 0.1 to 10% by weight, and the nitrogen concentration of the internal nitrided layer increases from the surface side to the inside of the steel. The thickness (t) in μm from the surface of the steel in the internal nitrided layer and the nitrogen concentration (c) satisfy the following formula: |Δc/Δt|≦0.5(%/μm) () A surface hardened steel is provided.

本発明の表面硬化鋼は、従来の窒化法で処理し
て得られる鋼にみられるように脆くて実用に耐え
ない化合物層がなく、高濃度の窒素が侵入拡散し
且つ鋼の表面側から内部側に向けての窒素濃度減
少勾配が非常に小さい内部窒化層を有する。本発
明の表面硬化鋼の最表面部分における窒素濃度
は、該最表面部の内部窒化層の重量に対して0.1
〜10重量%、好ましくは3〜8重量%である。上
記式()において|Δc/Δt|は窒化層中における 鋼の表面側から内部側へ向けての窒素濃度減少勾
配の絶対値を表し、本発明の表面硬化鋼では該窒
素濃度減少勾配が内部窒化層1μm厚さ当り0.5%
以下である。また、本発明において内部窒化層の
厚みが100μmを越える場合、内部窒化層の鋼の
表面から最も深い部分における窒素濃度は鋼の最
表面部分の窒素濃度の50%未満になることはな
い。本発明の表面硬化鋼の内部窒化層の厚さは実
用上の点から少くとも0.01mmは必要である。窒化
処理にかかるコストと実用上十分な厚さの硬化層
を得るという点から、内部窒化層の厚さは好まし
くは0.01mm〜0.5mm、更に好ましくは0.05mm〜0.2
mm、特に好ましくは0.1mm〜0.15mmである。
The surface-hardened steel of the present invention does not have a compound layer that is brittle and impractical as seen in steels obtained by conventional nitriding processes, and a high concentration of nitrogen penetrates and diffuses into the steel from the surface side. It has an internal nitrided layer with a very small lateral nitrogen concentration decreasing gradient. The nitrogen concentration at the outermost surface of the surface hardened steel of the present invention is 0.1 with respect to the weight of the internal nitrided layer at the outermost surface.
-10% by weight, preferably 3-8% by weight. In the above formula (), |Δc/Δt| represents the absolute value of the nitrogen concentration decreasing gradient from the surface side of the steel toward the inside in the nitrided layer, and in the surface hardened steel of the present invention, the nitrogen concentration decreasing gradient is 0.5% per 1μm thickness of nitride layer
It is as follows. Further, in the present invention, when the thickness of the internal nitrided layer exceeds 100 μm, the nitrogen concentration in the deepest part of the internal nitrided layer from the surface of the steel is never less than 50% of the nitrogen concentration in the outermost part of the steel. The thickness of the internal nitrided layer of the surface hardened steel of the present invention is required to be at least 0.01 mm from a practical point of view. In view of the cost of nitriding treatment and obtaining a hardened layer with a practically sufficient thickness, the thickness of the internal nitrided layer is preferably 0.01 mm to 0.5 mm, more preferably 0.05 mm to 0.2 mm.
mm, particularly preferably 0.1 mm to 0.15 mm.

本発明の表面硬化鋼は、窒化物生成金属元素と
して鉄以外にクロム(Cr)、アルミニウム(Al)、
モリブテン(Mo)、チタン(Ti)、タングステン
(W)、ホウ素(B)、バナジウム(V)、マンガン
(Mn)、ジルコニウム(Zr)、ニオブ(Nb)、タ
ンタル(Ta)及びケイ素(Si)等の中から選ば
れる少なくとも1種の元素を含む。本発明の表面
硬化鋼の内部窒化層の硬さはこれらの金属元素の
窒化物が生成することにより与えられる。このよ
うな金属元素を少くとも1種含有する鋼として
は、例えば、オーステナイト系、マルテンサイト
系及びフエライト系などのステンレス鋼(JIS
G4303)、耐熱鋼(JIS G4311)、マルエージング
鋼〔田村今男ら、鉄鋼材料学、朝倉書店(1981
年)、135頁〕、高速度工具鋼(JIS G4403)、耐蝕
耐熱超合金(JIS G4901)及び合金工具鋼(JIS
G4404)等が挙げられる。
In addition to iron, the surface hardened steel of the present invention includes chromium (Cr), aluminum (Al),
Molybdenum (Mo), titanium (Ti), tungsten (W), boron (B), vanadium (V), manganese (Mn), zirconium (Zr), niobium (Nb), tantalum (Ta), silicon (Si), etc. Contains at least one element selected from the following. The hardness of the internal nitrided layer of the surface hardened steel of the present invention is provided by the formation of nitrides of these metal elements. Examples of steels containing at least one metal element include austenitic, martensitic, and ferrite stainless steels (JIS
G4303), heat-resistant steel (JIS G4311), maraging steel [Imao Tamura et al., Steel Materials Science, Asakura Shoten (1981)
), 135 pages], high-speed tool steel (JIS G4403), corrosion-resistant and heat-resistant superalloy (JIS G4901), and alloy tool steel (JIS
G4404) etc.

本発明の表面硬化鋼の内部窒化層は鋼の断面を
観察した時にその窒素の侵入拡散していない母材
との視覚上の違いにより容易に識別できるので、
該内部窒化層の厚さは、表面硬化鋼をその表面に
垂直に切断して得られる断面の内部窒化層の部分
を光学顕微鏡観察下に直接計測することができ
る。本発明において表面硬化鋼の最表面部分にお
ける窒素濃度とは、表面硬化鋼の表面から5μm
の深さ削り取り、削り取つた鋼の表層部分の重さ
に対する該部分に含まれる窒素量の割合(重量
%)をいい、削り取つた鋼の表層部分中の窒素量
は日本工業規格JIS G1228に規定されている鉄及
び鋼中の窒素定量法に従つて測定することができ
る。また、本発明において内部窒化層における窒
素濃度減少勾配は、内部窒化層の任意の異なる深
さにおいてその深さを中心に5μm幅の厚さの層
を削り取り、その層中の窒素濃度を上記の窒素含
有量測定法に従つて測定して表面からの層の深さ
と窒素濃度の関係をグラフ上に表わし、グラフか
ら読みとられる鋼の表面から内部に向けての内部
窒化層中の単位厚さ(μm)当りの窒素濃度の減
少率(%)の絶対値で表わす。
The internal nitrided layer of the surface-hardened steel of the present invention can be easily identified when observing the cross section of the steel due to its visual difference from the base material in which nitrogen has not penetrated and diffused.
The thickness of the internal nitrided layer can be directly measured by observing the internal nitrided layer in a cross section obtained by cutting surface hardened steel perpendicular to its surface under an optical microscope. In the present invention, the nitrogen concentration at the outermost surface of surface hardened steel is 5 μm from the surface of surface hardened steel.
It refers to the ratio (wt%) of the amount of nitrogen contained in the surface layer of the scraped steel to the weight of the surface layer of the scraped steel. It can be measured according to the prescribed method for determining nitrogen in iron and steel. In addition, in the present invention, the nitrogen concentration decreasing gradient in the internal nitrided layer can be determined by scraping off a layer with a thickness of 5 μm around the arbitrary different depth of the internal nitrided layer, and reducing the nitrogen concentration in the layer to the above-mentioned value. The relationship between the depth of the layer from the surface and the nitrogen concentration is measured according to the nitrogen content measurement method, and the relationship between the depth of the layer from the surface and the nitrogen concentration is expressed on a graph, and the unit thickness in the internal nitrided layer from the surface of the steel toward the inside is read from the graph. It is expressed as the absolute value of the reduction rate (%) of nitrogen concentration per (μm).

尚、本発明の表面硬化鋼の内部窒化層内の窒素
濃度分布が従来のものに比べて非常に均一である
ということは本発明の表面硬化鋼の表面の任意の
場所の垂直断面をエレクトロン・プルーブ・マイ
クロ・アナライザー〔Electron Probe
Microanalyzer(EPMA)〕またはX線マイクロア
ナライザー〔X−ray Microanalyzer(XMA)〕
を用いる当業者において公知のX線発光分析によ
り測定することによつて簡単にわかる(第5図参
照)。
The fact that the nitrogen concentration distribution in the internal nitrided layer of the surface-hardened steel of the present invention is much more uniform than that of conventional ones means that when a vertical cross-section of any location on the surface of the surface-hardened steel of the present invention is Probe Micro Analyzer [Electron Probe]
Microanalyzer (EPMA)] or X-ray Microanalyzer (XMA)
This can be easily determined by measuring by X-ray emission spectrometry, which is known to those skilled in the art (see FIG. 5).

前述したように、本発明の表面硬化鋼は従来の
イオン窒化法と異なり、反応器内の放電を間欠的
に行なうことにより窒素イオンエネルギーと処理
温度を同時に一定に保つ方法で鋼を処理すること
により得ることができる。
As mentioned above, the surface-hardened steel of the present invention is different from the conventional ion nitriding method in that the steel is treated in a way that keeps the nitrogen ion energy and treatment temperature constant at the same time by intermittently performing electrical discharge in the reactor. It can be obtained by

即ち、更に本発明によれば、窒素イオン雰囲気
下において、鉄の他に少なくとも1種の窒化物生
成金属元素を含有する鋼の表面から窒素イオンを
侵入拡散させて該鋼の表面を硬化させる方法にし
て、陽極及び陰極を有する反応器中に鋼を該陰極
と接触せしめて同極化するように設置し、該反応
器中に窒素ガスを含有する混合ガスを導入し、該
陽極と該陰極間に間欠的に実質的に一定電圧を印
加して陽極と銅と同極化された陰極との間に間欠
的に放電を行なわしめることを特徴とする鋼の表
面硬化法が提供される。
That is, further according to the present invention, a method of hardening the surface of steel by penetrating and diffusing nitrogen ions from the surface of steel containing at least one nitride-forming metal element in addition to iron in a nitrogen ion atmosphere. The steel is placed in a reactor having an anode and a cathode so as to be in contact with the cathode so as to be homopolarized, and a gas mixture containing nitrogen gas is introduced into the reactor, and the anode and the cathode are A method for surface hardening steel is provided, which comprises intermittently applying a substantially constant voltage between the anode and the cathode homopolarized with copper to cause an electric discharge intermittently.

本発明の方法を実施するにおいて、まず、陽極
及び陰極の両電極を有する密閉可能な反応器中に
表面硬化処理しようとする鋼を陰極と同極化する
ように設置する。鋼を陰極と同極化する方法とし
ては、陰極を棚状としてその上に鋼を置いてもよ
いし、陰極から電気導伝性のワイヤーなどで鋼を
吊るすことによつて行なつてもよい。次に反応容
器を密閉した後、真空ポンプで反応容器中のガス
を排出し真空にした後、窒素ガスを含有する混合
ガスを導入する。混合ガスは窒素ガス以外に補助
ガスとして水素ガス、アルゴンガス、ヘリウムガ
ス及びネオンガスの中から選ばれる少なくとも1
種のガスを含有する。該混合ガス中の窒素ガス濃
度は0.1〜95容量%、好ましくは20〜50容量%で
ある。該混合ガス中の補助ガスとしては、上記水
素ガス、アルゴンガス、ヘリウムガス及びネオン
ガスをそれぞれ単独でも用いることができるし、
又組合せて用いることもできる。補助ガスを組合
せて用いる場合の各補助ガスの組成比については
いかなる場合でもよく限定的ではない。上記の補
助ガスの中では窒化が起こりやすい点で水素ガス
のみか、あるいは窒化が起こりやすく放電を起こ
しやすい点と安価に入手できる点から水素ガスと
アルゴンガスとの組合せを用いるのが好ましい。
該混合ガスは反応器中に0.01〜200mmHg、好まし
くは0.1〜20mmHgの圧力になるように導入する。
In carrying out the method of the present invention, first, the steel to be surface hardened is placed in a sealable reactor having both electrodes, an anode and a cathode, so that the steel is the same polarity as the cathode. To make the steel the same polarity as the cathode, the cathode can be made into a shelf and the steel can be placed on top of it, or the steel can be suspended from the cathode with an electrically conductive wire. . Next, after sealing the reaction container, the gas in the reaction container is exhausted using a vacuum pump to create a vacuum, and then a mixed gas containing nitrogen gas is introduced. In addition to nitrogen gas, the mixed gas contains at least one auxiliary gas selected from hydrogen gas, argon gas, helium gas, and neon gas.
Contains seed gas. The nitrogen gas concentration in the mixed gas is 0.1 to 95% by volume, preferably 20 to 50% by volume. As the auxiliary gas in the mixed gas, the above-mentioned hydrogen gas, argon gas, helium gas, and neon gas can be used alone, or
They can also be used in combination. When using a combination of auxiliary gases, the composition ratio of each auxiliary gas may be in any case and is not limited. Among the above-mentioned auxiliary gases, it is preferable to use only hydrogen gas because nitridation is likely to occur, or a combination of hydrogen gas and argon gas because nitridation is likely to occur, discharge is likely to occur, and hydrogen gas and argon gas are available at low cost.
The mixed gas is introduced into the reactor at a pressure of 0.01 to 200 mmHg, preferably 0.1 to 20 mmHg.

次に、反応器中の陽極と陰極間に間欠的に実質
的に一定電圧を印加して、陽極と鋼と同極化され
た陰極との間に間欠的に放電を行なわしめる。本
発明においては印加電圧を実質的に一定にするこ
とが必須である。印加する電圧は直流電圧で200
〜1200V、好ましくは300〜600Vである。本発明
の方法において間欠的に一定レベルの電圧印加を
行なう時は、自動制御により容易に行なえる点か
ら、一定時間の電圧印加を一定時間の間隔を置い
て行なうことが好ましい。その際に、電圧印加と
それに続く電圧印加休止を一周期とした場合に、
電圧印加の時間の該一周期の時間に対する割合
(以下“トリガー率”と略する)が、温度が上昇
しすぎないようにする目的から、約70%を超えな
いように行なう。1回の電圧印加時間は鋼の材
質、形状、大きさにより異なるが、温度が上昇し
すぎないようにするためには一般的には約10m秒
以下が望ましい。電圧印加時間の下限としては反
応器中の放電により得られる窒素イオンエネルギ
ーを必要なレベルで実質的に維持できるのであれ
ば、瞬間的、例えば0.1m秒以下の電圧印加時間
で電圧印加即ち放電を繰返すことも可能であるの
で限定的ではない。実用的な見地からは3〜5m
秒が好ましい。また電圧印加休止時間は、実質的
に一定の必要レベルの窒素イオンエネルギーが維
持できる範囲で延ばすことができる。従つて、上
記トリガー率の下限も実質的に一定の必要レベル
の窒素イオンエネルギーを維持できる範囲で小さ
く設定することができる。本発明の方法において
は、鋼の温度が200〜1200℃、好ましくは400〜
1000℃の範囲内の実質的に一定の温度を保持する
ように放電を行なうことが好ましい。上記温度
は、放電により発生する窒素イオンが鋼に衝突す
る際に得られる熱エネルギーにより達成され、電
圧印加のトリガー率を調節することによつて実質
的に一定の温度に保つことができる。但し、表面
硬化を施こそうとする鋼の材質、形状、大きさ、
や所望の厚みと硬さの内部窒化層を得るために必
要なレベルの実質的に一定の窒素イオンエネルギ
ーを維持するに必要な実質的に一定の電圧と該電
圧印加のトリガー率では十分なレベルの一定温度
が得られない場合は補助の加熱器で反応器を加熱
して鋼の温度を調節することができる。鋼の温度
は反応器内に熱電対を入れることにより測定でき
る。本発明の方法では上述のように反応器内のガ
ス圧力、電圧、温度条件等を設定することにより
反応器中の窒素イオンエネルギーを6×10-2
1.2×103eVの範囲に設定して窒化処理を行なう。
窒素イオンエネルギーはイオン密度測定用プロー
ブを用いる当業者において公知の方法で測定する
ことができる。
A substantially constant voltage is then applied intermittently between the anode and cathode in the reactor to cause an intermittent discharge between the anode and the cathode homopolarized to the steel. In the present invention, it is essential that the applied voltage be kept substantially constant. The voltage to be applied is DC voltage 200
~1200V, preferably 300-600V. When applying a voltage at a constant level intermittently in the method of the present invention, it is preferable to apply the voltage for a constant time at regular intervals, since this can be easily done by automatic control. At that time, if voltage application and subsequent voltage application pause are considered as one cycle,
In order to prevent the temperature from rising too much, the ratio of the voltage application time to the time of one cycle (hereinafter abbreviated as "trigger rate") is set not to exceed about 70%. The time for one voltage application varies depending on the material, shape, and size of the steel, but it is generally desirable to be about 10 msec or less in order to prevent the temperature from rising too much. As a lower limit for the voltage application time, if the nitrogen ion energy obtained by the discharge in the reactor can be substantially maintained at the required level, the voltage application, that is, the discharge can be applied instantaneously, for example, with a voltage application time of 0.1 msec or less. It is not limited as it can be repeated. From a practical point of view, 3-5m
Seconds are preferred. Additionally, the voltage application pause time can be extended to the extent that a substantially constant required level of nitrogen ion energy can be maintained. Therefore, the lower limit of the trigger rate can also be set small within a range that can maintain a substantially constant required level of nitrogen ion energy. In the method of the present invention, the temperature of the steel is 200-1200°C, preferably 400-1200°C.
Preferably, the discharge is carried out to maintain a substantially constant temperature within the range of 1000°C. This temperature is achieved by the thermal energy obtained when the nitrogen ions generated by the discharge impinge on the steel, and can be maintained at a substantially constant temperature by adjusting the trigger rate of voltage application. However, the material, shape, size,
or a level sufficient to maintain a substantially constant voltage and trigger rate of said voltage application to maintain a substantially constant nitrogen ion energy at the level necessary to obtain an internal nitrided layer of desired thickness and hardness. If a constant temperature cannot be obtained, the temperature of the steel can be adjusted by heating the reactor with an auxiliary heater. The temperature of the steel can be measured by placing a thermocouple in the reactor. In the method of the present invention, as mentioned above, by setting the gas pressure, voltage, temperature conditions, etc. in the reactor, the nitrogen ion energy in the reactor can be adjusted to 6 × 10 -2 ~
Nitriding treatment is performed with the voltage set in the range of 1.2×10 3 eV.
Nitrogen ion energy can be measured by a method known to those skilled in the art using an ion density measuring probe.

本発明において鋼を処理する時間については処
理しようとする鋼の材質、形状及び大きさや得よ
うとする内部窒化層の厚さによつて変つてくる。
処理時間を長くするほど鋼の内部深くまで窒化す
ることができるが、処理にかかるコストの面及び
実用上十分な窒化層の厚さを考慮すると、処理時
間は15分以上、好ましくは5〜48時間である。
The time for treating steel in the present invention varies depending on the material, shape and size of the steel to be treated and the thickness of the internal nitrided layer to be obtained.
The longer the treatment time, the deeper the inside of the steel can be nitrided, but considering the cost of treatment and the thickness of the nitrided layer that is practically sufficient, the treatment time should be 15 minutes or more, preferably 5 to 48 minutes. It's time.

本発明の表面硬化鋼は、従来の窒化処理法によ
り得られる表面硬化鋼のように脆くて実用に耐え
ない化合物層はなく、母材と明白に区別できる硬
さの優れた内部窒化層を有し、該内部窒化層はそ
の深さに関係なく、全体にわたつてほぼ一定の硬
さを維持している。しかもその硬さは窒化条件及
び鋼の材質により多少の変動はあるが荷重100g
のビツカース硬さ〔HV(0.1)〕で約1000〜約1600
と従来の窒化処理鋼の表面の硬さよりもビツカー
ス硬さで100〜200は優れている。表面硬化鋼の表
面のビツカース硬さは例えば、日本工業規格JIS
Z2244(1974)によるビツカース硬さ試験法によ
り測定できる。本発明の表面硬化鋼の優れた硬さ
を有する内部窒化層の厚みとその硬さは、前述し
たように温度や時間などの窒化条件の種々の組合
せにより変えることができる。
The surface-hardened steel of the present invention does not have a compound layer that is brittle and impractical unlike surface-hardened steels obtained by conventional nitriding methods, but has an internal nitrided layer with excellent hardness that can be clearly distinguished from the base metal. However, the internal nitrided layer maintains a substantially constant hardness throughout, regardless of its depth. Moreover, the hardness varies slightly depending on the nitriding conditions and the steel material, but the hardness is 100g under a load of 100g.
Bits hardness [HV (0.1)] of about 1000 to about 1600
The surface hardness of conventional nitrided steel is 100 to 200 on the Vickers hardness. For example, the Bitkers hardness of the surface of surface-hardened steel is determined by the Japanese Industrial Standard JIS.
It can be measured by the Bitkers hardness test method according to Z2244 (1974). The thickness and hardness of the internal nitrided layer having excellent hardness of the surface hardened steel of the present invention can be changed by various combinations of nitriding conditions such as temperature and time, as described above.

本発明の表面硬化鋼はその窒素濃度分布とX線
回折分析の結果から鉄以外の窒化物生成金属元素
と窒素との金属窒化物を内部窒化層中に均一に生
成していることがわかるが、本発明において、多
量の炭素を含有する鋼を被処理鋼として用いれば
得られる表面硬化鋼の内部窒化層には単に金属窒
化物を析出させるだけではなく金属炭窒化物を内
部窒化層全体に亘つて析出させることもできる。
即ち、炭化物生成金属元素、例えばクロム、バナ
ジウム、タングステン、モリブデン、チタン等を
少くとも1種含有し、且つ炭素を多量に含有する
実用鋼ではその内部に上記炭化物生成元素と炭素
とが金属炭化物を形成しているが、この鋼を本発
明の方法により内部窒化処理すると単に金属窒化
物を析出するだけでなく、金属炭化物中へも若干
の窒素が固溶して、結果において金属炭窒化物も
析出することになるのである。このような鋼とし
てはSUS420鋼のようなマルテンサイト系ステン
レス鋼や炭素含量の高いオーステナイト系ステン
レス鋼などがあげられる。上述のように炭素含量
の高い鋼を前述の本発明の方法で表面硬化処理を
施せば、その内部窒化層が炭素を含む炭窒化物層
である表面硬化鋼が得られるが、炭素含量の低い
鋼を窒化により表面硬化して、内部窒化層が金属
炭窒化物の生成した炭窒化層である表面硬化鋼を
得ることもできる。その場合は、本発明の方法に
おいて窒素ガスを含有する混合ガスとして、窒素
ガスと前述の補助ガスに加えてメタンガス、プロ
パンガス、ブタンガス、アセチレンガスなどの炭
化水素ガスを含有する混合ガスを用いて鋼を表面
硬化することにより行なうことができる。この場
合、上述の炭化水素ガスは、混合ガス中の窒素ガ
ス量に対して0.01〜10容量%の割合で混合せしめ
ることができる。
It can be seen from the nitrogen concentration distribution and the results of X-ray diffraction analysis that the surface-hardened steel of the present invention uniformly forms metal nitrides of nitride-forming metal elements other than iron and nitrogen in the internal nitrided layer. In the present invention, when steel containing a large amount of carbon is used as the steel to be treated, metal nitrides are not simply precipitated in the internal nitrided layer of the surface-hardened steel obtained, but metal carbonitrides are added to the entire internal nitrided layer. It is also possible to precipitate over a period of time.
That is, in a practical steel that contains at least one carbide-forming metal element such as chromium, vanadium, tungsten, molybdenum, titanium, etc. and a large amount of carbon, the carbide-forming element and carbon form metal carbides inside the steel. However, when this steel is internally nitrided by the method of the present invention, not only metal nitrides are simply precipitated, but also some nitrogen is solidly dissolved in the metal carbide, and as a result, metal carbonitrides are also formed. It will precipitate out. Examples of such steel include martensitic stainless steel such as SUS420 steel and austenitic stainless steel with a high carbon content. As described above, if steel with a high carbon content is subjected to surface hardening treatment by the method of the present invention described above, a surface hardened steel whose internal nitrided layer is a carbonitride layer containing carbon can be obtained. It is also possible to surface harden steel by nitriding to obtain surface hardened steel in which the internal nitrided layer is a carbonitrided layer formed of metal carbonitrides. In that case, as the mixed gas containing nitrogen gas in the method of the present invention, a mixed gas containing hydrocarbon gas such as methane gas, propane gas, butane gas, acetylene gas, etc. in addition to nitrogen gas and the above-mentioned auxiliary gas is used. This can be done by surface hardening the steel. In this case, the above-mentioned hydrocarbon gas can be mixed at a ratio of 0.01 to 10% by volume based on the amount of nitrogen gas in the mixed gas.

以下、実施例により本発明を詳細に説明する
が、本発明はこれに限定されるものではない。
EXAMPLES Hereinafter, the present invention will be explained in detail with reference to Examples, but the present invention is not limited thereto.

実施例 排気口と混合ガス導入口を有し、陽極とテーブ
ル状の陰極とを備えつけたオーステナイト系ステ
ンレス鋼SUS304製イオン窒化反応器中の陰極テ
ーブル上にオーステナイト系ステンレス鋼
SUS304鋼製の試料(15cm×15cm×10cm)を置
き、反応器を密閉した後、排気口から反応器内の
空気を排出し真空にした。次に25容量%の窒素ガ
スと75容量%の水素ガスとからなる混合ガスを混
合ガス導入口を通して反応器内に、ガス圧が5mm
Hgになるように導入した。次に反応器の該陽極
−陰極間に800Vの電圧を印加時間2.4m秒、印加
休止時間3.1m秒を繰返して、即ちトリガー率
43.6%で印加して、間欠的に放電を行なわしめ、
該放電によりイオン化した窒素イオンエネルギー
にもたらされる熱エネルギーのみで該鋼の温度を
550℃±5℃に保ち、この条件下で30時間鋼を処
理した。鋼の温度は熱電対を用いて測定した。
Example: An austenitic stainless steel ion nitriding reactor made of austenitic stainless steel SUS304 has an exhaust port and a mixed gas inlet, and is equipped with an anode and a table-shaped cathode.
After placing a SUS304 steel sample (15 cm x 15 cm x 10 cm) and sealing the reactor, the air inside the reactor was exhausted from the exhaust port to create a vacuum. Next, a mixed gas consisting of 25% by volume nitrogen gas and 75% by volume hydrogen gas was introduced into the reactor through the mixed gas inlet and the gas pressure was 5 mm.
It was introduced to become Hg. Next, a voltage of 800V was applied between the anode and cathode of the reactor for 2.4 msec, and the application pause time was repeated for 3.1 msec, that is, the trigger rate
Apply at 43.6% and discharge intermittently.
The temperature of the steel can be controlled only by the thermal energy brought about by the nitrogen ion energy ionized by the discharge.
The temperature was kept at 550°C ± 5°C and the steel was treated under these conditions for 30 hours. The temperature of the steel was measured using a thermocouple.

得られた窒化処理鋼をその表面に対して垂直に
切断し、その切断面を光学顕微鏡で400倍に拡大
して観察した。その結果、第2図にみられるよう
に、視覚上はつきりと鋼の母相5と区別できるほ
ぼ一定の厚さの内部窒化層4が形成されているこ
とが認められた。内部窒化層4の厚さは約135μ
mであつた。また、内部窒化層4と窒素の侵入拡
散していない鋼の母相5の境界部を走査型電子顕
微鏡で2000倍に拡大して観察した所第3図に示す
ように内部窒化層4と鋼の該母相5とは明瞭な境
界面を有していることが認められた。鋼の最表面
層における窒素濃度を前記の方法で測定した所、
6.1重量%であつた。また内部窒化層内の鋼の表
面側から内部に向けての窒素濃度減少勾配を前記
の方法で測定した所0.11%/μmであつた。内部
窒化層の硬さは表面硬化処理鋼の上記と同じ断面
において測定荷重100gのマイクロビツカース硬
さ計を用いて測定したところ第4図に示すよう
に、内部窒化層において、その表面からの深さに
関係なくほぼ一定でビツカース硬さ〔HV(0.1)〕
約1150と優れた硬さを有していた。また、
EPMA(日立製作所製X−650型、加速電圧
10kV)を用いて、表面硬化処理鋼の上記と同じ
断面において相対的な窒素濃度分布と比較のため
に鋼に含有されているクロム濃度分布を測定した
結果、第5図に示すように内部窒化層の下層の窒
化による硬化の施されていない鋼の母相において
は窒素濃度は非常に低いが、内部窒化層において
は非常に高濃度の窒素を含むことがわかる。尚、
クロム濃度は表面から内部にわたつて一定であつ
た。更に、内部窒化層をX線回折装置
NORELCO〔フイリツプス社製(米国)〕(Co−
Kα線、加速電圧30kV、鉄フイルター使用)を用
いて分析した所、第6図に示すように試料の母材
であるSUS304鋼に含有されているクロムとの窒
化物CrNを内部窒化層に析出していることがわか
つた。
The obtained nitrided steel was cut perpendicular to its surface, and the cut surface was observed under an optical microscope at 400 times magnification. As a result, as shown in FIG. 2, it was found that an internal nitrided layer 4 of a substantially constant thickness was formed which was visually distinguishable from the solid steel matrix 5. The thickness of the internal nitride layer 4 is approximately 135μ
It was m. In addition, when the boundary between the internal nitrided layer 4 and the steel matrix 5 in which nitrogen has not penetrated and diffused was observed with a scanning electron microscope at a magnification of 2000 times, the internal nitrided layer 4 and the steel matrix 5 were observed as shown in Figure 3. It was observed that there was a clear interface with the matrix 5. When the nitrogen concentration in the outermost layer of steel was measured using the method described above,
It was 6.1% by weight. Further, the decreasing gradient of nitrogen concentration from the surface side of the steel toward the inside in the internal nitrided layer was measured by the method described above and was found to be 0.11%/μm. The hardness of the internal nitrided layer was measured using a micro-Vickers hardness meter with a measuring load of 100 g on the same cross section of the surface-hardened steel as above. As shown in Figure 4, the hardness of the internal nitrided layer from the surface was measured. Bitskers hardness is almost constant regardless of depth [HV (0.1)]
It had an excellent hardness of approximately 1150. Also,
EPMA (Hitachi X-650 type, acceleration voltage
As a result of measuring the relative nitrogen concentration distribution and the chromium concentration distribution contained in the steel for comparison in the same cross section of the surface hardened steel using It can be seen that the nitrogen concentration is very low in the parent phase of the steel that has not been hardened by nitriding in the lower layer, but the internal nitrided layer contains a very high concentration of nitrogen. still,
The chromium concentration was constant from the surface to the interior. Furthermore, the internal nitride layer was analyzed using an X-ray diffraction device.
NORELCO [manufactured by Philips (USA)] (Co-
As shown in Figure 6, CrN, a nitride with chromium contained in the SUS304 steel, which is the base material of the sample, was precipitated in the internal nitrided layer. I realized that I was doing it.

比較例 1 実施例と同じ反応器を用い、該反応器中に機械
構用溶炭素鋼S45C(JIS G4051)製の試料(20cm
×20cm×15cm)を置き、実施例と同じ組成及び圧
力の混合ガス下、陽極−陰極間に連続的に電圧を
印加し放電せしめた。両極間に印加する直流出力
〔電圧(ボルト)×電流(アンペア)(VA)〕の電
圧を250〜450Vの間で増減させながら鋼の温度を
570℃に保ち、鋼を12時間処理した。
Comparative Example 1 Using the same reactor as in Example, a sample (20 cm
x 20 cm x 15 cm), and under a mixed gas having the same composition and pressure as in the example, a voltage was continuously applied between the anode and the cathode to cause discharge. The temperature of the steel is increased or decreased by increasing or decreasing the DC output [voltage (volts) x current (amperes) (VA)] applied between the two poles between 250 and 450V.
The temperature was kept at 570°C and the steel was treated for 12 hours.

得られた表面硬化鋼をその表面に対して垂直に
切断してその切断面を光学顕微鏡で400倍に拡大
して観察した所、第1図に示すように鋼の表面1
から内部に向けて約6μmの厚さの脆い化合物層
(白層)2が認められた。また、拡散層3には実
施例で得られたような、窒素が侵入拡散していな
い母相とはつきりとその境界が区別できるような
内部窒化層は認められなかつた。
When the obtained surface-hardened steel was cut perpendicular to its surface and the cut surface was observed with an optical microscope at a magnification of 400 times, the surface of the steel 1 was observed as shown in Figure 1.
A brittle compound layer (white layer) 2 with a thickness of approximately 6 μm was observed from the inside toward the inside. Further, in the diffusion layer 3, there was no internal nitrided layer whose boundary could be clearly distinguished from the parent phase in which nitrogen had not penetrated and diffused, as was obtained in the examples.

比較例 2 ヒーターを備えたDCグロー放電装置を用いて
下記に示すイオン窒化条件下でJIS鋼種SCM440
のイオン窒化による表面硬化を行なつた。間欠放
電条件は後述のように特開昭54−29845号に記載
されている30秒間隔で30秒放電をくりかえして行
なつた。イオン窒化条件: 窒化温度 520℃ 窒化時間 4hr 使用ガス N2:250c.c./min H2:750c.c./min 全圧力 4Torr 放電モード 30秒間電圧印加(ON)+30秒間電
圧印加休止(OFF)の繰り返し 放電電圧 400V 得られたイオン窒化処理試料をその表面に対し
て垂直に切断し、その切断面の光学顕微鏡による
組織観察、測定荷重25gのマイクロビツカース硬
さ計によるビツカース硬さ分布測定及びEPMA
(Electron Prove Microanalysis)(加速電圧
5kV)による窒素濃度分析を行なつた。得られた
結果を第7図、第8図及び第9図に示す。第7図
の鋼の試料の断面の金属組織顕微鏡写真から明ら
かなように、得られた表面硬化鋼には約1μmの
幅の白い化合物が形成されている。また、第8図
から明らかなようにイオン窒化処理鋼の表面のビ
ツカース硬さは鋼の表面から内側へ向うにつれて
急激に減少しているものである。また、第9図に
示すように、EPMAによる窒素濃度分布の分析
の結果、本比較実験のイオン窒化条件で得られた
表面硬化鋼はその表面における窒素濃度が極めて
小さくEPMAではほとんど検出できないほどで
あつた。この表面窒素濃度が低いことは表面に化
合物層を形成したことを支持するものである。
尚、試料の表面から内部へ向けての窒素濃度分布
はその濃度が低いためにEPMAでは直接観察で
きなかつたが、第8図に示されるビツカース硬さ
の急激な減少が、試料の表面から内部へ向けての
窒素濃度が急激に減少し、内部窒化層の窒素濃度
が均一でないことを示唆している。
Comparative Example 2 JIS steel type SCM440 was treated under the ion nitriding conditions shown below using a DC glow discharge device equipped with a heater.
The surface was hardened by ion nitriding. The intermittent discharge conditions were as described in Japanese Patent Application Laid-Open No. 54-29845, in which discharge was repeated for 30 seconds at 30 second intervals as described below. Ion nitriding conditions: Nitriding temperature 520℃ Nitriding time 4hr Gas used N 2 : 250c.c./min H 2 : 750c.c./min Total pressure 4Torr Discharge mode 30 seconds voltage application (ON) + 30 seconds voltage application pause (OFF) ) with a repeated discharge voltage of 400V.The obtained ion nitrided sample was cut perpendicular to its surface, and the cut surface was observed for its structure using an optical microscope, and the Bitkers hardness distribution was measured using a micro Bitkers hardness meter with a measurement load of 25 g. and EPMA
(Electron Prove Microanalysis) (Accelerating voltage
Nitrogen concentration analysis was performed using 5kV). The results obtained are shown in FIGS. 7, 8, and 9. As is clear from the metallographic micrograph of the cross section of the steel sample in FIG. 7, a white compound with a width of approximately 1 μm is formed in the surface hardened steel obtained. Furthermore, as is clear from FIG. 8, the Vickers hardness of the surface of the ion-nitrided steel decreases rapidly as it goes inward from the surface of the steel. Furthermore, as shown in Figure 9, as a result of the analysis of the nitrogen concentration distribution by EPMA, the surface hardened steel obtained under the ion nitriding conditions of this comparative experiment has an extremely low nitrogen concentration on the surface, which is almost undetectable by EPMA. It was hot. This low surface nitrogen concentration supports the formation of a compound layer on the surface.
The nitrogen concentration distribution from the surface to the inside of the sample could not be observed directly with EPMA due to its low concentration; The nitrogen concentration rapidly decreases toward

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来のイオン窒化法で処理した鋼の断
面の金属組織を示す顕微鏡写真である。第2図は
本発明による表面硬化鋼の断面の金属組織を示す
顕微鏡写真である。第3図は本発明による表面硬
化鋼の断面の金属組織を示す走査型電子顕微鏡写
真である。第4図は本発明による表面硬化鋼の表
面からの深さ(μm)とビツカース硬さ〔HV
(0.1)〕との関係を示すグラフである。第5図は
本発明による表面硬化鋼の表面からの深さ(μ
m)と、鋼の含有するクロム濃度分布および鋼表
面より侵入拡散した窒素濃度分布との関係を示す
グラフである。第6図は本発明による表面硬化鋼
の内部窒化層のX線回析分析の結果を示すグラフ
である。第7図は鋼の試料の金属組織断面を顕微
鏡で写した写真である。第8図はイオン窒化処理
鋼の表面のビツカース硬さの分布図である。第9
図は窒素濃度分布のEPMAによる分析結果であ
る。 1……表面、2……化合物層、3……拡散層、
4……内部窒化層、5……母相。
FIG. 1 is a micrograph showing the metal structure of a cross section of steel treated by a conventional ion nitriding method. FIG. 2 is a micrograph showing the metallographic structure of a cross section of the surface hardened steel according to the present invention. FIG. 3 is a scanning electron micrograph showing the metallographic structure of a cross section of the surface hardened steel according to the present invention. Figure 4 shows the depth (μm) from the surface and the Vickers hardness [HV
(0.1)]. Figure 5 shows the depth (μ) from the surface of the surface hardened steel according to the present invention.
2 is a graph showing the relationship between chromium concentration distribution in steel and nitrogen concentration distribution that penetrates and diffuses from the steel surface. FIG. 6 is a graph showing the results of X-ray diffraction analysis of the internal nitrided layer of the surface hardened steel according to the present invention. FIG. 7 is a microscopic photograph of a cross section of the metallographic structure of a steel sample. FIG. 8 is a distribution diagram of the Vickers hardness of the surface of the ion-nitrided steel. 9th
The figure shows the results of EPMA analysis of nitrogen concentration distribution. 1...Surface, 2...Compound layer, 3...Diffusion layer,
4... Internal nitrided layer, 5... Mother phase.

Claims (1)

【特許請求の範囲】 1 鉄の他に更に少なくとも1種の窒化物生成金
属元素を含有する鋼からなり、該鋼の表面に化合
物層がなく該鋼の表面から内部に向けて窒素が侵
入拡散した内部窒化層を有する表面硬化鋼にし
て、該内部窒化層の厚さが0.01mm以上であり、鋼
の最表面部分の窒素濃度が0.1〜10重量%であり、
内部窒素化層の窒素濃度が鋼の表面側から内部側
に向かうにつれて減少し、該内部窒化層における
鋼の表面からのμm単位の厚さ(t)と窒素濃度
(c)が、次式: |Δc/Δt|≦0.5(%/μm) () を満足することを特徴とする表面硬化鋼。 2 内部窒化層のビツカース硬さ〔HV(0.1)〕が
鋼の表面側から全層にわたつて実質的に一定であ
ることを特徴とする特許請求の範囲第1項に記載
の表面硬化鋼。 3 内部窒化層の厚さが0.01〜0.5mmである特許
請求の範囲第1項に記載の表面硬化鋼。 4 内部窒化層の厚さが0.05〜0.2mmである特許
請求の範囲第3項に記載の表面硬化鋼。 5 少なくとも1種の窒化物生成金属元素を含有
する鋼において、少なくとも1種の窒化物生成金
属元素がクロム、アルミニウム、モリブデン、チ
タン、タングステン、ホウ素、バナジウム、マン
ガン、ジルコニウム、ニオブ、タンタル及びケイ
素から選ばれる金属元素である特許請求の範囲第
1項に記載の表面硬化鋼。 6 該鋼がステンレス鋼、耐熱鋼、マルエーシン
グ鋼、高速度工具鋼、耐蝕耐熱超合金または合金
工具鋼である特許請求の範囲第5項に記載の表面
硬化鋼。 7 該内部窒化層が炭素を含む炭窒素化物層であ
る特許請求の範囲第1項に記載の表面硬化鋼。 8 窒素イオン雰囲気下において、鉄の他に少な
くとも1種の窒化物生成金属元素を含有する鋼の
表面から窒素イオンを侵入拡散させて該鋼の表面
を硬化させる方法にして、陽極及び陰極を有する
反応器中に鋼を該陰極と接触せしめて同極化する
ように設置し、該反応器中に窒素ガスを含有する
混合ガスを導入し、該陽極と該陰極間に間欠的に
実質的に一定電圧を印加して陽極と鋼と同極化さ
れた陰極との間に間欠的に放電を行なわしめ、該
陽極と該陰極間に間欠的に実質的に一定電圧を印
加するに際し、電圧印加及びそれに続く電圧印加
休止を一周期とした場合に電圧印加の時間が該一
周期の時間に対して約70%を超えないように、且
つ該一周期における電圧印加の時間が約10m秒以
下になるように電圧を印加することを特徴とする
鋼の表面硬化法。 9 電圧印加及びそれに続く電圧印加休止の該一
周期における電圧印加の時間が3〜5m秒である
ことを特徴とする特許請求の範囲第8項に記載鋼
の表面硬化法。 10 該陽極と該陰極間に印加する電圧が200〜
1200Vである特許請求の範囲第8項に記載の表面
硬化法。 11 該鋼の温度を200〜1200℃の範囲の実質的
に一定の温度に保ちながら放電を行なう特許請求
の範囲第8項に記載の鋼の表面硬化法。 12 該窒素ガスを含有する混合ガス中の窒素ガ
ス濃度が0.1〜95容量%である特許請求の範囲第
8項に記載の鋼の表面硬化法。 13 該混合ガスが窒素ガスの他に水素ガス、ア
ルゴンガス、ヘリウムガス及びネオンガスの中か
ら選ばれる少なくとも1種のガスを含む特許請求
の範囲第8項に記載の鋼の表面硬化法。 14 該反応器中の該混合ガスの圧力が0.01〜
200mmHgである特許請求の範囲第8項に記載の鋼
の表面硬化法。 15 放電を間欠的に15分以上行なわしめる特許
請求の範囲第8項に記載の方法。
[Scope of Claims] 1. A steel comprising at least one nitride-forming metal element in addition to iron, and there is no compound layer on the surface of the steel, and nitrogen penetrates and diffuses from the surface of the steel toward the inside. A surface hardened steel having an internal nitrided layer, the thickness of the internal nitrided layer is 0.01 mm or more, and the nitrogen concentration at the outermost surface part of the steel is 0.1 to 10% by weight,
The nitrogen concentration in the internal nitrided layer decreases from the surface side of the steel toward the inside, and the thickness (t) in μm from the surface of the steel in the internal nitrided layer and the nitrogen concentration
A surface hardened steel characterized in that (c) satisfies the following formula: |Δc/Δt|≦0.5 (%/μm) (). 2. The surface hardened steel according to claim 1, wherein the internal nitrided layer has a Vickers hardness [HV (0.1)] that is substantially constant over the entire layer from the surface side of the steel. 3. The surface hardened steel according to claim 1, wherein the internal nitrided layer has a thickness of 0.01 to 0.5 mm. 4. The surface hardened steel according to claim 3, wherein the internal nitrided layer has a thickness of 0.05 to 0.2 mm. 5 Steel containing at least one nitride-forming metal element, where the at least one nitride-forming metal element is selected from the group consisting of chromium, aluminum, molybdenum, titanium, tungsten, boron, vanadium, manganese, zirconium, niobium, tantalum, and silicon. The surface hardened steel according to claim 1, wherein the metal element is selected. 6. The surface hardened steel according to claim 5, wherein the steel is stainless steel, heat resistant steel, maraging steel, high speed tool steel, corrosion resistant heat resistant superalloy or alloy tool steel. 7. The surface hardened steel according to claim 1, wherein the internal nitrided layer is a carbonitride layer containing carbon. 8 A method of hardening the surface of steel by penetrating and diffusing nitrogen ions from the surface of the steel containing at least one nitride-forming metal element in addition to iron in a nitrogen ion atmosphere, and having an anode and a cathode. A steel is placed in a reactor so as to be in contact with the cathode to achieve homopolarization, and a gas mixture containing nitrogen gas is introduced into the reactor, and the steel is intermittently substantially in contact with the cathode. Applying a constant voltage to intermittently cause a discharge between an anode and a cathode homopolarized with steel, and applying a substantially constant voltage intermittently between the anode and the cathode. And when the subsequent pause in voltage application is considered as one cycle, the time of voltage application does not exceed about 70% of the time of one cycle, and the time of voltage application in one cycle is about 10 msec or less. A steel surface hardening method characterized by applying a voltage so that the surface hardens. 9. The method for surface hardening steel according to claim 8, wherein the voltage application time in one cycle of voltage application and subsequent voltage application stop is 3 to 5 msec. 10 The voltage applied between the anode and the cathode is 200~
The surface hardening method according to claim 8, which is 1200V. 11. The method for surface hardening steel according to claim 8, wherein the electric discharge is carried out while maintaining the temperature of the steel at a substantially constant temperature in the range of 200 to 1200°C. 12. The method for surface hardening steel according to claim 8, wherein the nitrogen gas concentration in the mixed gas containing nitrogen gas is 0.1 to 95% by volume. 13. The steel surface hardening method according to claim 8, wherein the mixed gas contains at least one gas selected from hydrogen gas, argon gas, helium gas, and neon gas in addition to nitrogen gas. 14 The pressure of the mixed gas in the reactor is 0.01~
A method for surface hardening steel according to claim 8, wherein the surface hardening temperature is 200 mmHg. 15. The method according to claim 8, wherein the discharge is performed intermittently for 15 minutes or more.
JP17926584A 1984-08-30 1984-08-30 Surface hardened steel and surface hardening method of steel Granted JPS6160874A (en)

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JP2012246558A (en) * 2011-05-30 2012-12-13 Daido Steel Co Ltd Nitriding treatment apparatus and cross sectional hardness distribution prediction system

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GB2173513B (en) * 1985-02-25 1989-06-14 Lucas Ind Plc Making of steel component
EP1176224B1 (en) 2000-07-24 2014-04-16 Dowa Thermotech Co., Ltd. Nitrided maraging steel and method of manufacturing thereof
JP2002161378A (en) * 2000-11-17 2002-06-04 Kobe Steel Ltd Iron based high-rigidity member
JP4976804B2 (en) * 2005-10-25 2012-07-18 キヤノン株式会社 Nitriding member, friction member and vibration wave driving device

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JPS5848027B2 (en) * 1976-06-24 1983-10-26 川崎重工業株式会社 Ion nitriding method for stainless steel
JPS531141A (en) * 1976-06-25 1978-01-07 Hitachi Ltd Metal treating process

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JP2012246558A (en) * 2011-05-30 2012-12-13 Daido Steel Co Ltd Nitriding treatment apparatus and cross sectional hardness distribution prediction system

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